JP2011140366A - 搬送車システム - Google Patents

搬送車システム Download PDF

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Publication number
JP2011140366A
JP2011140366A JP2010000856A JP2010000856A JP2011140366A JP 2011140366 A JP2011140366 A JP 2011140366A JP 2010000856 A JP2010000856 A JP 2010000856A JP 2010000856 A JP2010000856 A JP 2010000856A JP 2011140366 A JP2011140366 A JP 2011140366A
Authority
JP
Japan
Prior art keywords
transport vehicle
carrier
conveyance
substrate
sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2010000856A
Other languages
English (en)
Japanese (ja)
Inventor
Makoto Yamamoto
眞 山本
Mitsuya Tokumoto
光哉 徳本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Muratec Automation Co Ltd
Original Assignee
Muratec Automation Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Muratec Automation Co Ltd filed Critical Muratec Automation Co Ltd
Priority to JP2010000856A priority Critical patent/JP2011140366A/ja
Priority to PCT/JP2010/006037 priority patent/WO2011083525A1/ja
Priority to CN2010800607902A priority patent/CN102753458A/zh
Priority to KR1020127015981A priority patent/KR20120096014A/ko
Priority to TW100100038A priority patent/TW201140735A/zh
Publication of JP2011140366A publication Critical patent/JP2011140366A/ja
Pending legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67733—Overhead conveying
JP2010000856A 2010-01-06 2010-01-06 搬送車システム Pending JP2011140366A (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2010000856A JP2011140366A (ja) 2010-01-06 2010-01-06 搬送車システム
PCT/JP2010/006037 WO2011083525A1 (ja) 2010-01-06 2010-10-08 搬送車システム
CN2010800607902A CN102753458A (zh) 2010-01-06 2010-10-08 输送车系统
KR1020127015981A KR20120096014A (ko) 2010-01-06 2010-10-08 반송차 시스템
TW100100038A TW201140735A (en) 2010-01-06 2011-01-03 Conveying vehicle system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2010000856A JP2011140366A (ja) 2010-01-06 2010-01-06 搬送車システム

Publications (1)

Publication Number Publication Date
JP2011140366A true JP2011140366A (ja) 2011-07-21

Family

ID=44305272

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2010000856A Pending JP2011140366A (ja) 2010-01-06 2010-01-06 搬送車システム

Country Status (5)

Country Link
JP (1) JP2011140366A (zh)
KR (1) KR20120096014A (zh)
CN (1) CN102753458A (zh)
TW (1) TW201140735A (zh)
WO (1) WO2011083525A1 (zh)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2013015086A1 (ja) * 2011-07-28 2013-01-31 株式会社ダイフク 処理設備（processing facility）
JP2013177217A (ja) * 2012-02-28 2013-09-09 Daifuku Co Ltd 物品搬送設備
JP2013177216A (ja) * 2012-02-28 2013-09-09 Daifuku Co Ltd 物品搬送設備
JP2019094201A (ja) * 2017-11-27 2019-06-20 株式会社ダイフク 搬送車
JP2019201145A (ja) * 2018-05-17 2019-11-21 株式会社ディスコ 搬送システム
CN110998817A (zh) * 2017-08-09 2020-04-10 Asm Ip私人控股有限公司 用以存储用于基底的盒的存储设备及配备其的处理设备
JP2020083636A (ja) * 2018-11-30 2020-06-04 株式会社ディスコ 搬送システム
US11769682B2 (en) 2017-08-09 2023-09-26 Asm Ip Holding B.V. Storage apparatus for storing cassettes for substrates and processing apparatus equipped therewith

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103675561B (zh) * 2013-12-31 2016-05-11 上海亨井联接件有限公司 鼠标全自动测试设备
US11791186B2 (en) * 2018-05-31 2023-10-17 Murata Machinery, Ltd. Conveyance system
DE102018113786A1 (de) * 2018-06-08 2019-12-12 Vat Holding Ag Waferübergabeeinheit und Waferübergabesystem

Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03297156A (ja) * 1990-04-16 1991-12-27 Dainippon Screen Mfg Co Ltd カセット内の基板検出装置
JPH07206117A (ja) * 1994-01-14 1995-08-08 Sony Corp 搬送制御方法
JPH09181032A (ja) * 1995-12-26 1997-07-11 Kaijo Corp 基板検出装置及びこれを具備した基板自動処理装置
JP2001127131A (ja) * 1999-10-27 2001-05-11 Sharp Corp 半導体製造装置およびその制御方法
JP2003188238A (ja) * 2001-12-21 2003-07-04 Shinko Electric Co Ltd 基板検出装置
JP2003237941A (ja) * 2002-02-15 2003-08-27 Tokyo Electron Ltd 無人搬送車
JP2006156740A (ja) * 2004-11-30 2006-06-15 Eibisu:Kk 半導体ウエハ収納容器の検査装置
JP2009091075A (ja) * 2007-10-05 2009-04-30 Panasonic Corp 基板移載方法及び基板移載装置
US20090238664A1 (en) * 2008-03-24 2009-09-24 Asyst Technologies Japan, Inc. Storing apparatus and transporting system with storage

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2003026002A1 (fr) * 2001-09-18 2003-03-27 Murata Kikai Kabushiki Kaisha Vehicule a guidage automatique

Patent Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03297156A (ja) * 1990-04-16 1991-12-27 Dainippon Screen Mfg Co Ltd カセット内の基板検出装置
JPH07206117A (ja) * 1994-01-14 1995-08-08 Sony Corp 搬送制御方法
JPH09181032A (ja) * 1995-12-26 1997-07-11 Kaijo Corp 基板検出装置及びこれを具備した基板自動処理装置
JP2001127131A (ja) * 1999-10-27 2001-05-11 Sharp Corp 半導体製造装置およびその制御方法
JP2003188238A (ja) * 2001-12-21 2003-07-04 Shinko Electric Co Ltd 基板検出装置
JP2003237941A (ja) * 2002-02-15 2003-08-27 Tokyo Electron Ltd 無人搬送車
JP2006156740A (ja) * 2004-11-30 2006-06-15 Eibisu:Kk 半導体ウエハ収納容器の検査装置
JP2009091075A (ja) * 2007-10-05 2009-04-30 Panasonic Corp 基板移載方法及び基板移載装置
US20090238664A1 (en) * 2008-03-24 2009-09-24 Asyst Technologies Japan, Inc. Storing apparatus and transporting system with storage
JP2009227415A (ja) * 2008-03-24 2009-10-08 Asyst Technologies Japan Inc 保管庫装置及び保管庫付き搬送システム

Cited By (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9086697B2 (en) 2011-07-28 2015-07-21 Daifuku Co., Ltd. Processing facility
JP2013030003A (ja) * 2011-07-28 2013-02-07 Daifuku Co Ltd 処理設備
WO2013015086A1 (ja) * 2011-07-28 2013-01-31 株式会社ダイフク 処理設備（processing facility）
KR101887149B1 (ko) 2011-07-28 2018-08-09 가부시키가이샤 다이후쿠 처리 설비
KR20140049542A (ko) * 2011-07-28 2014-04-25 가부시키가이샤 다이후쿠 처리 설비
JP2013177216A (ja) * 2012-02-28 2013-09-09 Daifuku Co Ltd 物品搬送設備
JP2013177217A (ja) * 2012-02-28 2013-09-09 Daifuku Co Ltd 物品搬送設備
JP7187536B2 (ja) 2017-08-09 2022-12-12 エーエスエム・アイピー・ホールディング・ベー・フェー 基材用のカセットを保管するための保管装置、およびそれを備える処理装置
CN110998817A (zh) * 2017-08-09 2020-04-10 Asm Ip私人控股有限公司 用以存储用于基底的盒的存储设备及配备其的处理设备
CN110998817B (zh) * 2017-08-09 2023-11-10 Asm Ip私人控股有限公司 用以存储用于基底的盒的存储设备及配备其的处理设备
JP2020529740A (ja) * 2017-08-09 2020-10-08 エーエスエム・アイピー・ホールディング・ベー・フェー 基材用のカセットを保管するための保管装置、およびそれを備える処理装置
US11769682B2 (en) 2017-08-09 2023-09-26 Asm Ip Holding B.V. Storage apparatus for storing cassettes for substrates and processing apparatus equipped therewith
JP2019094201A (ja) * 2017-11-27 2019-06-20 株式会社ダイフク 搬送車
JP2019201145A (ja) * 2018-05-17 2019-11-21 株式会社ディスコ 搬送システム
JP7184453B2 (ja) 2018-05-17 2022-12-06 株式会社ディスコ 搬送システム
DE102019207133B4 (de) 2018-05-17 2023-10-19 Disco Corporation Beförderungssystem
JP7109863B2 (ja) 2018-11-30 2022-08-01 株式会社ディスコ 搬送システム
JP2020083636A (ja) * 2018-11-30 2020-06-04 株式会社ディスコ 搬送システム

Also Published As

Publication number Publication date
TW201140735A (en) 2011-11-16
CN102753458A (zh) 2012-10-24
KR20120096014A (ko) 2012-08-29
WO2011083525A1 (ja) 2011-07-14

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