JP2011508435A5 - - Google Patents

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Publication number
JP2011508435A5
JP2011508435A5 JP2010539820A JP2010539820A JP2011508435A5 JP 2011508435 A5 JP2011508435 A5 JP 2011508435A5 JP 2010539820 A JP2010539820 A JP 2010539820A JP 2010539820 A JP2010539820 A JP 2010539820A JP 2011508435 A5 JP2011508435 A5 JP 2011508435A5
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JP
Japan
Prior art keywords
substrate
space
assembly
inlet
chamber body
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JP2010539820A
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English (en)
Japanese (ja)
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JP2011508435A (ja
JP5226082B2 (ja
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Priority claimed from PCT/US2008/087496 external-priority patent/WO2009085992A2/en
Publication of JP2011508435A publication Critical patent/JP2011508435A/ja
Publication of JP2011508435A5 publication Critical patent/JP2011508435A5/ja
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JP2010539820A 2007-12-20 2008-12-18 ガス流分布が改善された熱反応器 Active JP5226082B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US1543507P 2007-12-20 2007-12-20
US61/015,435 2007-12-20
PCT/US2008/087496 WO2009085992A2 (en) 2007-12-20 2008-12-18 Thermal reactor with improved gas flow distribution

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2013049126A Division JP2013219344A (ja) 2007-12-20 2013-03-12 ガス流分布が改善された熱反応器

Publications (3)

Publication Number Publication Date
JP2011508435A JP2011508435A (ja) 2011-03-10
JP2011508435A5 true JP2011508435A5 (de) 2012-02-09
JP5226082B2 JP5226082B2 (ja) 2013-07-03

Family

ID=40789180

Family Applications (3)

Application Number Title Priority Date Filing Date
JP2010539820A Active JP5226082B2 (ja) 2007-12-20 2008-12-18 ガス流分布が改善された熱反応器
JP2013049126A Pending JP2013219344A (ja) 2007-12-20 2013-03-12 ガス流分布が改善された熱反応器
JP2015133398A Active JP6119060B2 (ja) 2007-12-20 2015-07-02 ガス流分布が改善された熱反応器

Family Applications After (2)

Application Number Title Priority Date Filing Date
JP2013049126A Pending JP2013219344A (ja) 2007-12-20 2013-03-12 ガス流分布が改善された熱反応器
JP2015133398A Active JP6119060B2 (ja) 2007-12-20 2015-07-02 ガス流分布が改善された熱反応器

Country Status (6)

Country Link
US (3) US8056500B2 (de)
JP (3) JP5226082B2 (de)
KR (3) KR101586211B1 (de)
CN (1) CN101896995B (de)
TW (1) TWI366217B (de)
WO (1) WO2009085992A2 (de)

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