JP2010515822A5 - - Google Patents

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Publication number
JP2010515822A5
JP2010515822A5 JP2009544852A JP2009544852A JP2010515822A5 JP 2010515822 A5 JP2010515822 A5 JP 2010515822A5 JP 2009544852 A JP2009544852 A JP 2009544852A JP 2009544852 A JP2009544852 A JP 2009544852A JP 2010515822 A5 JP2010515822 A5 JP 2010515822A5
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JP
Japan
Prior art keywords
elongate
channels
gaseous material
channel
gaseous
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2009544852A
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English (en)
Japanese (ja)
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JP2010515822A (ja
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Publication date
Priority claimed from US11/620,738 external-priority patent/US20080166880A1/en
Application filed filed Critical
Publication of JP2010515822A publication Critical patent/JP2010515822A/ja
Publication of JP2010515822A5 publication Critical patent/JP2010515822A5/ja
Pending legal-status Critical Current

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JP2009544852A 2007-01-08 2007-12-26 堆積用供給装置 Pending JP2010515822A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US11/620,738 US20080166880A1 (en) 2007-01-08 2007-01-08 Delivery device for deposition
PCT/US2007/026314 WO2008085468A1 (en) 2007-01-08 2007-12-26 Delivery device for deposition

Publications (2)

Publication Number Publication Date
JP2010515822A JP2010515822A (ja) 2010-05-13
JP2010515822A5 true JP2010515822A5 (enExample) 2010-12-09

Family

ID=39284739

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2009544852A Pending JP2010515822A (ja) 2007-01-08 2007-12-26 堆積用供給装置

Country Status (5)

Country Link
US (1) US20080166880A1 (enExample)
EP (1) EP2102382A1 (enExample)
JP (1) JP2010515822A (enExample)
TW (1) TW200902750A (enExample)
WO (1) WO2008085468A1 (enExample)

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