TW201034207A - Photovoltaic device with improved crystal orientation - Google Patents
Photovoltaic device with improved crystal orientation Download PDFInfo
- Publication number
- TW201034207A TW201034207A TW098145293A TW98145293A TW201034207A TW 201034207 A TW201034207 A TW 201034207A TW 098145293 A TW098145293 A TW 098145293A TW 98145293 A TW98145293 A TW 98145293A TW 201034207 A TW201034207 A TW 201034207A
- Authority
- TW
- Taiwan
- Prior art keywords
- transparent conductive
- layer
- conductive oxide
- depositing
- adjacent
- Prior art date
Links
- 239000013078 crystal Substances 0.000 title claims description 13
- 239000004065 semiconductor Substances 0.000 claims abstract description 113
- 239000006096 absorbing agent Substances 0.000 claims abstract description 53
- MARUHZGHZWCEQU-UHFFFAOYSA-N 5-phenyl-2h-tetrazole Chemical compound C1=CC=CC=C1C1=NNN=N1 MARUHZGHZWCEQU-UHFFFAOYSA-N 0.000 claims abstract description 15
- 238000000151 deposition Methods 0.000 claims description 74
- 238000000034 method Methods 0.000 claims description 64
- 239000000758 substrate Substances 0.000 claims description 40
- 238000000137 annealing Methods 0.000 claims description 24
- 230000004888 barrier function Effects 0.000 claims description 23
- 230000008021 deposition Effects 0.000 claims description 19
- 238000010438 heat treatment Methods 0.000 claims description 15
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 claims description 11
- 229910001887 tin oxide Inorganic materials 0.000 claims description 11
- 239000011521 glass Substances 0.000 claims description 9
- 238000004544 sputter deposition Methods 0.000 claims description 8
- 229910003437 indium oxide Inorganic materials 0.000 claims description 6
- PJXISJQVUVHSOJ-UHFFFAOYSA-N indium(iii) oxide Chemical compound [O-2].[O-2].[O-2].[In+3].[In+3] PJXISJQVUVHSOJ-UHFFFAOYSA-N 0.000 claims description 6
- 229910052738 indium Inorganic materials 0.000 claims description 5
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 claims description 5
- 229940071182 stannate Drugs 0.000 claims description 5
- WUPHOULIZUERAE-UHFFFAOYSA-N 3-(oxolan-2-yl)propanoic acid Chemical compound OC(=O)CCC1CCCO1 WUPHOULIZUERAE-UHFFFAOYSA-N 0.000 claims description 4
- 239000002253 acid Substances 0.000 claims description 4
- 229910052793 cadmium Inorganic materials 0.000 claims description 4
- 229910052980 cadmium sulfide Inorganic materials 0.000 claims description 4
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 claims description 3
- CXKCTMHTOKXKQT-UHFFFAOYSA-N cadmium oxide Inorganic materials [Cd]=O CXKCTMHTOKXKQT-UHFFFAOYSA-N 0.000 claims description 3
- CFEAAQFZALKQPA-UHFFFAOYSA-N cadmium(2+);oxygen(2-) Chemical compound [O-2].[Cd+2] CFEAAQFZALKQPA-UHFFFAOYSA-N 0.000 claims description 3
- 238000004519 manufacturing process Methods 0.000 claims description 3
- BNEMLSQAJOPTGK-UHFFFAOYSA-N zinc;dioxido(oxo)tin Chemical compound [Zn+2].[O-][Sn]([O-])=O BNEMLSQAJOPTGK-UHFFFAOYSA-N 0.000 claims description 3
- DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 claims description 2
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 claims description 2
- 150000004767 nitrides Chemical class 0.000 claims description 2
- 229910052708 sodium Inorganic materials 0.000 claims description 2
- 239000011734 sodium Substances 0.000 claims description 2
- 238000005507 spraying Methods 0.000 claims description 2
- 235000011149 sulphuric acid Nutrition 0.000 claims description 2
- 239000001117 sulphuric acid Substances 0.000 claims description 2
- MZLGASXMSKOWSE-UHFFFAOYSA-N tantalum nitride Chemical compound [Ta]#N MZLGASXMSKOWSE-UHFFFAOYSA-N 0.000 claims description 2
- YBMRDBCBODYGJE-UHFFFAOYSA-N germanium dioxide Chemical compound O=[Ge]=O YBMRDBCBODYGJE-UHFFFAOYSA-N 0.000 claims 2
- 229940119177 germanium dioxide Drugs 0.000 claims 1
- 239000011435 rock Substances 0.000 claims 1
- 125000005402 stannate group Chemical group 0.000 claims 1
- 238000004073 vulcanization Methods 0.000 claims 1
- 239000010410 layer Substances 0.000 description 201
- 239000000463 material Substances 0.000 description 12
- 238000010586 diagram Methods 0.000 description 7
- 239000002245 particle Substances 0.000 description 6
- 238000010521 absorption reaction Methods 0.000 description 3
- 238000009792 diffusion process Methods 0.000 description 3
- 239000002355 dual-layer Substances 0.000 description 3
- 239000007789 gas Substances 0.000 description 3
- 229910001415 sodium ion Inorganic materials 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- CETPSERCERDGAM-UHFFFAOYSA-N ceric oxide Chemical compound O=[Ce]=O CETPSERCERDGAM-UHFFFAOYSA-N 0.000 description 2
- 229910000422 cerium(IV) oxide Inorganic materials 0.000 description 2
- 230000005684 electric field Effects 0.000 description 2
- 230000005611 electricity Effects 0.000 description 2
- 229910052732 germanium Inorganic materials 0.000 description 2
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 239000005361 soda-lime glass Substances 0.000 description 2
- IOVCWXUNBOPUCH-UHFFFAOYSA-M Nitrite anion Chemical compound [O-]N=O IOVCWXUNBOPUCH-UHFFFAOYSA-M 0.000 description 1
- 241000282320 Panthera leo Species 0.000 description 1
- FKNQFGJONOIPTF-UHFFFAOYSA-N Sodium cation Chemical compound [Na+] FKNQFGJONOIPTF-UHFFFAOYSA-N 0.000 description 1
- 239000005864 Sulphur Substances 0.000 description 1
- 229910052787 antimony Inorganic materials 0.000 description 1
- WATWJIUSRGPENY-UHFFFAOYSA-N antimony atom Chemical compound [Sb] WATWJIUSRGPENY-UHFFFAOYSA-N 0.000 description 1
- 238000005422 blasting Methods 0.000 description 1
- BDOSMKKIYDKNTQ-UHFFFAOYSA-N cadmium atom Chemical compound [Cd] BDOSMKKIYDKNTQ-UHFFFAOYSA-N 0.000 description 1
- FJZMJOPKABSQOK-UHFFFAOYSA-N cadmium(2+) disulfide Chemical compound [S--].[S--].[Cd++].[Cd++] FJZMJOPKABSQOK-UHFFFAOYSA-N 0.000 description 1
- NCDKOFHLJFJLTB-UHFFFAOYSA-N cadmium(2+);dioxido(oxo)silane Chemical compound [Cd+2].[O-][Si]([O-])=O NCDKOFHLJFJLTB-UHFFFAOYSA-N 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- SCCCLDWUZODEKG-UHFFFAOYSA-N germanide Chemical compound [GeH3-] SCCCLDWUZODEKG-UHFFFAOYSA-N 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 210000000003 hoof Anatomy 0.000 description 1
- 238000013507 mapping Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000009862 microstructural analysis Methods 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 229910052717 sulfur Inorganic materials 0.000 description 1
- 239000011593 sulfur Substances 0.000 description 1
- XTQHKBHJIVJGKJ-UHFFFAOYSA-N sulfur monoxide Chemical compound S=O XTQHKBHJIVJGKJ-UHFFFAOYSA-N 0.000 description 1
- FAKFSJNVVCGEEI-UHFFFAOYSA-J tin(4+);disulfate Chemical compound [Sn+4].[O-]S([O-])(=O)=O.[O-]S([O-])(=O)=O FAKFSJNVVCGEEI-UHFFFAOYSA-J 0.000 description 1
- 229910052727 yttrium Inorganic materials 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F10/00—Individual photovoltaic cells, e.g. solar cells
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F71/00—Manufacture or treatment of devices covered by this subclass
- H10F71/138—Manufacture of transparent electrodes, e.g. transparent conductive oxides [TCO] or indium tin oxide [ITO] electrodes
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F77/00—Constructional details of devices covered by this subclass
- H10F77/10—Semiconductor bodies
- H10F77/12—Active materials
- H10F77/123—Active materials comprising only Group II-VI materials, e.g. CdS, ZnS or HgCdTe
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F77/00—Constructional details of devices covered by this subclass
- H10F77/20—Electrodes
- H10F77/244—Electrodes made of transparent conductive layers, e.g. transparent conductive oxide [TCO] layers
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
Landscapes
- Photovoltaic Devices (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US14827609P | 2009-01-29 | 2009-01-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| TW201034207A true TW201034207A (en) | 2010-09-16 |
Family
ID=42353175
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW098145293A TW201034207A (en) | 2009-01-29 | 2009-12-28 | Photovoltaic device with improved crystal orientation |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US20100186815A1 (enExample) |
| EP (1) | EP2392025B1 (enExample) |
| JP (1) | JP2012516573A (enExample) |
| KR (1) | KR20110107402A (enExample) |
| CN (1) | CN102365707B (enExample) |
| AU (1) | AU2010208530A1 (enExample) |
| TW (1) | TW201034207A (enExample) |
| WO (1) | WO2010088059A1 (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI477643B (zh) * | 2011-09-20 | 2015-03-21 | Air Prod & Chem | 用於光伏打鈍化的含氧前驅物 |
Families Citing this family (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2011068033A1 (en) | 2009-12-04 | 2011-06-09 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
| WO2011126709A2 (en) * | 2010-03-30 | 2011-10-13 | First Solar, Inc. | Doped buffer layer |
| US20120060923A1 (en) * | 2010-03-31 | 2012-03-15 | Zhibo Zhao | Photovoltaic device barrier layer |
| CN103180962B (zh) | 2010-08-13 | 2016-05-11 | 第一太阳能有限公司 | 具有氧化物层的光伏装置 |
| US20120042927A1 (en) * | 2010-08-20 | 2012-02-23 | Chungho Lee | Photovoltaic device front contact |
| CN103283031B (zh) | 2010-09-22 | 2016-08-17 | 第一太阳能有限公司 | 包含n型掺杂剂源的光伏装置 |
| US8354586B2 (en) | 2010-10-01 | 2013-01-15 | Guardian Industries Corp. | Transparent conductor film stack with cadmium stannate, corresponding photovoltaic device, and method of making same |
| US9034686B2 (en) * | 2012-06-29 | 2015-05-19 | First Solar, Inc. | Manufacturing methods for semiconductor devices |
| US20140053895A1 (en) * | 2012-08-24 | 2014-02-27 | Rosestreet Labs, Llc | Intentionally-doped cadmium oxide layer for solar cells |
| US9698285B2 (en) | 2013-02-01 | 2017-07-04 | First Solar, Inc. | Photovoltaic device including a P-N junction and method of manufacturing |
| US11876140B2 (en) * | 2013-05-02 | 2024-01-16 | First Solar, Inc. | Photovoltaic devices and method of making |
| CN104183663B (zh) | 2013-05-21 | 2017-04-12 | 第一太阳能马来西亚有限公司 | 光伏器件及其制备方法 |
| US10062800B2 (en) | 2013-06-07 | 2018-08-28 | First Solar, Inc. | Photovoltaic devices and method of making |
| US10672925B2 (en) * | 2013-06-14 | 2020-06-02 | Taiwan Semiconductor Manufacturing Co., Ltd. | Thin film solar cell and method of forming same |
| US10529883B2 (en) | 2014-11-03 | 2020-01-07 | First Solar, Inc. | Photovoltaic devices and method of manufacturing |
| US10672921B2 (en) | 2015-03-12 | 2020-06-02 | Vitro Flat Glass Llc | Article with transparent conductive layer and method of making the same |
Family Cites Families (19)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5234391A (en) * | 1975-09-12 | 1977-03-16 | Hitachi Ltd | Production method of transparent electrode film |
| JPS63304520A (ja) * | 1987-06-04 | 1988-12-12 | Sumitomo Electric Ind Ltd | 透明電極の製造方法 |
| JPH03120763A (ja) * | 1989-10-04 | 1991-05-22 | Ricoh Co Ltd | 光電変換素子 |
| DE4442824C1 (de) * | 1994-12-01 | 1996-01-25 | Siemens Ag | Solarzelle mit Chalkopyrit-Absorberschicht |
| US6169246B1 (en) * | 1998-09-08 | 2001-01-02 | Midwest Research Institute | Photovoltaic devices comprising zinc stannate buffer layer and method for making |
| US6137048A (en) * | 1996-11-07 | 2000-10-24 | Midwest Research Institute | Process for fabricating polycrystalline semiconductor thin-film solar cells, and cells produced thereby |
| US5922142A (en) * | 1996-11-07 | 1999-07-13 | Midwest Research Institute | Photovoltaic devices comprising cadmium stannate transparent conducting films and method for making |
| JPH10247625A (ja) * | 1997-03-04 | 1998-09-14 | Matsushita Denchi Kogyo Kk | ＣｄＴｅ膜の形成方法とそれを用いた太陽電池 |
| JP3247876B2 (ja) * | 1999-03-09 | 2002-01-21 | 日本板硝子株式会社 | 透明導電膜付きガラス基板 |
| JP2000357810A (ja) * | 1999-06-16 | 2000-12-26 | Matsushita Battery Industrial Co Ltd | テルル化カドミウム膜の製造方法および太陽電池 |
| JP2001118758A (ja) * | 1999-10-14 | 2001-04-27 | Sony Corp | 半導体素子の製造方法 |
| JP2001223376A (ja) * | 2000-02-10 | 2001-08-17 | Midwest Research Inst | 多結晶半導体薄膜太陽電池の製造方法およびその方法で製造された太陽電池 |
| JP2001237441A (ja) * | 2000-02-24 | 2001-08-31 | Matsushita Battery Industrial Co Ltd | 太陽電池の製造方法および太陽電池 |
| AU2002248199A1 (en) * | 2001-12-13 | 2003-06-30 | Midwest Research Institute | Semiconductor device with higher oxygen (o2) concentration within window layers and method for making |
| US20070111367A1 (en) * | 2005-10-19 | 2007-05-17 | Basol Bulent M | Method and apparatus for converting precursor layers into photovoltaic absorbers |
| US8389852B2 (en) * | 2006-02-22 | 2013-03-05 | Guardian Industries Corp. | Electrode structure for use in electronic device and method of making same |
| US20090014055A1 (en) * | 2006-03-18 | 2009-01-15 | Solyndra, Inc. | Photovoltaic Modules Having a Filling Material |
| WO2008126706A1 (en) * | 2007-04-06 | 2008-10-23 | Semiconductor Energy Laboratory Co., Ltd. | Photovoltaic device and method for manufacturing the same |
| EP2286456A4 (en) * | 2008-05-01 | 2017-02-22 | First Solar, Inc | Transparent conductive materials including cadmium stannate |
-
2009
- 2009-12-28 TW TW098145293A patent/TW201034207A/zh unknown
-
2010
- 2010-01-14 US US12/687,697 patent/US20100186815A1/en not_active Abandoned
- 2010-01-14 AU AU2010208530A patent/AU2010208530A1/en not_active Abandoned
- 2010-01-14 WO PCT/US2010/021052 patent/WO2010088059A1/en not_active Ceased
- 2010-01-14 EP EP10736199.0A patent/EP2392025B1/en active Active
- 2010-01-14 KR KR1020117019848A patent/KR20110107402A/ko not_active Withdrawn
- 2010-01-14 CN CN201080014178.1A patent/CN102365707B/zh active Active
- 2010-01-14 JP JP2011548032A patent/JP2012516573A/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI477643B (zh) * | 2011-09-20 | 2015-03-21 | Air Prod & Chem | 用於光伏打鈍化的含氧前驅物 |
Also Published As
| Publication number | Publication date |
|---|---|
| AU2010208530A1 (en) | 2011-08-18 |
| EP2392025A1 (en) | 2011-12-07 |
| EP2392025A4 (en) | 2012-07-11 |
| KR20110107402A (ko) | 2011-09-30 |
| WO2010088059A1 (en) | 2010-08-05 |
| EP2392025B1 (en) | 2013-09-04 |
| JP2012516573A (ja) | 2012-07-19 |
| CN102365707B (zh) | 2015-02-04 |
| CN102365707A (zh) | 2012-02-29 |
| US20100186815A1 (en) | 2010-07-29 |
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