JP2012507144A - プラズマ助長酸化を使用したパッシベーションを伴うシリコンエッチング方法及び装置 - Google Patents
プラズマ助長酸化を使用したパッシベーションを伴うシリコンエッチング方法及び装置 Download PDFInfo
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Abstract
【選択図】図1
Description
Claims (29)
- シリコン層が中に置かれたエッチングチャンバを使用して、前記シリコン層の上に形成されたパターン化マスクを通して前記シリコン層をエッチングする方法であって、
フッ素含有ガス、及び、酸素・水素含有ガスを含むエッチングガスを前記エッチングチャンバ内へ提供することと、
前記エッチングガスからプラズマを生成することと、
前記プラズマを使用して前記シリコン層内に特徴をエッチングすることと、
前記エッチングガスを停止させることと、
を備える方法。 - 請求項1に記載の方法であって、
前記プラズマは、OHラジカルを含む、方法。 - 請求項1又は2に記載の方法であって、更に、
前記エッチング中にバイアス電圧を印加することを備える方法。 - 請求項1又は2に記載の方法であって、
前記酸素・水素含有ガスは、水蒸気を含む、方法。 - 請求項4に記載の方法であって、
前記エッチングは、x≧1且つy≧1として、SiOxHyを含有するパッシベーション層を、前記エッチングされている特徴の側壁上に形成することを含む、方法。 - 請求項1又は2に記載の方法であって、
前記酸素・水素含有ガスは、アルコールを含む、方法。 - 請求項6に記載の方法であって、
前記エッチングは、n≧0、x≧1、y≧0で且つn及びyをともにゼロでないとして、SiCnOxHyを含有するパッシベーション層を、前記エッチングされている特徴の側壁上に形成することを含む、方法。 - 請求項1又は2に記載の方法であって、
前記フッ素含有ガスは、SF6を含む、方法。 - 請求項8に記載の方法であって、
前記フッ素含有ガスは、更に、SiF4を含む、方法。 - 請求項1又は2に記載の方法であって、
前記エッチングガスは、更に、O2を含む、方法。 - 請求項10に記載の方法であって、
前記エッチングガスは、更に、CO2又はCOの少なくとも一方を含む、方法。 - 請求項1又は2に記載の方法であって、
前記エッチングガス及び前記酸素・水素含有ガスは、異なる場所に設けられた異なるガス入口から別々に前記エッチングチャンバに導入される、方法。 - シリコン層が中に置かれたエッチングチャンバを使用して、前記シリコン層の上に形成されたパターン化マスクを通して前記シリコン層をエッチングする方法であって、
フッ素含有ガスを含むエッチングガスを上流エッチングチャンバ内へ提供することと、
前記エッチングガスからプラズマを生成することと、
前記プラズマからの反応媒体を前記エッチングチャンバに導入することと、
前記反応媒体がOHラジカルを含むように、酸素及び水素を含有するパッシベーションガスを前記エッチングチャンバ内へ提供することと、
前記反応媒体を使用して前記シリコン層内に特徴をエッチングすることと、
前記反応媒体及び前記パッシベーションガスを停止させることと、
を備える方法。 - 請求項13に記載の方法であって、更に、
前記エッチング中にバイアス電圧を印加することを備える方法。 - 請求項13又は14に記載の方法であって、
前記パッシベーションガスは、水蒸気又はアルコールの少なくとも一方を含む、方法。 - 請求項15に記載の方法であって、
前記エッチングは、x≧1且つy≧1として、SiOxHyを含有するパッシベーション層を、前記エッチングされている特徴の側壁上に形成することを含む、方法。 - 請求項15に記載の方法であって、
前記エッチングは、n≧0、x≧1、y≧0で且つn及びyをともにゼロでないとして、SiCnOxHyを含有するパッシベーション層を、前記エッチングされている特徴の側壁上に形成することを含む、方法。 - 請求項13又は14に記載の方法であって、
前記フッ素含有ガスは、SF6を含む、方法。 - パターン化マスクを通してシリコン層内に特徴をエッチングするための装置であって、
プラズマ処理チャンバであって、
プラズマ処理チャンバエンクロージャを形成するチャンバ壁と、
前記プラズマ処理チャンバエンクロージャ内において基板を支えるための基板サポートと、
前記プラズマ処理チャンバエンクロージャ内の圧力を調整するための圧力調整器と、
プラズマを維持するために前記プラズマ処理チャンバエンクロージャに電力を供給するための少なくとも1つの電極と、
前記少なくとも1つの電極に電気的に接続された少なくとも1つのRF電力源と、
前記プラズマ処理チャンバエンクロージャ内へガスを提供するためのガス入口と、
前記プラズマ処理チャンバエンクロージャからガスを排出するためのガス出口と、
を含むプラズマ処理チャンバと、
前記ガス入口と流体接続しているエッチングガス源であって、
フッ素含有ガス源と、
酸素・水素含有ガス源と、
を含むエッチングガス源と、
前記ガス源、前記RFバイアス源、及び前記少なくとも1つのRF電力源に可制御式に接続されたコントローラであって、
少なくとも1つのプロセッサと、
コンピュータ可読媒体であって、
前記シリコン層をエッチングするためのコンピュータ可読コードであって、
前記フッ素含有ガス源から前記プラズマチャンバにフッ素含有ガスを流し込むためのコンピュータ可読コードと、
前記酸素・水素含有ガス源から前記プラズマチャンバに酸素・水素含有ガスを流し込むためのコンピュータ可読コードと、
前記フッ素含有ガス及び前記酸素・水素含有ガスからプラズマを形成するためのコンピュータ可読コードと、
バイアス電圧を印加するためのコンピュータ可読コードと、
前記シリコン層内に特徴をエッチングするためのコンピュータ可読コードと、
前記フッ素含有ガス及び前記酸素・水素含有ガスを停止させるためのコンピュータ可読コードと、
を含むコンピュータ可読コードを含むコンピュータ可読媒体と、
を含むコントローラと、
を備える装置。 - 請求項1〜3のいずれか一項に記載の方法であって、
前記酸素・水素含有ガスは、水蒸気を含む、方法。 - 請求項20に記載の方法であって、
前記エッチングは、x≧1且つy≧1として、SiOxHyを含有するパッシベーション層を、前記エッチングされている特徴の側壁上に形成することを含む、方法。 - 請求項1〜3、及び、20〜21のいずれか一項に記載の方法であって、
前記酸素・水素含有ガスは、アルコールを含む、方法。 - 請求項22に記載の方法であって、
前記エッチングは、n≧0、x≧1、y≧0で且つn及びyをともにゼロでないとして、SiCnOxHyを含有するパッシベーション層を、前記エッチングされている特徴の側壁上に形成することを含む、方法。 - 請求項1〜3、及び、20〜23のいずれか一項に記載の方法であって、
前記フッ素含有ガスは、SF6を含む、方法。 - 請求項24に記載の方法であって、
前記フッ素含有ガスは、更に、SiF4を含む、方法。 - 請求項1〜3及び20〜25のいずれか一項に記載の方法であって、
前記エッチングガスは、更に、O2を含む、方法。 - 請求項26に記載の方法であって、
前記エッチングガスは、更に、CO2又はCOの少なくとも一方を含む、方法。 - 請求項1〜3、及び、20〜27のいずれか一項に記載の方法であって、
前記エッチングガス及び前記酸素・水素含有ガスは、異なる場所に設けられた異なるガス入口から別々に前記エッチングチャンバに導入される、方法。 - 請求項13〜17のいずれか一項に記載の方法であって、
前記フッ素含有ガスは、SF6を含む、方法。
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US12/257,210 | 2008-10-23 | ||
US12/257,210 US8173547B2 (en) | 2008-10-23 | 2008-10-23 | Silicon etch with passivation using plasma enhanced oxidation |
PCT/US2009/060214 WO2010047976A2 (en) | 2008-10-23 | 2009-10-09 | Silicon etch with passivation using plasma enhanced oxidation |
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CN (2) | CN105470126B (ja) |
SG (1) | SG195602A1 (ja) |
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Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2012507145A (ja) * | 2008-10-23 | 2012-03-22 | ラム リサーチ コーポレーション | 化学気相蒸着を使用したパッシベーションを伴うシリコンエッチング方法及び装置 |
JP2016189409A (ja) * | 2015-03-30 | 2016-11-04 | 東京エレクトロン株式会社 | 薄膜の形成方法 |
WO2018193971A1 (ja) * | 2017-04-17 | 2018-10-25 | 浜松ホトニクス株式会社 | 加工対象物切断方法 |
Families Citing this family (186)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8193096B2 (en) | 2004-12-13 | 2012-06-05 | Novellus Systems, Inc. | High dose implantation strip (HDIS) in H2 base chemistry |
US8435895B2 (en) | 2007-04-04 | 2013-05-07 | Novellus Systems, Inc. | Methods for stripping photoresist and/or cleaning metal regions |
WO2009085672A2 (en) | 2007-12-21 | 2009-07-09 | Lam Research Corporation | Fabrication of a silicon structure and deep silicon etch with profile control |
US20110143548A1 (en) | 2009-12-11 | 2011-06-16 | David Cheung | Ultra low silicon loss high dose implant strip |
US8658541B2 (en) * | 2010-01-15 | 2014-02-25 | Applied Materials, Inc. | Method of controlling trench microloading using plasma pulsing |
JP5223878B2 (ja) * | 2010-03-30 | 2013-06-26 | 株式会社デンソー | 半導体装置の製造方法 |
US9324576B2 (en) | 2010-05-27 | 2016-04-26 | Applied Materials, Inc. | Selective etch for silicon films |
US8741778B2 (en) | 2010-12-14 | 2014-06-03 | Applied Materials, Inc. | Uniform dry etch in two stages |
US10283321B2 (en) | 2011-01-18 | 2019-05-07 | Applied Materials, Inc. | Semiconductor processing system and methods using capacitively coupled plasma |
US8771539B2 (en) * | 2011-02-22 | 2014-07-08 | Applied Materials, Inc. | Remotely-excited fluorine and water vapor etch |
WO2012122064A1 (en) * | 2011-03-04 | 2012-09-13 | Tokyo Electron Limited | Method of etching silicon nitride films |
US9064815B2 (en) | 2011-03-14 | 2015-06-23 | Applied Materials, Inc. | Methods for etch of metal and metal-oxide films |
US8999856B2 (en) | 2011-03-14 | 2015-04-07 | Applied Materials, Inc. | Methods for etch of sin films |
JP5913830B2 (ja) * | 2011-04-21 | 2016-04-27 | 株式会社アルバック | シリコン基板のエッチング方法 |
JP5981106B2 (ja) * | 2011-07-12 | 2016-08-31 | 東京エレクトロン株式会社 | プラズマエッチング方法 |
US8771536B2 (en) | 2011-08-01 | 2014-07-08 | Applied Materials, Inc. | Dry-etch for silicon-and-carbon-containing films |
US20130045605A1 (en) * | 2011-08-18 | 2013-02-21 | Applied Materials, Inc. | Dry-etch for silicon-and-nitrogen-containing films |
US8679982B2 (en) | 2011-08-26 | 2014-03-25 | Applied Materials, Inc. | Selective suppression of dry-etch rate of materials containing both silicon and oxygen |
US9613825B2 (en) | 2011-08-26 | 2017-04-04 | Novellus Systems, Inc. | Photoresist strip processes for improved device integrity |
US8679983B2 (en) | 2011-09-01 | 2014-03-25 | Applied Materials, Inc. | Selective suppression of dry-etch rate of materials containing both silicon and nitrogen |
US8927390B2 (en) | 2011-09-26 | 2015-01-06 | Applied Materials, Inc. | Intrench profile |
US8808563B2 (en) | 2011-10-07 | 2014-08-19 | Applied Materials, Inc. | Selective etch of silicon by way of metastable hydrogen termination |
WO2013070436A1 (en) | 2011-11-08 | 2013-05-16 | Applied Materials, Inc. | Methods of reducing substrate dislocation during gapfill processing |
US9267739B2 (en) | 2012-07-18 | 2016-02-23 | Applied Materials, Inc. | Pedestal with multi-zone temperature control and multiple purge capabilities |
US9373517B2 (en) | 2012-08-02 | 2016-06-21 | Applied Materials, Inc. | Semiconductor processing with DC assisted RF power for improved control |
US9034770B2 (en) | 2012-09-17 | 2015-05-19 | Applied Materials, Inc. | Differential silicon oxide etch |
US9023734B2 (en) | 2012-09-18 | 2015-05-05 | Applied Materials, Inc. | Radical-component oxide etch |
US9390937B2 (en) | 2012-09-20 | 2016-07-12 | Applied Materials, Inc. | Silicon-carbon-nitride selective etch |
US9132436B2 (en) | 2012-09-21 | 2015-09-15 | Applied Materials, Inc. | Chemical control features in wafer process equipment |
US8765574B2 (en) | 2012-11-09 | 2014-07-01 | Applied Materials, Inc. | Dry etch process |
US8969212B2 (en) | 2012-11-20 | 2015-03-03 | Applied Materials, Inc. | Dry-etch selectivity |
US9064816B2 (en) | 2012-11-30 | 2015-06-23 | Applied Materials, Inc. | Dry-etch for selective oxidation removal |
US8980763B2 (en) | 2012-11-30 | 2015-03-17 | Applied Materials, Inc. | Dry-etch for selective tungsten removal |
US9111877B2 (en) | 2012-12-18 | 2015-08-18 | Applied Materials, Inc. | Non-local plasma oxide etch |
US8921234B2 (en) | 2012-12-21 | 2014-12-30 | Applied Materials, Inc. | Selective titanium nitride etching |
US10256079B2 (en) | 2013-02-08 | 2019-04-09 | Applied Materials, Inc. | Semiconductor processing systems having multiple plasma configurations |
US9362130B2 (en) | 2013-03-01 | 2016-06-07 | Applied Materials, Inc. | Enhanced etching processes using remote plasma sources |
US9040422B2 (en) | 2013-03-05 | 2015-05-26 | Applied Materials, Inc. | Selective titanium nitride removal |
US8801952B1 (en) | 2013-03-07 | 2014-08-12 | Applied Materials, Inc. | Conformal oxide dry etch |
US10170282B2 (en) | 2013-03-08 | 2019-01-01 | Applied Materials, Inc. | Insulated semiconductor faceplate designs |
US20140271097A1 (en) | 2013-03-15 | 2014-09-18 | Applied Materials, Inc. | Processing systems and methods for halide scavenging |
US8895449B1 (en) | 2013-05-16 | 2014-11-25 | Applied Materials, Inc. | Delicate dry clean |
US9114438B2 (en) | 2013-05-21 | 2015-08-25 | Applied Materials, Inc. | Copper residue chamber clean |
US9493879B2 (en) | 2013-07-12 | 2016-11-15 | Applied Materials, Inc. | Selective sputtering for pattern transfer |
US9773648B2 (en) | 2013-08-30 | 2017-09-26 | Applied Materials, Inc. | Dual discharge modes operation for remote plasma |
US9269587B2 (en) | 2013-09-06 | 2016-02-23 | Applied Materials, Inc. | Methods for etching materials using synchronized RF pulses |
US8956980B1 (en) | 2013-09-16 | 2015-02-17 | Applied Materials, Inc. | Selective etch of silicon nitride |
JP6207947B2 (ja) * | 2013-09-24 | 2017-10-04 | 東京エレクトロン株式会社 | 被処理体をプラズマ処理する方法 |
US8951429B1 (en) | 2013-10-29 | 2015-02-10 | Applied Materials, Inc. | Tungsten oxide processing |
US9576809B2 (en) | 2013-11-04 | 2017-02-21 | Applied Materials, Inc. | Etch suppression with germanium |
US9236265B2 (en) | 2013-11-04 | 2016-01-12 | Applied Materials, Inc. | Silicon germanium processing |
US9520303B2 (en) | 2013-11-12 | 2016-12-13 | Applied Materials, Inc. | Aluminum selective etch |
US9245762B2 (en) | 2013-12-02 | 2016-01-26 | Applied Materials, Inc. | Procedure for etch rate consistency |
US9117855B2 (en) | 2013-12-04 | 2015-08-25 | Applied Materials, Inc. | Polarity control for remote plasma |
US9287095B2 (en) | 2013-12-17 | 2016-03-15 | Applied Materials, Inc. | Semiconductor system assemblies and methods of operation |
US9263278B2 (en) | 2013-12-17 | 2016-02-16 | Applied Materials, Inc. | Dopant etch selectivity control |
US9190293B2 (en) | 2013-12-18 | 2015-11-17 | Applied Materials, Inc. | Even tungsten etch for high aspect ratio trenches |
US9418867B2 (en) | 2014-01-10 | 2016-08-16 | Applied Materials, Inc. | Mask passivation using plasma |
US9287134B2 (en) | 2014-01-17 | 2016-03-15 | Applied Materials, Inc. | Titanium oxide etch |
US9396989B2 (en) | 2014-01-27 | 2016-07-19 | Applied Materials, Inc. | Air gaps between copper lines |
US9293568B2 (en) | 2014-01-27 | 2016-03-22 | Applied Materials, Inc. | Method of fin patterning |
US9385028B2 (en) | 2014-02-03 | 2016-07-05 | Applied Materials, Inc. | Air gap process |
US9499898B2 (en) | 2014-03-03 | 2016-11-22 | Applied Materials, Inc. | Layered thin film heater and method of fabrication |
US9299575B2 (en) | 2014-03-17 | 2016-03-29 | Applied Materials, Inc. | Gas-phase tungsten etch |
US9299537B2 (en) | 2014-03-20 | 2016-03-29 | Applied Materials, Inc. | Radial waveguide systems and methods for post-match control of microwaves |
US9299538B2 (en) | 2014-03-20 | 2016-03-29 | Applied Materials, Inc. | Radial waveguide systems and methods for post-match control of microwaves |
US9136273B1 (en) | 2014-03-21 | 2015-09-15 | Applied Materials, Inc. | Flash gate air gap |
US9903020B2 (en) | 2014-03-31 | 2018-02-27 | Applied Materials, Inc. | Generation of compact alumina passivation layers on aluminum plasma equipment components |
US9269590B2 (en) | 2014-04-07 | 2016-02-23 | Applied Materials, Inc. | Spacer formation |
US9309598B2 (en) | 2014-05-28 | 2016-04-12 | Applied Materials, Inc. | Oxide and metal removal |
US9847289B2 (en) | 2014-05-30 | 2017-12-19 | Applied Materials, Inc. | Protective via cap for improved interconnect performance |
US9514954B2 (en) | 2014-06-10 | 2016-12-06 | Lam Research Corporation | Peroxide-vapor treatment for enhancing photoresist-strip performance and modifying organic films |
US9378969B2 (en) | 2014-06-19 | 2016-06-28 | Applied Materials, Inc. | Low temperature gas-phase carbon removal |
US9406523B2 (en) | 2014-06-19 | 2016-08-02 | Applied Materials, Inc. | Highly selective doped oxide removal method |
US20150371889A1 (en) * | 2014-06-20 | 2015-12-24 | Applied Materials, Inc. | Methods for shallow trench isolation formation in a silicon germanium layer |
US9425058B2 (en) | 2014-07-24 | 2016-08-23 | Applied Materials, Inc. | Simplified litho-etch-litho-etch process |
US9496167B2 (en) | 2014-07-31 | 2016-11-15 | Applied Materials, Inc. | Integrated bit-line airgap formation and gate stack post clean |
US9159606B1 (en) | 2014-07-31 | 2015-10-13 | Applied Materials, Inc. | Metal air gap |
US9378978B2 (en) | 2014-07-31 | 2016-06-28 | Applied Materials, Inc. | Integrated oxide recess and floating gate fin trimming |
US9165786B1 (en) | 2014-08-05 | 2015-10-20 | Applied Materials, Inc. | Integrated oxide and nitride recess for better channel contact in 3D architectures |
US9659753B2 (en) | 2014-08-07 | 2017-05-23 | Applied Materials, Inc. | Grooved insulator to reduce leakage current |
US9553102B2 (en) | 2014-08-19 | 2017-01-24 | Applied Materials, Inc. | Tungsten separation |
US9355856B2 (en) | 2014-09-12 | 2016-05-31 | Applied Materials, Inc. | V trench dry etch |
US9478434B2 (en) | 2014-09-24 | 2016-10-25 | Applied Materials, Inc. | Chlorine-based hardmask removal |
US9368364B2 (en) | 2014-09-24 | 2016-06-14 | Applied Materials, Inc. | Silicon etch process with tunable selectivity to SiO2 and other materials |
US9613822B2 (en) | 2014-09-25 | 2017-04-04 | Applied Materials, Inc. | Oxide etch selectivity enhancement |
US9966240B2 (en) | 2014-10-14 | 2018-05-08 | Applied Materials, Inc. | Systems and methods for internal surface conditioning assessment in plasma processing equipment |
US9355922B2 (en) | 2014-10-14 | 2016-05-31 | Applied Materials, Inc. | Systems and methods for internal surface conditioning in plasma processing equipment |
US11637002B2 (en) | 2014-11-26 | 2023-04-25 | Applied Materials, Inc. | Methods and systems to enhance process uniformity |
US9299583B1 (en) | 2014-12-05 | 2016-03-29 | Applied Materials, Inc. | Aluminum oxide selective etch |
US10573496B2 (en) | 2014-12-09 | 2020-02-25 | Applied Materials, Inc. | Direct outlet toroidal plasma source |
US10224210B2 (en) | 2014-12-09 | 2019-03-05 | Applied Materials, Inc. | Plasma processing system with direct outlet toroidal plasma source |
US20160181111A1 (en) * | 2014-12-19 | 2016-06-23 | Lam Research Corporation | Silicon etch and clean |
US9502258B2 (en) | 2014-12-23 | 2016-11-22 | Applied Materials, Inc. | Anisotropic gap etch |
US9343272B1 (en) | 2015-01-08 | 2016-05-17 | Applied Materials, Inc. | Self-aligned process |
US11257693B2 (en) | 2015-01-09 | 2022-02-22 | Applied Materials, Inc. | Methods and systems to improve pedestal temperature control |
US9373522B1 (en) | 2015-01-22 | 2016-06-21 | Applied Mateials, Inc. | Titanium nitride removal |
US9449846B2 (en) | 2015-01-28 | 2016-09-20 | Applied Materials, Inc. | Vertical gate separation |
US20160225652A1 (en) | 2015-02-03 | 2016-08-04 | Applied Materials, Inc. | Low temperature chuck for plasma processing systems |
US9728437B2 (en) | 2015-02-03 | 2017-08-08 | Applied Materials, Inc. | High temperature chuck for plasma processing systems |
KR102354460B1 (ko) | 2015-02-12 | 2022-01-24 | 삼성전자주식회사 | 반도체 소자 및 그 제조 방법 |
US9881805B2 (en) | 2015-03-02 | 2018-01-30 | Applied Materials, Inc. | Silicon selective removal |
JP2017010993A (ja) * | 2015-06-17 | 2017-01-12 | 東京エレクトロン株式会社 | プラズマ処理方法 |
US9741593B2 (en) | 2015-08-06 | 2017-08-22 | Applied Materials, Inc. | Thermal management systems and methods for wafer processing systems |
US9691645B2 (en) | 2015-08-06 | 2017-06-27 | Applied Materials, Inc. | Bolted wafer chuck thermal management systems and methods for wafer processing systems |
US9349605B1 (en) | 2015-08-07 | 2016-05-24 | Applied Materials, Inc. | Oxide etch selectivity systems and methods |
US10504700B2 (en) | 2015-08-27 | 2019-12-10 | Applied Materials, Inc. | Plasma etching systems and methods with secondary plasma injection |
US10504754B2 (en) | 2016-05-19 | 2019-12-10 | Applied Materials, Inc. | Systems and methods for improved semiconductor etching and component protection |
US10522371B2 (en) | 2016-05-19 | 2019-12-31 | Applied Materials, Inc. | Systems and methods for improved semiconductor etching and component protection |
US9865484B1 (en) | 2016-06-29 | 2018-01-09 | Applied Materials, Inc. | Selective etch using material modification and RF pulsing |
US10062575B2 (en) | 2016-09-09 | 2018-08-28 | Applied Materials, Inc. | Poly directional etch by oxidation |
US10629473B2 (en) | 2016-09-09 | 2020-04-21 | Applied Materials, Inc. | Footing removal for nitride spacer |
US10546729B2 (en) | 2016-10-04 | 2020-01-28 | Applied Materials, Inc. | Dual-channel showerhead with improved profile |
US9721789B1 (en) | 2016-10-04 | 2017-08-01 | Applied Materials, Inc. | Saving ion-damaged spacers |
US10062585B2 (en) | 2016-10-04 | 2018-08-28 | Applied Materials, Inc. | Oxygen compatible plasma source |
US9934942B1 (en) | 2016-10-04 | 2018-04-03 | Applied Materials, Inc. | Chamber with flow-through source |
US10062579B2 (en) * | 2016-10-07 | 2018-08-28 | Applied Materials, Inc. | Selective SiN lateral recess |
US9947549B1 (en) | 2016-10-10 | 2018-04-17 | Applied Materials, Inc. | Cobalt-containing material removal |
US9997366B2 (en) * | 2016-10-19 | 2018-06-12 | Lam Research Corporation | Silicon oxide silicon nitride stack ion-assisted etch |
US9768034B1 (en) | 2016-11-11 | 2017-09-19 | Applied Materials, Inc. | Removal methods for high aspect ratio structures |
US10163696B2 (en) | 2016-11-11 | 2018-12-25 | Applied Materials, Inc. | Selective cobalt removal for bottom up gapfill |
US10242908B2 (en) | 2016-11-14 | 2019-03-26 | Applied Materials, Inc. | Airgap formation with damage-free copper |
US10026621B2 (en) | 2016-11-14 | 2018-07-17 | Applied Materials, Inc. | SiN spacer profile patterning |
US10566206B2 (en) | 2016-12-27 | 2020-02-18 | Applied Materials, Inc. | Systems and methods for anisotropic material breakthrough |
US10403507B2 (en) | 2017-02-03 | 2019-09-03 | Applied Materials, Inc. | Shaped etch profile with oxidation |
US10431429B2 (en) | 2017-02-03 | 2019-10-01 | Applied Materials, Inc. | Systems and methods for radial and azimuthal control of plasma uniformity |
US10043684B1 (en) | 2017-02-06 | 2018-08-07 | Applied Materials, Inc. | Self-limiting atomic thermal etching systems and methods |
US10319739B2 (en) | 2017-02-08 | 2019-06-11 | Applied Materials, Inc. | Accommodating imperfectly aligned memory holes |
US10943834B2 (en) | 2017-03-13 | 2021-03-09 | Applied Materials, Inc. | Replacement contact process |
US10319649B2 (en) | 2017-04-11 | 2019-06-11 | Applied Materials, Inc. | Optical emission spectroscopy (OES) for remote plasma monitoring |
US11276559B2 (en) | 2017-05-17 | 2022-03-15 | Applied Materials, Inc. | Semiconductor processing chamber for multiple precursor flow |
US11276590B2 (en) | 2017-05-17 | 2022-03-15 | Applied Materials, Inc. | Multi-zone semiconductor substrate supports |
US10049891B1 (en) | 2017-05-31 | 2018-08-14 | Applied Materials, Inc. | Selective in situ cobalt residue removal |
US10497579B2 (en) | 2017-05-31 | 2019-12-03 | Applied Materials, Inc. | Water-free etching methods |
US10920320B2 (en) | 2017-06-16 | 2021-02-16 | Applied Materials, Inc. | Plasma health determination in semiconductor substrate processing reactors |
US10541246B2 (en) | 2017-06-26 | 2020-01-21 | Applied Materials, Inc. | 3D flash memory cells which discourage cross-cell electrical tunneling |
US10727080B2 (en) | 2017-07-07 | 2020-07-28 | Applied Materials, Inc. | Tantalum-containing material removal |
US10541184B2 (en) | 2017-07-11 | 2020-01-21 | Applied Materials, Inc. | Optical emission spectroscopic techniques for monitoring etching |
US10354889B2 (en) | 2017-07-17 | 2019-07-16 | Applied Materials, Inc. | Non-halogen etching of silicon-containing materials |
US10043674B1 (en) | 2017-08-04 | 2018-08-07 | Applied Materials, Inc. | Germanium etching systems and methods |
US10170336B1 (en) | 2017-08-04 | 2019-01-01 | Applied Materials, Inc. | Methods for anisotropic control of selective silicon removal |
US10297458B2 (en) | 2017-08-07 | 2019-05-21 | Applied Materials, Inc. | Process window widening using coated parts in plasma etch processes |
US10424487B2 (en) | 2017-10-24 | 2019-09-24 | Applied Materials, Inc. | Atomic layer etching processes |
US10128086B1 (en) | 2017-10-24 | 2018-11-13 | Applied Materials, Inc. | Silicon pretreatment for nitride removal |
US10283324B1 (en) | 2017-10-24 | 2019-05-07 | Applied Materials, Inc. | Oxygen treatment for nitride etching |
US10256112B1 (en) | 2017-12-08 | 2019-04-09 | Applied Materials, Inc. | Selective tungsten removal |
US10903054B2 (en) | 2017-12-19 | 2021-01-26 | Applied Materials, Inc. | Multi-zone gas distribution systems and methods |
US11328909B2 (en) | 2017-12-22 | 2022-05-10 | Applied Materials, Inc. | Chamber conditioning and removal processes |
US10854426B2 (en) | 2018-01-08 | 2020-12-01 | Applied Materials, Inc. | Metal recess for semiconductor structures |
US10679870B2 (en) | 2018-02-15 | 2020-06-09 | Applied Materials, Inc. | Semiconductor processing chamber multistage mixing apparatus |
US10964512B2 (en) | 2018-02-15 | 2021-03-30 | Applied Materials, Inc. | Semiconductor processing chamber multistage mixing apparatus and methods |
TWI716818B (zh) | 2018-02-28 | 2021-01-21 | 美商應用材料股份有限公司 | 形成氣隙的系統及方法 |
US10593560B2 (en) | 2018-03-01 | 2020-03-17 | Applied Materials, Inc. | Magnetic induction plasma source for semiconductor processes and equipment |
US10319600B1 (en) | 2018-03-12 | 2019-06-11 | Applied Materials, Inc. | Thermal silicon etch |
US10497573B2 (en) | 2018-03-13 | 2019-12-03 | Applied Materials, Inc. | Selective atomic layer etching of semiconductor materials |
US10573527B2 (en) | 2018-04-06 | 2020-02-25 | Applied Materials, Inc. | Gas-phase selective etching systems and methods |
US10490406B2 (en) | 2018-04-10 | 2019-11-26 | Appled Materials, Inc. | Systems and methods for material breakthrough |
US10699879B2 (en) | 2018-04-17 | 2020-06-30 | Applied Materials, Inc. | Two piece electrode assembly with gap for plasma control |
US10886137B2 (en) | 2018-04-30 | 2021-01-05 | Applied Materials, Inc. | Selective nitride removal |
US10872778B2 (en) | 2018-07-06 | 2020-12-22 | Applied Materials, Inc. | Systems and methods utilizing solid-phase etchants |
US10755941B2 (en) | 2018-07-06 | 2020-08-25 | Applied Materials, Inc. | Self-limiting selective etching systems and methods |
US10672642B2 (en) | 2018-07-24 | 2020-06-02 | Applied Materials, Inc. | Systems and methods for pedestal configuration |
US10892198B2 (en) | 2018-09-14 | 2021-01-12 | Applied Materials, Inc. | Systems and methods for improved performance in semiconductor processing |
US11049755B2 (en) | 2018-09-14 | 2021-06-29 | Applied Materials, Inc. | Semiconductor substrate supports with embedded RF shield |
US11062887B2 (en) | 2018-09-17 | 2021-07-13 | Applied Materials, Inc. | High temperature RF heater pedestals |
US11114306B2 (en) | 2018-09-17 | 2021-09-07 | Applied Materials, Inc. | Methods for depositing dielectric material |
US11417534B2 (en) | 2018-09-21 | 2022-08-16 | Applied Materials, Inc. | Selective material removal |
US11682560B2 (en) | 2018-10-11 | 2023-06-20 | Applied Materials, Inc. | Systems and methods for hafnium-containing film removal |
US11121002B2 (en) | 2018-10-24 | 2021-09-14 | Applied Materials, Inc. | Systems and methods for etching metals and metal derivatives |
KR20210065199A (ko) * | 2018-10-26 | 2021-06-03 | 매슨 테크놀로지 인크 | 하드마스크의 제거를 위한 수증기 기반 불소 함유 플라즈마 |
US11437242B2 (en) | 2018-11-27 | 2022-09-06 | Applied Materials, Inc. | Selective removal of silicon-containing materials |
US11646242B2 (en) | 2018-11-29 | 2023-05-09 | Qorvo Us, Inc. | Thermally enhanced semiconductor package with at least one heat extractor and process for making the same |
US11721527B2 (en) | 2019-01-07 | 2023-08-08 | Applied Materials, Inc. | Processing chamber mixing systems |
US10920319B2 (en) | 2019-01-11 | 2021-02-16 | Applied Materials, Inc. | Ceramic showerheads with conductive electrodes |
KR20210129656A (ko) | 2019-01-23 | 2021-10-28 | 코르보 유에스, 인크. | Rf 반도체 디바이스 및 이를 형성하는 방법 |
US20200235040A1 (en) | 2019-01-23 | 2020-07-23 | Qorvo Us, Inc. | Rf devices with enhanced performance and methods of forming the same |
US20200235066A1 (en) | 2019-01-23 | 2020-07-23 | Qorvo Us, Inc. | Rf devices with enhanced performance and methods of forming the same |
KR20200108242A (ko) | 2019-03-08 | 2020-09-17 | 에이에스엠 아이피 홀딩 비.브이. | 실리콘 질화물 층을 선택적으로 증착하는 방법, 및 선택적으로 증착된 실리콘 질화물 층을 포함하는 구조체 |
JP7349861B2 (ja) * | 2019-09-24 | 2023-09-25 | 東京エレクトロン株式会社 | エッチング方法、ダメージ層の除去方法、および記憶媒体 |
US11646289B2 (en) | 2019-12-02 | 2023-05-09 | Qorvo Us, Inc. | RF devices with enhanced performance and methods of forming the same |
US11923238B2 (en) | 2019-12-12 | 2024-03-05 | Qorvo Us, Inc. | Method of forming RF devices with enhanced performance including attaching a wafer to a support carrier by a bonding technique without any polymer adhesive |
US11177137B2 (en) * | 2020-01-17 | 2021-11-16 | Taiwan Semiconductor Manufacturing Company, Ltd. | Wafer etching process and methods thereof |
US11232954B2 (en) | 2020-03-16 | 2022-01-25 | Tokyo Electron Limited | Sidewall protection layer formation for substrate processing |
WO2022186857A1 (en) * | 2021-03-05 | 2022-09-09 | Qorvo Us, Inc. | Selective etching process for si-ge and doped epitaxial silicon |
CN114171641A (zh) * | 2021-11-30 | 2022-03-11 | 北京燕东微电子科技有限公司 | 氧化钒薄膜的刻蚀方法与半导体器件的制造方法 |
CN117438299B (zh) * | 2023-12-21 | 2024-03-29 | 浙江集迈科微电子有限公司 | Iii-v族化合物半导体材料的刻蚀方法 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH08115899A (ja) * | 1994-10-18 | 1996-05-07 | Sony Corp | シリコン系材料層のパターニング方法 |
JPH11111686A (ja) * | 1997-10-01 | 1999-04-23 | Nippon Telegr & Teleph Corp <Ntt> | 低ガス圧プラズマエッチング方法 |
JP2007103876A (ja) * | 2005-10-07 | 2007-04-19 | Hitachi High-Technologies Corp | エッチング方法およびエッチング装置 |
JP2007533139A (ja) * | 2004-04-08 | 2007-11-15 | アプライド マテリアルズ インコーポレイテッド | インサイチュ膜スタック処理のための方法及び装置 |
Family Cites Families (46)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5863376A (en) | 1996-06-05 | 1999-01-26 | Lam Research Corporation | Temperature controlling method and apparatus for a plasma processing chamber |
US5843226A (en) | 1996-07-16 | 1998-12-01 | Applied Materials, Inc. | Etch process for single crystal silicon |
US6534409B1 (en) | 1996-12-04 | 2003-03-18 | Micron Technology, Inc. | Silicon oxide co-deposition/etching process |
DE19706682C2 (de) | 1997-02-20 | 1999-01-14 | Bosch Gmbh Robert | Anisotropes fluorbasiertes Plasmaätzverfahren für Silizium |
JPH10256260A (ja) | 1997-03-11 | 1998-09-25 | Sony Corp | 高融点金属系材料層を有するゲート電極の形成方法、及び高融点金属系材料層を有するゲート電極を備えた半導体装置の製造方法 |
US6127278A (en) * | 1997-06-02 | 2000-10-03 | Applied Materials, Inc. | Etch process for forming high aspect ratio trenched in silicon |
JPH1197414A (ja) | 1997-09-25 | 1999-04-09 | Sony Corp | 酸化シリコン系絶縁膜のプラズマエッチング方法 |
US20020076935A1 (en) | 1997-10-22 | 2002-06-20 | Karen Maex | Anisotropic etching of organic-containing insulating layers |
US5904520A (en) | 1998-01-05 | 1999-05-18 | Utek Semiconductor Corp. | Method of fabricating a CMOS transistor |
TW412792B (en) | 1999-02-10 | 2000-11-21 | Applied Materials Inc | Etching back process for solving the plug loss |
US6458648B1 (en) | 1999-12-17 | 2002-10-01 | Agere Systems Guardian Corp. | Method for in-situ removal of side walls in MOM capacitor formation |
US6491835B1 (en) | 1999-12-20 | 2002-12-10 | Applied Materials, Inc. | Metal mask etching of silicon |
JP2001319925A (ja) | 2000-05-12 | 2001-11-16 | Chemitoronics Co Ltd | プラズマエッチング装置 |
US6284666B1 (en) | 2000-05-31 | 2001-09-04 | International Business Machines Corporation | Method of reducing RIE lag for deep trench silicon etching |
US6387804B1 (en) | 2000-09-19 | 2002-05-14 | Advanced Micro Devices, Inc. | Passivation of sidewall spacers using ozonated water |
US6680232B2 (en) | 2000-09-22 | 2004-01-20 | Fairchild Semiconductor Corporation | Trench etch with incremental oxygen flow |
EP1233449A3 (en) | 2001-02-15 | 2006-03-01 | Interuniversitair Micro-Elektronica Centrum | A method of fabricating a semiconductor device |
US6743727B2 (en) | 2001-06-05 | 2004-06-01 | International Business Machines Corporation | Method of etching high aspect ratio openings |
JP3527901B2 (ja) | 2001-07-24 | 2004-05-17 | 株式会社日立製作所 | プラズマエッチング方法 |
CN100355033C (zh) | 2001-10-31 | 2007-12-12 | 东京电子株式会社 | 蚀刻高长径比零件的方法 |
JP4504684B2 (ja) | 2001-12-27 | 2010-07-14 | 東京エレクトロン株式会社 | エッチング方法 |
US7129178B1 (en) | 2002-02-13 | 2006-10-31 | Cypress Semiconductor Corp. | Reducing defect formation within an etched semiconductor topography |
US7169255B2 (en) | 2002-02-15 | 2007-01-30 | Hitachi High-Technologies Corporation | Plasma processing apparatus |
DE10209763A1 (de) | 2002-03-05 | 2003-10-02 | Bosch Gmbh Robert | Vorrichtung und Verfahren zum anisotropen Plasmaätzen eines Substrates, insbesondere eines Siliziumkörpers |
US7547635B2 (en) | 2002-06-14 | 2009-06-16 | Lam Research Corporation | Process for etching dielectric films with improved resist and/or etch profile characteristics |
JP4167542B2 (ja) * | 2002-07-17 | 2008-10-15 | 積水化学工業株式会社 | プラズマエッチング用ガス供給装置並びにプラズマエッチングシステム及び方法 |
US7556741B2 (en) * | 2002-08-28 | 2009-07-07 | Kyocera Corporation | Method for producing a solar cell |
JP4184851B2 (ja) | 2003-03-31 | 2008-11-19 | 東京エレクトロン株式会社 | プラズマ処理方法 |
US6916746B1 (en) | 2003-04-09 | 2005-07-12 | Lam Research Corporation | Method for plasma etching using periodic modulation of gas chemistry |
US7348245B2 (en) | 2003-04-28 | 2008-03-25 | Renesas Technology Corp. | Semiconductor device and a method of manufacturing the same |
US6958112B2 (en) | 2003-05-27 | 2005-10-25 | Applied Materials, Inc. | Methods and systems for high-aspect-ratio gapfill using atomic-oxygen generation |
US6949460B2 (en) * | 2003-11-12 | 2005-09-27 | Lam Research Corporation | Line edge roughness reduction for trench etch |
US20050145341A1 (en) | 2003-11-19 | 2005-07-07 | Masaki Suzuki | Plasma processing apparatus |
JP4381963B2 (ja) | 2003-11-19 | 2009-12-09 | パナソニック株式会社 | プラズマ処理装置 |
DE10361635B4 (de) | 2003-12-30 | 2010-05-06 | Advanced Micro Devices, Inc., Sunnyvale | Verfahren zur Herstellung eines Abstandselements für ein Leitungselement durch anwenden einer Ätzstoppschicht, die durch eine stark richtungsgebundene Abscheidetechnik aufgebracht wird und Transistor mit Abstandselement |
US7202170B2 (en) | 2004-01-20 | 2007-04-10 | Taiwan Semiconductor Manufacturing Co., Ltd. | Method of improving etching profile of floating gates for flash memory devices |
US7285503B2 (en) | 2004-06-21 | 2007-10-23 | Applied Materials, Inc. | Hermetic cap layers formed on low-k films by plasma enhanced chemical vapor deposition |
US7271107B2 (en) | 2005-02-03 | 2007-09-18 | Lam Research Corporation | Reduction of feature critical dimensions using multiple masks |
US7645707B2 (en) * | 2005-03-30 | 2010-01-12 | Lam Research Corporation | Etch profile control |
KR100801308B1 (ko) | 2005-11-12 | 2008-02-11 | 주식회사 하이닉스반도체 | 고선택비 하드마스크를 이용한 트렌치 형성 방법 및 그를이용한 반도체소자의 소자분리 방법 |
US7780865B2 (en) | 2006-03-31 | 2010-08-24 | Applied Materials, Inc. | Method to improve the step coverage and pattern loading for dielectric films |
US7807219B2 (en) * | 2006-06-27 | 2010-10-05 | Lam Research Corporation | Repairing and restoring strength of etch-damaged low-k dielectric materials |
KR100763514B1 (ko) | 2006-06-30 | 2007-10-04 | 삼성전자주식회사 | 반도체 장치의 개구 형성 방법 및 이를 이용한 반도체 장치제조 방법 |
US7829465B2 (en) * | 2006-08-09 | 2010-11-09 | Shouliang Lai | Method for plasma etching of positively sloped structures |
US8124516B2 (en) * | 2006-08-21 | 2012-02-28 | Lam Research Corporation | Trilayer resist organic layer etch |
WO2009085672A2 (en) * | 2007-12-21 | 2009-07-09 | Lam Research Corporation | Fabrication of a silicon structure and deep silicon etch with profile control |
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2008
- 2008-10-23 US US12/257,210 patent/US8173547B2/en not_active Expired - Fee Related
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Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH08115899A (ja) * | 1994-10-18 | 1996-05-07 | Sony Corp | シリコン系材料層のパターニング方法 |
JPH11111686A (ja) * | 1997-10-01 | 1999-04-23 | Nippon Telegr & Teleph Corp <Ntt> | 低ガス圧プラズマエッチング方法 |
JP2007533139A (ja) * | 2004-04-08 | 2007-11-15 | アプライド マテリアルズ インコーポレイテッド | インサイチュ膜スタック処理のための方法及び装置 |
JP2007103876A (ja) * | 2005-10-07 | 2007-04-19 | Hitachi High-Technologies Corp | エッチング方法およびエッチング装置 |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2012507145A (ja) * | 2008-10-23 | 2012-03-22 | ラム リサーチ コーポレーション | 化学気相蒸着を使用したパッシベーションを伴うシリコンエッチング方法及び装置 |
JP2016189409A (ja) * | 2015-03-30 | 2016-11-04 | 東京エレクトロン株式会社 | 薄膜の形成方法 |
WO2018193971A1 (ja) * | 2017-04-17 | 2018-10-25 | 浜松ホトニクス株式会社 | 加工対象物切断方法 |
JP2018182142A (ja) * | 2017-04-17 | 2018-11-15 | 浜松ホトニクス株式会社 | 加工対象物切断方法 |
Also Published As
Publication number | Publication date |
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CN105470126B (zh) | 2018-06-12 |
US8598037B2 (en) | 2013-12-03 |
WO2010047976A3 (en) | 2010-07-01 |
US20120100720A1 (en) | 2012-04-26 |
KR20110084408A (ko) | 2011-07-22 |
TWI506691B (zh) | 2015-11-01 |
SG195602A1 (en) | 2013-12-30 |
WO2010047976A2 (en) | 2010-04-29 |
JP5965641B2 (ja) | 2016-08-10 |
US20100105209A1 (en) | 2010-04-29 |
CN102187435A (zh) | 2011-09-14 |
KR101711671B1 (ko) | 2017-03-02 |
TW201019391A (en) | 2010-05-16 |
CN105470126A (zh) | 2016-04-06 |
CN102187435B (zh) | 2016-01-20 |
US8173547B2 (en) | 2012-05-08 |
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