JP2009539740A5 - - Google Patents
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- Publication number
- JP2009539740A5 JP2009539740A5 JP2009513306A JP2009513306A JP2009539740A5 JP 2009539740 A5 JP2009539740 A5 JP 2009539740A5 JP 2009513306 A JP2009513306 A JP 2009513306A JP 2009513306 A JP2009513306 A JP 2009513306A JP 2009539740 A5 JP2009539740 A5 JP 2009539740A5
- Authority
- JP
- Japan
- Prior art keywords
- solution
- content
- maximum
- active oxygen
- oxygen content
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000034 method Methods 0.000 claims 12
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims 6
- 229910052760 oxygen Inorganic materials 0.000 claims 6
- 239000001301 oxygen Substances 0.000 claims 6
- 239000012425 OXONE® Substances 0.000 claims 5
- HJKYXKSLRZKNSI-UHFFFAOYSA-I pentapotassium;hydrogen sulfate;oxido sulfate;sulfuric acid Chemical compound [K+].[K+].[K+].[K+].[K+].OS([O-])(=O)=O.[O-]S([O-])(=O)=O.OS(=O)(=O)O[O-].OS(=O)(=O)O[O-] HJKYXKSLRZKNSI-UHFFFAOYSA-I 0.000 claims 5
- 239000000463 material Substances 0.000 claims 4
- 239000000203 mixture Substances 0.000 claims 4
- 239000007787 solid Substances 0.000 claims 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims 4
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims 3
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 claims 3
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 claims 3
- 229910052802 copper Inorganic materials 0.000 claims 3
- 239000010949 copper Substances 0.000 claims 3
- CDBYLPFSWZWCQE-UHFFFAOYSA-L Sodium Carbonate Chemical compound [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 claims 2
- 229910052751 metal Inorganic materials 0.000 claims 2
- 239000002184 metal Substances 0.000 claims 2
- 238000005498 polishing Methods 0.000 claims 2
- BWHMMNNQKKPAPP-UHFFFAOYSA-L potassium carbonate Chemical compound [K+].[K+].[O-]C([O-])=O BWHMMNNQKKPAPP-UHFFFAOYSA-L 0.000 claims 2
- 239000002002 slurry Substances 0.000 claims 2
- 229910000881 Cu alloy Inorganic materials 0.000 claims 1
- UIIMBOGNXHQVGW-DEQYMQKBSA-M Sodium bicarbonate-14C Chemical compound [Na+].O[14C]([O-])=O UIIMBOGNXHQVGW-DEQYMQKBSA-M 0.000 claims 1
- 239000002253 acid Substances 0.000 claims 1
- 239000012752 auxiliary agent Substances 0.000 claims 1
- RQPZNWPYLFFXCP-UHFFFAOYSA-L barium dihydroxide Chemical compound [OH-].[OH-].[Ba+2] RQPZNWPYLFFXCP-UHFFFAOYSA-L 0.000 claims 1
- 229910001863 barium hydroxide Inorganic materials 0.000 claims 1
- 238000005530 etching Methods 0.000 claims 1
- 229910052500 inorganic mineral Inorganic materials 0.000 claims 1
- VTHJTEIRLNZDEV-UHFFFAOYSA-L magnesium dihydroxide Chemical compound [OH-].[OH-].[Mg+2] VTHJTEIRLNZDEV-UHFFFAOYSA-L 0.000 claims 1
- 239000000347 magnesium hydroxide Substances 0.000 claims 1
- 229910001862 magnesium hydroxide Inorganic materials 0.000 claims 1
- 239000011707 mineral Substances 0.000 claims 1
- 235000010755 mineral Nutrition 0.000 claims 1
- 239000003607 modifier Substances 0.000 claims 1
- 150000007524 organic acids Chemical class 0.000 claims 1
- 235000005985 organic acids Nutrition 0.000 claims 1
- 239000011736 potassium bicarbonate Substances 0.000 claims 1
- 229910000028 potassium bicarbonate Inorganic materials 0.000 claims 1
- 235000015497 potassium bicarbonate Nutrition 0.000 claims 1
- 229910000027 potassium carbonate Inorganic materials 0.000 claims 1
- 235000011181 potassium carbonates Nutrition 0.000 claims 1
- TYJJADVDDVDEDZ-UHFFFAOYSA-M potassium hydrogencarbonate Chemical compound [K+].OC([O-])=O TYJJADVDDVDEDZ-UHFFFAOYSA-M 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 229910000029 sodium carbonate Inorganic materials 0.000 claims 1
- 239000003381 stabilizer Substances 0.000 claims 1
- 239000000758 substrate Substances 0.000 claims 1
- 239000004094 surface-active agent Substances 0.000 claims 1
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US11/445,610 | 2006-06-02 | ||
| US11/445,610 US7442323B2 (en) | 2006-06-02 | 2006-06-02 | Potassium monopersulfate solutions |
| PCT/US2007/012995 WO2007143127A1 (en) | 2006-06-02 | 2007-06-01 | Potassium monopersulfate solutions |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2009539740A JP2009539740A (ja) | 2009-11-19 |
| JP2009539740A5 true JP2009539740A5 (enExample) | 2010-06-24 |
| JP5292285B2 JP5292285B2 (ja) | 2013-09-18 |
Family
ID=38566311
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2009513306A Active JP5292285B2 (ja) | 2006-06-02 | 2007-06-01 | 一過硫酸カリウム溶液 |
Country Status (10)
| Country | Link |
|---|---|
| US (2) | US7442323B2 (enExample) |
| EP (1) | EP2024281B1 (enExample) |
| JP (1) | JP5292285B2 (enExample) |
| KR (1) | KR101397363B1 (enExample) |
| CN (1) | CN101460397B (enExample) |
| CA (1) | CA2652151C (enExample) |
| DE (1) | DE602007008400D1 (enExample) |
| MY (2) | MY142427A (enExample) |
| TW (1) | TWI349648B (enExample) |
| WO (1) | WO2007143127A1 (enExample) |
Families Citing this family (21)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20100239678A1 (en) * | 2006-07-18 | 2010-09-23 | Ali Razavi | Ionically functionalized nanodiamonds |
| WO2009026324A2 (en) | 2007-08-20 | 2009-02-26 | Advanced Technology Materials, Inc. | Composition and method for removing ion-implanted photoresist |
| KR20100133507A (ko) * | 2008-05-01 | 2010-12-21 | 어드밴스드 테크놀러지 머티리얼즈, 인코포레이티드 | 고밀도 주입된 레지스트의 제거를 위한 저 ｐｈ 혼합물 |
| TWI480360B (zh) | 2009-04-03 | 2015-04-11 | Du Pont | 蝕刻劑組成物及方法 |
| JP5340071B2 (ja) * | 2009-08-03 | 2013-11-13 | 株式会社Ａｄｅｋａ | 安定剤を含むペルオキシ一硫酸水溶液の製造方法 |
| US10383894B2 (en) * | 2010-03-17 | 2019-08-20 | Lutran Industries, Inc. | Human medicinal treatment using salt of peroxymonosulfuric acid |
| US20120074014A1 (en) * | 2010-09-27 | 2012-03-29 | Lutran Industries, Inc. | Product typically based on salt of peroxymonosulfuric acid and suitable for medicinal usage, and associated product fabrication |
| MX2012010730A (es) * | 2010-03-18 | 2012-12-17 | Dow Global Technologies Llc | Proceso para preparar dioxidos de divinilareno. |
| CN102296293B (zh) * | 2011-06-24 | 2015-01-07 | 李沛泓 | 印刷线路板微蚀刻剂 |
| JP5885971B2 (ja) * | 2011-09-08 | 2016-03-16 | 関東化學株式会社 | 銅および銅合金のエッチング液 |
| US20150104938A1 (en) * | 2013-10-16 | 2015-04-16 | United Microelectronics Corporation | Method for forming damascene opening and applications thereof |
| JP2016104474A (ja) * | 2014-08-22 | 2016-06-09 | 有限会社情報科学研究所 | 共鳴発泡と真空キャビテーションによるウルトラファインバブル製造方法及びウルトラファインバブル水製造装置。 |
| PL3218317T3 (pl) | 2014-11-13 | 2019-03-29 | Gerresheimer Glas Gmbh | Filtr cząstek urządzenia do wytwarzania szkła, jednostka tłoka, głowica dmuchu, wspornik głowicy dmuchu i urządzenie do wytwarzania szkła, przystosowane lub zawierające filtr |
| CN108950558A (zh) * | 2018-08-27 | 2018-12-07 | 深圳市星扬高新科技有限公司 | 一种铜制件表面粗化剂 |
| CN110172349B (zh) * | 2019-05-08 | 2020-11-20 | 厦门大学 | 一种氮化镓半导体光电化学刻蚀液及加工方法 |
| FR3102008B1 (fr) * | 2019-10-10 | 2021-09-24 | Commissariat Energie Atomique | Procede de recyclage des batteries li-ion |
| CN111039309A (zh) * | 2019-12-31 | 2020-04-21 | 中船重工（邯郸）派瑞特种气体有限公司 | 一种分离硫酸氢钾和硫酸钾混合物的装置及方法 |
| CN111662641B (zh) * | 2020-06-30 | 2021-10-26 | 中国科学院上海微系统与信息技术研究所 | 一种高选择比的化学机械抛光液及其应用 |
| KR102581261B1 (ko) * | 2021-03-04 | 2023-09-21 | 우석대학교 산학협력단 | 습윤 옥손을 이용한 비시날 트라이카보닐 화합물의 제조방법 |
| CN115124204A (zh) * | 2022-06-16 | 2022-09-30 | 安徽省交通航务工程有限公司 | 一种实现疏浚泥浆快速泥水分离的处理方法 |
| CN116235863A (zh) * | 2023-01-04 | 2023-06-09 | 四川省畜牧科学研究院 | 一种耐分解的消毒剂 |
Family Cites Families (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3555147A (en) * | 1967-12-19 | 1971-01-12 | Fmc Corp | Peroxydiphosphate neutralizer for hair waving |
| US3805809A (en) * | 1972-10-02 | 1974-04-23 | Procter & Gamble | Hair setting process |
| EP0149329B1 (en) * | 1983-12-30 | 1992-04-15 | E.I. Du Pont De Nemours And Company | Potassium monopersulfate compositions and process for preparing them |
| DE4014655A1 (de) * | 1990-05-08 | 1991-11-14 | Behringwerke Ag | Peptidamide, verfahren zu deren herstellung und diese enthaltende mittel als fibrin/thrombin-gerinnungsinhibitoren |
| DE4020856A1 (de) * | 1990-06-29 | 1992-01-09 | Degussa | Verfahren zur herstellung von lagerstabilen waessrigen natriumperoxomonosulfatloesungen |
| US5139763A (en) * | 1991-03-06 | 1992-08-18 | E. I. Du Pont De Nemours And Company | Class of stable potassium monopersulfate compositions |
| DE19503900C1 (de) | 1995-02-07 | 1995-11-23 | Degussa | Verfahren zur Herstellung des Kaliumperoxomonosulfat-Tripelsalzes 2 KHSO¶5¶ . KHSO¶4¶ . K¶2¶SO¶4¶ |
| JP4767401B2 (ja) * | 2000-10-30 | 2011-09-07 | ルネサスエレクトロニクス株式会社 | 半導体記憶装置及びその製造方法 |
| US6974777B2 (en) * | 2002-06-07 | 2005-12-13 | Cabot Microelectronics Corporation | CMP compositions for low-k dielectric materials |
| TW200417628A (en) * | 2002-09-09 | 2004-09-16 | Shipley Co Llc | Improved cleaning composition |
| US6818142B2 (en) * | 2003-03-31 | 2004-11-16 | E. I. Du Pont De Nemours And Company | Potassium hydrogen peroxymonosulfate solutions |
| US20050063895A1 (en) * | 2003-09-23 | 2005-03-24 | Martin Perry L. | Production of potassium monopersulfate triple salt using oleum |
| US7090820B2 (en) * | 2003-09-23 | 2006-08-15 | Truox, Inc. | Potassium monopersulfate triple salt with increased active oxygen content and substantially no K2S2O8 |
| US20060013750A1 (en) * | 2004-07-16 | 2006-01-19 | Martin Perry L | Solvent-activated reactor |
| CN1778669A (zh) * | 2004-11-22 | 2006-05-31 | 上海嘉源实业有限公司 | 一种单过硫酸氢钾的制备方法 |
-
2006
- 2006-06-02 US US11/445,610 patent/US7442323B2/en active Active
-
2007
- 2007-05-08 MY MYPI20070707A patent/MY142427A/en unknown
- 2007-05-08 MY MYPI2010001723A patent/MY156749A/en unknown
- 2007-05-14 TW TW096117073A patent/TWI349648B/zh active
- 2007-06-01 CA CA2652151A patent/CA2652151C/en active Active
- 2007-06-01 CN CN200780020437XA patent/CN101460397B/zh active Active
- 2007-06-01 DE DE602007008400T patent/DE602007008400D1/de active Active
- 2007-06-01 WO PCT/US2007/012995 patent/WO2007143127A1/en not_active Ceased
- 2007-06-01 JP JP2009513306A patent/JP5292285B2/ja active Active
- 2007-06-01 EP EP07777364A patent/EP2024281B1/en active Active
- 2007-06-01 KR KR1020087031909A patent/KR101397363B1/ko active Active
-
2008
- 2008-09-10 US US12/207,733 patent/US8123970B2/en active Active
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