JP2010503213A - コンタクトエリアに金属シリサイド領域が局所的に設けられたトランジスタ及び該トランジスタを形成するための方法 - Google Patents
コンタクトエリアに金属シリサイド領域が局所的に設けられたトランジスタ及び該トランジスタを形成するための方法 Download PDFInfo
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- JP2010503213A JP2010503213A JP2009526713A JP2009526713A JP2010503213A JP 2010503213 A JP2010503213 A JP 2010503213A JP 2009526713 A JP2009526713 A JP 2009526713A JP 2009526713 A JP2009526713 A JP 2009526713A JP 2010503213 A JP2010503213 A JP 2010503213A
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- metal silicide
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- forming
- silicon
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- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical group [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 title claims abstract description 210
- 229910021332 silicide Inorganic materials 0.000 title claims abstract description 204
- 229910052751 metal Inorganic materials 0.000 title claims abstract description 189
- 239000002184 metal Substances 0.000 title claims abstract description 189
- 238000000034 method Methods 0.000 title claims abstract description 124
- 230000005669 field effect Effects 0.000 claims abstract description 18
- 239000003989 dielectric material Substances 0.000 claims abstract description 13
- 239000004065 semiconductor Substances 0.000 claims description 80
- 239000000463 material Substances 0.000 claims description 60
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 46
- 229910052710 silicon Inorganic materials 0.000 claims description 46
- 239000010703 silicon Substances 0.000 claims description 46
- 239000003870 refractory metal Substances 0.000 claims description 38
- 238000000137 annealing Methods 0.000 claims description 22
- 239000010953 base metal Substances 0.000 claims description 18
- 230000001939 inductive effect Effects 0.000 claims description 14
- 230000015572 biosynthetic process Effects 0.000 claims description 13
- 238000006243 chemical reaction Methods 0.000 claims description 11
- 206010010144 Completed suicide Diseases 0.000 claims 1
- 230000008569 process Effects 0.000 abstract description 83
- 230000000694 effects Effects 0.000 abstract description 9
- 230000002411 adverse Effects 0.000 abstract description 5
- 239000010410 layer Substances 0.000 description 96
- 238000004519 manufacturing process Methods 0.000 description 30
- 230000001965 increasing effect Effects 0.000 description 20
- 230000007246 mechanism Effects 0.000 description 13
- 239000000758 substrate Substances 0.000 description 13
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 10
- 238000005516 engineering process Methods 0.000 description 10
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 10
- 229910017052 cobalt Inorganic materials 0.000 description 9
- 239000010941 cobalt Substances 0.000 description 9
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 9
- 238000012545 processing Methods 0.000 description 9
- 239000002019 doping agent Substances 0.000 description 8
- 239000004020 conductor Substances 0.000 description 6
- 230000006698 induction Effects 0.000 description 6
- 238000000151 deposition Methods 0.000 description 5
- 238000013461 design Methods 0.000 description 5
- 229910052759 nickel Inorganic materials 0.000 description 5
- RUFLMLWJRZAWLJ-UHFFFAOYSA-N nickel silicide Chemical compound [Ni]=[Si]=[Ni] RUFLMLWJRZAWLJ-UHFFFAOYSA-N 0.000 description 5
- 229910021334 nickel silicide Inorganic materials 0.000 description 5
- 229910052697 platinum Inorganic materials 0.000 description 5
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 5
- 229920005591 polysilicon Polymers 0.000 description 5
- 239000002800 charge carrier Substances 0.000 description 4
- 238000005229 chemical vapour deposition Methods 0.000 description 4
- 238000005137 deposition process Methods 0.000 description 4
- 239000011229 interlayer Substances 0.000 description 4
- 238000001465 metallisation Methods 0.000 description 4
- 238000004544 sputter deposition Methods 0.000 description 4
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 4
- 239000010937 tungsten Substances 0.000 description 4
- 229910052721 tungsten Inorganic materials 0.000 description 4
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 3
- 230000004888 barrier function Effects 0.000 description 3
- 230000008901 benefit Effects 0.000 description 3
- 239000003990 capacitor Substances 0.000 description 3
- 238000009792 diffusion process Methods 0.000 description 3
- 229910052732 germanium Inorganic materials 0.000 description 3
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 3
- 238000000059 patterning Methods 0.000 description 3
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 3
- 239000002210 silicon-based material Substances 0.000 description 3
- 238000009751 slip forming Methods 0.000 description 3
- 125000006850 spacer group Chemical group 0.000 description 3
- 239000010936 titanium Substances 0.000 description 3
- 229910052719 titanium Inorganic materials 0.000 description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 239000012876 carrier material Substances 0.000 description 2
- 239000000356 contaminant Substances 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 238000011161 development Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000002513 implantation Methods 0.000 description 2
- 239000011810 insulating material Substances 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 239000002861 polymer material Substances 0.000 description 2
- 230000009467 reduction Effects 0.000 description 2
- 238000003860 storage Methods 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 229910000881 Cu alloy Inorganic materials 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 230000003213 activating effect Effects 0.000 description 1
- 230000004913 activation Effects 0.000 description 1
- 238000009303 advanced oxidation process reaction Methods 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 229910021419 crystalline silicon Inorganic materials 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
- 238000001459 lithography Methods 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 229910001092 metal group alloy Inorganic materials 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- -1 portion 113 Chemical compound 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 230000000087 stabilizing effect Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- 238000007704 wet chemistry method Methods 0.000 description 1
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Abstract
Description
以下、本発明の実施例を以下に記載する。なお、簡素化のため、現実の実施品におけるすべての特徴を本明細書に記載することはしていない。当然のことながら、そのような現実の実施品の開発においては、開発者における特定の目標を達成するため、システム的制限やビジネス的制限との摺り合せなど、多くの特定の実施の決定がなされる。それらは各実施形態によって様々に変化するものである。更に、そのような開発努力は複雑で時間を消費するものであるのは当然のことであるが、それでもなお、この開示の恩恵を有する当業者にとっては通常作業の範疇に入るものである。
Claims (17)
- 半導体デバイス(200)の回路素子(250)を覆う誘電材料(210)中に、前記回路素子(250)のシリコン含有コンタクト領域(203C、206C)を接続するコンタクト開口部(209A)を形成するステップと、
前記コンタクト開口部(209A)を通って前記コンタクト領域(203C、206C)中に金属シリサイド(213)を形成するステップと、
前記コンタクト開口部(209A)中に、前記金属シリサイド(213)に接続するコンタクト素子を形成するステップと、を含む方法。 - 前記金属シリサイド(213)を形成する前に、前記コンタクト領域(203C、206C)中にベース金属シリサイド(220)を形成するステップをさらに含む、請求項1記載の方法。
- 前記金属シリサイド(213)の形成ステップは、前記シリコン含有コンタクト領域(203C、206C)を覆うために、耐火金属(212)を埋め込み、前記金属シリサイド(213)を形成するために前記耐火金属(212)をアニールするステップを含む、請求項1記載の方法。
- 前記金属シリサイド(413)が前記コンタクト開口部に形成され、一方で、前記誘電材料(410)中に形成される第2コンタクト開口部がマスキングされて、前記金属シリサイド(413)が前記第2コンタクト開口部中に形成されるのを防ぐようにする、請求項1記載の方法。
- 前記ベース金属シリサイド(220)は、前記シリサイド(213)とは材料の成分が異なる、請求項2記載の方法。
- 前記コンタクト領域中に形成される前記ベース金属シリサイド(320)とは少なくとも1つの特性が異なる第2ベース金属シリサイド(320A)を含む第2コンタクト領域に接続する第2コンタクト開口部を形成するステップをさらに含む、請求項2記載の方法。
- 前記ベース金属シリサイド(320)と前記第2ベース金属シリサイド(320)とは異なる厚みで形成される、請求項6記載の方法。
- 誘電層(209)中に形成されるコンタクト開口部(209A)により露出される回路素子(250)の、シリコン含有コンタクト領域(203C、206C)の一部に耐火金属(212)を形成するステップと、
金属シリサイド(213)を形成するために、前記耐火金属(212)とシリコン間で化学反応を起こすステップと、を含む方法。 - 前記コンタクト開口部(209A)中に、前記金属シリサイド(213)に接続するコンタクト素子を形成するステップをさらに含む、請求項8記載の方法。
- 前記回路素子(350)のチャネル領域(307)に対して少なくとも1つの歪み誘発ソースを形成するステップをさらに含む、請求項8記載の方法。
- 前記一部を露出するため、前記コンタクト開口部(209A)を形成する前に、前記コンタクト領域(203C、206C)中に第1ベース金属シリサイド(320)を形成するステップをさらに含む、請求項10記載の方法。
- 前記第1ベース金属シリサイド(320)は、前記歪み誘発ソースが前記第2ベース金属シリサイド(320A)により誘発される歪みとは異なる種類の歪みを前記チャネル領域(307)中に生成する場合に、第2回路素子(350A)の第2ベース金属シリサイド(320A)よりも薄く形成される、請求項11記載の方法。
- 半導体デバイス(200)であって、
誘電材料(210)中に埋め込まれ、金属シリサイドが堆積された部分(213)を含む少なくとも1つのシリコン含有領域(203、206)を有する回路素子(250)と、
前記誘電材料(210)中に形成され、前記少なくとも1つのシリコン含有領域(203、206)のコンタクト領域(203C、206C)に実質的に位置合せされるコンタクト素子と、を含み、前記堆積された金属シリサイド部位(213)は前記コンタクト領域(203C、206C)に実質的に集中する、半導体デバイス。 - 前記少なくとも1つのシリコン含有領域(203、206)中に実質的に連続的に形成される金属シリサイド層(220)をさらに含み、前記金属シリサイド層(220)は前記堆積された金属シリサイド部分(213)よりも薄い、請求項13記載の半導体デバイス(200)。
- 前記少なくとも1つのシリコン含有領域(203、206)は、第1電界効果トランジスタ(250)のドレイン領域(206)、ソース領域(206)およびゲート電極(203)のうちの1つである、請求項13記載の半導体デバイス(200)。
- 前記第1電界効果トランジスタ(250)のチャネル領域(207)中に歪みを生成する少なくとも1つの歪み誘発ソースをさらに含む、請求項15記載の半導体デバイス(200)。
- 第2電界効果トランジスタ(350A)に接続する第2コンタクト素子(315)をさらに含み、前記第2電界効果トランジスタ(350A)は前記第1電界効果トランジスタ(350)よりも金属シリサイド量が多い、請求項16記載の半導体デバイス(300)。
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PCT/US2007/019073 WO2008027473A2 (en) | 2006-08-31 | 2007-08-29 | A transistor having a locally provided metal silicide region in contact areas and a method of forming the transistor |
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TWI446414B (zh) | 2014-07-21 |
CN101536176A (zh) | 2009-09-16 |
EP2070112A2 (en) | 2009-06-17 |
KR20090048514A (ko) | 2009-05-13 |
CN101536176B (zh) | 2011-09-21 |
US7799682B2 (en) | 2010-09-21 |
DE102006040764B4 (de) | 2010-11-11 |
DE102006040764A1 (de) | 2008-03-20 |
WO2008027473A2 (en) | 2008-03-06 |
WO2008027473A3 (en) | 2008-04-17 |
US20080054371A1 (en) | 2008-03-06 |
TW200832526A (en) | 2008-08-01 |
KR101366201B1 (ko) | 2014-02-21 |
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