JP6484328B2 - バッファ層スタック上にiii−v族の活性半導体層を備える半導体構造および半導体構造を製造するための方法 - Google Patents
バッファ層スタック上にiii−v族の活性半導体層を備える半導体構造および半導体構造を製造するための方法 Download PDFInfo
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Description
−基板上に複数のIII−V材料層を備える(その材料層から成る)バッファ層スタックを成長させることと、
−バッファ層スタック上に設けられるIII−V族の活性半導体層を成長させることと、を含み、
バッファ層スタックを成長させることが、層状サブ構造を少なくとも1回成長させることを含み、層状サブ構造を成長させることが、第1のバッファ層、第1のバッファ層の頂部上に圧縮応力誘起構造を成長させることと、圧縮応力誘起構造の頂部上に第2のバッファ層を成長させることと、これによって、それぞれの第2のバッファ層の下面において、それぞれの第1のバッファ層の上面におけるものよりも低いAl含有量を提供することと、を含む、半導体構造を製造するための方法が開示される。
必要な変更を加えて、逆もまた同じである。
Claims (19)
- 複数のIII−V材料層を備えるバッファ層スタックであって、前記バッファ層スタックが、少なくとも1つの層状サブ構造を備え、前記層状サブ構造の各々が、それぞれの第1のバッファ層と、前記バッファ層スタック内で前記それぞれの第1のバッファ層よりも高く位置付けられたそれぞれの第2のバッファ層との間に圧縮応力誘起構造を備え、前記それぞれの第2のバッファ層の下面が、前記それぞれの第1のバッファ層の上面よりも低いAl含有量を有する、バッファ層スタックと、
前記バッファ層スタック上に設けられた前記III−V族の活性半導体層と、を備え、
前記圧縮応力誘起層状構造のそれぞれが、その下面近くに擬似格子整合平坦化層およびその上面近くに緩和層を備え、前記平坦化層の下面の前記Al含有量が、前記それぞれの第1のバッファ層の前記上面の前記Al含有量よりも低いかまたはそれに等しく、前記平坦化層の上面の前記Al含有量が、前記緩和層の下面の前記Al含有量よりも低く、前記緩和層の上面の前記Al含有量が、前記それぞれの第2のバッファ層の前記Al含有量よりも高く、
前記それぞれの緩和層の前記面が、1nmよりも大きな二乗平均平方根(RMS)粗さを備え、それにより前記粗さが、前記それぞれの第2のバッファ層の緩和を抑制する、半導体構造。 - シリコンベースウェハを更に備え、前記バッファ層スタックが、前記シリコンベースウェハおよび前記バッファ層スタックと直接接触しているAlN核生成層によって、前記シリコンベースウェハから分離される、請求項1に記載の半導体構造。
- 少なくとも1つの層状サブ構造について、前記それぞれの平坦化層および緩和層が、直接接触しており、前記擬似格子整合平坦化層および前記緩和層間の遷移が、Al含有量に関して急峻的または不連続的である、請求項1または2に記載の半導体構造。
- 前記それぞれの第1のバッファ層の前記Al含有量が、15%〜100%の範囲内にある、請求項1〜3のいずれかに記載の半導体構造。
- 前記それぞれの第1のバッファ層の厚さが、50nm〜2ミクロンの範囲内にあり、前記それぞれの第2のバッファ層の厚さが、50nm〜8ミクロンの範囲内にある、請求項1〜4のいずれかに記載の半導体構造。
- 前記それぞれの第2のバッファ層の前記Al含有量が、0〜40%の範囲内にある、請求項1〜5のいずれかに記載の半導体構造。
- 前記それぞれの擬似格子整合平坦化層が、0〜20%の範囲内のAl含有量を有する、請求項1〜6のいずれかに記載の半導体構造。
- 前記それぞれの擬似格子整合平坦化層の前記Al含有量が、少なくとも1つの層状サブ構造について一定である、請求項1〜7のいずれかに記載の半導体構造。
- 前記擬似格子整合平坦化層が、少なくとも1つの層状サブ構造についてGaN層である、請求項8に記載の半導体構造。
- 前記それぞれの緩和層が、50〜100%の範囲内のAl含有量を有する、請求項1〜9のいずれかに記載の半導体構造。
- 前記緩和層が、少なくとも1つの層状サブ構造についてAlN層である、請求項10に記載の半導体構造。
- 前記それぞれの緩和層の厚さが、0.28nm〜50nmの範囲内にある、請求項1〜11のいずれかに記載の半導体構造。
- 前記バッファ層スタックが、前記圧縮応力誘起構造(複数可)を除いて、その下面においてより高いAl含有量を有する組成勾配を付けられており、そのAl含有量は、前記活性半導体層の方に向かって単調に減少する、請求項1〜12のいずれかに記載の半導体構造。
- 前記バッファ層スタックは、前記圧縮応力誘起構造(複数可)を除いて、その下面においてより高いAl含有量を有する組成勾配を付けられており、そのAl含有量は、前記活性半導体層の方に向かって連続的に減少する、請求項13に記載の半導体構造。
- 前記減少が、段階的である、請求項13に記載の半導体構造。
- 少なくとも2つの層状サブ構造を備える、請求項1〜15のいずれかに記載の半導体構造。
- −基板上に複数のIII−V材料層を備えるバッファ層スタックを成長させることと、
−前記バッファ層スタック上に設けられる前記III−V族の活性半導体層を成長させることと、を含み、
前記バッファ層スタックを成長させることが、層状サブ構造を少なくとも1回成長させることを含み、層状サブ構造を成長させることが、第1のバッファ層、前記第1のバッファ層の頂部上に圧縮応力誘起構造を成長させることと、前記圧縮応力誘起構造の頂部上に第2のバッファ層を成長させることと、これによって、前記それぞれの第2のバッファ層の下面において、前記それぞれの第1のバッファ層の上面におけるものよりも低いAl含有量を提供することと、を含み、
圧縮応力誘起構造を成長させることが、前記それぞれの第1のバッファ層上にそれぞれの擬似格子整合平坦化層を成長させることと、前記平坦化層上に、それぞれの、最初に擬似格子整合的な、緩和層を成長させることと、を含み、前記それぞれの擬似格子整合平坦化層の下面の前記Al含有量が、前記それぞれの第1のバッファ層の前記上面の前記Al含有量よりも低いかまたはそれに等しく、前記それぞれの擬似格子整合平坦化層の上面の前記Al含有量が、前記それぞれの緩和層の下面の前記Al含有量よりも低く、前記それぞれの緩和層の上面の前記Al含有量が、前記それぞれの第2のバッファ層の前記Al含有量よりも高く、
前記緩和層を成長させるために、1200℃よりも高い温度を使用して、前記それぞれの緩和層の前記面を成長させ、当該それぞれの緩和層の前記面が、1nmよりも大きな二乗平均平方根(RMS)粗さを備え、それにより前記粗さが、前記それぞれの第2のバッファ層の緩和を抑制する、半導体構造を製造するための方法。 - 前記平坦化層上に前記それぞれの緩和層を前記成長させるステップが、前記それぞれの緩和層を最初に擬似格子整合的に成長させて、前記それぞれの緩和層を緩和させることを可能にすることを含む、請求項17に記載の方法。
- 複数のIII−V材料層を備えるバッファ層スタックであって、前記バッファ層スタックが、少なくとも1つの層状サブ構造を備え、前記層状サブ構造の各々が、それぞれの第1のバッファ層と、前記バッファ層スタック内で前記それぞれの第1のバッファ層よりも高く位置付けられたそれぞれの第2のバッファ層との間に圧縮応力誘起構造を備え、前記それぞれの第2のバッファ層の下面が、前記それぞれの第1のバッファ層の上面よりも低いAl含有量を有する、バッファ層スタックと、
前記バッファ層スタック上に設けられた前記III−V族の活性半導体層と、を備え、
前記圧縮応力誘起層状構造のそれぞれが、その下面近くに擬似格子整合平坦化層およびその上面近くに緩和層を備え、前記平坦化層の下面の前記Al含有量が、前記それぞれの第1のバッファ層の前記上面の前記Al含有量よりも低いかまたはそれに等しく、前記平坦化層の上面の前記Al含有量が、前記緩和層の下面の前記Al含有量よりも低く、前記緩和層の上面の前記Al含有量が、前記それぞれの第2のバッファ層の前記Al含有量よりも高く、
前記それぞれの第2のバッファ層は前記それぞれの緩和層の上面で擬似格子整合的に成長することにより、前記それぞれの第2のバッファ層の圧縮歪みが蓄積され、
前記それぞれの緩和層の前記面が、1nmよりも大きな二乗平均平方根(RMS)粗さを備え、それにより前記粗さが、前記それぞれの第2のバッファ層の緩和を抑制する、半導体構造。
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