JP2010534118A - 熱噴流プリント装置および熱噴流プリント方法 - Google Patents
熱噴流プリント装置および熱噴流プリント方法 Download PDFInfo
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- JP2010534118A JP2010534118A JP2010512405A JP2010512405A JP2010534118A JP 2010534118 A JP2010534118 A JP 2010534118A JP 2010512405 A JP2010512405 A JP 2010512405A JP 2010512405 A JP2010512405 A JP 2010512405A JP 2010534118 A JP2010534118 A JP 2010534118A
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- B05B17/06—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations
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- B05B17/0638—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations generated by electrical means, e.g. piezoelectric transducers spray being produced by discharging the liquid or other fluent material through a plate comprising a plurality of orifices
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
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- H05B33/10—Apparatus or processes specially adapted to the manufacture of electroluminescent light sources
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
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- H—ELECTRICITY
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/10—Deposition of organic active material
- H10K71/12—Deposition of organic active material using liquid deposition, e.g. spin coating
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Abstract
【選択図】図13
Description
本出願の開示内容は、基板上に薄膜パターンを効率よく積層する方法および装置に関する。より具体的に言えば、本出願の開示内容は、LEDや他の種類のディスプレイの部品を形成する基板の上に薄膜を積層する方法および装置に関する。
(1)相対的(relative)な真空環境において有機材料を熱蒸発させた後、基板上でこの有機材料の蒸気を凝縮させる。
(2)溶媒に有機材料を溶解させ、そうして得られた溶液で基板をコーティングした後、溶媒を除去する。
先ず、1つの実施の形態において、実質的に固体の状態で薄膜を基板上に積層する方法および装置を開示する。こうした薄膜は、例えば、OLEDや面積の大きいトランジスタ回路の設計および製造に用いられる。また、別の実施の形態では、実質的に固体の状態の材料の薄膜を基板上に積層する方法および装置を開示する。また、別の実施の形態では、実質的に溶媒を伴わない材料から成る薄膜を基板上に積層する方法および装置を開示する。こうした薄膜は、例えば、OLEDや面積の大きいトランジスタ回路の設計および製造に用いられる。ここで説明する装置および方法によって積層される材料には、有機材料、金属材料、無機半導体および絶縁体が含まれる(例:無機酸化物、カルコゲニド、IV族半導体、III−V族化合物半導体、II−VI族半導体)。
図1Aが示すのは、基板上に材料を積層する装置の一例であり、当該装置は、チャンバ130、開口部170、放出ノズル180、マイクロ孔管(micro-porous conduit)160を有する。チャンバ130は、液体状態でインクを受け取り、開口部170から放出ノズル180までインクを移動させる。インクは、キャリア液の中に粒子を懸濁または溶解させたものとすることができる。これら粒子は、単一の分子または原子から成るものでもよいし、複数の分子および/または原子の集合から成るものでもよい。開口部170と放出ノズル180との間の通路が送出路となっている。図1Aの実施の形態では、放出ノズル180は、仕切り165で隔てられた複数の管160を有する。管160の内部にはマイクロ孔を有する素材を入れてもよい。放出ノズル180の面のうち開口部170に近い側の面には、放出ノズル180への入口ポートが形作られており、放出ノズル180のうち開口部170から遠い側の面には出口ポートが形作られている。基板(図示せず)は、放出ノズル180の出口ポートの近くに置かれて、積層されるインクをノズルから受け止める。
図2A〜2Dは、本発明が開示する実施の形態によって基板上にインクを積層する処理を概略的に示している。本発明が開示する実施の形態を用いれば、様々に異なる材料や薄膜を積層することができるが、図2の実施の形態では、インクは実質的に固体の状態で積層される。図2Aでは、インク101がチャンバ130に供給される。インク101の成分については従来通りとすることができる。本実施の形態において、インク101は、キャリア液の中に多数の粒子を含ませて作られた液体インクである。キャリア液は1以上の溶媒で構成することができるが、その溶媒の蒸気圧は、搬送・積層処理の間に溶媒がほぼ蒸発してキャリア液中の多数の粒子が固体粒子の状態で積層されることになる、というものになっている。これにより、積層された多数の固体粒子が基板上に薄膜を成す。
放出ノズル180は、基端面181(あるいは入口ポート)と先端面182(あるいは出口ポート)とを有する。基端面181と先端面182との間には、複数の仕切り160と管165とが介在する。基端面181はチャンバ130に面しており、先端面182は基板190に面している。ノズルヒータ150を起動すると、放出ノズル180の温度が周囲温度を上回り、それによって、管160にその時点で残っている液滴102からキャリア液を急速に蒸発させることができる。ノズルヒータ150の起動は、インク吐出装置にエネルギを与える前(チャンバ130から開口部170を通って放出ノズル180に進むインク液滴102が量り取られる前)であってもよいし、液滴102が放出ノズル180に達した後でもよい。言い換えると、チャンバヒータ110および放出ノズルヒータ150は、編成によって、同時に脈動させることも順番に脈動させることもできる。
図3Aは、材料を積層するために発熱体を用いる放出用配列を図示している。図3Aの装置は、液体301の収容のためのチャンバ330を有する。液体301には、基板上に積層する粒子を溶解または懸濁した状態で含ませることができる。チャンバ330は更に、複数のチャンバ開口部370を有する。図3Aの実施の形態はインク吐出ヒータ310を有し、これによって、各チャンバ開口部370から液体インクを脈動的に量り取り、放出ノズル380に向けて送り出す。放出ノズル380は配列の形で配置されており、各放出ノズル380は対応するチャンバ開口部370とつながっている。ノズルヒータ350は放出ノズル380の近くに配置されており、実質的に全てのキャリア液を蒸発させる。その結果、放出ノズル配列は固体粒子を積層することができる。
図9Bでは、気化性の反応物質920が放出ノズル825に送られ、さらに圧力を受けてマイクロ孔840を通過する。気化性の反応物質920に粒子を懸濁した形で含ませ、それによって合成材料930を形成することにしてもよい(必須ではない)。ヒータ830を起動すれば、積層しようとする固体インク粒子を含んだ反応物質ガス流909を加熱することができる。マイクロ孔840から出る気化性の反応物質(図示せず)は、排出ガス(図示せず)を使ってシステムの外に運び出すことができる。そして、ヒータ830からの熱によって所望の化学反応が開始され、基板860の上に所望の材料930が作られる。また、別の実施の形態では、本放出装置850は、効率的かつ対象を空間的に局所化した発熱体として、気体環境または液体環境のいずれかに入れて用いることができ、当該環境ではヒータ830からの熱を用いて化学合成プロセスを開始させる。
Claims (30)
- 基板上にインクを正確に積層するためのインク積層システムであって、
キャリア液にインク粒子が含まれた混合物を格納する格納手段と、
格納手段に接続されて混合物の少なくとも一部を脈動的に量り取る計量手段と、
チャンバから放出ノズルまで前記量り取られたインクを搬送する搬送手段と、
キャリア液を蒸発させて放出ノズルで実質的に固体のインク粒子を形成する蒸発手段と、
前記実質的に固体のインク粒子を放出ノズルから基板上に放出する放出手段と、
を有することを特徴とするインク積層システム。 - 格納手段は、外部の貯蔵器と連通して流体を受け取るチャンバを有すること、
を特徴とする請求項1に記載のインク積層システム。 - 格納手段には、インクの混合物を格納するための貯蔵器が形成されていること、
を特徴とする請求項1に記載のインク積層システム。 - 計量手段は、離散パルスでチャンバを加熱するように構成されていること、
を特徴とする請求項1に記載のインク積層システム。 - 計量手段と、気化した懸濁粒子を放出する手段とのうち少なくとも1つを制御する制御手段を更に有すること、
を特徴とする請求項1に記載のインク積層システム。 - 制御手段は、命令でプログラムされたプロセッサを更に有し、当該プロセッサは、計量手段を起動してインクを量り取らせ、その後、放出手段を作動させて固体のインク粒子を基板上に送らせること、
を特徴とする請求項5に記載のインク積層システム。 - 制御手段は命令でプログラムされた別のプロセッサを更に有し、当該別のプロセッサは、脈動エネルギを用いて計量手段と放出手段とを作動させること、
を特徴とする請求項6に記載のインク積層システム。 - 計量手段は、離散パルスで機械的にチャンバに圧力を加えるように構成されていること、
を特徴とする請求項1に記載のインク積層システム。 - 吐出手段はヒータから成ること、
を特徴とする請求項1に記載のインク積層システム。 - 吐出手段は圧電素子から成ること、
を特徴とする請求項1に記載のインク積層システム。 - 蒸発手段はヒータから成ること、
を特徴とする請求項1に記載のインク積層システム。 - 放出手段は圧電素子から成ること、
を特徴とする請求項1に記載のインク積層システム。 - 放出手段はヒータから成ること、
を特徴とする請求項1に記載のインク積層システム。 - 基板上に粒子を積層する積層装置であって、
キャリア液の中に複数の粒子を有する液体状態のインクを受け取るチャンバと、
チャンバに連結され、チャンバから送られるインクを量り取って放出ノズルに送る吐出装置と、を有し、
放出ノズルはキャリア液を蒸発させて実質的に固体のインク粒子を形成するものであり、放出ノズルはチャンバに対して軸回転することで実質的に固体のインク粒子を放出し、そして、基板上に実質的に固体の粒子を積層すること、
を特徴とする積層装置。 - チャンバと放出ノズルとを収容するハウジングを更に有すること、
を特徴とする請求項14に記載の積層装置。 - チャンバと連通しているインク貯蔵器を更に有すること、
を特徴とする請求項14に記載の積層装置。 - 吐出装置には、チャンバから送られてくるインクを量り取るためのヒータが形成されていること、
を特徴とする請求項14に記載の積層装置。 - 吐出装置には、チャンバから送られてくるインクを量り取るための圧電素子が形成されていること、
を特徴とする請求項14に記載の積層装置。 - 吐出装置は、チャンバからインクを量り取るために、振幅と周波数とを有するエネルギパルスをチャンバに供給すること、
を特徴とする請求項14に記載の積層装置。 - 放出ノズルは複数のマイクロ孔を更に有し、当該複数のマイクロ孔は液体状態で量り取られたインクを受け取り、放出ノズルはマイクロ孔から基板上へ実質的に固体のインク粒子を吐出すること、
を特徴とする請求項14に記載の積層装置。 - 放出ノズルはキャリア液を蒸発させるためのヒータを更に有すること、
を特徴とする請求項14に記載の積層装置。 - 放出ノズルは、実質的に固体の粒子を気化させ、前記粒子を実質的に気体の形で基板上に放出すること、
を特徴とする請求項14に記載の積層装置。 - プリント装置の制御システムであって、
第1のコントローラと第2のコントローラとを有し、
第1のコントローラは、第1のメモリ回路に接続された第1のプロセッサ回路を有し、第1のメモリ回路には第1のプロセッサ回路を動作させるための命令が格納されており、
第1のプロセッサ回路は、各々がキャリア液の中に複数の粒子を溶解または懸濁した状態で含む液体インクを受け取る、というチャンバを複数特定し、当該複数のチャンバの各々に吐出すべき液体インクを量り取らせ、
第2のコントローラは、第2のメモリ回路と接続された第2のプロセッサ回路を有し、第2のメモリ回路には第2のプロセッサ回路を動作させるための命令が格納されており、
第2のプロセッサ回路は、複数のチャンバのうち対応する1つから液体を受け取る放出ノズルを複数特定し、特定した複数の放出ノズルを起動させてキャリア液の少なくとも一部を蒸発させ、そして、特定した複数の放出ノズルの各々に指示して基板上に実質的に固体のインク粒子を積層させること、
を特徴とする制御システム。 - 第1のプロセッサは、利用可能なチャンバ群から複数のチャンバを特定すること、
を特徴とする請求項23に記載の制御システム。 - 第1のプロセッサが各チャンバに量り取らせる吐出対象の流体インクの量は実質的に同一であること、
を特徴とする請求項23に記載の制御システム。 - 第1のプロセッサは、複数のチャンバのうちの第1のチャンバに対し、複数のチャンバのうちの第2のチャンバに比べて多い量の流体インクを量り取らせること、
を特徴とする請求項23に記載の制御システム。 - 第1のプロセッサは、複数のチャンバの各々にインクを量り取らせるために、各チャンバに接続されたヒータ、圧電素子または弁を1以上起動させること、
を特徴とする請求項23に記載の制御システム。 - 第2のプロセッサは複数の放出ノズルの各々に対して固体のインク粒子の積層を行わせるために、基板に対して放出ノズルの面を回転させること、
を特徴とする請求項23に記載の制御システム。 - 第2のプロセッサは複数の放出ノズルの各々に対して固体のインク粒子の積層を行わせるために、放出ノズルの各々に対応する複数の圧電素子を動作させること、
を特徴とする請求項23に記載の制御システム。 - 第2のプロセッサは複数の放出ノズルの各々に対して固体のインク粒子の基板上への積層を行わせるために、放出ノズルの各々に対応する複数のヒータを動作させること、
を特徴とする請求項23に記載の制御システム。
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