JP2012164841A - 半導体装置の組立治具および半導体装置の組立方法 - Google Patents
半導体装置の組立治具および半導体装置の組立方法 Download PDFInfo
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Abstract
【解決手段】半田が溶融する温度で実装基板21が凹状に湾曲した場合でもチップコマ1の底面2aの一部が実装基板面22に常に自重で接触させることで、組立治具100と実装基板21の間の隙間寸法T1を半導体チップ31の厚さW1と溶融半田32aの厚さW2aを合わせた寸法T2以下にできる。その結果、半田溶融時に半導体チップ31が横方向にズレしてチップコマ1の開口部5からはみ出ることがなく、半導体チップ31の実装基板21への位置決めを精度よく行なうことができる。
【選択図】 図11
Description
図16は、放熱用ベース上に組立治具と板半田および実装基板を位置決めした構成図である。位置決め用穴51a,金属ピン68で放熱用ベース51上に外枠66を位置決めし固定する。外枠66を構成する金属ピン68で板半田52aと実装基板53を位置決めして放熱ベース51上に載置する。外枠66を構成する枠67の内側69で内コマ61を位置決めして実装基板53上に載置する。
図18は、半田付け時の温度で実装基板が湾曲した様子を示す図である。組立時に発生する実装基板53が熱変形して湾曲する。この湾曲により組立治具500を構成する内コマ61の裏面61a(平板62の裏面)と実装基板面53aの間に隙間Sができる。この隙間Sが薄型化が進んだ半導体チップ55の厚さと溶融半田54bの厚さ(板半田54aの厚さにほぼ等しい)を合わせた寸法T5より大きくなると、半田付け時の半導体チップ55がこの隙間Sから横方向へ位置ズレを起こし高精度に位置決めすることが困難になる。
また、特許請求の範囲の請求項5に記載の発明によれば、放熱用ベース上に外枠を位置決めして載置する工程と、前記外枠内に第1の板半田を載置し、該第1の板半田上に前記外枠で位置決めされた実装基板を載置する工程と、前記実装基板上に前記外枠で内コマを位置決めし載置する工程と、前記内コマの開口部にチップコマの筒部を挿入し、前記実装基板に該チップコマの前記筒部の底面の一部を接触させて該チップコマを位置決めする工程と、前記チップコマの開口部に第2の板半田と半導体チップを積層して挿入し前記第2の板半田と前記半導体チップを位置決めする工程と、全体を加熱炉に入れて、前記チップコマの筒部の底面の一部を熱応力で湾曲する前記実装基板に接触させながら前記第1の板半田および第2の板半田を溶融させる工程と、溶融した前記第1の板半田および第2の板半田を固化させ前記放熱用ベースと前記実装基板および半導体チップと前記実装基板をそれぞれ半田で固着する工程と、全体を加熱炉から取り出し、前記組立治具を前記放熱用ベースから取り外す工程と、を含むことを特徴とする半導体装置の組立方法とする。
また、チップコマ1に庇部4を設けない場合もある。
図4は、組立治具の全体の構成図である。この組立治具100は、外枠13と、外枠13を構成する枠14の内側15に位置決めされる内コマ7と、内コマ7の開口部9で位置決めされるチップコマ1で構成される。この組立治具100の材質は、例えば、高温、還元雰囲気の中フラックスを使用せずに半田付けを行なう場合には、加熱炉を汚染せず(攻撃性がなく)、熱変形が少なく、接触する半導体チップ31などの部品が割れなどの損傷を受け難い、加工性の優れたカーボンなどが好ましい。
図11に示す半田付け状態において、チップコマ1の筒部2の底面2aと実装基板面22の間の隙間寸法T1を半導体チップ31の厚さW1と半導体チップ31下の溶融半田32aの厚さW2a(板半田32の厚さW2にほぼ等しい)を合わせた寸法T2以下にすることができる。その結果、板半田32が溶融して溶融半田32aになった時に半導体チップ31が横方向に位置ズレしてチップコマ1の開口部5から半導体チップ31がはみ出すことがなくなり、半導体チップ31の実装基板21への位置決めが精度よく行なうことができる。
図6において、放熱用ベース25上に外枠13を位置決めして載置し、外枠13を構成する爪17(突起)で第1板半田としての板半田24とその上に実装基板21を位置決めして載置する。
つぎに、図9において、前記の半導体チップ31、板半田32、チップコマ1、内コマ7、外枠13、実装基板21および板半田24などが載置された放熱用ベース25など全体33を加熱炉41に入れ、例えば、300℃程度の高温、還元雰囲気42で各板半田24,32を溶融させて溶融半田24a,32aの状態にする。
2 筒部
2a 底部
2b 外壁
3 側壁
4 庇部
5、9 開口部
7 内コマ
8 平板
10 内壁
13 外枠
14 枠
15 内側
16、26 穴
17 爪
21 実装基板
22 実装基板面
24、32 板半田
24a、32a 溶融半田
24b、32b 固化した半田
25 放熱用ベース
31 半導体チップ
33 全体
41 加熱炉
42 雰囲気
Claims (7)
- 放熱用ベース上に位置決めされて載置され、実装基板を位置決めする外枠と、該外枠で位置決めされ前記実装基板上に載置される板状の内コマと、該内コマに形成された開口部で位置決めされ該内コマに対して上下に独立可動するチップコマと、を具備する半導体装置の組立治具であって、
前記内コマの前記開口部を貫通する前記チップコマの長さ寸法が、前記内コマの厚さ寸法より大きいことを特徴とする半導体装置の組立治具。 - 前記内コマの前記開口部を貫通する前記チップコマの長さ寸法が、該チップコマの底面の一部が前記実装基板の温度上昇で想定される湾曲面に接触する長さ寸法以上であることを特徴とする請求項1に記載の半導体装置の組立治具。
- 前記チップコマが、前記内コマの前記内コマの開口部を貫通する筒部と、該筒部上の庇部を有し、前記筒部の長さ寸法が該筒部の底面の一部が前記実装基板の温度上昇で想定される湾曲面に接触する長さ寸法以上であることを特徴とする請求項1または2に記載の半導体装置の組立治具。
- 前記外枠と前記内コマおよび前記チップコマがカーボンで形成されることを特徴とする請求項1に記載の半導体装置の組立治具。
- 放熱用ベース上に外枠を位置決めして載置する工程と、
前記外枠内に第1の板半田を載置し、該第1の板半田上に前記外枠で位置決めされた実装基板を載置する工程と、
前記実装基板上に前記外枠で内コマを位置決めし載置する工程と、
前記内コマの開口部にチップコマの筒部を挿入し、前記実装基板に該チップコマの前記筒部の底面の一部を接触させて該チップコマを位置決めする工程と、
前記チップコマの開口部に第2の板半田と半導体チップを積層して挿入し前記第2の板半田と前記半導体チップを位置決めする工程と
全体を加熱炉に入れて、前記チップコマの筒部の底面の一部を熱応力で湾曲する前記実装基板に接触させながら前記第1の板半田および第2の板半田を溶融させる工程と、
溶融した前記第1の板半田および第2の板半田を固化させ前記放熱用ベースと前記実装基板および半導体チップと前記実装基板をそれぞれ半田で固着する工程と、
全体を加熱炉から取り出し、前記組立治具を前記放熱用ベースから取り外す工程と、
を含むことを特徴とする半導体装置の組立方法。 - 前記チップコマの筒部の長さ寸法が、前記板半田が溶融する温度で湾曲した前記実装基板面に接触する長さ寸法以上であることを特徴とする請求項5に記載の半導体装置の組立方法。
- 前記チップコマの筒部の底面が、前記第1の板半田または第2の板半田が溶融する温度による前記実装基板の湾曲に追従して該実装基板面に常に接触することを特徴とする請求項5記載の半導体装置の組立方法。
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