CN101844440A - 液体喷射头、液体喷射装置以及致动器 - Google Patents

液体喷射头、液体喷射装置以及致动器 Download PDF

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Publication number
CN101844440A
CN101844440A CN201010143229A CN201010143229A CN101844440A CN 101844440 A CN101844440 A CN 101844440A CN 201010143229 A CN201010143229 A CN 201010143229A CN 201010143229 A CN201010143229 A CN 201010143229A CN 101844440 A CN101844440 A CN 101844440A
Authority
CN
China
Prior art keywords
piezoelectric
layer
piezoelectric body
electrode
body layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201010143229A
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English (en)
Chinese (zh)
Inventor
角浩二
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Publication of CN101844440A publication Critical patent/CN101844440A/zh
Pending legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14201—Structure of print heads with piezoelectric elements
    • B41J2/14233—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1607—Production of print heads with piezoelectric elements
    • B41J2/161—Production of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2047—Membrane type
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/85—Piezoelectric or electrostrictive active materials
    • H10N30/853—Ceramic compositions
    • H10N30/8548—Lead-based oxides
    • H10N30/8554—Lead-zirconium titanate [PZT] based

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
CN201010143229A 2009-03-26 2010-03-26 液体喷射头、液体喷射装置以及致动器 Pending CN101844440A (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP077841/2009 2009-03-26
JP2009077841A JP2010228266A (ja) 2009-03-26 2009-03-26 液体噴射ヘッド及び液体噴射装置並びにアクチュエーター

Publications (1)

Publication Number Publication Date
CN101844440A true CN101844440A (zh) 2010-09-29

Family

ID=42769332

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201010143229A Pending CN101844440A (zh) 2009-03-26 2010-03-26 液体喷射头、液体喷射装置以及致动器

Country Status (3)

Country Link
US (1) US8317304B2 (enExample)
JP (1) JP2010228266A (enExample)
CN (1) CN101844440A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111823714A (zh) * 2019-04-19 2020-10-27 精工爱普生株式会社 液体喷出头以及打印机

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2833423B1 (en) * 2012-03-30 2020-11-04 Kyocera Corporation Piezoelectric actuator, inkjet head, and method for manufacturing piezoelectric actuator
US9450171B2 (en) * 2012-04-19 2016-09-20 Sae Magnetics (H.K.) Ltd. Thin film piezoelectric element and manufacturing method thereof, micro-actuator, head gimbal assembly and disk drive unit with the same
US20130279044A1 (en) * 2012-04-19 2013-10-24 Sae Magnetics (H.K.) Ltd. Thin film piezoelectric element and manufacturing method thereof, micro-actuator, head gimbal assembly and disk drive unit with the same
JP6613596B2 (ja) * 2015-04-06 2019-12-04 セイコーエプソン株式会社 圧電素子、これを備えた液体吐出ヘッド、及び、液体吐出装置
CN107342357B (zh) * 2016-04-28 2022-08-16 新科实业有限公司 薄膜压电元件及其制造方法

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005119166A (ja) * 2003-10-17 2005-05-12 Matsushita Electric Ind Co Ltd 圧電素子、インクジェットヘッド、及びこれらの製造方法、並びにインクジェット式記録装置
CN1676330A (zh) * 2004-04-02 2005-10-05 松下电器产业株式会社 压电元件、喷墨头、角速度传感器及喷墨式记录装置
JP2007088446A (ja) * 2005-08-23 2007-04-05 Canon Inc 圧電体、圧電素子、圧電素子を用いた液体吐出ヘッドおよび液体吐出装置
CN1953947A (zh) * 2004-01-20 2007-04-25 株式会社Iai 压电陶瓷组合物
US20080018716A1 (en) * 2006-07-19 2008-01-24 Seiko Epson Corporation Piezoelectric device and liquid jet head

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4327942B2 (ja) * 1999-05-20 2009-09-09 Ｔｄｋ株式会社 薄膜圧電素子
US7998362B2 (en) 2005-08-23 2011-08-16 Canon Kabushiki Kaisha Piezoelectric substance, piezoelectric element, liquid discharge head using piezoelectric element, liquid discharge apparatus, and production method of piezoelectric element
US7521845B2 (en) 2005-08-23 2009-04-21 Canon Kabushiki Kaisha Piezoelectric substance, piezoelectric element, liquid discharge head using piezoelectric element, and liquid discharge apparatus
JP5241087B2 (ja) 2005-08-23 2013-07-17 キヤノン株式会社 圧電体、圧電素子、圧電素子を用いた液体吐出ヘッド、液体吐出装置及び圧電素子の製造方法
JP2007250626A (ja) * 2006-03-14 2007-09-27 Seiko Epson Corp 圧電素子の製造方法、アクチュエータ装置の製造方法、液体噴射ヘッドの製造方法、液体噴射装置の製造方法および圧電素子
US8020974B2 (en) 2007-01-31 2011-09-20 Panasonic Corporation Piezoelectric thin film device and piezoelectric thin film device manufacturing method, and inkjet head and inkjet recording apparatus
JP2008218620A (ja) 2007-03-02 2008-09-18 Matsushita Electric Ind Co Ltd 圧電体薄膜素子、圧電体薄膜素子の製造方法、インクジェットヘッド、およびインクジェット式記録装置
JP2008305821A (ja) 2007-06-05 2008-12-18 Panasonic Corp 圧電体薄膜素子、圧電体薄膜素子の製造方法、インクジェットヘッド、およびインクジェット式記録装置
JP2009049220A (ja) 2007-08-21 2009-03-05 Panasonic Corp 圧電体薄膜素子、圧電体薄膜素子の製造方法、インクジェットヘッド、及びインクジェット式記録装置
US8518290B2 (en) * 2008-07-30 2013-08-27 Canon Kabushiki Kaisha Piezoelectric material

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005119166A (ja) * 2003-10-17 2005-05-12 Matsushita Electric Ind Co Ltd 圧電素子、インクジェットヘッド、及びこれらの製造方法、並びにインクジェット式記録装置
CN1953947A (zh) * 2004-01-20 2007-04-25 株式会社Iai 压电陶瓷组合物
CN1676330A (zh) * 2004-04-02 2005-10-05 松下电器产业株式会社 压电元件、喷墨头、角速度传感器及喷墨式记录装置
JP2007088446A (ja) * 2005-08-23 2007-04-05 Canon Inc 圧電体、圧電素子、圧電素子を用いた液体吐出ヘッドおよび液体吐出装置
US20080018716A1 (en) * 2006-07-19 2008-01-24 Seiko Epson Corporation Piezoelectric device and liquid jet head

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111823714A (zh) * 2019-04-19 2020-10-27 精工爱普生株式会社 液体喷出头以及打印机

Also Published As

Publication number Publication date
US8317304B2 (en) 2012-11-27
JP2010228266A (ja) 2010-10-14
US20100245487A1 (en) 2010-09-30

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Application publication date: 20100929