JP2010231171A - 光学物品およびその製造方法 - Google Patents
光学物品およびその製造方法 Download PDFInfo
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- JP2010231171A JP2010231171A JP2009199464A JP2009199464A JP2010231171A JP 2010231171 A JP2010231171 A JP 2010231171A JP 2009199464 A JP2009199464 A JP 2009199464A JP 2009199464 A JP2009199464 A JP 2009199464A JP 2010231171 A JP2010231171 A JP 2010231171A
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- layer
- antireflection
- silicon
- germanium
- optical article
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Images
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
- G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
- G02B1/11—Anti-reflection coatings
- G02B1/113—Anti-reflection coatings using inorganic layer materials only
- G02B1/115—Multilayers
Landscapes
- Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Inorganic Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Surface Treatment Of Optical Elements (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2009199464A JP2010231171A (ja) | 2009-03-04 | 2009-08-31 | 光学物品およびその製造方法 |
| US12/710,974 US20100226005A1 (en) | 2009-03-04 | 2010-02-23 | Optical Article and Process for Producing the Same |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2009050322 | 2009-03-04 | ||
| JP2009199464A JP2010231171A (ja) | 2009-03-04 | 2009-08-31 | 光学物品およびその製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2010231171A true JP2010231171A (ja) | 2010-10-14 |
| JP2010231171A5 JP2010231171A5 (enExample) | 2012-09-06 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2009199464A Withdrawn JP2010231171A (ja) | 2009-03-04 | 2009-08-31 | 光学物品およびその製造方法 |
Country Status (2)
| Country | Link |
|---|---|
| US (1) | US20100226005A1 (enExample) |
| JP (1) | JP2010231171A (enExample) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011232569A (ja) * | 2010-04-28 | 2011-11-17 | Seiko Epson Corp | 光学物品およびその製造方法 |
| WO2013084997A1 (ja) * | 2011-12-07 | 2013-06-13 | 株式会社ニコン・エシロール | 光学部品の製造方法 |
Families Citing this family (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011013654A (ja) * | 2008-10-23 | 2011-01-20 | Seiko Epson Corp | 多層反射防止層およびその製造方法、プラスチックレンズ |
| JP5588135B2 (ja) * | 2009-08-10 | 2014-09-10 | ホーヤ レンズ マニュファクチャリング フィリピン インク | 光学物品の製造方法 |
| JP5523066B2 (ja) * | 2009-11-17 | 2014-06-18 | ホーヤ レンズ マニュファクチャリング フィリピン インク | 光学物品の製造方法 |
| JP2012032690A (ja) | 2010-08-02 | 2012-02-16 | Seiko Epson Corp | 光学物品およびその製造方法 |
| WO2012057003A1 (ja) * | 2010-10-27 | 2012-05-03 | コニカミノルタオプト株式会社 | 太陽熱発電用フィルムミラー及び太陽熱発電用反射装置 |
| CN102758173A (zh) * | 2011-04-28 | 2012-10-31 | 鸿富锦精密工业（深圳）有限公司 | 镀膜件及其制造方法 |
| JP2013156523A (ja) * | 2012-01-31 | 2013-08-15 | Topcon Corp | 基板 |
| JP6197833B2 (ja) * | 2015-06-30 | 2017-09-20 | 株式会社豊田自動織機 | 太陽熱集熱管及び太陽熱発電装置 |
| TWM519743U (zh) * | 2015-11-17 | 2016-04-01 | Wei-Xian Lai | 護目鏡片結構 |
| US10859899B2 (en) * | 2017-08-03 | 2020-12-08 | Seiko Epson Corporation | Wavelength conversion element, method for producing wavelength conversion element, light source device, and projector |
| JP6881172B2 (ja) * | 2017-09-13 | 2021-06-02 | Ａｇｃ株式会社 | 反射防止膜付透明基体、およびそれを用いた表示装置 |
| WO2021246295A1 (ja) * | 2020-06-05 | 2021-12-09 | 三菱瓦斯化学株式会社 | 成形用樹脂シートおよびそれを用いた成形品 |
| KR20220030470A (ko) * | 2020-09-01 | 2022-03-11 | 삼성디스플레이 주식회사 | 폴더블 표시 장치 |
| JP7701175B2 (ja) * | 2021-03-30 | 2025-07-01 | ホヤ レンズ タイランド リミテッド | 眼鏡レンズ、眼鏡レンズの製造方法及び眼鏡 |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01273006A (ja) * | 1988-04-25 | 1989-10-31 | Gunze Ltd | 可視光選択透過膜 |
| JP2001330703A (ja) * | 2000-03-31 | 2001-11-30 | Carl-Zeiss-Stiftung Trading As Carl Zeiss | 保護層系を有する多層系および製造方法 |
| JP2005254541A (ja) * | 2004-03-10 | 2005-09-22 | Fuji Photo Film Co Ltd | ガスバリア性積層フィルム及びその製造方法、並びに該フィルムを用いた画像表示素子 |
| JP2008282014A (ja) * | 2007-05-10 | 2008-11-20 | Samsung Sdi Co Ltd | フィルタ及びフィルタを備えたディスプレイ装置 |
Family Cites Families (25)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4609267A (en) * | 1980-12-22 | 1986-09-02 | Seiko Epson Corporation | Synthetic resin lens and antireflection coating |
| KR0176767B1 (ko) * | 1995-03-17 | 1999-05-01 | 구자홍 | 다이아몬드상 탄소 박막의 반사 방지 층을 갖는 액정 표시 장치 |
| US6852406B2 (en) * | 2000-01-26 | 2005-02-08 | Sola International Holdings, Ltd. | Anti-static, anti-reflection coating |
| US7261957B2 (en) * | 2000-03-31 | 2007-08-28 | Carl Zeiss Smt Ag | Multilayer system with protecting layer system and production method |
| TWI281748B (en) * | 2001-12-18 | 2007-05-21 | Matsushita Electric Industrial Co Ltd | Non-volatile memory |
| JP4475016B2 (ja) * | 2003-06-30 | 2010-06-09 | 東レ株式会社 | ハードコートフィルム、反射防止フィルムおよび画像表示装置 |
| US7304719B2 (en) * | 2004-03-31 | 2007-12-04 | Asml Holding N.V. | Patterned grid element polarizer |
| JP5262110B2 (ja) * | 2005-01-31 | 2013-08-14 | 旭硝子株式会社 | 反射防止膜付き基体 |
| WO2007030679A2 (en) * | 2005-09-07 | 2007-03-15 | The Regents Of The University Of California | Materials for the formation of polymer junction diodes |
| US20070065638A1 (en) * | 2005-09-20 | 2007-03-22 | Eastman Kodak Company | Nano-structured thin film with reduced light reflection |
| US7948675B2 (en) * | 2005-10-11 | 2011-05-24 | Nikon Corporation | Surface-corrected multilayer-film mirrors with protected reflective surfaces, exposure systems comprising same, and associated methods |
| JP4207083B2 (ja) * | 2006-04-04 | 2009-01-14 | セイコーエプソン株式会社 | 光学多層膜フィルタ、光学多層膜フィルタの製造方法および電子機器装置 |
| TWI447442B (zh) * | 2008-06-26 | 2014-08-01 | Eternal Chemical Co Ltd | 具有非球形粒子之光學薄膜 |
| FR2903197B1 (fr) * | 2006-06-28 | 2009-01-16 | Essilor Int | Article d'optique revetu d'une sous-couche et d'un revetement anti-reflets multicouches resistant a la temperature, et procede de fabrication |
| JP5217887B2 (ja) * | 2008-01-28 | 2013-06-19 | セイコーエプソン株式会社 | 光学物品 |
| JP5326407B2 (ja) * | 2008-07-31 | 2013-10-30 | セイコーエプソン株式会社 | 時計用カバーガラス、および時計 |
| JP2011013654A (ja) * | 2008-10-23 | 2011-01-20 | Seiko Epson Corp | 多層反射防止層およびその製造方法、プラスチックレンズ |
| JP2010102157A (ja) * | 2008-10-24 | 2010-05-06 | Seiko Epson Corp | 光学物品およびその製造方法 |
| JP5489604B2 (ja) * | 2009-01-14 | 2014-05-14 | ホーヤ レンズ マニュファクチャリング フィリピン インク | 光学物品の製造方法 |
| US8128255B2 (en) * | 2009-06-16 | 2012-03-06 | Day Sun Industrial Corp. | Structure for securing conductive strip of flashlight |
| JP5588135B2 (ja) * | 2009-08-10 | 2014-09-10 | ホーヤ レンズ マニュファクチャリング フィリピン インク | 光学物品の製造方法 |
| JP5523066B2 (ja) * | 2009-11-17 | 2014-06-18 | ホーヤ レンズ マニュファクチャリング フィリピン インク | 光学物品の製造方法 |
| JP5622468B2 (ja) * | 2010-07-26 | 2014-11-12 | ホーヤ レンズ マニュファクチャリング フィリピン インク | レンズの製造方法及びレンズ |
| JP2012032690A (ja) * | 2010-08-02 | 2012-02-16 | Seiko Epson Corp | 光学物品およびその製造方法 |
| JP2012128135A (ja) * | 2010-12-15 | 2012-07-05 | Seiko Epson Corp | 光学物品およびその製造方法 |
-
2009
- 2009-08-31 JP JP2009199464A patent/JP2010231171A/ja not_active Withdrawn
-
2010
- 2010-02-23 US US12/710,974 patent/US20100226005A1/en not_active Abandoned
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01273006A (ja) * | 1988-04-25 | 1989-10-31 | Gunze Ltd | 可視光選択透過膜 |
| JP2001330703A (ja) * | 2000-03-31 | 2001-11-30 | Carl-Zeiss-Stiftung Trading As Carl Zeiss | 保護層系を有する多層系および製造方法 |
| JP2005254541A (ja) * | 2004-03-10 | 2005-09-22 | Fuji Photo Film Co Ltd | ガスバリア性積層フィルム及びその製造方法、並びに該フィルムを用いた画像表示素子 |
| JP2008282014A (ja) * | 2007-05-10 | 2008-11-20 | Samsung Sdi Co Ltd | フィルタ及びフィルタを備えたディスプレイ装置 |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011232569A (ja) * | 2010-04-28 | 2011-11-17 | Seiko Epson Corp | 光学物品およびその製造方法 |
| WO2013084997A1 (ja) * | 2011-12-07 | 2013-06-13 | 株式会社ニコン・エシロール | 光学部品の製造方法 |
| JPWO2013084997A1 (ja) * | 2011-12-07 | 2015-04-27 | 株式会社ニコン・エシロール | 光学部品の製造方法 |
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