JP2012059819A - 基板搬送方法及び記憶媒体 - Google Patents
基板搬送方法及び記憶媒体 Download PDFInfo
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- JP2012059819A JP2012059819A JP2010199892A JP2010199892A JP2012059819A JP 2012059819 A JP2012059819 A JP 2012059819A JP 2010199892 A JP2010199892 A JP 2010199892A JP 2010199892 A JP2010199892 A JP 2010199892A JP 2012059819 A JP2012059819 A JP 2012059819A
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
- H01L21/67748—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber horizontal transfer of a single workpiece
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67126—Apparatus for sealing, encapsulating, glassing, decapsulating or the like
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
- H01L21/67742—Mechanical parts of transfer devices
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- Drying Of Semiconductors (AREA)
Abstract
【解決手段】基板処理システム10は、内部空間S1を有するプロセスモジュール12〜17と、該プロセスモジュール12〜17に接続され且つ内部空間S2を有するトランスファモジュール11と、内部空間S1及び内部空間S2を仕切る開閉自在なゲートバルブ30とを備え、トランスファモジュール11は、ウエハWを把持してプロセスモジュール12〜17に対するウエハWの搬出入を行う搬送アーム機構21を内部空間S2に有し、ゲートバルブ30の開弁動作中において、搬送アーム機構21は把持するウエハWをゲートバルブ30と対向する対向位置から退避させる。
【選択図】図3
Description
S1,S2,S5,S6 内部空間
W ウエハ
10,34 基板処理システム
11,37 トランスファモジュール
12〜17,36 プロセスモジュール
21,39 搬送アーム機構
30,43 ゲートバルブ
Claims (8)
- 第1の内部空間を有する基板処理装置と、該基板処理装置に接続され且つ第2の内部空間を有する基板搬送装置と、前記第1の内部空間及び前記第2の内部空間を仕切る開閉自在な仕切り弁とを備え、前記基板搬送装置は、前記基板を把持して前記基板処理装置に対する前記基板の搬出入を行う基板搬送機構を前記第2の内部空間に有する基板処理システムにおける基板搬送方法であって、
少なくとも前記仕切り弁の開弁動作中において、前記基板搬送機構は前記把持する基板を前記仕切り弁と対向する対向位置から退避させることを特徴とする基板搬送方法。 - 前記基板搬送機構は回転することにより、前記把持する基板を前記対向位置から円運動させて到達可能な退避位置へ退避させることを特徴とする請求項1記載の基板搬送方法。
- 前記退避位置は、前記対向位置から絶対値で90°以上の回転角の円運動によって到達する位置であることを特徴とする請求項2記載の基板搬送方法。
- 前記基板搬送機構は複数の前記基板を把持し、少なくとも前記仕切り弁の開弁動作中において、前記基板搬送機構は前記把持する複数の基板を前記仕切り弁と対向させないことを特徴とする請求項3記載の基板搬送方法。
- 前記基板搬送機構は、前記仕切り弁の開弁動作後に前記退避させた基板を前記対向位置へ移動させることを特徴とする請求項1乃至4のいずれか1項に記載の基板搬送方法。
- 前記第1の内部空間において実行される処理に応じて前記基板を前記対向位置から退避させる時間を変更することを特徴とする請求項1乃至5のいずれか1項に記載の基板搬送方法。
- 前記第1の内部空間において前記第1の内部空間に配される構成部品の洗浄処理が実行される場合における前記基板を前記対向位置から退避させる時間を、前記第1の内部空間において他の前記基板に処理を施す場合における前記基板を前記対向位置から退避させる時間よりも長くすることを特徴とする請求項6記載の基板搬送方法。
- 第1の内部空間を有する基板処理装置と、該基板処理装置に接続され且つ第2の内部空間を有する基板搬送装置と、前記第1の内部空間及び前記第2の内部空間を仕切る開閉自在な仕切り弁とを備え、前記基板搬送装置は、前記基板を把持して前記基板処理装置に対する前記基板の搬出入を行う基板搬送機構を前記第2の内部空間に有する基板処理システムにおける基板搬送方法をコンピュータに実行させるプログラムを格納するコンピュータで読み取り可能な記憶媒体であって、前記基板搬送方法は、
少なくとも前記仕切り弁の開弁動作中において、前記基板搬送機構は前記把持する基板を前記仕切り弁と対向する対向位置から退避させることを特徴とする記憶媒体。
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JP2010199892A JP5654807B2 (ja) | 2010-09-07 | 2010-09-07 | 基板搬送方法及び記憶媒体 |
US13/225,672 US9002494B2 (en) | 2010-09-07 | 2011-09-06 | Substrate transfer method and storage medium |
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JP2010199892A JP5654807B2 (ja) | 2010-09-07 | 2010-09-07 | 基板搬送方法及び記憶媒体 |
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Families Citing this family (4)
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JP4925650B2 (ja) * | 2005-11-28 | 2012-05-09 | 東京エレクトロン株式会社 | 基板処理装置 |
US9356822B2 (en) * | 2012-10-30 | 2016-05-31 | Kla-Tencor Corporation | Automated interface apparatus and method for use in semiconductor wafer handling systems |
TWI734305B (zh) * | 2018-12-18 | 2021-07-21 | 美商因特瓦克公司 | 用於沉積薄膜的複合系統架構 |
US11694913B2 (en) | 2018-12-18 | 2023-07-04 | Intevac, Inc. | Hybrid system architecture for thin film deposition |
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JPH1050623A (ja) * | 1996-08-06 | 1998-02-20 | Nippon Steel Corp | 化学気相成長装置 |
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US9002494B2 (en) | 2015-04-07 |
US20120059502A1 (en) | 2012-03-08 |
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