JP2010228266A5 - - Google Patents
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- Publication number
- JP2010228266A5 JP2010228266A5 JP2009077841A JP2009077841A JP2010228266A5 JP 2010228266 A5 JP2010228266 A5 JP 2010228266A5 JP 2009077841 A JP2009077841 A JP 2009077841A JP 2009077841 A JP2009077841 A JP 2009077841A JP 2010228266 A5 JP2010228266 A5 JP 2010228266A5
- Authority
- JP
- Japan
- Prior art keywords
- layer
- conductive layer
- thickness
- piezoelectric layer
- ion beam
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
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- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 4
- 238000000034 method Methods 0.000 description 3
- 239000012212 insulator Substances 0.000 description 2
- 238000010884 ion-beam technique Methods 0.000 description 2
- 238000004151 rapid thermal annealing Methods 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 2
- 229910052721 tungsten Inorganic materials 0.000 description 2
- 239000010937 tungsten Substances 0.000 description 2
- 238000002441 X-ray diffraction Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 229910052741 iridium Inorganic materials 0.000 description 1
- GKOZUEZYRPOHIO-UHFFFAOYSA-N iridium atom Chemical compound [Ir] GKOZUEZYRPOHIO-UHFFFAOYSA-N 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 229910001928 zirconium oxide Inorganic materials 0.000 description 1
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2009077841A JP2010228266A (ja) | 2009-03-26 | 2009-03-26 | 液体噴射ヘッド及び液体噴射装置並びにアクチュエーター |
| US12/722,387 US8317304B2 (en) | 2009-03-26 | 2010-03-11 | Liquid ejecting head, liquid ejecting apparatus, and actuator |
| CN201010143229A CN101844440A (zh) | 2009-03-26 | 2010-03-26 | 液体喷射头、液体喷射装置以及致动器 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2009077841A JP2010228266A (ja) | 2009-03-26 | 2009-03-26 | 液体噴射ヘッド及び液体噴射装置並びにアクチュエーター |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2010228266A JP2010228266A (ja) | 2010-10-14 |
| JP2010228266A5 true JP2010228266A5 (enExample) | 2012-05-10 |
Family
ID=42769332
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2009077841A Withdrawn JP2010228266A (ja) | 2009-03-26 | 2009-03-26 | 液体噴射ヘッド及び液体噴射装置並びにアクチュエーター |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | US8317304B2 (enExample) |
| JP (1) | JP2010228266A (enExample) |
| CN (1) | CN101844440A (enExample) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9180668B2 (en) * | 2012-03-30 | 2015-11-10 | Kyocera Corporation | Piezoelectric actuator, ink jet head, and method for producing piezoelectric actuator |
| CN103378286B (zh) * | 2012-04-19 | 2017-12-01 | 新科实业有限公司 | 薄膜压电元件及其制造方法、磁头折片组合及磁盘驱动器 |
| US20130279044A1 (en) * | 2012-04-19 | 2013-10-24 | Sae Magnetics (H.K.) Ltd. | Thin film piezoelectric element and manufacturing method thereof, micro-actuator, head gimbal assembly and disk drive unit with the same |
| JP6613596B2 (ja) * | 2015-04-06 | 2019-12-04 | セイコーエプソン株式会社 | 圧電素子、これを備えた液体吐出ヘッド、及び、液体吐出装置 |
| CN107342357B (zh) * | 2016-04-28 | 2022-08-16 | 新科实业有限公司 | 薄膜压电元件及其制造方法 |
| JP7263898B2 (ja) * | 2019-04-19 | 2023-04-25 | セイコーエプソン株式会社 | 液体吐出ヘッドおよびプリンター |
Family Cites Families (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4327942B2 (ja) * | 1999-05-20 | 2009-09-09 | Ｔｄｋ株式会社 | 薄膜圧電素子 |
| JP2005119166A (ja) | 2003-10-17 | 2005-05-12 | Matsushita Electric Ind Co Ltd | 圧電素子、インクジェットヘッド、及びこれらの製造方法、並びにインクジェット式記録装置 |
| WO2005068394A1 (ja) | 2004-01-20 | 2005-07-28 | Iai Corporation | 圧電磁器組成物 |
| US7312558B2 (en) * | 2004-04-02 | 2007-12-25 | Matsushita Electric Industrial Co., Ltd. | Piezoelectric element, ink jet head, angular velocity sensor, and ink jet recording apparatus |
| US7998362B2 (en) | 2005-08-23 | 2011-08-16 | Canon Kabushiki Kaisha | Piezoelectric substance, piezoelectric element, liquid discharge head using piezoelectric element, liquid discharge apparatus, and production method of piezoelectric element |
| JP5241086B2 (ja) | 2005-08-23 | 2013-07-17 | キヤノン株式会社 | 圧電体、圧電素子、圧電素子を用いた液体吐出ヘッドおよび液体吐出装置 |
| JP5241087B2 (ja) | 2005-08-23 | 2013-07-17 | キヤノン株式会社 | 圧電体、圧電素子、圧電素子を用いた液体吐出ヘッド、液体吐出装置及び圧電素子の製造方法 |
| US7521845B2 (en) | 2005-08-23 | 2009-04-21 | Canon Kabushiki Kaisha | Piezoelectric substance, piezoelectric element, liquid discharge head using piezoelectric element, and liquid discharge apparatus |
| JP2007250626A (ja) * | 2006-03-14 | 2007-09-27 | Seiko Epson Corp | 圧電素子の製造方法、アクチュエータ装置の製造方法、液体噴射ヘッドの製造方法、液体噴射装置の製造方法および圧電素子 |
| JP2008028030A (ja) * | 2006-07-19 | 2008-02-07 | Seiko Epson Corp | 圧電素子および液体噴射ヘッド |
| EP1953840A3 (en) | 2007-01-31 | 2012-04-11 | Panasonic Corporation | Piezoelectric thin film device and piezoelectric thin film device manufacturing method and inkjet head and inkjet recording apparatus |
| JP2008218620A (ja) | 2007-03-02 | 2008-09-18 | Matsushita Electric Ind Co Ltd | 圧電体薄膜素子、圧電体薄膜素子の製造方法、インクジェットヘッド、およびインクジェット式記録装置 |
| JP2008305821A (ja) | 2007-06-05 | 2008-12-18 | Panasonic Corp | 圧電体薄膜素子、圧電体薄膜素子の製造方法、インクジェットヘッド、およびインクジェット式記録装置 |
| JP2009049220A (ja) | 2007-08-21 | 2009-03-05 | Panasonic Corp | 圧電体薄膜素子、圧電体薄膜素子の製造方法、インクジェットヘッド、及びインクジェット式記録装置 |
| US8518290B2 (en) * | 2008-07-30 | 2013-08-27 | Canon Kabushiki Kaisha | Piezoelectric material |
-
2009
- 2009-03-26 JP JP2009077841A patent/JP2010228266A/ja not_active Withdrawn
-
2010
- 2010-03-11 US US12/722,387 patent/US8317304B2/en active Active
- 2010-03-26 CN CN201010143229A patent/CN101844440A/zh active Pending
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