JP2011500480A5 - - Google Patents

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Publication number
JP2011500480A5
JP2011500480A5 JP2010530402A JP2010530402A JP2011500480A5 JP 2011500480 A5 JP2011500480 A5 JP 2011500480A5 JP 2010530402 A JP2010530402 A JP 2010530402A JP 2010530402 A JP2010530402 A JP 2010530402A JP 2011500480 A5 JP2011500480 A5 JP 2011500480A5
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JP
Japan
Prior art keywords
web
guide device
coating
guiding
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2010530402A
Other languages
English (en)
Japanese (ja)
Other versions
JP2011500480A (ja
Filing date
Publication date
Priority claimed from EP07020927A external-priority patent/EP2053663A1/en
Application filed filed Critical
Publication of JP2011500480A publication Critical patent/JP2011500480A/ja
Publication of JP2011500480A5 publication Critical patent/JP2011500480A5/ja
Pending legal-status Critical Current

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JP2010530402A 2007-10-25 2008-10-15 ウェブコーティングプロセスにおける浮上クッションによるウェブの搬送 Pending JP2011500480A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US98263507P 2007-10-25 2007-10-25
EP07020927A EP2053663A1 (en) 2007-10-25 2007-10-25 Hover cushion transport for webs in a web coating process
PCT/EP2008/063902 WO2009053289A1 (en) 2007-10-25 2008-10-15 Hover cushion transport for webs in a web coating process

Publications (2)

Publication Number Publication Date
JP2011500480A JP2011500480A (ja) 2011-01-06
JP2011500480A5 true JP2011500480A5 (enExample) 2011-12-01

Family

ID=38824994

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2010530402A Pending JP2011500480A (ja) 2007-10-25 2008-10-15 ウェブコーティングプロセスにおける浮上クッションによるウェブの搬送

Country Status (7)

Country Link
US (1) US20090110809A1 (enExample)
EP (1) EP2053663A1 (enExample)
JP (1) JP2011500480A (enExample)
KR (1) KR20100091984A (enExample)
CN (1) CN101836303A (enExample)
TW (1) TW200933788A (enExample)
WO (1) WO2009053289A1 (enExample)

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CN102308368B (zh) 2008-12-04 2014-02-12 威科仪器有限公司 用于化学气相沉积的进气口元件及其制造方法
EP2455316A4 (en) * 2009-07-15 2012-12-19 Toyo Kohan Co Ltd NETFLOW AND CONVEYOR DEVICE AND METHOD FOR THE PRODUCTION THEREOF
EP2299473A1 (en) * 2009-09-22 2011-03-23 Applied Materials, Inc. Modular substrate processing system and method
US20110097494A1 (en) * 2009-10-27 2011-04-28 Kerr Roger S Fluid conveyance system including flexible retaining mechanism
JP5485928B2 (ja) * 2011-03-09 2014-05-07 東京エレクトロン株式会社 基板浮上搬送装置及び基板処理装置
US9073250B2 (en) * 2011-09-08 2015-07-07 Corning Incorporated Apparatus and methods for producing a ceramic green body
JP2013082959A (ja) * 2011-10-07 2013-05-09 Sony Corp 自己停止反応成膜装置及び自己停止反応成膜方法
SE537252C2 (sv) * 2011-12-15 2015-03-17 Andritz Tech & Asset Man Gmbh Torklåda som har blåslådor för torkning av en bana av cellulosamassa
WO2013108751A1 (ja) * 2012-01-16 2013-07-25 株式会社アルバック 成膜装置
JP2013212919A (ja) * 2012-04-03 2013-10-17 Sakurai Graphic Syst:Kk 枚葉シート搬送装置及び印刷機
EP2765218A1 (en) * 2013-02-07 2014-08-13 Nederlandse Organisatie voor toegepast-natuurwetenschappelijk Onderzoek TNO Method and apparatus for depositing atomic layers on a substrate
BR112015031114B1 (pt) * 2013-06-11 2020-10-13 University Of Houston aparelho e método para deposição de um revestimento
DE102014113047A1 (de) * 2013-09-19 2015-03-19 Von Ardenne Gmbh Vakuumbeschichtungsanlage und Verfahren zur Beschichtung bandförmiger Substrate
US9925761B2 (en) * 2015-12-02 2018-03-27 Eastman Kodak Company Liquid ejection hole orientation for web guide
KR102509129B1 (ko) * 2016-06-02 2023-03-09 어플라이드 머티어리얼스, 인코포레이티드 가이딩 디바이스들 및 웹 코팅 프로세스
CN107745579B (zh) * 2016-11-10 2019-05-28 北京航空航天大学 一种具有气浮支撑功能的卷对卷印刷电子喷墨加工平台
US11440831B2 (en) * 2018-12-13 2022-09-13 Corning Incorporated Conveying apparatus and conveying ribbon
CN110911335B (zh) * 2019-11-13 2022-05-31 深圳市华星光电半导体显示技术有限公司 气浮支撑平台
EP4326919A4 (en) * 2021-04-21 2025-08-20 Elevated Mat Germany Gmbh MATERIAL DEPOSITION APPARATUS, METHOD FOR DEPOSITING MATERIAL ON A SUBSTRATE, AND MATERIAL DEPOSITION SYSTEM
US20220356027A1 (en) * 2021-05-04 2022-11-10 Applied Materials, Inc. Roller for transporting a flexible substrate, vacuum processing apparatus, and methods therefor
US20220356028A1 (en) * 2021-05-04 2022-11-10 Applied Materials, Inc. Roller for transporting a flexible substrate, vacuum processing apparatus, and methods therefor
CN116067158B (zh) * 2023-02-07 2023-07-04 无锡爱德旺斯科技有限公司 一种气浮烘箱
JP7731926B2 (ja) * 2023-02-17 2025-09-01 プライムプラネットエナジー＆ソリューションズ株式会社 シート搬送装置
EP4530240A1 (en) * 2023-09-29 2025-04-02 CUSTOMCELLS Holding GmbH A system, plant, and method for processing a bendable foil, a plant for obtaining a metalated battery electrode and a method of producing a battery cell
CN120288561B (zh) * 2025-06-13 2025-08-12 福建省爱珈图服装发展有限公司 一种铺布机模块化磁吸式压布导辊

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