JP2012023212A - 半導体装置 - Google Patents
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 133
- 239000000758 substrate Substances 0.000 claims abstract description 40
- 230000007423 decrease Effects 0.000 claims description 7
- 229910052751 metal Inorganic materials 0.000 description 11
- 239000002184 metal Substances 0.000 description 11
- 229910002601 GaN Inorganic materials 0.000 description 9
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 description 8
- 229910002704 AlGaN Inorganic materials 0.000 description 7
- 238000010586 diagram Methods 0.000 description 6
- 230000015556 catabolic process Effects 0.000 description 5
- 230000006866 deterioration Effects 0.000 description 4
- 238000010030 laminating Methods 0.000 description 4
- 230000003071 parasitic effect Effects 0.000 description 4
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 4
- 229910010271 silicon carbide Inorganic materials 0.000 description 4
- 238000004088 simulation Methods 0.000 description 4
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 description 3
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 3
- 229910000530 Gallium indium arsenide Inorganic materials 0.000 description 3
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 description 3
- 238000005530 etching Methods 0.000 description 3
- 150000004767 nitrides Chemical class 0.000 description 3
- 230000000149 penetrating effect Effects 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 229910004298 SiO 2 Inorganic materials 0.000 description 2
- NWAIGJYBQQYSPW-UHFFFAOYSA-N azanylidyneindigane Chemical compound [In]#N NWAIGJYBQQYSPW-UHFFFAOYSA-N 0.000 description 2
- 238000004364 calculation method Methods 0.000 description 2
- 239000000969 carrier Substances 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 230000006378 damage Effects 0.000 description 2
- 229910052738 indium Inorganic materials 0.000 description 2
- RPQDHPTXJYYUPQ-UHFFFAOYSA-N indium arsenide Chemical compound [In]#[As] RPQDHPTXJYYUPQ-UHFFFAOYSA-N 0.000 description 2
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 229910000980 Aluminium gallium arsenide Inorganic materials 0.000 description 1
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 1
- 229910000673 Indium arsenide Inorganic materials 0.000 description 1
- KXNLCSXBJCPWGL-UHFFFAOYSA-N [Ga].[As].[In] Chemical compound [Ga].[As].[In] KXNLCSXBJCPWGL-UHFFFAOYSA-N 0.000 description 1
- AUCDRFABNLOFRE-UHFFFAOYSA-N alumane;indium Chemical compound [AlH3].[In] AUCDRFABNLOFRE-UHFFFAOYSA-N 0.000 description 1
- FTWRSWRBSVXQPI-UHFFFAOYSA-N alumanylidynearsane;gallanylidynearsane Chemical compound [As]#[Al].[As]#[Ga] FTWRSWRBSVXQPI-UHFFFAOYSA-N 0.000 description 1
- MDPILPRLPQYEEN-UHFFFAOYSA-N aluminium arsenide Chemical compound [As]#[Al] MDPILPRLPQYEEN-UHFFFAOYSA-N 0.000 description 1
- RNQKDQAVIXDKAG-UHFFFAOYSA-N aluminum gallium Chemical compound [Al].[Ga] RNQKDQAVIXDKAG-UHFFFAOYSA-N 0.000 description 1
- AJGDITRVXRPLBY-UHFFFAOYSA-N aluminum indium Chemical compound [Al].[In] AJGDITRVXRPLBY-UHFFFAOYSA-N 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 239000007772 electrode material Substances 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 230000005669 field effect Effects 0.000 description 1
- -1 for example Chemical compound 0.000 description 1
- 229910052733 gallium Inorganic materials 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 230000017525 heat dissipation Effects 0.000 description 1
- 230000000415 inactivating effect Effects 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
- 230000006641 stabilisation Effects 0.000 description 1
- 238000011105 stabilization Methods 0.000 description 1
- 230000001629 suppression Effects 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/41—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions
- H01L29/417—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions carrying the current to be rectified, amplified or switched
- H01L29/41725—Source or drain electrodes for field effect devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/41—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions
- H01L29/417—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions carrying the current to be rectified, amplified or switched
- H01L29/41725—Source or drain electrodes for field effect devices
- H01L29/4175—Source or drain electrodes for field effect devices for lateral devices where the connection to the source or drain region is done through at least one part of the semiconductor substrate thickness, e.g. with connecting sink or with via-hole
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/41—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions
- H01L29/417—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions carrying the current to be rectified, amplified or switched
- H01L29/41725—Source or drain electrodes for field effect devices
- H01L29/41758—Source or drain electrodes for field effect devices for lateral devices with structured layout for source or drain region, i.e. the source or drain region having cellular, interdigitated or ring structure or being curved or angular
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/41—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions
- H01L29/423—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions not carrying the current to be rectified, amplified or switched
- H01L29/42312—Gate electrodes for field effect devices
- H01L29/42316—Gate electrodes for field effect devices for field-effect transistors
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/12—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/20—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, only AIIIBV compounds
- H01L29/2003—Nitride compounds
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- Condensed Matter Physics & Semiconductors (AREA)
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- Computer Hardware Design (AREA)
- Junction Field-Effect Transistors (AREA)
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Abstract
【解決手段】半導体基板10上に設けられ、ソースパッド12aと、ソースパッド12aと接続された一端から他端に向けて長さが小さくなる階段状の側部12cを有するソースフィンガー12bと、を含むソース電極12と、ドレインパッド14aと、ドレインパッド14aと接続された一端から他端に向けて長さが小さくなり、側部12cと対向する側部14cを有するドレインフィンガー14bと、を含むドレイン電極14と、ソースフィンガー12bの段差12dと、ドレインフィンガー14bの段差14dとの間に屈曲部16cを有し、ソースフィンガー12a及びドレインフィンガー14aに沿って屈曲するゲート電極16と、を具備し、側部12cの形状と側部14cの形状とは、ソースフィンガー12bの他端とドレインフィンガー14bの他端とを結ぶ線分9の中点に対して対称である半導体装置。
【選択図】図1
Description
ソース電極 12
ソースパッド 12a
ソースフィンガー 12b
側部 12c、14c
ドレイン電極 14
ドレインパッド 14a
ドレインフィンガー 14b
ゲート電極 16
ゲートパッド 16a
ゲートフィンガー 16b
屈曲部 16c
配線 18
不活性領域 20,22,24,26
活性領域 21,23,25
Claims (6)
- 半導体基板上に設けられ、ソースパッドと、前記ソースパッドと接続されている一端から他端に向けて、ゲート長方向のフィンガーの長さが小さくなるような階段状の側部を有するソースフィンガーと、を含むソース電極と、
前記半導体基板上に設けられ、ドレインパッドと、前記ドレインパッドと接続されている一端から他端に向けて、ゲート長方向のフィンガーの長さが小さくなり、前記ソースフィンガーの側部と対向する階段状の側部を有するドレインフィンガーと、を含むドレイン電極と、
前記半導体基板上に設けられ、前記ソースフィンガーの前記側部に形成された段差と、前記ドレインフィンガーの前記側部に形成された段差との間に屈曲部を有し、前記ソースフィンガー及び前記ドレインフィンガーに沿うように前記屈曲部において屈曲するゲート電極と、を具備し、
前記ソースフィンガーの前記側部の形状と、前記ソースフィンガーと対向する前記ドレインフィンガーの前記側部の形状とは、前記ソースフィンガーの他端と、前記ドレインフィンガーの他端とを結ぶ線分の中点に対して対称であることを特徴とする半導体装置。 - 前記ゲート電極の屈曲部は、前記半導体基板に形成された不活性領域上に配置され、かつ前記半導体基板に形成された活性領域に接触しないことを特徴とする請求項1記載の半導体装置。
- 前記ソースフィンガー及び前記ドレインフィンガーの少なくとも一方の両側にゲート電極が設けられ、
前記ソースフィンガー又は前記ドレインフィンガーの前記少なくとも一方の上側に設けられ、前記屈曲部において、隣り合う前記ゲート電極を接続する配線を備えることを特徴とする請求項1又は2記載の半導体装置。 - 前記配線は、前記ゲート電極の端部及び前記屈曲部において、前記隣り合うゲート電極を接続し、
2つの前記屈曲部間のゲート電極の幅と、前記端部と前記屈曲部との間のゲート電極の幅とは同一であることを特徴とする請求項3記載の半導体装置。 - 前記隣り合うゲート電極は、前記ゲート電極の端部において接続されず、
前記配線は、前記屈曲部において前記隣り合うゲート電極を接続し、
2つの前記屈曲部間のゲート電極の幅は、前記端部と前記屈曲部との間のゲート電極の幅より大きいことを特徴とする請求項3記載の半導体装置。 - 前記ソースパッドは、前記ソースフィンガーのうち長さが最も大きい領域に設けられ、
前記ドレインパッドは、前記ドレインフィンガーのうち長さが最も大きい領域に設けられ、
前記ソースパッド又は前記ドレインパッドの少なくとも一方は、2つの前記ゲート電極の間に形成され、
前記ソースパッド又は前記ドレインパッドの前記少なくとも一方は、前記半導体基板を貫通することを特徴とする請求項3から5いずれか一項記載の半導体装置。
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JP2010160115A JP2012023212A (ja) | 2010-07-14 | 2010-07-14 | 半導体装置 |
US13/182,922 US8592919B2 (en) | 2010-07-14 | 2011-07-14 | Semiconductor device with source and drain fingers |
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JP2010160115A JP2012023212A (ja) | 2010-07-14 | 2010-07-14 | 半導体装置 |
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JP (1) | JP2012023212A (ja) |
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KR20170079376A (ko) * | 2015-12-30 | 2017-07-10 | 엘지디스플레이 주식회사 | 박막 트랜지스터 및 그를 이용한 내장형 게이트 구동부를 갖는 표시 장치 |
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JP2016532321A (ja) * | 2013-12-13 | 2016-10-13 | 蘇州能訊高能半導体有限公司Dynax Semiconductor,Inc. | 半導体デバイス及びその製造方法 |
KR20170079376A (ko) * | 2015-12-30 | 2017-07-10 | 엘지디스플레이 주식회사 | 박막 트랜지스터 및 그를 이용한 내장형 게이트 구동부를 갖는 표시 장치 |
KR102567318B1 (ko) | 2015-12-30 | 2023-08-16 | 엘지디스플레이 주식회사 | 박막 트랜지스터 및 그를 이용한 내장형 게이트 구동부를 갖는 표시 장치 |
JP2022147859A (ja) * | 2021-03-23 | 2022-10-06 | 株式会社東芝 | 半導体装置 |
JP7423569B2 (ja) | 2021-03-23 | 2024-01-29 | 株式会社東芝 | 半導体装置 |
WO2023084927A1 (ja) * | 2021-11-09 | 2023-05-19 | ローム株式会社 | 半導体装置 |
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US20120012945A1 (en) | 2012-01-19 |
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