JP2010515823A5 - - Google Patents

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Publication number
JP2010515823A5
JP2010515823A5 JP2009544853A JP2009544853A JP2010515823A5 JP 2010515823 A5 JP2010515823 A5 JP 2010515823A5 JP 2009544853 A JP2009544853 A JP 2009544853A JP 2009544853 A JP2009544853 A JP 2009544853A JP 2010515823 A5 JP2010515823 A5 JP 2010515823A5
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elongate
gaseous material
gas
discharge channel
channels
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JP2009544853A
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JP2010515823A (ja
JP5466019B2 (ja
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Priority claimed from US11/620,740 external-priority patent/US7789961B2/en
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JP2009544853A 2007-01-08 2007-12-26 薄膜堆積のための供給装置 Expired - Fee Related JP5466019B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US11/620,740 2007-01-08
US11/620,740 US7789961B2 (en) 2007-01-08 2007-01-08 Delivery device comprising gas diffuser for thin film deposition
PCT/US2007/026326 WO2008085474A2 (en) 2007-01-08 2007-12-26 Delivery device for thin film deposition

Publications (3)

Publication Number Publication Date
JP2010515823A JP2010515823A (ja) 2010-05-13
JP2010515823A5 true JP2010515823A5 (enExample) 2012-01-05
JP5466019B2 JP5466019B2 (ja) 2014-04-09

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JP2009544853A Expired - Fee Related JP5466019B2 (ja) 2007-01-08 2007-12-26 薄膜堆積のための供給装置

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US (2) US7789961B2 (enExample)
EP (4) EP2102383B1 (enExample)
JP (1) JP5466019B2 (enExample)
TW (1) TWI419992B (enExample)
WO (1) WO2008085474A2 (enExample)

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