JP2012134533A - ウエハ形物品を輸送するための装置 - Google Patents
ウエハ形物品を輸送するための装置 Download PDFInfo
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- JP2012134533A JP2012134533A JP2012043009A JP2012043009A JP2012134533A JP 2012134533 A JP2012134533 A JP 2012134533A JP 2012043009 A JP2012043009 A JP 2012043009A JP 2012043009 A JP2012043009 A JP 2012043009A JP 2012134533 A JP2012134533 A JP 2012134533A
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
- H01L21/67161—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the layout of the process chambers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
- H01L21/67161—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the layout of the process chambers
- H01L21/67173—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the layout of the process chambers in-line arrangement
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
- H01L21/67742—Mechanical parts of transfer devices
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
- H01L21/67745—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber characterized by movements or sequence of movements of transfer devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67796—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations with angular orientation of workpieces
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S414/00—Material or article handling
- Y10S414/135—Associated with semiconductor wafer handling
- Y10S414/141—Associated with semiconductor wafer handling includes means for gripping wafer
Abstract
【解決手段】少なくとも2個の処理ユニットの複数の少なくとも1個の直線状に配列されたアレイを備え、各処理ユニットにおいて1個の枚葉ウエハ形物品を処理でき、更に、かかる各処理ユニットにおいて1個の枚葉ウエハ形物品を処理し得る処理ユニット、少なくとも1個の枚葉ウエハ形物品を内部に貯蔵する少なくとも1個のカセットを保持するためのカセット保持ユニット15、及びカセットからウエハ形物品を取り上げてこれを処理ユニットの一つの中に置くための輸送システムを備えたウエハ形物品の処理用の装置で、直線状トラック上に取り付けられた輸送ユニット44、46は、枚葉ウエハ形物品を、直線状トラック24、26と平行な実質的に垂直な平面内に保持する。
【選択図】図1
Description
径よりかなり小さく選定し得ることである。例えば、300mmウエハの輸送のためには少なくも320mmの通路幅が必要であるが、本発明の輸送システムでは輸送路の幅を約60mmに減らすことができる。約5mの機械長の場合、1輸送路について占有面積を約1.2m2 節約することができる。かかる機械が2個又は3個の平行な輸送路を持つならば、2.4又は3.6m2 節約することができる。
ン処理ユニット、スピンコーター、熱処理ユニット又はその他の適宜の枚葉式ウエハ処理ユニットから選ぶことができる。前記複数の処理ユニット31−38のアレイが配列されたラインは、前面5に対して実質的に直角である。この前面5には、内部に少なくも1個のウエハ形物品を貯蔵している少なくも1個のカセットを保持するための2個のカセット保持ユニット15がある。この場合は、各カセット保持ユニット15は前面開口型統一ポート(front opening unified port,FOUP)である。
、22が配置される。左の直線状トラック26は左の移送ステーション22と組み合わせられ、右の直線状トラック24は右の移送ステーション20と組み合わせられる。各移送ステーション20、22は、対応したウエハ輸送ユニット44、46が移送ステーションからウエハを取り上げ及びここにウエハを置くように配列される。単純化のため、移送ステーションは、処理ユニットのそれぞれのアレイと一列に配置される。従って、各移送ステーションを、それぞれの保持器具に対して容易にアクセスさせることができる。
Claims (8)
- ウエハ形物品を処理するための装置(1)であって、
1.1 複数の少なくとも2個の処理ユニット(31、33)の直線状に配列されたアレイであって、かかる各処理ユニットにおいて1個の単一ウエハ形物品(Wm)を処理することができ、該少なくとも2個の処理ユニット(31、33)がウエハ形物品を略水平状態に保持するための保持手段を備えているアレイ、
1.2 少なくとも1個のウエハ形物品を内部に貯蔵している少なくとも1個のカセットを保持するためのカセット保持ユニット(15)、
1.3 カセットからウエハ形物品を取り上げてこれを処理ユニットの一つの中に置くための輸送システム、を備え、輸送システムが、
1.4.1 少なくとも1個の枚葉ウエハ形物品を、複数の処理ユニットのアレイと平行な直線状経路に沿って動かすために、複数の処理ユニット(31、33)のアレイと平行に配列された少なくとも1個の直線状トラック(26)、
1.4.2 前記少なくとも1個の直線状トラック(26)の各々に可動に取り付けられた輸送ユニット(46)であって、枚葉ウエハ形物品を、直線状トラックと平行に垂直な面内に保持するための少なくとも1個の保持手段(46a)を備えた輸送ユニット、を具備し、
輸送ユニット(46)は、ウエハ形物品を、直線状トラックに沿って動かすために、実質的に垂直な状態から、処理ユニット上の実質的に水平な状態に旋回させる(P)ための旋回機構(66)を有し、該ウエハ形物品の垂直な状態が、直線状トラックに平行な実質的に垂直な面内にあることを特徴とする、ウエハ形物品を処理するための装置。 - 複数のウエハ形物品を貯蔵しているカセットを保持するための少なくとも2個のカセット保持ユニット(15)のアレイが配列された前面ユニット、及びカセットと少なくも1個の直線状トラック(26)の輸送ユニット(46)との間でウエハ形物品を移送するための移送ユニット(84、86)を備えた請求項1に記載の装置。
- ウエハ物品(Wt)を一時的に貯蔵するための少なくとも1個の移送ステーション(22)を備え、移送ステーションは直線状トラック上に移動可能に取り付けられた移送ユニット(84、86)によるアクセスが可能である請求項1に記載の装置。
- 前記移送ステーション(22)が、ウエハ形物品を表裏反転(Fv)させるための反転機構を備える請求項1に記載の装置。
- 前記移送ステーションが、背中合わせ構成に配列された2個の保持器具(42a、42b)を有する保持ユニット(42)を備えている請求項4に記載の装置。
- 前記輸送ユニット(46)が、ウエハ形物品と2個の保持器具(46a、46b)とを反転させるための反転機構を備えている請求項1に記載の装置。
- 2個の保持器具(46a、46b)が、背中合わせ構成に配列される請求項6に記載の装置。
- 輸送システムが、前記少なくとも1個の直線状トラック(24、26)の少なくとも2つを備えている請求項1に記載の装置。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
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ATA1565/2002 | 2002-10-16 | ||
AT15652002 | 2002-10-16 |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2004544119A Division JP4986399B2 (ja) | 2002-10-16 | 2003-10-09 | ウエハ形物品を輸送するための装置及び方法 |
Publications (2)
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JP2012134533A true JP2012134533A (ja) | 2012-07-12 |
JP5367105B2 JP5367105B2 (ja) | 2013-12-11 |
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JP2004544119A Expired - Fee Related JP4986399B2 (ja) | 2002-10-16 | 2003-10-09 | ウエハ形物品を輸送するための装置及び方法 |
JP2012043009A Expired - Lifetime JP5367105B2 (ja) | 2002-10-16 | 2012-02-29 | ウエハ形物品を輸送するための装置 |
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JP2004544119A Expired - Fee Related JP4986399B2 (ja) | 2002-10-16 | 2003-10-09 | ウエハ形物品を輸送するための装置及び方法 |
Country Status (10)
Country | Link |
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US (1) | US7270510B2 (ja) |
EP (1) | EP1554748B1 (ja) |
JP (2) | JP4986399B2 (ja) |
KR (2) | KR101028782B1 (ja) |
CN (1) | CN100369185C (ja) |
AT (1) | ATE419645T1 (ja) |
AU (1) | AU2003294674A1 (ja) |
DE (1) | DE60325626D1 (ja) |
TW (1) | TWI262165B (ja) |
WO (1) | WO2004036628A2 (ja) |
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2003
- 2003-09-25 TW TW092126529A patent/TWI262165B/zh active
- 2003-10-09 CN CNB2003801015288A patent/CN100369185C/zh not_active Expired - Lifetime
- 2003-10-09 KR KR1020057006545A patent/KR101028782B1/ko active IP Right Grant
- 2003-10-09 AT AT03785610T patent/ATE419645T1/de active
- 2003-10-09 AU AU2003294674A patent/AU2003294674A1/en not_active Abandoned
- 2003-10-09 DE DE60325626T patent/DE60325626D1/de not_active Expired - Lifetime
- 2003-10-09 US US10/531,419 patent/US7270510B2/en not_active Expired - Lifetime
- 2003-10-09 EP EP03785610A patent/EP1554748B1/en not_active Expired - Lifetime
- 2003-10-09 WO PCT/EP2003/011178 patent/WO2004036628A2/en active Application Filing
- 2003-10-09 KR KR1020107029022A patent/KR101276785B1/ko active IP Right Grant
- 2003-10-09 JP JP2004544119A patent/JP4986399B2/ja not_active Expired - Fee Related
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2012
- 2012-02-29 JP JP2012043009A patent/JP5367105B2/ja not_active Expired - Lifetime
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ATE419645T1 (de) | 2009-01-15 |
TWI262165B (en) | 2006-09-21 |
KR20050052539A (ko) | 2005-06-02 |
JP4986399B2 (ja) | 2012-07-25 |
WO2004036628A3 (en) | 2004-07-01 |
CN1706024A (zh) | 2005-12-07 |
AU2003294674A1 (en) | 2004-05-04 |
US20060008342A1 (en) | 2006-01-12 |
JP5367105B2 (ja) | 2013-12-11 |
KR101276785B1 (ko) | 2013-06-24 |
KR101028782B1 (ko) | 2011-04-14 |
EP1554748A2 (en) | 2005-07-20 |
DE60325626D1 (de) | 2009-02-12 |
KR20110014663A (ko) | 2011-02-11 |
JP2006503428A (ja) | 2006-01-26 |
CN100369185C (zh) | 2008-02-13 |
EP1554748B1 (en) | 2008-12-31 |
TW200416188A (en) | 2004-09-01 |
WO2004036628A2 (en) | 2004-04-29 |
US7270510B2 (en) | 2007-09-18 |
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