JP2010280150A - 精密ホットプレス装置における転写部の加熱冷却制御方法及び装置 - Google Patents
精密ホットプレス装置における転写部の加熱冷却制御方法及び装置 Download PDFInfo
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- B29C35/0288—Controlling heating or curing of polymers during moulding, e.g. by measuring temperatures or properties of the polymer and regulating the process
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
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- B29C35/00—Heating, cooling or curing, e.g. crosslinking or vulcanising; Apparatus therefor
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- B29C35/08—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould by wave energy or particle radiation
- B29C35/0805—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould by wave energy or particle radiation using electromagnetic radiation
- B29C2035/0811—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould by wave energy or particle radiation using electromagnetic radiation using induction
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C35/00—Heating, cooling or curing, e.g. crosslinking or vulcanising; Apparatus therefor
- B29C35/02—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould
- B29C35/08—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould by wave energy or particle radiation
- B29C35/0805—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould by wave energy or particle radiation using electromagnetic radiation
- B29C2035/0822—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould by wave energy or particle radiation using electromagnetic radiation using IR radiation
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C35/00—Heating, cooling or curing, e.g. crosslinking or vulcanising; Apparatus therefor
- B29C35/16—Cooling
- B29C2035/1616—Cooling using liquids
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C35/00—Heating, cooling or curing, e.g. crosslinking or vulcanising; Apparatus therefor
- B29C35/16—Cooling
- B29C2035/1616—Cooling using liquids
- B29C2035/1625—Cooling using liquids other than water
- B29C2035/1633—Cooling using liquids other than water oil
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C35/00—Heating, cooling or curing, e.g. crosslinking or vulcanising; Apparatus therefor
- B29C35/16—Cooling
- B29C2035/1658—Cooling using gas
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C35/00—Heating, cooling or curing, e.g. crosslinking or vulcanising; Apparatus therefor
- B29C35/02—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C35/00—Heating, cooling or curing, e.g. crosslinking or vulcanising; Apparatus therefor
- B29C35/02—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould
- B29C35/08—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould by wave energy or particle radiation
- B29C35/0805—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould by wave energy or particle radiation using electromagnetic radiation
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Abstract
【解決手段】転写部の温度が目標温度に達する前に、加熱手段又は冷却手段によって転写部へ与えた又は奪ったエネルギー量(熱量)と観測された転写部に出入りするエネルギー量とを比較し、両エネルギー量の差から余剰又は過冷却エネルギー量を算出し、余剰又は過冷却エネルギー量に基づいて転写部の加熱又は冷却を行う。転写部の温度は、ヒータ等の加熱手段や冷却手段が出力する加熱又は冷却の熱量、及び熱の伝達時間を計算し、加熱手段から発生する熱量を、冷却にて打ち消すことにより、転写部の温度の目標温度への急速な制御が可能となる。
【選択図】図2
Description
そこで、精密ホットプレス装置において、転写部の加熱・冷却に要する時間を可及的に短縮するため、加熱冷却機構による熱の出入りを管理する点で解決すべき課題がある。
[数式2] 観測されている仕事量(W・min)=0.278×60(秒)×比熱C(Kj/kg・℃)×加熱機構重量(kg)×上昇した温度t(℃)
[数式3] 加熱冷却機構部の放熱量(W・min)=(保温部以外の表面積(m^2))×保温部以外の放熱損失係数1(W/m^2)+保温部の表面積(m^2)×保温部の放熱損失係数2(W/m^2))×ヒータON時間(min)
[数式4] 伝わっていない仕事量(W・min)=[数式1]−[数式2]−[数式3]
[数式5] 水が奪うべき仕事量(W/min)=流量(L/min)×(流出後の水温T2(℃)−流入前の温度T1(℃))
3 加熱媒体 4 断熱部
5 目標温度 6 制御開始温度
7 開示技術の温度推移 8 従来技術の温度推移
9 本発明の温度推移
17 転写部
20 制御部 21 プログラマブルコントローラ
22 流体制御機器 23 温度調整機器
25 センサ部 251,252 温度センサ
Claims (6)
- 基板に対して微細構造の熱転写を行う転写部を加熱又は冷却する精密ホットプレス装置における転写部の加熱冷却において、
前記転写部を目標温度へ加熱又は冷却する際に、前記転写部の温度が前記目標温度に達する前に、当該加熱により前記転写部に与えた又は当該冷却により前記転写部から奪ったエネルギー量と前記転写部へ出入りするのが観測されたエネルギー量を比較し、当該両エネルギー量の差から、余剰又は過冷却エネルギー量を算出し、前記余剰又は過冷却エネルギー量に基づいて前記転写部の加熱又は冷却を行うこと
を特徴とする精密ホットプレス装置における転写部の加熱冷却制御方法。 - 請求項1に記載の精密ホットプレス装置における転写部の加熱冷却制御方法において、
前記エネルギー量として、放射によるエネルギー、潜熱によるエネルギー、ブローによるエネルギー、また、熱効率、安全率を考慮して、前記余剰又は過冷却エネルギー量を算出すること
を特徴とする精密ホットプレス装置における転写部の加熱冷却制御方法。 - 基板に対して微細構造の熱転写を行う転写部を熱伝達可能に支持する転写ブロック、前記転写ブロックを加熱する加熱手段及び前記転写ブロックを冷却する冷却手段、前記転写ブロックの温度を監視する温度センサ、並びに前記温度センサが検出した前記転写ブロックの温度に応じて前記加熱手段及び前記冷却手段を制御する制御手段を備えた精密ホットプレス装置における転写部の加熱冷却制御装置において、
前記制御手段は、前記転写部を目標温度へ加熱又は冷却する際に、前記転写部の温度が前記目標温度に達する前に、加熱により前記転写部に与えたエネルギー量又は当該冷却により前記転写部から奪ったエネルギー量と前記転写部へ出入りするのが観測されたエネルギー量を比較し、当該両エネルギー量の差から、余剰又は過冷却エネルギー量を算出し、前記余剰又は過冷却エネルギー量に基づいて前記転写部の加熱又は冷却を行うこと
を特徴とする精密ホットプレス装置における転写部の加熱冷却制御装置。 - 請求項3に記載の精密ホットプレス装置における転写部の加熱冷却制御装置において、
前記制御手段は、前記余剰エネルギー量又は前記過冷却エネルギー量を打ち消した後に、通常のPID温度制御を行うこと
を特徴とする精密ホットプレス装置における転写部の加熱冷却制御装置。 - 請求項3又は4に記載の精密ホットプレス装置における転写部の加熱冷却制御装置おいて、
前記加熱手段は、電熱線、ランプ、又は誘導加熱であること
を特徴とする精密ホットプレス装置における転写部の加熱冷却制御装置。 - 請求項3又は4に記載の精密ホットプレス装置における転写部の加熱冷却制御装置において、
前記冷却手段は、水、ガス、エア、油等の冷却媒体を使用していること
を特徴とする精密ホットプレス装置における転写部の加熱冷却制御装置。
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JP2009135874A JP5368884B2 (ja) | 2009-06-05 | 2009-06-05 | 精密ホットプレス装置における転写部の加熱冷却制御方法及び装置 |
EP20100000595 EP2258543B1 (en) | 2009-06-05 | 2010-01-21 | Method and apparatus for controlling heating and cooling of transfer unit in precision hot press apparatus |
US12/690,947 US8735781B2 (en) | 2009-06-05 | 2010-01-21 | Method and apparatus for controlling heating and cooling of transfer unit in precision hot press apparatus |
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2013010216A (ja) * | 2011-06-28 | 2013-01-17 | Apic Yamada Corp | モールド金型及びこれを備えた樹脂モールド装置 |
JP2020157368A (ja) * | 2019-03-28 | 2020-10-01 | 株式会社日本製鋼所 | プレス装置の冷却制御方法およびプレス装置 |
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JP2013041805A (ja) * | 2011-07-20 | 2013-02-28 | Fuji Impulse Kk | インパルス式ヒートシーラー用のヒーター |
CN103203893B (zh) * | 2013-05-03 | 2015-06-10 | 湖州东方机械有限公司 | 油加热水冷却压力成型机 |
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JP2005329577A (ja) * | 2004-05-19 | 2005-12-02 | Mitsubishi Heavy Ind Ltd | 金型温度の調整装置および調整方法 |
JP2006159643A (ja) * | 2004-12-07 | 2006-06-22 | Shisuko:Kk | 熱プレス用の金型の加熱冷却システム及び加熱冷却方法 |
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JP2013010216A (ja) * | 2011-06-28 | 2013-01-17 | Apic Yamada Corp | モールド金型及びこれを備えた樹脂モールド装置 |
JP2020157368A (ja) * | 2019-03-28 | 2020-10-01 | 株式会社日本製鋼所 | プレス装置の冷却制御方法およびプレス装置 |
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US8735781B2 (en) | 2014-05-27 |
EP2258543B1 (en) | 2015-04-29 |
EP2258543A2 (en) | 2010-12-08 |
US20100307732A1 (en) | 2010-12-09 |
JP5368884B2 (ja) | 2013-12-18 |
EP2258543A3 (en) | 2013-07-31 |
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