JP2012092014A - 高熱伝導性窒化アルミニウム焼結体 - Google Patents
高熱伝導性窒化アルミニウム焼結体 Download PDFInfo
- Publication number
- JP2012092014A JP2012092014A JP2012008011A JP2012008011A JP2012092014A JP 2012092014 A JP2012092014 A JP 2012092014A JP 2012008011 A JP2012008011 A JP 2012008011A JP 2012008011 A JP2012008011 A JP 2012008011A JP 2012092014 A JP2012092014 A JP 2012092014A
- Authority
- JP
- Japan
- Prior art keywords
- aluminum nitride
- sintered body
- thermal conductivity
- sintering
- grain boundary
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/622—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/626—Preparing or treating the powders individually or as batches ; preparing or treating macroscopic reinforcing agents for ceramic products, e.g. fibres; mechanical aspects section B
- C04B35/63—Preparing or treating the powders individually or as batches ; preparing or treating macroscopic reinforcing agents for ceramic products, e.g. fibres; mechanical aspects section B using additives specially adapted for forming the products, e.g.. binder binders
- C04B35/638—Removal thereof
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
- C04B35/58—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides
- C04B35/581—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on aluminium nitride
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/622—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/626—Preparing or treating the powders individually or as batches ; preparing or treating macroscopic reinforcing agents for ceramic products, e.g. fibres; mechanical aspects section B
- C04B35/62605—Treating the starting powders individually or as mixtures
- C04B35/62645—Thermal treatment of powders or mixtures thereof other than sintering
- C04B35/62675—Thermal treatment of powders or mixtures thereof other than sintering characterised by the treatment temperature
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/622—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/626—Preparing or treating the powders individually or as batches ; preparing or treating macroscopic reinforcing agents for ceramic products, e.g. fibres; mechanical aspects section B
- C04B35/63—Preparing or treating the powders individually or as batches ; preparing or treating macroscopic reinforcing agents for ceramic products, e.g. fibres; mechanical aspects section B using additives specially adapted for forming the products, e.g.. binder binders
- C04B35/6303—Inorganic additives
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
- C04B2235/30—Constituents and secondary phases not being of a fibrous nature
- C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
- C04B2235/3217—Aluminum oxide or oxide forming salts thereof, e.g. bauxite, alpha-alumina
- C04B2235/3222—Aluminates other than alumino-silicates, e.g. spinel (MgAl2O4)
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
- C04B2235/30—Constituents and secondary phases not being of a fibrous nature
- C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
- C04B2235/3224—Rare earth oxide or oxide forming salts thereof, e.g. scandium oxide
- C04B2235/3225—Yttrium oxide or oxide-forming salts thereof
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
- C04B2235/50—Constituents or additives of the starting mixture chosen for their shape or used because of their shape or their physical appearance
- C04B2235/54—Particle size related information
- C04B2235/5418—Particle size related information expressed by the size of the particles or aggregates thereof
- C04B2235/5436—Particle size related information expressed by the size of the particles or aggregates thereof micrometer sized, i.e. from 1 to 100 micron
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/60—Aspects relating to the preparation, properties or mechanical treatment of green bodies or pre-forms
- C04B2235/602—Making the green bodies or pre-forms by moulding
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/60—Aspects relating to the preparation, properties or mechanical treatment of green bodies or pre-forms
- C04B2235/602—Making the green bodies or pre-forms by moulding
- C04B2235/6025—Tape casting, e.g. with a doctor blade
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/65—Aspects relating to heat treatments of ceramic bodies such as green ceramics or pre-sintered ceramics, e.g. burning, sintering or melting processes
- C04B2235/652—Reduction treatment
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/65—Aspects relating to heat treatments of ceramic bodies such as green ceramics or pre-sintered ceramics, e.g. burning, sintering or melting processes
- C04B2235/656—Aspects relating to heat treatments of ceramic bodies such as green ceramics or pre-sintered ceramics, e.g. burning, sintering or melting processes characterised by specific heating conditions during heat treatment
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/65—Aspects relating to heat treatments of ceramic bodies such as green ceramics or pre-sintered ceramics, e.g. burning, sintering or melting processes
- C04B2235/656—Aspects relating to heat treatments of ceramic bodies such as green ceramics or pre-sintered ceramics, e.g. burning, sintering or melting processes characterised by specific heating conditions during heat treatment
- C04B2235/6565—Cooling rate
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/65—Aspects relating to heat treatments of ceramic bodies such as green ceramics or pre-sintered ceramics, e.g. burning, sintering or melting processes
- C04B2235/656—Aspects relating to heat treatments of ceramic bodies such as green ceramics or pre-sintered ceramics, e.g. burning, sintering or melting processes characterised by specific heating conditions during heat treatment
- C04B2235/6567—Treatment time
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/70—Aspects relating to sintered or melt-casted ceramic products
- C04B2235/72—Products characterised by the absence or the low content of specific components, e.g. alkali metal free alumina ceramics
- C04B2235/721—Carbon content
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/70—Aspects relating to sintered or melt-casted ceramic products
- C04B2235/72—Products characterised by the absence or the low content of specific components, e.g. alkali metal free alumina ceramics
- C04B2235/723—Oxygen content
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/70—Aspects relating to sintered or melt-casted ceramic products
- C04B2235/74—Physical characteristics
- C04B2235/78—Grain sizes and shapes, product microstructures, e.g. acicular grains, equiaxed grains, platelet-structures
- C04B2235/786—Micrometer sized grains, i.e. from 1 to 100 micron
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/70—Aspects relating to sintered or melt-casted ceramic products
- C04B2235/80—Phases present in the sintered or melt-cast ceramic products other than the main phase
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/70—Aspects relating to sintered or melt-casted ceramic products
- C04B2235/80—Phases present in the sintered or melt-cast ceramic products other than the main phase
- C04B2235/85—Intergranular or grain boundary phases
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/70—Aspects relating to sintered or melt-casted ceramic products
- C04B2235/96—Properties of ceramic products, e.g. mechanical properties such as strength, toughness, wear resistance
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/70—Aspects relating to sintered or melt-casted ceramic products
- C04B2235/96—Properties of ceramic products, e.g. mechanical properties such as strength, toughness, wear resistance
- C04B2235/9607—Thermal properties, e.g. thermal expansion coefficient
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/26—Web or sheet containing structurally defined element or component, the element or component having a specified physical dimension
- Y10T428/268—Monolayer with structurally defined element
Abstract
【解決手段】Y元素を0.14〜1.5質量%含有し、窒化アルミニウム(101面)のX線回折強度IAlNに対するAl2Y4O9(201面)のX線回折強度IAl2Y4O9の比(IAl2Y4O9/IAlN)が0.002〜0.06であり、且つY2O3(222面)のX線回折強度IY2O3の窒化アルミニウム(101面)のX線回折強度IAlNに対する比(IY2O3/IAlN)が0.008〜0.06であり、熱伝導率が240W/m・K以上、三点曲げ強度が200MPa以上であることを特徴とする高熱伝導性窒化アルミニウム焼結体である。
【選択図】 なし
Description
上記脱脂処理後において、すなわち本焼結前の段階において、成形体に残留する炭素量が0.3〜0.6質量%の範囲になるように制御することが重要である。
なお、上記脱脂処理した成形体に残存する炭素量は、炭素分析装置(EMIA−521、堀場製作所製)を用いて測定した。
[実施例1〜12]
[実施例13〜19]
[比較例1]
一方、脱酸熱処理を実施しない点以外は実施例1と同一条件で成形・脱脂・焼結処理して同一寸法を有する比較例1に係るAlN焼結体を調製した。
[比較例2]
[比較例3]
[比較例4〜8]
[比較例9]
各実施例および比較例に係る焼結体中のY2O3の含有量は、表1に示すように原料粉末へのY2O3の添加量より若干減少することが確認された。
Claims (2)
- Y元素を0.14〜1.5質量%含有し、窒化アルミニウム(101面)のX線回折強度IAlNに対するAl2Y4O9(201面)のX線回折強度IAl2Y4O9の比(IAl2Y4O9/IAlN)が0.002〜0.06であり、且つY2O3(222面)のX線回折強度IY2O3の窒化アルミニウム(101面)のX線回折強度IAlNに対する比(IY2O3/IAlN)が0.008〜0.06であり、熱伝導率が240W/m・K以上、三点曲げ強度が200MPa以上であることを特徴とする高熱伝導性窒化アルミニウム焼結体。
- Y元素を0.14〜1.5質量%、酸素を0.05〜0.5質量%含有し、酸素とY元素との質量比率(O/Y)が0.5以下であり、窒化アルミニウム結晶粒子の平均径が6μm以上で、任意の結晶組織面積100μm×100μm当りに存在する結晶粒子数が150個以下であり、粒界相の最大径が0.5μm以下であることを特徴とする請求の範囲第1項記載の高熱伝導性窒化アルミニウム焼結体。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2012008011A JP5444384B2 (ja) | 2003-11-21 | 2012-01-18 | 高熱伝導性窒化アルミニウム焼結体 |
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2003392464 | 2003-11-21 | ||
JP2003392464 | 2003-11-21 | ||
JP2012008011A JP5444384B2 (ja) | 2003-11-21 | 2012-01-18 | 高熱伝導性窒化アルミニウム焼結体 |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2005515694A Division JP5060048B2 (ja) | 2003-11-21 | 2004-11-18 | 高熱伝導性窒化アルミニウム焼結体 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2012092014A true JP2012092014A (ja) | 2012-05-17 |
JP5444384B2 JP5444384B2 (ja) | 2014-03-19 |
Family
ID=34616448
Family Applications (6)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2005515694A Active JP5060048B2 (ja) | 2003-11-21 | 2004-11-18 | 高熱伝導性窒化アルミニウム焼結体 |
JP2006259072A Active JP5060093B2 (ja) | 2003-11-21 | 2006-09-25 | 半導体装置用基板 |
JP2006259071A Active JP5060092B2 (ja) | 2003-11-21 | 2006-09-25 | 半導体装置用放熱板 |
JP2012008011A Active JP5444384B2 (ja) | 2003-11-21 | 2012-01-18 | 高熱伝導性窒化アルミニウム焼結体 |
JP2012009219A Active JP5444386B2 (ja) | 2003-11-21 | 2012-01-19 | 半導体装置用基板 |
JP2012010109A Active JP5444387B2 (ja) | 2003-11-21 | 2012-01-20 | 半導体装置用放熱板 |
Family Applications Before (3)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2005515694A Active JP5060048B2 (ja) | 2003-11-21 | 2004-11-18 | 高熱伝導性窒化アルミニウム焼結体 |
JP2006259072A Active JP5060093B2 (ja) | 2003-11-21 | 2006-09-25 | 半導体装置用基板 |
JP2006259071A Active JP5060092B2 (ja) | 2003-11-21 | 2006-09-25 | 半導体装置用放熱板 |
Family Applications After (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2012009219A Active JP5444386B2 (ja) | 2003-11-21 | 2012-01-19 | 半導体装置用基板 |
JP2012010109A Active JP5444387B2 (ja) | 2003-11-21 | 2012-01-20 | 半導体装置用放熱板 |
Country Status (7)
Country | Link |
---|---|
US (2) | US7479467B2 (ja) |
EP (2) | EP1695948A4 (ja) |
JP (6) | JP5060048B2 (ja) |
KR (1) | KR100819414B1 (ja) |
CN (1) | CN100519480C (ja) |
TW (1) | TW200521103A (ja) |
WO (1) | WO2005049525A1 (ja) |
Families Citing this family (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TW200521103A (en) * | 2003-11-21 | 2005-07-01 | Toshiba Kk | High thermally conductive aluminum nitride sintered product |
US7553469B2 (en) * | 2004-03-29 | 2009-06-30 | Denki Kagaku Kogyo Kabushiki Kaisha | Aluminum nitride powder and aluminum nitride sintered compact |
CN101198566A (zh) * | 2005-06-15 | 2008-06-11 | 德山株式会社 | 氮化铝烧结体、浆料、生坯及脱脂体 |
KR101337618B1 (ko) * | 2007-03-07 | 2013-12-06 | 서울바이오시스 주식회사 | 발광 다이오드 및 그 제조 방법 |
JP5283420B2 (ja) * | 2008-04-04 | 2013-09-04 | 株式会社トクヤマ | 窒化アルミニウム焼結体及びその製造方法 |
JP5248381B2 (ja) * | 2009-03-18 | 2013-07-31 | 株式会社東芝 | 窒化アルミニウム基板およびその製造方法並びに回路基板、半導体装置 |
WO2010109960A1 (ja) * | 2009-03-26 | 2010-09-30 | 株式会社東芝 | 窒化アルミニウム基板、窒化アルミニウム回路基板、半導体装置および窒化アルミニウム基板の製造方法 |
JP5611554B2 (ja) * | 2009-08-18 | 2014-10-22 | 株式会社東芝 | 高熱伝導性窒化アルミニウム焼結体、これを用いた基板、回路基板、および半導体装置、ならびに高熱伝導性窒化アルミニウム焼結体の製造方法 |
US8580593B2 (en) * | 2009-09-10 | 2013-11-12 | Micron Technology, Inc. | Epitaxial formation structures and associated methods of manufacturing solid state lighting devices |
JP2017193479A (ja) * | 2016-04-13 | 2017-10-26 | 昭和電工株式会社 | 窒化アルミニウム焼結体の製造方法、並びに窒化アルミニウム焼結体 |
KR102026277B1 (ko) * | 2019-01-22 | 2019-09-27 | 강릉원주대학교산학협력단 | 질화알루미늄 판재의 제조방법 |
JP7043689B1 (ja) * | 2020-06-22 | 2022-03-29 | デンカ株式会社 | 窒化アルミニウム焼結体、及び基板 |
CN112113449B (zh) * | 2020-09-04 | 2022-05-20 | Oppo广东移动通信有限公司 | 均热板、均热板的制作方法、电子器件和电子装置 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH05105525A (ja) * | 1991-10-14 | 1993-04-27 | Denki Kagaku Kogyo Kk | 高熱伝導性窒化アルミニウム焼結体の製造方法 |
JPH0881263A (ja) * | 1994-09-16 | 1996-03-26 | Toshiba Corp | 窒化アルミニウム焼結体 |
JPH08508461A (ja) * | 1993-03-30 | 1996-09-10 | ザ・ダウ・ケミカル・カンパニー | 高い熱伝導率を示すように窒化アルミニウムの焼結を行う改良方法およびその結果として生じる焼結体 |
JP2001233676A (ja) * | 2000-02-23 | 2001-08-28 | Taiheiyo Cement Corp | プラズマ耐食部材及びその製造方法 |
JP2002201072A (ja) * | 2000-12-27 | 2002-07-16 | Toshiba Corp | AlN焼結体およびこれを用いたAlN回路基板 |
Family Cites Families (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5314850A (en) * | 1985-10-31 | 1994-05-24 | Kyocera Corporation | Aluminum nitride sintered body and production thereof |
JP2856734B2 (ja) * | 1987-01-13 | 1999-02-10 | 株式会社東芝 | 高熱伝導性窒化アルミニウム焼結体 |
JPS6442367A (en) * | 1987-08-07 | 1989-02-14 | Asahi Glass Co Ltd | Aluminum nitride sintered body |
CA2003078A1 (en) * | 1988-11-18 | 1990-05-18 | Alan Sloma | Protease deletion |
JPH0427184A (ja) | 1990-05-22 | 1992-01-30 | Fuji Electric Co Ltd | 半導体レーザ素子 |
JPH0442862A (ja) * | 1990-06-06 | 1992-02-13 | Showa Denko Kk | AlN焼結体の製造方法 |
JP2938153B2 (ja) * | 1990-07-06 | 1999-08-23 | 株式会社東芝 | 窒化アルミニウム焼結体の製造方法 |
JPH05229871A (ja) * | 1992-02-19 | 1993-09-07 | Toshiba Corp | セラミックス焼結体の製造方法 |
JP3472585B2 (ja) | 1992-02-21 | 2003-12-02 | 株式会社東芝 | 窒化アルミニウム焼結体 |
JP3633636B2 (ja) | 1993-02-05 | 2005-03-30 | 住友電気工業株式会社 | 窒化アルミニウム焼結体 |
US5744411A (en) * | 1993-07-12 | 1998-04-28 | The Dow Chemical Company | Aluminum nitride sintered body with high thermal conductivity and its preparation |
US5773377A (en) * | 1993-12-22 | 1998-06-30 | Crystalline Materials Corporation | Low temperature sintered, resistive aluminum nitride ceramics |
JPH1025160A (ja) * | 1996-07-04 | 1998-01-27 | Tokuyama Corp | 窒化アルミニウム焼結体 |
JP2000178072A (ja) | 1998-12-18 | 2000-06-27 | Kyocera Corp | 窒化アルミニウム質焼結体 |
JP2001064079A (ja) * | 1999-08-25 | 2001-03-13 | Sumitomo Electric Ind Ltd | 窒化アルミニウム焼結体及びその製造方法 |
JP2001097779A (ja) * | 1999-09-28 | 2001-04-10 | Toshiba Corp | 窒化アルミニウム基板および同基板を用いた回路基板 |
TWI243158B (en) * | 2000-12-21 | 2005-11-11 | Ngk Insulators Ltd | Aluminum nitride sintered bodies |
JP4970712B2 (ja) * | 2003-06-19 | 2012-07-11 | 日本碍子株式会社 | 窒化アルミニウム焼結体、窒化アルミニウムの製造方法、及び窒化アルミニウムの評価方法 |
TW200521103A (en) * | 2003-11-21 | 2005-07-01 | Toshiba Kk | High thermally conductive aluminum nitride sintered product |
-
2004
- 2004-11-15 TW TW093134979A patent/TW200521103A/zh unknown
- 2004-11-18 KR KR1020067011733A patent/KR100819414B1/ko active IP Right Grant
- 2004-11-18 EP EP04799819A patent/EP1695948A4/en not_active Ceased
- 2004-11-18 JP JP2005515694A patent/JP5060048B2/ja active Active
- 2004-11-18 US US10/579,916 patent/US7479467B2/en active Active
- 2004-11-18 WO PCT/JP2004/017531 patent/WO2005049525A1/ja active Application Filing
- 2004-11-18 CN CNB2004800344140A patent/CN100519480C/zh active Active
- 2004-11-18 EP EP10002627.7A patent/EP2189432B1/en active Active
-
2006
- 2006-09-25 JP JP2006259072A patent/JP5060093B2/ja active Active
- 2006-09-25 JP JP2006259071A patent/JP5060092B2/ja active Active
-
2008
- 2008-11-17 US US12/272,468 patent/US7662736B2/en active Active
-
2012
- 2012-01-18 JP JP2012008011A patent/JP5444384B2/ja active Active
- 2012-01-19 JP JP2012009219A patent/JP5444386B2/ja active Active
- 2012-01-20 JP JP2012010109A patent/JP5444387B2/ja active Active
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH05105525A (ja) * | 1991-10-14 | 1993-04-27 | Denki Kagaku Kogyo Kk | 高熱伝導性窒化アルミニウム焼結体の製造方法 |
JPH08508461A (ja) * | 1993-03-30 | 1996-09-10 | ザ・ダウ・ケミカル・カンパニー | 高い熱伝導率を示すように窒化アルミニウムの焼結を行う改良方法およびその結果として生じる焼結体 |
JPH0881263A (ja) * | 1994-09-16 | 1996-03-26 | Toshiba Corp | 窒化アルミニウム焼結体 |
JP2001233676A (ja) * | 2000-02-23 | 2001-08-28 | Taiheiyo Cement Corp | プラズマ耐食部材及びその製造方法 |
JP2002201072A (ja) * | 2000-12-27 | 2002-07-16 | Toshiba Corp | AlN焼結体およびこれを用いたAlN回路基板 |
Also Published As
Publication number | Publication date |
---|---|
JP5060048B2 (ja) | 2012-10-31 |
CN1882517A (zh) | 2006-12-20 |
CN100519480C (zh) | 2009-07-29 |
JP2007019544A (ja) | 2007-01-25 |
JP5444386B2 (ja) | 2014-03-19 |
EP1695948A1 (en) | 2006-08-30 |
JP5444384B2 (ja) | 2014-03-19 |
KR20060120200A (ko) | 2006-11-24 |
US20090075071A1 (en) | 2009-03-19 |
KR100819414B1 (ko) | 2008-04-08 |
EP2189432A3 (en) | 2012-05-30 |
JP2012116750A (ja) | 2012-06-21 |
EP1695948A4 (en) | 2009-04-29 |
JP5060092B2 (ja) | 2012-10-31 |
JP2012092015A (ja) | 2012-05-17 |
TWI326676B (ja) | 2010-07-01 |
TW200521103A (en) | 2005-07-01 |
WO2005049525A1 (ja) | 2005-06-02 |
US7479467B2 (en) | 2009-01-20 |
EP2189432A2 (en) | 2010-05-26 |
US20070161495A1 (en) | 2007-07-12 |
JP5444387B2 (ja) | 2014-03-19 |
JP5060093B2 (ja) | 2012-10-31 |
JP2007063122A (ja) | 2007-03-15 |
EP2189432B1 (en) | 2018-05-23 |
JPWO2005049525A1 (ja) | 2007-06-07 |
US7662736B2 (en) | 2010-02-16 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP5444384B2 (ja) | 高熱伝導性窒化アルミニウム焼結体 | |
JP6822362B2 (ja) | 窒化珪素基板の製造方法、及び窒化珪素基板 | |
KR0168303B1 (ko) | 질화 알루미늄 소결체 및 그의 제조방법 | |
JP5836522B2 (ja) | 窒化ケイ素基板の製造方法 | |
JP2000034172A (ja) | 高熱伝導性窒化けい素焼結体およびその製造方法 | |
KR960016070B1 (ko) | 질화알루미늄 소결체 및 그 제조방법 | |
JP3472585B2 (ja) | 窒化アルミニウム焼結体 | |
JPH07172921A (ja) | 窒化アルミニウム焼結体およびその製造方法 | |
JP4564257B2 (ja) | 高熱伝導性窒化アルミニウム焼結体 | |
JP3742661B2 (ja) | 窒化アルミニウム焼結体およびその製造方法 | |
JP2001354479A (ja) | 窒化アルミニウム焼結体およびその製造方法 | |
JP4301617B2 (ja) | Dbc回路基板用窒化アルミニウム焼結体の製造方法およびdbc回路基板の製造方法 | |
JP4702978B2 (ja) | 窒化アルミニウム焼結体 | |
JP3141505B2 (ja) | 窒化アルミニウム焼結体およびその製造方法 | |
JP2003201179A (ja) | 窒化アルミニウム焼結体およびその製造方法 | |
JP3929335B2 (ja) | 窒化アルミニウム焼結体およびその製造方法 | |
JPH08157262A (ja) | 窒化アルミニウム焼結体およびその製造方法 | |
JP2009179557A (ja) | 高熱伝導性窒化けい素焼結体の製造方法 | |
JP2000302556A (ja) | 窒化アルミニウム焼結体およびその製造方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20130716 |
|
A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20130909 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20131126 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20131220 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 5444384 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 Free format text: JAPANESE INTERMEDIATE CODE: R150 |