JP2008048315A5 - - Google Patents

Download PDF

Info

Publication number
JP2008048315A5
JP2008048315A5 JP2006223928A JP2006223928A JP2008048315A5 JP 2008048315 A5 JP2008048315 A5 JP 2008048315A5 JP 2006223928 A JP2006223928 A JP 2006223928A JP 2006223928 A JP2006223928 A JP 2006223928A JP 2008048315 A5 JP2008048315 A5 JP 2008048315A5
Authority
JP
Japan
Prior art keywords
thin film
piezoelectric thin
piezoelectric
manufacturing
vibrating piece
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2006223928A
Other languages
English (en)
Japanese (ja)
Other versions
JP4978114B2 (ja
JP2008048315A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2006223928A priority Critical patent/JP4978114B2/ja
Priority claimed from JP2006223928A external-priority patent/JP4978114B2/ja
Publication of JP2008048315A publication Critical patent/JP2008048315A/ja
Publication of JP2008048315A5 publication Critical patent/JP2008048315A5/ja
Application granted granted Critical
Publication of JP4978114B2 publication Critical patent/JP4978114B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2006223928A 2006-08-21 2006-08-21 圧電振動片の製造方法 Expired - Fee Related JP4978114B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2006223928A JP4978114B2 (ja) 2006-08-21 2006-08-21 圧電振動片の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006223928A JP4978114B2 (ja) 2006-08-21 2006-08-21 圧電振動片の製造方法

Publications (3)

Publication Number Publication Date
JP2008048315A JP2008048315A (ja) 2008-02-28
JP2008048315A5 true JP2008048315A5 (enExample) 2009-09-17
JP4978114B2 JP4978114B2 (ja) 2012-07-18

Family

ID=39181588

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2006223928A Expired - Fee Related JP4978114B2 (ja) 2006-08-21 2006-08-21 圧電振動片の製造方法

Country Status (1)

Country Link
JP (1) JP4978114B2 (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102959752B (zh) 2010-08-12 2015-09-02 株式会社村田制作所 压电薄膜元件的制造方法、压电薄膜元件以及压电薄膜元件用部件
CN103531706B (zh) * 2013-10-22 2016-05-25 深圳市豪恩声学股份有限公司 压电驻极体材料及其制备方法
US20160352307A1 (en) * 2015-05-27 2016-12-01 Murata Manufacturing Co., Ltd. Mems resonator with high quality factor

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3576788B2 (ja) * 1998-02-13 2004-10-13 株式会社東芝 電子部品及びその製造方法
JP3127245B1 (ja) * 1999-09-03 2001-01-22 工業技術院長 多層型電子材料、その製造方法、それを用いたセンサー及び記憶デバイス
JP4122430B2 (ja) * 2003-03-26 2008-07-23 独立行政法人産業技術総合研究所 強誘電体膜

Similar Documents

Publication Publication Date Title
JP2012054547A5 (ja) 半導体装置の作製方法
EA201071184A1 (ru) Способ осаждения тонкого слоя
JP2012009837A5 (ja) 半導体装置の作製方法
JP2010540774A5 (enExample)
JP2012519378A5 (enExample)
NO20052878D0 (no) Fremgangsmate i fabrikasjonen av en ferroelektrisk minneinnretning.
JP2009039138A5 (enExample)
EA201171455A1 (ru) Изделие и способ изготовления, относящиеся к нанокомпозитным покрытиям
JP2007329500A5 (enExample)
JP2010526931A5 (enExample)
JP2005509057A5 (enExample)
JP2009534177A5 (enExample)
JP2008311621A5 (enExample)
EP1965419A3 (en) Absorber layer candidates and techniques for application
EP1699092A3 (en) Piezoelectric element and method for manufacturing piezoelectric element
JP2007043054A5 (enExample)
JP2008172245A5 (enExample)
JP2007513049A5 (enExample)
JP2009033148A5 (enExample)
JP2008048315A5 (enExample)
JP2010157494A5 (enExample)
JP2013503145A5 (enExample)
JP2006083010A5 (enExample)
TW200725897A (en) Thin film transistor, device electrode thereof and method of formong the same
JP2008518201A5 (enExample)