FR2932192B1 - Procede de metallisation d'une calotte vibrante et capteur vibrant obtenu - Google Patents

Procede de metallisation d'une calotte vibrante et capteur vibrant obtenu

Info

Publication number
FR2932192B1
FR2932192B1 FR0803185A FR0803185A FR2932192B1 FR 2932192 B1 FR2932192 B1 FR 2932192B1 FR 0803185 A FR0803185 A FR 0803185A FR 0803185 A FR0803185 A FR 0803185A FR 2932192 B1 FR2932192 B1 FR 2932192B1
Authority
FR
France
Prior art keywords
coating
metallizing
vibrating member
vibrant
vibrating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
FR0803185A
Other languages
English (en)
Other versions
FR2932192A1 (fr
Inventor
Michel Poirier
Paul Vandebeuque
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Safran Electronics and Defense SAS
Original Assignee
Sagem Defense Securite SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sagem Defense Securite SA filed Critical Sagem Defense Securite SA
Priority to FR0803185A priority Critical patent/FR2932192B1/fr
Priority to PCT/FR2009/000681 priority patent/WO2010000969A1/fr
Publication of FR2932192A1 publication Critical patent/FR2932192A1/fr
Application granted granted Critical
Publication of FR2932192B1 publication Critical patent/FR2932192B1/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14—Metallic material, boron or silicon
    • C23C14/18—Metallic material, boron or silicon on other inorganic substrates
    • C23C14/185—Metallic material, boron or silicon on other inorganic substrates by cathodic sputtering
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/58—After-treatment
    • C23C14/5806—Thermal treatment
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/567—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode
    • G01C19/5691—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode of essentially three-dimensional vibrators, e.g. wine glass-type vibrators

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Metallurgy (AREA)
  • Mechanical Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Inorganic Chemistry (AREA)
  • Remote Sensing (AREA)
  • General Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Gyroscopes (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
FR0803185A 2008-06-09 2008-06-09 Procede de metallisation d'une calotte vibrante et capteur vibrant obtenu Active FR2932192B1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
FR0803185A FR2932192B1 (fr) 2008-06-09 2008-06-09 Procede de metallisation d'une calotte vibrante et capteur vibrant obtenu
PCT/FR2009/000681 WO2010000969A1 (fr) 2008-06-09 2009-06-09 Procede de metallisation d'une calotte vibrante et capteur vibrant obtenu

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0803185A FR2932192B1 (fr) 2008-06-09 2008-06-09 Procede de metallisation d'une calotte vibrante et capteur vibrant obtenu

Publications (2)

Publication Number Publication Date
FR2932192A1 FR2932192A1 (fr) 2009-12-11
FR2932192B1 true FR2932192B1 (fr) 2011-01-21

Family

ID=40380248

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0803185A Active FR2932192B1 (fr) 2008-06-09 2008-06-09 Procede de metallisation d'une calotte vibrante et capteur vibrant obtenu

Country Status (2)

Country Link
FR (1) FR2932192B1 (fr)
WO (1) WO2010000969A1 (fr)

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR0174594B1 (ko) * 1994-11-26 1999-04-01 이재복 실리콘 웨이퍼상에 백금 박막을 형성하는 방법, 그 방법에 의하여 제조된 실리콘 기판 및 그 기판을 이용한 반도체 소자
US6025205A (en) * 1997-01-07 2000-02-15 Tong Yang Cement Corporation Apparatus and methods of forming preferred orientation-controlled platinum films using nitrogen
US6291345B1 (en) * 1998-07-27 2001-09-18 Honeywell International Inc. Controlled-stress stable metallization for electronic and electromechanical devices
US6647785B2 (en) * 2001-07-27 2003-11-18 Litton Systems, Inc. Nuclear radiation hard high accuracy rotation sensor system
US7168318B2 (en) * 2002-08-12 2007-01-30 California Institute Of Technology Isolated planar mesogyroscope
FR2851041B1 (fr) * 2003-02-06 2005-03-18 Sagem Procede de mise en oeuvre d'un resonateur sous l'effet de forces electrostatiques
JP4058018B2 (ja) * 2003-12-16 2008-03-05 松下電器産業株式会社 圧電素子及びその製造方法、並びにその圧電素子を備えたインクジェットヘッド、インクジェット式記録装置及び角速度センサ
WO2005086248A1 (fr) * 2004-03-05 2005-09-15 Matsushita Electric Industrial Co., Ltd. Élément piézoélectrique, tête d’impression jet d’encre, capteur de vitesse angulaire, procédés de fabrication de ceux-ci et dispositif d’enregistrement a jet d’encre
JP2007043054A (ja) * 2005-03-04 2007-02-15 Sony Corp 圧電素子及びその製造方法

Also Published As

Publication number Publication date
FR2932192A1 (fr) 2009-12-11
WO2010000969A1 (fr) 2010-01-07

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