JP2011100733A5 - - Google Patents

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JP2011100733A5
JP2011100733A5 JP2010250911A JP2010250911A JP2011100733A5 JP 2011100733 A5 JP2011100733 A5 JP 2011100733A5 JP 2010250911 A JP2010250911 A JP 2010250911A JP 2010250911 A JP2010250911 A JP 2010250911A JP 2011100733 A5 JP2011100733 A5 JP 2011100733A5
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JP
Japan
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optical system
particle optical
beam deflector
sacp
adjusting
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JP2010250911A
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Japanese (ja)
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JP2011100733A (ja
JP5819054B2 (ja
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Priority claimed from DE200910052392 external-priority patent/DE102009052392A1/de
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JP2010250911A 2009-11-09 2010-11-09 Ｓａｃｐ法およびｓａｃｐ法を行うための粒子光学系 Active JP5819054B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102009052392.8 2009-11-09
DE200910052392 DE102009052392A1 (de) 2009-11-09 2009-11-09 SACP-Verfahren und teilchenoptisches System zur Ausführung eines solchen Verfahrens

Publications (3)

Publication Number Publication Date
JP2011100733A JP2011100733A (ja) 2011-05-19
JP2011100733A5 true JP2011100733A5 (enExample) 2014-12-25
JP5819054B2 JP5819054B2 (ja) 2015-11-18

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JP2010250911A Active JP5819054B2 (ja) 2009-11-09 2010-11-09 Ｓａｃｐ法およびｓａｃｐ法を行うための粒子光学系

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US (1) US9093246B2 (enExample)
EP (1) EP2320217B1 (enExample)
JP (1) JP5819054B2 (enExample)
DE (1) DE102009052392A1 (enExample)

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