JP2010228266A - 液体噴射ヘッド及び液体噴射装置並びにアクチュエーター - Google Patents

液体噴射ヘッド及び液体噴射装置並びにアクチュエーター Download PDF

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Publication number
JP2010228266A
JP2010228266A JP2009077841A JP2009077841A JP2010228266A JP 2010228266 A JP2010228266 A JP 2010228266A JP 2009077841 A JP2009077841 A JP 2009077841A JP 2009077841 A JP2009077841 A JP 2009077841A JP 2010228266 A JP2010228266 A JP 2010228266A
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JP
Japan
Prior art keywords
piezoelectric layer
piezoelectric
electrode
layer
liquid ejecting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP2009077841A
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English (en)
Japanese (ja)
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JP2010228266A5 (enExample
Inventor
Koji Sumi
浩二 角
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Priority to JP2009077841A priority Critical patent/JP2010228266A/ja
Priority to US12/722,387 priority patent/US8317304B2/en
Priority to CN201010143229A priority patent/CN101844440A/zh
Publication of JP2010228266A publication Critical patent/JP2010228266A/ja
Publication of JP2010228266A5 publication Critical patent/JP2010228266A5/ja
Withdrawn legal-status Critical Current

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14201—Structure of print heads with piezoelectric elements
    • B41J2/14233—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1607—Production of print heads with piezoelectric elements
    • B41J2/161—Production of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2047—Membrane type
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/85—Piezoelectric or electrostrictive active materials
    • H10N30/853—Ceramic compositions
    • H10N30/8548—Lead-based oxides
    • H10N30/8554—Lead-zirconium titanate [PZT] based

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
JP2009077841A 2009-03-26 2009-03-26 液体噴射ヘッド及び液体噴射装置並びにアクチュエーター Withdrawn JP2010228266A (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2009077841A JP2010228266A (ja) 2009-03-26 2009-03-26 液体噴射ヘッド及び液体噴射装置並びにアクチュエーター
US12/722,387 US8317304B2 (en) 2009-03-26 2010-03-11 Liquid ejecting head, liquid ejecting apparatus, and actuator
CN201010143229A CN101844440A (zh) 2009-03-26 2010-03-26 液体喷射头、液体喷射装置以及致动器

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2009077841A JP2010228266A (ja) 2009-03-26 2009-03-26 液体噴射ヘッド及び液体噴射装置並びにアクチュエーター

Publications (2)

Publication Number Publication Date
JP2010228266A true JP2010228266A (ja) 2010-10-14
JP2010228266A5 JP2010228266A5 (enExample) 2012-05-10

Family

ID=42769332

Family Applications (1)

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JP2009077841A Withdrawn JP2010228266A (ja) 2009-03-26 2009-03-26 液体噴射ヘッド及び液体噴射装置並びにアクチュエーター

Country Status (3)

Country Link
US (1) US8317304B2 (enExample)
JP (1) JP2010228266A (enExample)
CN (1) CN101844440A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016197674A (ja) * 2015-04-06 2016-11-24 セイコーエプソン株式会社 圧電素子、これを備えた液体吐出ヘッド、及び、液体吐出装置

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5964947B2 (ja) * 2012-03-30 2016-08-03 京セラ株式会社 圧電アクチュエータ、インクジェットヘッド及び圧電アクチュエータの製造方法
US20130279044A1 (en) * 2012-04-19 2013-10-24 Sae Magnetics (H.K.) Ltd. Thin film piezoelectric element and manufacturing method thereof, micro-actuator, head gimbal assembly and disk drive unit with the same
US9450171B2 (en) * 2012-04-19 2016-09-20 Sae Magnetics (H.K.) Ltd. Thin film piezoelectric element and manufacturing method thereof, micro-actuator, head gimbal assembly and disk drive unit with the same
CN107342357B (zh) * 2016-04-28 2022-08-16 新科实业有限公司 薄膜压电元件及其制造方法
JP7263898B2 (ja) * 2019-04-19 2023-04-25 セイコーエプソン株式会社 液体吐出ヘッドおよびプリンター

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007250626A (ja) * 2006-03-14 2007-09-27 Seiko Epson Corp 圧電素子の製造方法、アクチュエータ装置の製造方法、液体噴射ヘッドの製造方法、液体噴射装置の製造方法および圧電素子

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JP4327942B2 (ja) * 1999-05-20 2009-09-09 Ｔｄｋ株式会社 薄膜圧電素子
JP2005119166A (ja) 2003-10-17 2005-05-12 Matsushita Electric Ind Co Ltd 圧電素子、インクジェットヘッド、及びこれらの製造方法、並びにインクジェット式記録装置
WO2005068394A1 (ja) 2004-01-20 2005-07-28 Iai Corporation 圧電磁器組成物
US7312558B2 (en) * 2004-04-02 2007-12-25 Matsushita Electric Industrial Co., Ltd. Piezoelectric element, ink jet head, angular velocity sensor, and ink jet recording apparatus
US7998362B2 (en) 2005-08-23 2011-08-16 Canon Kabushiki Kaisha Piezoelectric substance, piezoelectric element, liquid discharge head using piezoelectric element, liquid discharge apparatus, and production method of piezoelectric element
US7521845B2 (en) 2005-08-23 2009-04-21 Canon Kabushiki Kaisha Piezoelectric substance, piezoelectric element, liquid discharge head using piezoelectric element, and liquid discharge apparatus
JP5241086B2 (ja) 2005-08-23 2013-07-17 キヤノン株式会社 圧電体、圧電素子、圧電素子を用いた液体吐出ヘッドおよび液体吐出装置
JP5241087B2 (ja) 2005-08-23 2013-07-17 キヤノン株式会社 圧電体、圧電素子、圧電素子を用いた液体吐出ヘッド、液体吐出装置及び圧電素子の製造方法
JP2008028030A (ja) * 2006-07-19 2008-02-07 Seiko Epson Corp 圧電素子および液体噴射ヘッド
JP2008218620A (ja) 2007-03-02 2008-09-18 Matsushita Electric Ind Co Ltd 圧電体薄膜素子、圧電体薄膜素子の製造方法、インクジェットヘッド、およびインクジェット式記録装置
EP1953840A3 (en) 2007-01-31 2012-04-11 Panasonic Corporation Piezoelectric thin film device and piezoelectric thin film device manufacturing method and inkjet head and inkjet recording apparatus
JP2008305821A (ja) 2007-06-05 2008-12-18 Panasonic Corp 圧電体薄膜素子、圧電体薄膜素子の製造方法、インクジェットヘッド、およびインクジェット式記録装置
JP2009049220A (ja) 2007-08-21 2009-03-05 Panasonic Corp 圧電体薄膜素子、圧電体薄膜素子の製造方法、インクジェットヘッド、及びインクジェット式記録装置
US8518290B2 (en) * 2008-07-30 2013-08-27 Canon Kabushiki Kaisha Piezoelectric material

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007250626A (ja) * 2006-03-14 2007-09-27 Seiko Epson Corp 圧電素子の製造方法、アクチュエータ装置の製造方法、液体噴射ヘッドの製造方法、液体噴射装置の製造方法および圧電素子

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016197674A (ja) * 2015-04-06 2016-11-24 セイコーエプソン株式会社 圧電素子、これを備えた液体吐出ヘッド、及び、液体吐出装置

Also Published As

Publication number Publication date
US8317304B2 (en) 2012-11-27
US20100245487A1 (en) 2010-09-30
CN101844440A (zh) 2010-09-29

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