DE68926577T2 - Einrichtung zur Molekularstrahlepitaxie - Google Patents
Einrichtung zur MolekularstrahlepitaxieInfo
- Publication number
- DE68926577T2 DE68926577T2 DE68926577T DE68926577T DE68926577T2 DE 68926577 T2 DE68926577 T2 DE 68926577T2 DE 68926577 T DE68926577 T DE 68926577T DE 68926577 T DE68926577 T DE 68926577T DE 68926577 T2 DE68926577 T2 DE 68926577T2
- Authority
- DE
- Germany
- Prior art keywords
- molecular beam
- beam epitaxy
- epitaxy
- molecular
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
- H01L21/67748—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber horizontal transfer of a single workpiece
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/564—Means for minimising impurities in the coating chamber such as dust, moisture, residual gases
- C23C14/566—Means for minimising impurities in the coating chamber such as dust, moisture, residual gases using a load-lock chamber
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B23/00—Single-crystal growth by condensing evaporated or sublimed materials
- C30B23/02—Epitaxial-layer growth
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67063—Apparatus for fluid treatment for etching
- H01L21/67069—Apparatus for fluid treatment for etching for drying etching
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67126—Apparatus for sealing, encapsulating, glassing, decapsulating or the like
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
- H01L21/67751—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber vertical transfer of a single workpiece
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP63077798A JPH01249692A (ja) | 1988-03-30 | 1988-03-30 | 分子線エピタキシー装置 |
JP1988042830U JPH0527501Y2 (de) | 1988-03-30 | 1988-03-30 | |
JP63087918A JPH01261296A (ja) | 1988-04-08 | 1988-04-08 | 分子線エピタキシー装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE68926577D1 DE68926577D1 (de) | 1996-07-04 |
DE68926577T2 true DE68926577T2 (de) | 1996-10-02 |
Family
ID=27291358
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE68916457T Expired - Lifetime DE68916457T2 (de) | 1988-03-30 | 1989-03-23 | Einrichtung zur Molekularstrahlepitaxie. |
DE68926577T Expired - Fee Related DE68926577T2 (de) | 1988-03-30 | 1989-03-23 | Einrichtung zur Molekularstrahlepitaxie |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE68916457T Expired - Lifetime DE68916457T2 (de) | 1988-03-30 | 1989-03-23 | Einrichtung zur Molekularstrahlepitaxie. |
Country Status (6)
Country | Link |
---|---|
US (1) | US4944246A (de) |
EP (2) | EP0335267B1 (de) |
KR (2) | KR930010750B1 (de) |
CA (1) | CA1333038C (de) |
DE (2) | DE68916457T2 (de) |
TW (1) | TW202485B (de) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102010016792A1 (de) * | 2010-05-05 | 2011-11-10 | Aixtron Ag | Bevorratungsmagazin einer CVD-Anlage |
Families Citing this family (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2678775B1 (fr) * | 1991-07-05 | 1997-02-28 | Thomson Csf | Procede de realisation d'un dispositif optoelectronique |
US5379719A (en) * | 1993-07-26 | 1995-01-10 | Sandia National Laboratories | Method of deposition by molecular beam epitaxy |
GB9405442D0 (en) * | 1994-03-19 | 1994-05-04 | Applied Vision Ltd | Apparatus for coating substrates |
GB0008286D0 (en) * | 2000-04-04 | 2000-05-24 | Applied Materials Inc | A vaporiser for generating feed gas for an arc chamber |
US7622322B2 (en) * | 2001-03-23 | 2009-11-24 | Cornell Research Foundation, Inc. | Method of forming an AlN coated heterojunction field effect transistor |
DE10261362B8 (de) * | 2002-12-30 | 2008-08-28 | Osram Opto Semiconductors Gmbh | Substrat-Halter |
US7767480B1 (en) * | 2004-02-26 | 2010-08-03 | Opticomp Corporation | Method for semiconductor compositional grading to realize low-resistance, distributed Bragg reflectors |
DE212007000078U1 (de) | 2006-10-31 | 2009-06-25 | "Nauchnoe I Tekhnologicheskoe Oborudovanie" Limited | Züchtungsmanipulator |
WO2008054239A1 (fr) * | 2006-10-31 | 2008-05-08 | 'nauchnoe I Tekhnologicheskoe Oborudovanie' Limited | Manipulateur de croissance pour chambre à vide destiné à la croissance d'hétérostructures semi-conductrices |
US20100282167A1 (en) * | 2008-12-18 | 2010-11-11 | Veeco Instruments Inc. | Linear Deposition Source |
WO2011065999A1 (en) * | 2008-12-18 | 2011-06-03 | Veeco Instruments Inc. | Linear deposition source |
US20100159132A1 (en) * | 2008-12-18 | 2010-06-24 | Veeco Instruments, Inc. | Linear Deposition Source |
US10026436B2 (en) * | 2009-07-01 | 2018-07-17 | Nordson Corporation | Apparatus and methods for supporting workpieces during plasma processing |
JP5654807B2 (ja) * | 2010-09-07 | 2015-01-14 | 東京エレクトロン株式会社 | 基板搬送方法及び記憶媒体 |
FR3025220B1 (fr) * | 2014-09-03 | 2016-09-09 | Riber | Dispositif sous vide pour le traitement ou l'analyse d'un echantillon |
FR3025219B1 (fr) * | 2014-09-03 | 2016-12-02 | Riber | Dispositif sous vide pour le traitement ou l'analyse d'un echantillon |
CN106637416B (zh) * | 2016-12-28 | 2018-11-20 | 厦门大学 | 矢量强磁场下分子束外延及其原位表征装置 |
Family Cites Families (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3839084A (en) * | 1972-11-29 | 1974-10-01 | Bell Telephone Labor Inc | Molecular beam epitaxy method for fabricating magnesium doped thin films of group iii(a)-v(a) compounds |
US4171234A (en) * | 1976-07-20 | 1979-10-16 | Matsushita Electric Industrial Co., Ltd. | Method of fabricating three-dimensional epitaxial layers utilizing molecular beams of varied angles |
GB2010335A (en) * | 1977-11-29 | 1979-06-27 | Dobson C | Improvements Relating to Vacuum Deposition Chamber |
FR2502643B1 (fr) * | 1981-03-27 | 1986-05-02 | Western Electric Co | Appareil et procede de depot par jet moleculaire sur plusieurs substrats |
US4681773A (en) * | 1981-03-27 | 1987-07-21 | American Telephone And Telegraph Company At&T Bell Laboratories | Apparatus for simultaneous molecular beam deposition on a plurality of substrates |
US4592308A (en) * | 1983-11-10 | 1986-06-03 | Texas Instruments Incorporated | Solderless MBE system |
US4569829A (en) * | 1983-11-10 | 1986-02-11 | Texas Instruments Incorporated | MBE Source bakeout system |
US4605469A (en) * | 1983-11-10 | 1986-08-12 | Texas Instruments Incorporated | MBE system with in-situ mounting |
EP0145285B1 (de) * | 1983-11-10 | 1992-05-20 | Texas Instruments Incorporated | MBE-System ohne Schweissen |
JPS60108400A (ja) * | 1983-11-15 | 1985-06-13 | Toshiba Corp | 分子線結晶成長装置 |
JPS6132414A (ja) * | 1984-07-24 | 1986-02-15 | Mitsubishi Electric Corp | 薄膜形成装置 |
JPS61107720A (ja) * | 1984-10-31 | 1986-05-26 | Hitachi Ltd | 分子線エピタキシ装置 |
US4636268A (en) * | 1984-11-30 | 1987-01-13 | At&T Bell Laboratories | Chemical beam deposition method utilizing alkyl compounds in a carrier gas |
JPS61280610A (ja) * | 1985-06-06 | 1986-12-11 | Toshiba Corp | 分子線エピタキシヤル成長装置 |
JPS6235513A (ja) * | 1985-08-09 | 1987-02-16 | Hitachi Ltd | 分子線エピタキシ装置 |
JPS6261315A (ja) * | 1985-09-11 | 1987-03-18 | Sharp Corp | 分子線エピタキシ−装置 |
JPS62145809A (ja) * | 1985-12-20 | 1987-06-29 | Seiko Instr & Electronics Ltd | 分子線源用シヤツタ |
-
1989
- 1989-03-23 DE DE68916457T patent/DE68916457T2/de not_active Expired - Lifetime
- 1989-03-23 EP EP89105248A patent/EP0335267B1/de not_active Expired - Lifetime
- 1989-03-23 EP EP92117113A patent/EP0529687B1/de not_active Expired - Lifetime
- 1989-03-23 DE DE68926577T patent/DE68926577T2/de not_active Expired - Fee Related
- 1989-03-24 TW TW080105276A patent/TW202485B/zh active
- 1989-03-27 US US07/329,313 patent/US4944246A/en not_active Expired - Lifetime
- 1989-03-29 CA CA000594977A patent/CA1333038C/en not_active Expired - Fee Related
- 1989-03-30 KR KR1019890004152A patent/KR930010750B1/ko not_active IP Right Cessation
-
1993
- 1993-07-09 KR KR1019930013044A patent/KR930010751B1/ko not_active IP Right Cessation
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102010016792A1 (de) * | 2010-05-05 | 2011-11-10 | Aixtron Ag | Bevorratungsmagazin einer CVD-Anlage |
Also Published As
Publication number | Publication date |
---|---|
DE68916457T2 (de) | 1995-02-09 |
KR890016632A (ko) | 1989-11-29 |
DE68926577D1 (de) | 1996-07-04 |
EP0529687A2 (de) | 1993-03-03 |
EP0335267A3 (en) | 1990-10-31 |
CA1333038C (en) | 1994-11-15 |
DE68916457D1 (de) | 1994-08-04 |
EP0529687B1 (de) | 1996-05-29 |
EP0335267A2 (de) | 1989-10-04 |
KR930010750B1 (ko) | 1993-11-10 |
US4944246A (en) | 1990-07-31 |
KR930010751B1 (ko) | 1993-11-10 |
TW202485B (de) | 1993-03-21 |
EP0529687A3 (en) | 1993-03-24 |
EP0335267B1 (de) | 1994-06-29 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |