JP2011507031A5 - - Google Patents

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Publication number
JP2011507031A5
JP2011507031A5 JP2010538011A JP2010538011A JP2011507031A5 JP 2011507031 A5 JP2011507031 A5 JP 2011507031A5 JP 2010538011 A JP2010538011 A JP 2010538011A JP 2010538011 A JP2010538011 A JP 2010538011A JP 2011507031 A5 JP2011507031 A5 JP 2011507031A5
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JP
Japan
Prior art keywords
emitted light
radiation beam
output
focal point
photoreactive composition
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JP2010538011A
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English (en)
Japanese (ja)
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JP2011507031A (ja
JP5524856B2 (ja
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Priority claimed from PCT/US2008/082588 external-priority patent/WO2009075970A1/en
Publication of JP2011507031A publication Critical patent/JP2011507031A/ja
Publication of JP2011507031A5 publication Critical patent/JP2011507031A5/ja
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Publication of JP5524856B2 publication Critical patent/JP5524856B2/ja
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JP2010538011A 2007-12-12 2008-11-06 エッジ明瞭性が向上した構造の製造方法 Active JP5524856B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US1312107P 2007-12-12 2007-12-12
US61/013,121 2007-12-12
PCT/US2008/082588 WO2009075970A1 (en) 2007-12-12 2008-11-06 Method for making structures with improved edge definition

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2014022569A Division JP5806348B2 (ja) 2007-12-12 2014-02-07 エッジ明瞭性が向上した構造の製造方法

Publications (3)

Publication Number Publication Date
JP2011507031A JP2011507031A (ja) 2011-03-03
JP2011507031A5 true JP2011507031A5 (enExample) 2011-12-22
JP5524856B2 JP5524856B2 (ja) 2014-06-18

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JP2010538011A Active JP5524856B2 (ja) 2007-12-12 2008-11-06 エッジ明瞭性が向上した構造の製造方法
JP2014022569A Active JP5806348B2 (ja) 2007-12-12 2014-02-07 エッジ明瞭性が向上した構造の製造方法

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Country Status (5)

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US (1) US8455846B2 (enExample)
EP (1) EP2232531B1 (enExample)
JP (2) JP5524856B2 (enExample)
CN (1) CN101946305B (enExample)
WO (1) WO2009075970A1 (enExample)

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