JP2010540773A - 無機材料の選択領域堆積法 - Google Patents

無機材料の選択領域堆積法 Download PDF

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Publication number
JP2010540773A
JP2010540773A JP2010526894A JP2010526894A JP2010540773A JP 2010540773 A JP2010540773 A JP 2010540773A JP 2010526894 A JP2010526894 A JP 2010526894A JP 2010526894 A JP2010526894 A JP 2010526894A JP 2010540773 A JP2010540773 A JP 2010540773A
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substrate
deposition
gas
thin film
poly
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JP2010526894A
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Japanese (ja)
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JP2010540773A5 (enExample
Inventor
ヤン，チェン
マリー アービング，リン
ハワード レビー，デイビッド
ジェローム カウデリー−コーバン，ピーター
キャロル フリーマン，ダイアン
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イーストマン コダック カンパニー
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Publication of JP2010540773A publication Critical patent/JP2010540773A/ja
Publication of JP2010540773A5 publication Critical patent/JP2010540773A5/ja
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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
    • C23C16/45523—Pulsed gas flow or change of composition over time
    • C23C16/45525—Atomic layer deposition [ALD]
    • C23C16/45544—Atomic layer deposition [ALD] characterized by the apparatus
    • C23C16/45548—Atomic layer deposition [ALD] characterized by the apparatus having arrangements for gas injection at different locations of the reactor for each ALD half-reaction
    • C23C16/45551—Atomic layer deposition [ALD] characterized by the apparatus having arrangements for gas injection at different locations of the reactor for each ALD half-reaction for relative movement of the substrate and the gas injectors or half-reaction reactor compartments
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/04—Coating on selected surface areas, e.g. using masks
    • C23C16/042—Coating on selected surface areas, e.g. using masks using masks
    • H10P14/6506—
    • H10P14/6939—
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/10—Deposition of organic active material
    • H10K71/12—Deposition of organic active material using liquid deposition, e.g. spin coating
    • H10K71/13—Deposition of organic active material using liquid deposition, e.g. spin coating using printing techniques, e.g. ink-jet printing or screen printing
    • H10P14/6339—
    • H10P14/69391—

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  • Chemical & Material Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
JP2010526894A 2007-09-26 2008-09-16 無機材料の選択領域堆積法 Pending JP2010540773A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US11/861,658 US8030212B2 (en) 2007-09-26 2007-09-26 Process for selective area deposition of inorganic materials
PCT/US2008/010759 WO2009042046A1 (en) 2007-09-26 2008-09-16 Process for selective area deposition of inorganic materials

Publications (2)

Publication Number Publication Date
JP2010540773A true JP2010540773A (ja) 2010-12-24
JP2010540773A5 JP2010540773A5 (enExample) 2012-11-22

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
JP2010526894A Pending JP2010540773A (ja) 2007-09-26 2008-09-16 無機材料の選択領域堆積法

Country Status (6)

Country Link
US (1) US8030212B2 (enExample)
EP (1) EP2217740B1 (enExample)
JP (1) JP2010540773A (enExample)
CN (1) CN101809195B (enExample)
TW (1) TW200923122A (enExample)
WO (1) WO2009042046A1 (enExample)

Cited By (19)

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JP2010540774A (ja) * 2007-09-26 2010-12-24 イーストマン コダック カンパニー 光学膜の製造方法
JP2011501779A (ja) * 2007-09-26 2011-01-13 イーストマン コダック カンパニー 無機材料を選択領域堆積するためのオルガノシロキサン材料
JP5282989B1 (ja) * 2012-07-18 2013-09-04 Ｄｉｃ株式会社 ネマチック液晶組成物及びこれを用いた液晶表示素子
KR101567536B1 (ko) 2013-12-17 2015-11-10 인하대학교 산학협력단 패턴의 형성방법
US9200202B2 (en) 2012-07-18 2015-12-01 Dic Corporation Nematic liquid crystal composition and liquid crystal display device using the same
JP2016527395A (ja) * 2013-06-27 2016-09-08 ベネク・オサケユキテュアＢｅｎｅｑ Ｏｙ 基板の表面をコーティングするための方法および装置
WO2016147941A1 (ja) * 2015-03-13 2016-09-22 株式会社村田製作所 原子層堆積阻害材料
KR20180061052A (ko) * 2016-11-29 2018-06-07 에이에스엠 아이피 홀딩 비.브이. 산화물 박막의 증착
KR20200004245A (ko) 2018-07-02 2020-01-13 도쿄엘렉트론가부시키가이샤 선택적으로 막을 형성하는 방법 및 시스템
KR20200019271A (ko) * 2017-07-18 2020-02-21 어플라이드 머티어리얼스, 인코포레이티드 금속 표면들 상에 블로킹 층들을 증착시키기 위한 방법들
WO2020184212A1 (ja) * 2019-03-13 2020-09-17 東京エレクトロン株式会社 成膜方法
JP2020172704A (ja) * 2019-04-12 2020-10-22 エーエスエム アイピー ホールディング ビー．ブイ． 金属表面上の金属酸化物の選択的堆積
JP2020180368A (ja) * 2019-03-29 2020-11-05 ピコサン オーワイＰｉｃｏｓｕｎ Ｏｙ 基板コーティング
KR20220050198A (ko) 2019-09-05 2022-04-22 도쿄엘렉트론가부시키가이샤 성막 방법
KR20230110621A (ko) 2020-12-09 2023-07-24 도쿄엘렉트론가부시키가이샤 성막 방법
KR20230150367A (ko) 2021-03-09 2023-10-30 도쿄엘렉트론가부시키가이샤 성막 방법 및 성막 시스템
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US20110073039A1 (en) * 2009-09-28 2011-03-31 Ron Colvin Semiconductor deposition system and method
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Cited By (38)

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