JP2012149253A5 - - Google Patents
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- Publication number
- JP2012149253A5 JP2012149253A5 JP2012000213A JP2012000213A JP2012149253A5 JP 2012149253 A5 JP2012149253 A5 JP 2012149253A5 JP 2012000213 A JP2012000213 A JP 2012000213A JP 2012000213 A JP2012000213 A JP 2012000213A JP 2012149253 A5 JP2012149253 A5 JP 2012149253A5
- Authority
- JP
- Japan
- Prior art keywords
- methyl
- ester
- acrylic acid
- oxo
- tricyclo
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000178 monomer Substances 0.000 description 7
- 229920000642 polymer Polymers 0.000 description 5
- -1 5-oxo-4-oxa-tricyclo [4.2.1.03,7] non-2-yloxycarbonylmethyl ester Chemical class 0.000 description 4
- CERQOIWHTDAKMF-UHFFFAOYSA-N Methacrylic acid Chemical compound CC(=C)C(O)=O CERQOIWHTDAKMF-UHFFFAOYSA-N 0.000 description 4
- 239000002253 acid Substances 0.000 description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- 150000001298 alcohols Chemical class 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 150000002148 esters Chemical class 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- JNIUFMXERFGMTC-UHFFFAOYSA-N oxolan-3-yl 2-methylprop-2-enoate Chemical compound CC(=C)C(=O)OC1CCOC1 JNIUFMXERFGMTC-UHFFFAOYSA-N 0.000 description 2
- QSUJHKWXLIQKEY-UHFFFAOYSA-N (2-oxooxolan-3-yl) 2-methylprop-2-enoate Chemical compound CC(=C)C(=O)OC1CCOC1=O QSUJHKWXLIQKEY-UHFFFAOYSA-N 0.000 description 1
- OOIBFPKQHULHSQ-UHFFFAOYSA-N (3-hydroxy-1-adamantyl) 2-methylprop-2-enoate Chemical compound C1C(C2)CC3CC2(O)CC1(OC(=O)C(=C)C)C3 OOIBFPKQHULHSQ-UHFFFAOYSA-N 0.000 description 1
- CVOFUHUIXVFPCH-UHFFFAOYSA-N (3-oxo-4,10-dioxatricyclo[5.2.1.02,6]decan-8-yl) 2-methylprop-2-enoate Chemical compound C12COC(=O)C2C2CC(OC(=O)C(=C)C)C1O2 CVOFUHUIXVFPCH-UHFFFAOYSA-N 0.000 description 1
- CUONHNINZJRNLP-UHFFFAOYSA-N (3-oxo-4-oxatricyclo[5.2.1.02,6]decan-8-yl) 2-methylprop-2-enoate Chemical compound C12COC(=O)C2C2CC(OC(=O)C(=C)C)C1C2 CUONHNINZJRNLP-UHFFFAOYSA-N 0.000 description 1
- JJMQLQLMPJLIPZ-UHFFFAOYSA-N (5-oxo-4-oxatricyclo[4.2.1.03,7]nonan-2-yl) 2-methylprop-2-enoate Chemical group O1C(=O)C2CC3C(OC(=O)C(=C)C)C1C2C3 JJMQLQLMPJLIPZ-UHFFFAOYSA-N 0.000 description 1
- ZROFAXCQYPKWCY-UHFFFAOYSA-N (5-oxooxolan-3-yl) 2-methylprop-2-enoate Chemical compound CC(=C)C(=O)OC1COC(=O)C1 ZROFAXCQYPKWCY-UHFFFAOYSA-N 0.000 description 1
- WGPZTLIWMRFXSI-UHFFFAOYSA-N 2-(1-ethoxyethoxy)ethyl 2-methylprop-2-enoate Chemical compound CCOC(C)OCCOC(=O)C(C)=C WGPZTLIWMRFXSI-UHFFFAOYSA-N 0.000 description 1
- SMZOUWXMTYCWNB-UHFFFAOYSA-N 2-(2-methoxy-5-methylphenyl)ethanamine Chemical compound COC1=CC=C(C)C=C1CCN SMZOUWXMTYCWNB-UHFFFAOYSA-N 0.000 description 1
- NIQLOLNJWXWZHX-UHFFFAOYSA-N 2-(5-bicyclo[2.2.1]hept-2-enylmethyl)-1,1,1,3,3,3-hexafluoropropan-2-ol Chemical compound C1C2C(CC(O)(C(F)(F)F)C(F)(F)F)CC1C=C2 NIQLOLNJWXWZHX-UHFFFAOYSA-N 0.000 description 1
- LNUJGAPHYUEEIB-UHFFFAOYSA-N 2-(ethoxymethoxy)ethyl 2-methylprop-2-enoate Chemical compound CCOCOCCOC(=O)C(C)=C LNUJGAPHYUEEIB-UHFFFAOYSA-N 0.000 description 1
- PDTDJRYFNGKLHD-UHFFFAOYSA-N 2-(methoxymethoxy)ethyl 2-methylprop-2-enoate Chemical compound COCOCCOC(=O)C(C)=C PDTDJRYFNGKLHD-UHFFFAOYSA-N 0.000 description 1
- NIXOWILDQLNWCW-UHFFFAOYSA-N 2-Propenoic acid Natural products OC(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 1
- XNECRJLMCBHYOM-UHFFFAOYSA-N 2-ethenyl-6-(1-ethoxyethoxy)naphthalene Chemical compound C1=C(C=C)C=CC2=CC(OC(C)OCC)=CC=C21 XNECRJLMCBHYOM-UHFFFAOYSA-N 0.000 description 1
- GPRXTZUZMOYERY-UHFFFAOYSA-N 2-ethenyl-6-(ethoxymethoxy)naphthalene Chemical compound C1=C(C=C)C=CC2=CC(OCOCC)=CC=C21 GPRXTZUZMOYERY-UHFFFAOYSA-N 0.000 description 1
- AEXWRSPXHREQHM-UHFFFAOYSA-N 2-ethenyl-6-(methoxymethoxy)naphthalene Chemical compound C1=C(C=C)C=CC2=CC(OCOC)=CC=C21 AEXWRSPXHREQHM-UHFFFAOYSA-N 0.000 description 1
- XVZWMPLMWUJTCE-UHFFFAOYSA-N 6-ethenylnaphthalen-2-ol Chemical compound C1=C(C=C)C=CC2=CC(O)=CC=C21 XVZWMPLMWUJTCE-UHFFFAOYSA-N 0.000 description 1
- WOBHKFSMXKNTIM-UHFFFAOYSA-N Hydroxyethyl methacrylate Chemical compound CC(=C)C(=O)OCCO WOBHKFSMXKNTIM-UHFFFAOYSA-N 0.000 description 1
- 150000001252 acrylic acid derivatives Chemical class 0.000 description 1
- 125000002723 alicyclic group Chemical group 0.000 description 1
- 125000003545 alkoxy group Chemical group 0.000 description 1
- 125000005907 alkyl ester group Chemical group 0.000 description 1
- 125000000217 alkyl group Chemical group 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 125000000484 butyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- 125000003178 carboxy group Chemical group [H]OC(*)=O 0.000 description 1
- 125000004122 cyclic group Chemical group 0.000 description 1
- 125000004185 ester group Chemical group 0.000 description 1
- 150000002170 ethers Chemical class 0.000 description 1
- 125000001495 ethyl group Chemical group [H]C([H])([H])C([H])([H])* 0.000 description 1
- 150000002596 lactones Chemical class 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201061429107P | 2010-12-31 | 2010-12-31 | |
| US61/429,107 | 2010-12-31 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2012149253A JP2012149253A (ja) | 2012-08-09 |
| JP2012149253A5 true JP2012149253A5 (enExample) | 2016-11-10 |
| JP6130099B2 JP6130099B2 (ja) | 2017-05-17 |
Family
ID=45444459
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2012000213A Active JP6130099B2 (ja) | 2010-12-31 | 2012-01-04 | ポリマー、フォトレジスト組成物、およびフォトリソグラフィパターンを形成する方法 |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US9298093B2 (enExample) |
| EP (1) | EP2472325A1 (enExample) |
| JP (1) | JP6130099B2 (enExample) |
| KR (1) | KR101904090B1 (enExample) |
| CN (1) | CN102617790B (enExample) |
| IL (2) | IL217246A0 (enExample) |
| TW (1) | TWI428355B (enExample) |
Families Citing this family (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP2428843A1 (en) * | 2010-09-10 | 2012-03-14 | Rohm and Haas Electronic Materials LLC | Photoresist compositions and methods of forming photolithographic patterns |
| JP6005932B2 (ja) * | 2011-01-07 | 2016-10-12 | 住友化学株式会社 | ポジ型レジスト組成物及びパターン形成方法 |
| JP6118500B2 (ja) * | 2011-02-28 | 2017-04-19 | ローム アンド ハース エレクトロニック マテリアルズ エルエルシーＲｏｈｍ ａｎｄ Ｈａａｓ Ｅｌｅｃｔｒｏｎｉｃ Ｍａｔｅｒｉａｌｓ ＬＬＣ | フォトレジスト組成物、およびフォトリソグラフィパターンを形成する方法 |
| JP5817650B2 (ja) * | 2011-06-13 | 2015-11-18 | 信越化学工業株式会社 | パターン形成方法及びレジスト組成物 |
| JP5277291B2 (ja) * | 2011-06-29 | 2013-08-28 | 富士フイルム株式会社 | 感活性光線性又は感放射線性樹脂組成物、これを用いた感活性光線性又は感放射線性膜、及び、パターン形成方法 |
| JP5594243B2 (ja) * | 2011-07-14 | 2014-09-24 | 信越化学工業株式会社 | 重合性エステル化合物、高分子化合物、レジスト材料及びパターン形成方法 |
| JP2015180950A (ja) * | 2012-01-31 | 2015-10-15 | 富士フイルム株式会社 | 感活性光線性又は感放射線性樹脂組成物、並びに、これを用いたレジスト膜、パターン形成方法、電子デバイスの製造方法、及び、電子デバイス |
| JP6065862B2 (ja) * | 2013-04-10 | 2017-01-25 | 信越化学工業株式会社 | パターン形成方法、レジスト組成物、高分子化合物及び単量体 |
| US10095113B2 (en) | 2013-12-06 | 2018-10-09 | Taiwan Semiconductor Manufacturing Company | Photoresist and method |
| KR101707483B1 (ko) | 2013-12-24 | 2017-02-16 | 금호석유화학 주식회사 | 신규 단량체, 중합체 및 이를 포함하는 레지스트 조성물 |
| US9581908B2 (en) | 2014-05-16 | 2017-02-28 | Taiwan Semiconductor Manufacturing Company, Ltd. | Photoresist and method |
| US11480878B2 (en) * | 2016-08-31 | 2022-10-25 | Rohm And Haas Electronic Materials Korea Ltd. | Monomers, polymers and photoresist compositions |
| US11940731B2 (en) * | 2018-06-30 | 2024-03-26 | Rohm And Haas Electronic Materials Llc | Photoresist topcoat compositions and methods of processing photoresist compositions |
| CN120958566A (zh) | 2023-03-17 | 2025-11-14 | 朗姆研究公司 | 用于单一处理室中euv图案化的干法显影与蚀刻工艺的集成 |
| WO2025064348A1 (en) * | 2023-09-19 | 2025-03-27 | Lam Research Corporation | Reclamation of hydrogen halides in dry development of photoresists |
Family Cites Families (26)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5865411A (ja) * | 1981-10-15 | 1983-04-19 | Toyo Contact Lens Co Ltd | コンタクトレンズの製造法 |
| JPS57181524A (en) * | 1981-05-01 | 1982-11-09 | Toyo Contact Lens Co Ltd | Contact lens and its manufacture |
| CA2028112A1 (en) * | 1989-03-28 | 1990-09-29 | Norbert Klaus | Hydrogels based on sugar alcohol monomers |
| JP3332263B2 (ja) * | 1993-05-19 | 2002-10-07 | 三菱レイヨン株式会社 | 光硬化型樹脂組成物 |
| JP2715881B2 (ja) | 1993-12-28 | 1998-02-18 | 日本電気株式会社 | 感光性樹脂組成物およびパターン形成方法 |
| JPH0950126A (ja) | 1995-08-08 | 1997-02-18 | Fujitsu Ltd | レジスト組成物及びレジストパターン形成方法 |
| CN1198181C (zh) | 1996-03-07 | 2005-04-20 | 住友电木株式会社 | 包括具有酸不稳定侧基的多环聚合物的光刻胶组合物 |
| JPH10316609A (ja) * | 1997-05-20 | 1998-12-02 | Kuraray Co Ltd | ２−ヒドロキシ−５−ノルボルネン−２−カルボン酸の製造方法 |
| JP4955136B2 (ja) * | 1998-06-25 | 2012-06-20 | ハイドロ−ケベック | 架橋ポリマーを含んで成るイオン伝導性材料 |
| TWI234567B (en) * | 1998-11-27 | 2005-06-21 | Hyundai Electronics Ind | Cross-linker for photoresist, and photoresist composition comprising the same |
| JP2001089511A (ja) | 1999-09-27 | 2001-04-03 | Dainippon Ink & Chem Inc | 活性エネルギー線硬化型樹脂組成物 |
| KR100497091B1 (ko) * | 2000-10-02 | 2005-06-27 | 신에쓰 가가꾸 고교 가부시끼가이샤 | 환상 아세탈 화합물, 고분자 화합물, 레지스트 재료 및패턴 형성 방법 |
| KR100749494B1 (ko) * | 2001-04-03 | 2007-08-14 | 삼성에스디아이 주식회사 | 화학증폭형 네가티브 포토레지스트용 중합체 및 포토레지스트 조성물 |
| TWI291953B (enExample) * | 2001-10-23 | 2008-01-01 | Mitsubishi Rayon Co | |
| DE10308504A1 (de) | 2003-02-26 | 2004-09-09 | Basf Ag | Enzymatische Herstellung von (Meth)acrylsäureestern |
| KR20060066932A (ko) | 2004-12-14 | 2006-06-19 | 주식회사 하이닉스반도체 | 포토레지스트 중합체 및 이를 함유하는 포토레지스트 조성물 |
| CN102585069B (zh) * | 2006-06-26 | 2014-10-22 | Lg化学株式会社 | 制备降冰片烯单体组合物的方法、由其制备的降冰片烯聚合物、包含该降冰片烯聚合物的光学膜以及制备该降冰片烯聚合物的方法 |
| JP4554665B2 (ja) * | 2006-12-25 | 2010-09-29 | 富士フイルム株式会社 | パターン形成方法、該パターン形成方法に用いられる多重現像用ポジ型レジスト組成物、該パターン形成方法に用いられるネガ現像用現像液及び該パターン形成方法に用いられるネガ現像用リンス液 |
| US8637229B2 (en) * | 2006-12-25 | 2014-01-28 | Fujifilm Corporation | Pattern forming method, resist composition for multiple development used in the pattern forming method, developer for negative development used in the pattern forming method, and rinsing solution for negative development used in the pattern forming method |
| US8530148B2 (en) * | 2006-12-25 | 2013-09-10 | Fujifilm Corporation | Pattern forming method, resist composition for multiple development used in the pattern forming method, developer for negative development used in the pattern forming method, and rinsing solution for negative development used in the pattern forming method |
| JP5011018B2 (ja) | 2007-04-13 | 2012-08-29 | 富士フイルム株式会社 | パターン形成方法 |
| US8034547B2 (en) | 2007-04-13 | 2011-10-11 | Fujifilm Corporation | Pattern forming method, resist composition to be used in the pattern forming method, negative developing solution to be used in the pattern forming method and rinsing solution for negative development to be used in the pattern forming method |
| KR20090059650A (ko) | 2007-12-07 | 2009-06-11 | 삼성전자주식회사 | 이머전 리소그래피용 포토레지스트 조성물 및 이를 이용한포토레지스트 패턴의 형성 방법 |
| JP5270188B2 (ja) * | 2008-02-22 | 2013-08-21 | 株式会社クラレ | 新規なアクリル酸エステル誘導体、高分子化合物 |
| JP5775701B2 (ja) * | 2010-02-26 | 2015-09-09 | 富士フイルム株式会社 | パターン形成方法及びレジスト組成物 |
| EP2428843A1 (en) | 2010-09-10 | 2012-03-14 | Rohm and Haas Electronic Materials LLC | Photoresist compositions and methods of forming photolithographic patterns |
-
2011
- 2011-12-23 EP EP11195238A patent/EP2472325A1/en not_active Withdrawn
- 2011-12-28 IL IL217246A patent/IL217246A0/en unknown
- 2011-12-28 IL IL217245A patent/IL217245A0/en unknown
- 2011-12-29 TW TW100149504A patent/TWI428355B/zh not_active IP Right Cessation
- 2011-12-31 US US13/341,939 patent/US9298093B2/en not_active Expired - Fee Related
- 2011-12-31 CN CN201110463318.XA patent/CN102617790B/zh not_active Expired - Fee Related
-
2012
- 2012-01-02 KR KR1020120000210A patent/KR101904090B1/ko not_active Expired - Fee Related
- 2012-01-04 JP JP2012000213A patent/JP6130099B2/ja active Active
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