JP2010232322A - 化合物半導体基板 - Google Patents
化合物半導体基板 Download PDFInfo
- Publication number
- JP2010232322A JP2010232322A JP2009076840A JP2009076840A JP2010232322A JP 2010232322 A JP2010232322 A JP 2010232322A JP 2009076840 A JP2009076840 A JP 2009076840A JP 2009076840 A JP2009076840 A JP 2009076840A JP 2010232322 A JP2010232322 A JP 2010232322A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- single crystal
- substrate
- crystal
- single layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 title claims abstract description 69
- 239000004065 semiconductor Substances 0.000 title claims abstract description 59
- 150000001875 compounds Chemical class 0.000 title claims abstract description 28
- 239000013078 crystal Substances 0.000 claims abstract description 106
- 239000010410 layer Substances 0.000 claims abstract description 88
- 239000002356 single layer Substances 0.000 claims abstract description 80
- 150000004767 nitrides Chemical class 0.000 claims abstract description 23
- 230000015572 biosynthetic process Effects 0.000 claims abstract description 16
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 11
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 11
- 239000010703 silicon Substances 0.000 claims abstract description 11
- 229910002704 AlGaN Inorganic materials 0.000 claims description 13
- 230000007547 defect Effects 0.000 abstract description 9
- 238000002425 crystallisation Methods 0.000 abstract 1
- 230000008025 crystallization Effects 0.000 abstract 1
- 238000000034 method Methods 0.000 description 28
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 description 24
- 229910002601 GaN Inorganic materials 0.000 description 23
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 description 21
- XCZXGTMEAKBVPV-UHFFFAOYSA-N trimethylgallium Chemical compound C[Ga](C)C XCZXGTMEAKBVPV-UHFFFAOYSA-N 0.000 description 8
- 230000000052 comparative effect Effects 0.000 description 6
- JLTRXTDYQLMHGR-UHFFFAOYSA-N trimethylaluminium Chemical compound C[Al](C)C JLTRXTDYQLMHGR-UHFFFAOYSA-N 0.000 description 6
- 239000007789 gas Substances 0.000 description 5
- 239000000203 mixture Substances 0.000 description 5
- 239000000463 material Substances 0.000 description 4
- 238000005229 chemical vapour deposition Methods 0.000 description 3
- 239000000470 constituent Substances 0.000 description 3
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 238000010030 laminating Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 2
- PIGFYZPCRLYGLF-UHFFFAOYSA-N Aluminum nitride Chemical compound [Al]#N PIGFYZPCRLYGLF-UHFFFAOYSA-N 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 1
- 229910021529 ammonia Inorganic materials 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 230000000593 degrading effect Effects 0.000 description 1
- 230000002542 deteriorative effect Effects 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 239000000155 melt Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 230000003746 surface roughness Effects 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/10—Inorganic compounds or compositions
- C30B29/40—AIIIBV compounds wherein A is B, Al, Ga, In or Tl and B is N, P, As, Sb or Bi
- C30B29/403—AIII-nitrides
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/02—Pretreatment of the material to be coated
- C23C16/0272—Deposition of sub-layers, e.g. to promote the adhesion of the main coating
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/301—AIII BV compounds, where A is Al, Ga, In or Tl and B is N, P, As, Sb or Bi
- C23C16/303—Nitrides
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
- C30B25/02—Epitaxial-layer growth
- C30B25/18—Epitaxial-layer growth characterised by the substrate
- C30B25/183—Epitaxial-layer growth characterised by the substrate being provided with a buffer layer, e.g. a lattice matching layer
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02367—Substrates
- H01L21/0237—Materials
- H01L21/02373—Group 14 semiconducting materials
- H01L21/02381—Silicon, silicon germanium, germanium
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02367—Substrates
- H01L21/02433—Crystal orientation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02436—Intermediate layers between substrates and deposited layers
- H01L21/02439—Materials
- H01L21/02455—Group 13/15 materials
- H01L21/02458—Nitrides
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02436—Intermediate layers between substrates and deposited layers
- H01L21/02494—Structure
- H01L21/02496—Layer structure
- H01L21/02505—Layer structure consisting of more than two layers
- H01L21/02507—Alternating layers, e.g. superlattice
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02518—Deposited layers
- H01L21/02521—Materials
- H01L21/02538—Group 13/15 materials
- H01L21/0254—Nitrides
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/12—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/20—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, only AIIIBV compounds
- H01L29/2003—Nitride compounds
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/778—Field effect transistors with two-dimensional charge carrier gas channel, e.g. HEMT ; with two-dimensional charge-carrier layer formed at a heterojunction interface
- H01L29/7786—Field effect transistors with two-dimensional charge carrier gas channel, e.g. HEMT ; with two-dimensional charge-carrier layer formed at a heterojunction interface with direct single heterostructure, i.e. with wide bandgap layer formed on top of active layer, e.g. direct single heterostructure MIS-like HEMT
- H01L29/7787—Field effect transistors with two-dimensional charge carrier gas channel, e.g. HEMT ; with two-dimensional charge-carrier layer formed at a heterojunction interface with direct single heterostructure, i.e. with wide bandgap layer formed on top of active layer, e.g. direct single heterostructure MIS-like HEMT with wide bandgap charge-carrier supplying layer, e.g. direct single heterostructure MODFET
Abstract
【解決手段】化合物半導体基板1は、結晶面方位が(111)面であるシリコン単結晶基板10と、シリコン単結晶基板10上に形成され、AlxGa1−xN単結晶(0<x≦1)で構成された第1バッファ層20aおよび20bと、第1バッファ層20aおよび20b上に形成され、厚さが250nm以上350nm以下のAlyGa1−yN単結晶(0≦y<0.1)で構成された第1単層30aと、厚さが5nm以上20nm以下のAlzGa1−zN単結晶(0.9<z≦1)で構成された第2単層30bとが交互に複数積層された第2バッファ層30と、第2バッファ層30上に形成され、少なくとも1層以上の窒化物系半導体単結晶層を含む半導体素子形成領域40と、を備える。
【選択図】図1
Description
結晶面方位(111)面、キャリア濃度1×1018/cm3、伝導型がn型で、CZ法により製造された直径が4インチ、厚さ500μmの片面が鏡面研磨されたSi単結晶基板10を、水素雰囲気下、1000℃で熱処理を行い、表面を清浄にした。
第2単層30bの厚さを1nmに制御し、その他は、実施例1と同様な方法で複数のサンプルを作製した。
第2単層30bの厚さを30nmに制御し、その他は、実施例1と同様な方法で複数のサンプルを作製した。
第1単層30aの厚さを200nmに制御し、その他は、実施例1と同様な方法で複数のサンプルを作製した。
第1単層30aの厚さを400nmに制御し、その他は、実施例1と同様な方法で複数のサンプルを作製した。
上述した第1単層20a及び第2単層20bを形成しないで、その他は、実施例1と同様な方法で複数のサンプルを作製した。
上述した第2単層20bをGaN単結晶とし、その他は、実施例1と同様な方法で複数のサンプルを作製した。
10・・・Si単結晶基板
20・・・第1バッファ層
30・・・第2バッファ層
40・・・半導体素子形成領域
Claims (3)
- 結晶面方位が(111)面であるシリコン単結晶基板と、
前記シリコン単結晶基板上に形成され、AlxGa1−xN単結晶(0<x≦1)で構成された第1バッファ層と、
前記第1バッファ層上に形成され、厚さが250nm以上350nm以下のAlyGa1−yN単結晶(0≦y<0.1)で構成された第1単層と、厚さが5nm以上20nm以下のAlzGa1−zN単結晶(0.9<z≦1)で構成された第2単層とが交互に複数積層された第2バッファ層と、
前記第2バッファ層上に形成され、少なくとも1層以上の窒化物系半導体単結晶層を含む半導体素子形成領域と、を備えることを特徴とする化合物半導体基板。 - 前記第1バッファ層は、前記シリコン単結晶基板上に形成され、AlN単結晶(x=1)で構成されたAlN単層と、前記AlN単層上に形成され、AlxGa1−xN単結晶(0<x<1)で構成されたAlGaN単層と、で構成されていることを特徴とする請求項1に記載の化合物半導体基板。
- 前記第1単層は、GaN単結晶(y=0)であり、前記第2単層は、AlN単結晶(z=1)であることを特徴とする請求項1または2に記載の化合物半導体基板。
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2009076840A JP5133927B2 (ja) | 2009-03-26 | 2009-03-26 | 化合物半導体基板 |
US12/659,927 US8148753B2 (en) | 2009-03-26 | 2010-03-25 | Compound semiconductor substrate having multiple buffer layers |
DE102010003286A DE102010003286A1 (de) | 2009-03-26 | 2010-03-25 | Verbindungshalbleitersubstrat |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2009076840A JP5133927B2 (ja) | 2009-03-26 | 2009-03-26 | 化合物半導体基板 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2010232322A true JP2010232322A (ja) | 2010-10-14 |
JP5133927B2 JP5133927B2 (ja) | 2013-01-30 |
Family
ID=42751177
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2009076840A Active JP5133927B2 (ja) | 2009-03-26 | 2009-03-26 | 化合物半導体基板 |
Country Status (3)
Country | Link |
---|---|
US (1) | US8148753B2 (ja) |
JP (1) | JP5133927B2 (ja) |
DE (1) | DE102010003286A1 (ja) |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2013008938A (ja) * | 2011-02-22 | 2013-01-10 | Covalent Materials Corp | 窒化物半導体基板及びその製造方法 |
JP2015512148A (ja) * | 2012-02-03 | 2015-04-23 | トランスフォーム インコーポレーテッド | 異種基板を有するiii族窒化物デバイスに適するバッファ層構造 |
CN105264643A (zh) * | 2012-12-18 | 2016-01-20 | Lg矽得荣株式会社 | 半导体衬底及其制造方法 |
WO2016072521A1 (ja) * | 2014-11-07 | 2016-05-12 | 住友化学株式会社 | 半導体基板および半導体基板の検査方法 |
WO2018101280A1 (ja) | 2016-11-30 | 2018-06-07 | 住友化学株式会社 | 半導体基板 |
WO2018101367A1 (ja) | 2016-11-30 | 2018-06-07 | 住友化学株式会社 | 半導体基板 |
US10256368B2 (en) | 2012-12-18 | 2019-04-09 | Sk Siltron Co., Ltd. | Semiconductor substrate for controlling a strain |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5912383B2 (ja) * | 2011-10-03 | 2016-04-27 | クアーズテック株式会社 | 窒化物半導体基板 |
US8680507B1 (en) * | 2013-01-16 | 2014-03-25 | Translucent, Inc. | A1N inter-layers in III-N material grown on DBR/silicon substrate |
CN104733511A (zh) * | 2013-12-21 | 2015-06-24 | 江西省昌大光电科技有限公司 | 一种在硅衬底上生长的氮化镓外延结构 |
US9443923B2 (en) * | 2014-05-07 | 2016-09-13 | Raytheon Company | Substrate for molecular beam epitaxy (MBE) HgCdTe growth |
US10516076B2 (en) | 2018-02-01 | 2019-12-24 | Silanna UV Technologies Pte Ltd | Dislocation filter for semiconductor devices |
Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2003059948A (ja) * | 2001-08-20 | 2003-02-28 | Sanken Electric Co Ltd | 半導体装置及びその製造方法 |
JP2003188414A (ja) * | 2001-12-19 | 2003-07-04 | Sanken Electric Co Ltd | 半導体発光素子の製造方法 |
WO2004042832A1 (ja) * | 2002-11-06 | 2004-05-21 | Sanken Electric Co., Ltd. | 半導体発光素子及びその製造方法 |
JP2005527988A (ja) * | 2002-12-04 | 2005-09-15 | エムコア・コーポレイション | 窒化ガリウムベース素子及び製造方法 |
JP2007067077A (ja) * | 2005-08-30 | 2007-03-15 | Nippon Telegr & Teleph Corp <Ntt> | 窒化物半導体素子およびその製造方法 |
WO2007097264A1 (ja) * | 2006-02-20 | 2007-08-30 | The Furukawa Electric Co., Ltd. | 半導体素子 |
JP2008085123A (ja) * | 2006-09-28 | 2008-04-10 | Covalent Materials Corp | 化合物半導体デバイス用基板およびそれを用いた化合物半導体デバイス |
JP2009065025A (ja) * | 2007-09-07 | 2009-03-26 | Covalent Materials Corp | 化合物半導体基板 |
Family Cites Families (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6462361B1 (en) * | 1995-12-27 | 2002-10-08 | Showa Denko K.K. | GaInP epitaxial stacking structure and fabrication method thereof, and a FET transistor using this structure |
US5874747A (en) * | 1996-02-05 | 1999-02-23 | Advanced Technology Materials, Inc. | High brightness electroluminescent device emitting in the green to ultraviolet spectrum and method of making the same |
US6677619B1 (en) * | 1997-01-09 | 2004-01-13 | Nichia Chemical Industries, Ltd. | Nitride semiconductor device |
US20030012249A1 (en) * | 2001-07-13 | 2003-01-16 | Motorola, Inc. | Monolithic piezoelectrically-tunable optoelectronic device structures and methods for fabricating same |
JP4530171B2 (ja) * | 2003-08-08 | 2010-08-25 | サンケン電気株式会社 | 半導体装置 |
JP3960957B2 (ja) * | 2003-09-05 | 2007-08-15 | 古河電気工業株式会社 | 半導体電子デバイス |
JP4389723B2 (ja) * | 2004-02-17 | 2009-12-24 | 住友電気工業株式会社 | 半導体素子を形成する方法 |
US7042018B2 (en) * | 2004-09-22 | 2006-05-09 | Formosa Epitaxy Incorporation | Structure of GaN light-emitting diode |
JP4826703B2 (ja) * | 2004-09-29 | 2011-11-30 | サンケン電気株式会社 | 半導体素子の形成に使用するための板状基体 |
JP4653671B2 (ja) * | 2005-03-14 | 2011-03-16 | 株式会社東芝 | 発光装置 |
JP4997621B2 (ja) * | 2005-09-05 | 2012-08-08 | パナソニック株式会社 | 半導体発光素子およびそれを用いた照明装置 |
JP5309451B2 (ja) | 2007-02-19 | 2013-10-09 | サンケン電気株式会社 | 半導体ウエーハ及び半導体素子及び製造方法 |
JP5309452B2 (ja) * | 2007-02-28 | 2013-10-09 | サンケン電気株式会社 | 半導体ウエーハ及び半導体素子及び製造方法 |
WO2008153130A1 (ja) * | 2007-06-15 | 2008-12-18 | Rohm Co., Ltd. | 窒化物半導体発光素子及び窒化物半導体の製造方法 |
JP2009076840A (ja) | 2007-08-30 | 2009-04-09 | Kyocera Corp | 光電変換装置の製造方法 |
-
2009
- 2009-03-26 JP JP2009076840A patent/JP5133927B2/ja active Active
-
2010
- 2010-03-25 DE DE102010003286A patent/DE102010003286A1/de not_active Ceased
- 2010-03-25 US US12/659,927 patent/US8148753B2/en not_active Expired - Fee Related
Patent Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2003059948A (ja) * | 2001-08-20 | 2003-02-28 | Sanken Electric Co Ltd | 半導体装置及びその製造方法 |
JP2003188414A (ja) * | 2001-12-19 | 2003-07-04 | Sanken Electric Co Ltd | 半導体発光素子の製造方法 |
WO2004042832A1 (ja) * | 2002-11-06 | 2004-05-21 | Sanken Electric Co., Ltd. | 半導体発光素子及びその製造方法 |
JP2005527988A (ja) * | 2002-12-04 | 2005-09-15 | エムコア・コーポレイション | 窒化ガリウムベース素子及び製造方法 |
JP2007067077A (ja) * | 2005-08-30 | 2007-03-15 | Nippon Telegr & Teleph Corp <Ntt> | 窒化物半導体素子およびその製造方法 |
WO2007097264A1 (ja) * | 2006-02-20 | 2007-08-30 | The Furukawa Electric Co., Ltd. | 半導体素子 |
JP2008085123A (ja) * | 2006-09-28 | 2008-04-10 | Covalent Materials Corp | 化合物半導体デバイス用基板およびそれを用いた化合物半導体デバイス |
JP2009065025A (ja) * | 2007-09-07 | 2009-03-26 | Covalent Materials Corp | 化合物半導体基板 |
Cited By (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2013008938A (ja) * | 2011-02-22 | 2013-01-10 | Covalent Materials Corp | 窒化物半導体基板及びその製造方法 |
JP2015512148A (ja) * | 2012-02-03 | 2015-04-23 | トランスフォーム インコーポレーテッド | 異種基板を有するiii族窒化物デバイスに適するバッファ層構造 |
CN105264643A (zh) * | 2012-12-18 | 2016-01-20 | Lg矽得荣株式会社 | 半导体衬底及其制造方法 |
JP2016513356A (ja) * | 2012-12-18 | 2016-05-12 | エルジー シルトロン インコーポレイテッド | 半導体基板及びその製造方法 |
US10256368B2 (en) | 2012-12-18 | 2019-04-09 | Sk Siltron Co., Ltd. | Semiconductor substrate for controlling a strain |
WO2016072521A1 (ja) * | 2014-11-07 | 2016-05-12 | 住友化学株式会社 | 半導体基板および半導体基板の検査方法 |
KR20170077227A (ko) | 2014-11-07 | 2017-07-05 | 스미또모 가가꾸 가부시키가이샤 | 반도체 기판 및 반도체 기판의 검사 방법 |
JPWO2016072521A1 (ja) * | 2014-11-07 | 2017-09-21 | 住友化学株式会社 | 半導体基板および半導体基板の検査方法 |
US10763332B2 (en) | 2014-11-07 | 2020-09-01 | Sumitomo Chemical Company, Limited | Semiconductor wafer and method of inspecting semiconductor wafer |
WO2018101280A1 (ja) | 2016-11-30 | 2018-06-07 | 住友化学株式会社 | 半導体基板 |
WO2018101367A1 (ja) | 2016-11-30 | 2018-06-07 | 住友化学株式会社 | 半導体基板 |
US11011630B2 (en) | 2016-11-30 | 2021-05-18 | Sumitomo Chemical Company, Limited | Semiconductor wafer |
Also Published As
Publication number | Publication date |
---|---|
DE102010003286A1 (de) | 2010-10-21 |
US8148753B2 (en) | 2012-04-03 |
JP5133927B2 (ja) | 2013-01-30 |
US20100244100A1 (en) | 2010-09-30 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP5133927B2 (ja) | 化合物半導体基板 | |
JP5631034B2 (ja) | 窒化物半導体エピタキシャル基板 | |
JP5331868B2 (ja) | 窒化物層上の光電子又は電子デバイス及びその製造方法 | |
JP4335187B2 (ja) | 窒化物系半導体装置の製造方法 | |
JP4529846B2 (ja) | Iii−v族窒化物系半導体基板及びその製造方法 | |
JP4740903B2 (ja) | シリコン基板上の窒化物単結晶成長方法、これを用いた窒化物半導体発光素子及びその製造方法 | |
WO2011102044A1 (ja) | エピタキシャル基板およびエピタキシャル基板の製造方法 | |
JP6484328B2 (ja) | バッファ層スタック上にiii−v族の活性半導体層を備える半導体構造および半導体構造を製造するための方法 | |
JP2009158804A (ja) | 半導体材料、半導体材料の製造方法及び半導体素子 | |
JP2012191202A (ja) | 歪吸収中間層遷移モジュールを有するiii族窒化物半導体構造 | |
US20120126239A1 (en) | Layer structures for controlling stress of heteroepitaxially grown iii-nitride layers | |
JPWO2011136051A1 (ja) | エピタキシャル基板およびエピタキシャル基板の製造方法 | |
JP6242941B2 (ja) | Iii族窒化物半導体及びその製造方法 | |
CN105280770B (zh) | 氮化物半导体结构 | |
JP2008115023A (ja) | AlN系III族窒化物単結晶厚膜の作製方法 | |
JPH11145514A (ja) | 窒化ガリウム系半導体素子およびその製造方法 | |
JPWO2011122322A1 (ja) | エピタキシャル基板およびエピタキシャル基板の製造方法 | |
JP2013123052A (ja) | シリコン基板上にGaN層を形成する方法およびGaN基板 | |
JP2015018960A (ja) | 半導体装置の製造方法 | |
JP4749583B2 (ja) | 半導体基板の製造方法 | |
JP2002299253A5 (ja) | ||
JP5139567B1 (ja) | 窒化物半導体層を成長させるためのバッファ層構造を有する基板 | |
JP2005032823A (ja) | 電界効果トランジスタ用エピタキシャルウェハの製造方法 | |
JP4535935B2 (ja) | 窒化物半導体薄膜およびその製造方法 | |
JP2008085123A (ja) | 化合物半導体デバイス用基板およびそれを用いた化合物半導体デバイス |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20111021 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20120828 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20120911 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20121015 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20121106 |
|
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20121108 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20151116 Year of fee payment: 3 |
|
R150 | Certificate of patent or registration of utility model |
Free format text: JAPANESE INTERMEDIATE CODE: R150 Ref document number: 5133927 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
S531 | Written request for registration of change of domicile |
Free format text: JAPANESE INTERMEDIATE CODE: R313531 |
|
S533 | Written request for registration of change of name |
Free format text: JAPANESE INTERMEDIATE CODE: R313533 |
|
R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
S533 | Written request for registration of change of name |
Free format text: JAPANESE INTERMEDIATE CODE: R313533 |
|
R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |