JP2011258994A - 半導体装置 - Google Patents
半導体装置 Download PDFInfo
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- JP2011258994A JP2011258994A JP2011209882A JP2011209882A JP2011258994A JP 2011258994 A JP2011258994 A JP 2011258994A JP 2011209882 A JP2011209882 A JP 2011209882A JP 2011209882 A JP2011209882 A JP 2011209882A JP 2011258994 A JP2011258994 A JP 2011258994A
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/02—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/26—Materials of the light emitting region
- H01L33/30—Materials of the light emitting region containing only elements of group III and group V of the periodic system
- H01L33/32—Materials of the light emitting region containing only elements of group III and group V of the periodic system containing nitrogen
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/02—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/04—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a quantum effect structure or superlattice, e.g. tunnel junction
- H01L33/06—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a quantum effect structure or superlattice, e.g. tunnel junction within the light emitting region, e.g. quantum confinement structure or tunnel barrier
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/02—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/04—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a quantum effect structure or superlattice, e.g. tunnel junction
Abstract
【解決手段】 GaNで形成された下地層20と、下地層上に形成され、下地層よりも格子定数が小さいInAlGaNで形成された障壁層と下地層よりも格子定数が大きいInGaNで形成された量子井戸層とが交互に積層された発光層30と、を備える発光ダイオードであって、100A/cm2 以上の電流密度で作動させ、障壁層でAl組成又はIn組成が傾斜している。
【選択図】 図1
Description
図1は、本発明の第1の実施形態に係る半導体装置(発光ダイオード)の基本的な構成を模式的に示した断面図である。図1に示した半導体装置は、基板10と、基板10上に形成された下地層20と、下地層20上に形成された発光層30によって構成されている。
次に、本発明の第2の実施形態について説明する。なお、基本的な構成は第1の実施形態と同様であり、第1の実施形態で説明した事項については説明を省略する。
21…n型GaNコンタクト層 22…n型GaNガイド層
30…発光層 31…障壁層 32…中間層
33…量子井戸層 34…中間層 35…障壁層
41…p型AlGaNオーバーフロー防止層
42…p型GaN層 43…p型GaNコンタクト層
50…n側電極 60…p側電極
Claims (6)
- GaNで形成された下地層と、
前記下地層上に形成され、前記下地層よりも格子定数が小さいInAlGaNで形成された障壁層と前記下地層よりも格子定数が大きいInGaNで形成された量子井戸層とが交互に積層された発光層と、
を備える発光ダイオードであって、
100A/cm2 以上の電流密度で作動させ、
前記障壁層でAl組成又はIn組成が傾斜している
ことを特徴とする半導体装置。 - 前記障壁層は、前記量子井戸層よりも低いIn組成を有する
ことを特徴とする請求項1に記載の半導体装置。 - 互いに隣接する前記障壁層と前記量子井戸層との間に設けられ、InGaNで形成され且つ前記量子井戸層よりも低いIn組成を有する中間層をさらに備えた
ことを特徴とする請求項1または2に記載の半導体装置。 - 前記発光層上に形成され、前記障壁層よりも高いAl組成を有するオーバーフロー防止層をさらに備えた
ことを特徴とする請求項1乃至3のいずれかに記載の半導体装置。 - 前記発光層上に形成された、p−InuAlvGa1-u-vN(0≦u<1,0<v<1)層をさらに備えた
ことを特徴とする請求項1乃至3のいずれかに記載の半導体装置。 - 前記下地層は、基板の実質的に(0001)面上に形成されている
ことを特徴とする請求項1乃至5のいずれかに記載の半導体装置。
Priority Applications (1)
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JP2011209882A JP5634368B2 (ja) | 2008-08-29 | 2011-09-26 | 半導体装置 |
Applications Claiming Priority (3)
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JP2008221471 | 2008-08-29 | ||
JP2008221471 | 2008-08-29 | ||
JP2011209882A JP5634368B2 (ja) | 2008-08-29 | 2011-09-26 | 半導体装置 |
Related Parent Applications (1)
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JP2009201071A Division JP2010080955A (ja) | 2008-08-29 | 2009-08-31 | 半導体装置 |
Publications (3)
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JP2011258994A true JP2011258994A (ja) | 2011-12-22 |
JP2011258994A5 JP2011258994A5 (ja) | 2012-06-07 |
JP5634368B2 JP5634368B2 (ja) | 2014-12-03 |
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JP2009201071A Pending JP2010080955A (ja) | 2008-08-29 | 2009-08-31 | 半導体装置 |
JP2011209882A Active JP5634368B2 (ja) | 2008-08-29 | 2011-09-26 | 半導体装置 |
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JP2009201071A Pending JP2010080955A (ja) | 2008-08-29 | 2009-08-31 | 半導体装置 |
Country Status (6)
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US (1) | US20100187497A1 (ja) |
EP (1) | EP2325899A4 (ja) |
JP (2) | JP2010080955A (ja) |
KR (1) | KR20110034689A (ja) |
CN (1) | CN102138227A (ja) |
WO (1) | WO2010024436A1 (ja) |
Cited By (6)
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JP2015508238A (ja) * | 2012-02-28 | 2015-03-16 | コーニンクレッカ フィリップス エヌ ヴェ | 交流ledのためのシリコン基板上における窒化ガリウムledの窒化アルミニウムガリウム/窒化ガリウムデバイスとの集積化 |
JP2016092162A (ja) * | 2014-11-03 | 2016-05-23 | 豊田合成株式会社 | 発光素子の製造方法、iii族窒化物半導体の製造方法 |
WO2016125435A1 (ja) * | 2015-02-02 | 2016-08-11 | スタンレー電気株式会社 | 量子ドットの製造方法および量子ドット |
JP2016148028A (ja) * | 2015-02-06 | 2016-08-18 | スタンレー電気株式会社 | 半導体ナノ粒子の製造方法、および、半導体ナノ粒子 |
JP2016149399A (ja) * | 2015-02-10 | 2016-08-18 | ウシオ電機株式会社 | 半導体発光素子 |
JP2016148027A (ja) * | 2015-02-06 | 2016-08-18 | スタンレー電気株式会社 | 半導体ナノ粒子およびその製造方法 |
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WO2011027417A1 (ja) | 2009-09-01 | 2011-03-10 | 株式会社 東芝 | 半導体発光素子 |
JP4940317B2 (ja) * | 2010-02-25 | 2012-05-30 | 株式会社東芝 | 半導体発光素子及びその製造方法 |
JP5325171B2 (ja) * | 2010-07-08 | 2013-10-23 | 株式会社東芝 | 半導体発光素子 |
WO2012064748A1 (en) * | 2010-11-08 | 2012-05-18 | Georgia Tech Research Corporation | Systems and methods for growing a non-phase separated group-iii nitride semiconductor alloy |
US20130082274A1 (en) * | 2011-09-29 | 2013-04-04 | Bridgelux, Inc. | Light emitting devices having dislocation density maintaining buffer layers |
KR101262726B1 (ko) * | 2011-12-30 | 2013-05-09 | 일진엘이디(주) | 탄소 도핑된 p형 질화물층을 포함하는 질화물계 발광소자 제조 방법 |
US9343626B2 (en) | 2013-03-15 | 2016-05-17 | Soitec | Semiconductor structures having active regions comprising InGaN, methods of forming such semiconductor structures, and light emitting devices formed from such semiconductor structures |
DE112014001423T5 (de) * | 2013-03-15 | 2015-12-24 | Soitec | Halbleiterstrukturen mit InGaN umfassenden Aktivbereichen, Verfahren zum Bilden derartiger Halbleiterstrukturen und aus derartigen Halbleiterstrukturen gebildete Licht emittierende Vorrichtungen |
FR3003397B1 (fr) * | 2013-03-15 | 2016-07-22 | Soitec Silicon On Insulator | Structures semi-conductrices dotées de régions actives comprenant de l'INGAN |
TWI593135B (zh) | 2013-03-15 | 2017-07-21 | 索泰克公司 | 具有含氮化銦鎵之主動區域之半導體結構,形成此等半導體結構之方法,以及應用此等半導體結構形成之發光元件 |
JP5606595B2 (ja) * | 2013-06-28 | 2014-10-15 | 株式会社東芝 | 半導体発光素子の製造方法 |
FR3012676A1 (fr) | 2013-10-25 | 2015-05-01 | Commissariat Energie Atomique | Diode electroluminescente a puits quantiques separes par des couches barrieres d'ingan a compositions d'indium variables |
US9985168B1 (en) | 2014-11-18 | 2018-05-29 | Cree, Inc. | Group III nitride based LED structures including multiple quantum wells with barrier-well unit interface layers |
DE102016116425A1 (de) | 2016-09-02 | 2018-03-08 | Osram Opto Semiconductors Gmbh | Optoelektronisches Bauelement |
US11393948B2 (en) | 2018-08-31 | 2022-07-19 | Creeled, Inc. | Group III nitride LED structures with improved electrical performance |
US11404473B2 (en) | 2019-12-23 | 2022-08-02 | Lumileds Llc | III-nitride multi-wavelength LED arrays |
US11923398B2 (en) | 2019-12-23 | 2024-03-05 | Lumileds Llc | III-nitride multi-wavelength LED arrays |
US11631786B2 (en) | 2020-11-12 | 2023-04-18 | Lumileds Llc | III-nitride multi-wavelength LED arrays with etch stop layer |
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2009
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- 2009-08-31 KR KR1020117004435A patent/KR20110034689A/ko not_active Application Discontinuation
- 2009-08-31 EP EP09810080.3A patent/EP2325899A4/en not_active Withdrawn
- 2009-08-31 JP JP2009201071A patent/JP2010080955A/ja active Pending
- 2009-08-31 CN CN2009801334030A patent/CN102138227A/zh active Pending
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2010
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2011
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Cited By (12)
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JP2015508238A (ja) * | 2012-02-28 | 2015-03-16 | コーニンクレッカ フィリップス エヌ ヴェ | 交流ledのためのシリコン基板上における窒化ガリウムledの窒化アルミニウムガリウム/窒化ガリウムデバイスとの集積化 |
JP2016092162A (ja) * | 2014-11-03 | 2016-05-23 | 豊田合成株式会社 | 発光素子の製造方法、iii族窒化物半導体の製造方法 |
WO2016125435A1 (ja) * | 2015-02-02 | 2016-08-11 | スタンレー電気株式会社 | 量子ドットの製造方法および量子ドット |
KR20170115517A (ko) * | 2015-02-02 | 2017-10-17 | 스탠리 일렉트릭 컴퍼니, 리미티드 | 양자도트의 제조방법 및 양자도트 |
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JP2016148028A (ja) * | 2015-02-06 | 2016-08-18 | スタンレー電気株式会社 | 半導体ナノ粒子の製造方法、および、半導体ナノ粒子 |
JP2016148027A (ja) * | 2015-02-06 | 2016-08-18 | スタンレー電気株式会社 | 半導体ナノ粒子およびその製造方法 |
JP2016149399A (ja) * | 2015-02-10 | 2016-08-18 | ウシオ電機株式会社 | 半導体発光素子 |
WO2016129493A1 (ja) * | 2015-02-10 | 2016-08-18 | ウシオ電機株式会社 | 半導体発光素子 |
TWI636581B (zh) * | 2015-02-10 | 2018-09-21 | 牛尾電機股份有限公司 | Semiconductor light-emitting element |
Also Published As
Publication number | Publication date |
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JP5634368B2 (ja) | 2014-12-03 |
WO2010024436A1 (ja) | 2010-03-04 |
CN102138227A (zh) | 2011-07-27 |
EP2325899A1 (en) | 2011-05-25 |
EP2325899A4 (en) | 2015-04-29 |
KR20110034689A (ko) | 2011-04-05 |
US20100187497A1 (en) | 2010-07-29 |
JP2010080955A (ja) | 2010-04-08 |
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