JP2007043054A5 - - Google Patents

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Publication number
JP2007043054A5
JP2007043054A5 JP2005378321A JP2005378321A JP2007043054A5 JP 2007043054 A5 JP2007043054 A5 JP 2007043054A5 JP 2005378321 A JP2005378321 A JP 2005378321A JP 2005378321 A JP2005378321 A JP 2005378321A JP 2007043054 A5 JP2007043054 A5 JP 2007043054A5
Authority
JP
Japan
Prior art keywords
piezoelectric
film
piezoelectric element
manufacturing
element according
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
JP2005378321A
Other languages
English (en)
Japanese (ja)
Other versions
JP2007043054A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2005378321A priority Critical patent/JP2007043054A/ja
Priority claimed from JP2005378321A external-priority patent/JP2007043054A/ja
Priority to EP20060004396 priority patent/EP1699092A3/en
Priority to US11/367,996 priority patent/US7583012B2/en
Priority to KR20060020584A priority patent/KR20060096373A/ko
Publication of JP2007043054A publication Critical patent/JP2007043054A/ja
Priority to US12/123,109 priority patent/US20080222865A1/en
Publication of JP2007043054A5 publication Critical patent/JP2007043054A5/ja
Abandoned legal-status Critical Current

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JP2005378321A 2005-03-04 2005-12-28 圧電素子及びその製造方法 Abandoned JP2007043054A (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2005378321A JP2007043054A (ja) 2005-03-04 2005-12-28 圧電素子及びその製造方法
EP20060004396 EP1699092A3 (en) 2005-03-04 2006-03-03 Piezoelectric element and method for manufacturing piezoelectric element
US11/367,996 US7583012B2 (en) 2005-03-04 2006-03-03 Piezoelectric element and method for manufacturing piezoelectric element
KR20060020584A KR20060096373A (ko) 2005-03-04 2006-03-03 압전 소자 및 그 제조 방법
US12/123,109 US20080222865A1 (en) 2005-03-04 2008-05-19 Piezoelectric element and method for manuacturing piezoelectric element

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
JP2005061695 2005-03-04
JP2005061694 2005-03-04
JP2005061696 2005-03-04
JP2005190234 2005-06-29
JP2005378321A JP2007043054A (ja) 2005-03-04 2005-12-28 圧電素子及びその製造方法

Publications (2)

Publication Number Publication Date
JP2007043054A JP2007043054A (ja) 2007-02-15
JP2007043054A5 true JP2007043054A5 (enExample) 2009-02-19

Family

ID=36599295

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2005378321A Abandoned JP2007043054A (ja) 2005-03-04 2005-12-28 圧電素子及びその製造方法

Country Status (4)

Country Link
US (2) US7583012B2 (enExample)
EP (1) EP1699092A3 (enExample)
JP (1) JP2007043054A (enExample)
KR (1) KR20060096373A (enExample)

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5037819B2 (ja) * 2005-03-04 2012-10-03 ソニー株式会社 電子機器
JP2006341956A (ja) * 2005-06-09 2006-12-21 Otis Elevator Co エレベータシステム
US7946173B2 (en) * 2005-11-08 2011-05-24 Panasonic Corporation Angular velocity sensor and process for producing the same
US7696676B2 (en) * 2006-12-18 2010-04-13 Lockheed Martin Corporation Piezoelectric composite apparatus and related methods
JP5288530B2 (ja) * 2007-03-30 2013-09-11 富士フイルム株式会社 圧電素子製造方法及び液体吐出ヘッド製造方法
US7915794B2 (en) * 2007-11-15 2011-03-29 Sony Corporation Piezoelectric device having a tension stress, and angular velocity sensor
KR100975010B1 (ko) * 2008-02-29 2010-08-09 성균관대학교산학협력단 다중 크기 압전 마이크로 칸티레버 공진자 어레이를 이용한 물리센서 및 그 제작방법
JP5410686B2 (ja) * 2008-03-21 2014-02-05 富士フイルム株式会社 圧電体膜の製造方法、成膜装置および圧電体膜
FR2932192B1 (fr) * 2008-06-09 2011-01-21 Sagem Defense Securite Procede de metallisation d'une calotte vibrante et capteur vibrant obtenu
US9035253B2 (en) 2008-06-27 2015-05-19 Panasonic Intellectual Property Managment Co., Ltd. Infrared sensor element
WO2009157189A1 (ja) * 2008-06-27 2009-12-30 パナソニック株式会社 圧電体素子とその製造方法
JP4640459B2 (ja) 2008-07-04 2011-03-02 ソニー株式会社 角速度センサ
JP4582235B2 (ja) * 2008-10-31 2010-11-17 株式会社村田製作所 圧電デバイスの製造方法
JP2010135748A (ja) * 2008-11-04 2010-06-17 Seiko Epson Corp 圧電素子及びその製造方法、液体噴射ヘッド及びその製造方法、並びに液体噴射装置
JP5581781B2 (ja) * 2010-04-06 2014-09-03 セイコーエプソン株式会社 圧電アクチュエーターの製造方法
KR101677297B1 (ko) 2010-12-21 2016-11-29 한국전자통신연구원 압전 마이크로 에너지 수확기 및 이의 제조 방법
JP6044101B2 (ja) 2012-04-10 2016-12-14 セイコーエプソン株式会社 センサーデバイス、センサーデバイスの製造方法および電子機器
JP6341446B2 (ja) * 2014-03-13 2018-06-13 株式会社リコー 電気機械変換素子の製造方法、電気機械変換素子、液滴吐出ヘッド、液滴吐出装置及び画像形成装置
JP7421178B2 (ja) * 2020-02-20 2024-01-24 国立大学法人大阪大学 振動検出素子およびその製造方法
WO2022174440A1 (zh) * 2021-02-22 2022-08-25 京东方科技集团股份有限公司 压电元件、压电振动器及其制作和驱动方法、电子设备

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5500988A (en) * 1990-11-20 1996-03-26 Spectra, Inc. Method of making a perovskite thin-film ink jet transducer
US5802684A (en) * 1993-09-14 1998-09-08 Nikon Corporation Process for producing a vibration angular-velocity sensor
JP4122564B2 (ja) * 1998-04-24 2008-07-23 セイコーエプソン株式会社 圧電体素子、インクジェット式記録ヘッドおよびそれらの製造方法
JP2000357826A (ja) * 1999-04-13 2000-12-26 Seiko Epson Corp 圧電体素子の製造方法、圧電体素子、インクジェット式記録ヘッドおよびプリンタ
US6362558B1 (en) * 1999-12-24 2002-03-26 Kansai Research Institute Piezoelectric element, process for producing the same and ink jet recording head
US20070046153A1 (en) * 2005-08-23 2007-03-01 Canon Kabushiki Kaisha Piezoelectric substrate, piezoelectric element, liquid discharge head and liquid discharge apparatus
US7456548B2 (en) * 2006-05-09 2008-11-25 Canon Kabushiki Kaisha Piezoelectric element, piezoelectric actuator, and ink jet recording head

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