JP2009536465A5 - - Google Patents

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Publication number
JP2009536465A5
JP2009536465A5 JP2009510111A JP2009510111A JP2009536465A5 JP 2009536465 A5 JP2009536465 A5 JP 2009536465A5 JP 2009510111 A JP2009510111 A JP 2009510111A JP 2009510111 A JP2009510111 A JP 2009510111A JP 2009536465 A5 JP2009536465 A5 JP 2009536465A5
Authority
JP
Japan
Prior art keywords
piezoelectric material
oxide layer
block
fired
polishing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2009510111A
Other languages
English (en)
Japanese (ja)
Other versions
JP2009536465A (ja
Filing date
Publication date
Priority claimed from US11/744,105 external-priority patent/US20070257580A1/en
Application filed filed Critical
Publication of JP2009536465A publication Critical patent/JP2009536465A/ja
Publication of JP2009536465A5 publication Critical patent/JP2009536465A5/ja
Pending legal-status Critical Current

Links

JP2009510111A 2006-05-05 2007-05-04 圧電材料の研磨 Pending JP2009536465A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US74655606P 2006-05-05 2006-05-05
US11/744,105 US20070257580A1 (en) 2006-05-05 2007-05-03 Polishing Piezoelectric Material
PCT/US2007/068289 WO2007131198A1 (en) 2006-05-05 2007-05-04 Polishing piezoelectric material

Publications (2)

Publication Number Publication Date
JP2009536465A JP2009536465A (ja) 2009-10-08
JP2009536465A5 true JP2009536465A5 (enExample) 2011-06-16

Family

ID=38660583

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2009510111A Pending JP2009536465A (ja) 2006-05-05 2007-05-04 圧電材料の研磨

Country Status (5)

Country Link
US (1) US20070257580A1 (enExample)
EP (1) EP2021298A4 (enExample)
JP (1) JP2009536465A (enExample)
KR (1) KR20090018096A (enExample)
WO (1) WO2007131198A1 (enExample)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005072113A (ja) * 2003-08-21 2005-03-17 Ngk Insulators Ltd 圧電／電歪デバイス
US8053951B2 (en) * 2008-11-04 2011-11-08 Fujifilm Corporation Thin film piezoelectric actuators
KR101024013B1 (ko) * 2008-12-03 2011-03-29 삼성전기주식회사 잉크젯 헤드 제조방법
JP2010238856A (ja) * 2009-03-31 2010-10-21 Tdk Corp 圧電体素子及びジャイロセンサ
WO2010148398A2 (en) * 2009-06-19 2010-12-23 The Regents Of The University Of Michigan A thin-film device and method of fabricating the same
US9266326B2 (en) 2012-07-25 2016-02-23 Hewlett-Packard Development Company, L.P. Piezoelectric actuator and method of making a piezoelectric actuator
DE112014001537B4 (de) 2013-03-21 2018-06-28 Ngk Insulators, Ltd. Verbundsubstrate für Akustikwellenelemente und Akustikwellenelemente
JP6166170B2 (ja) * 2013-12-16 2017-07-19 日本碍子株式会社 複合基板及びその製法
DK3130407T3 (da) * 2015-08-10 2021-02-01 Apator Miitors Aps Fremgangsmåde til binding af en piezoelektrisk ultralydstransducer
CN108028312B (zh) * 2015-09-15 2021-03-26 日本碍子株式会社 复合基板的制造方法
JP7195758B2 (ja) * 2018-04-19 2022-12-26 株式会社ディスコ Ｓａｗデバイスの製造方法
US11864465B2 (en) * 2020-05-22 2024-01-02 Wisconsin Alumni Research Foundation Integration of semiconductor membranes with piezoelectric substrates

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3151644B2 (ja) * 1993-03-08 2001-04-03 日本碍子株式会社 圧電／電歪膜型素子
JPH0818115A (ja) * 1994-07-04 1996-01-19 Matsushita Electric Ind Co Ltd 複合圧電デバイス
JP3399164B2 (ja) * 1995-06-27 2003-04-21 松下電工株式会社 加速度センサ及びその製造方法
JPH10264385A (ja) * 1997-03-27 1998-10-06 Seiko Epson Corp 圧電体素子、インクジェット式記録ヘッドおよびそれらの製造方法
WO2001018857A1 (en) * 1999-09-03 2001-03-15 University Of Maryland, College Park Process for fabrication of 3-dimensional micromechanisms
FR2823012B1 (fr) * 2001-04-03 2004-05-21 Commissariat Energie Atomique Procede de transfert selectif d'au moins un element d'un support initial sur un support final
JP2003034035A (ja) * 2001-07-24 2003-02-04 Ricoh Co Ltd 液滴吐出ヘッド
JP2003309302A (ja) * 2002-04-18 2003-10-31 Canon Inc 圧電膜型素子構造体と液体噴射ヘッドおよびそれらの製造方法
US7052117B2 (en) * 2002-07-03 2006-05-30 Dimatix, Inc. Printhead having a thin pre-fired piezoelectric layer
JP3774782B2 (ja) * 2003-05-14 2006-05-17 富士通メディアデバイス株式会社 弾性表面波素子の製造方法
WO2005037558A2 (en) * 2003-10-10 2005-04-28 Dimatix, Inc. Print head with thin membrane
JP4737375B2 (ja) * 2004-03-11 2011-07-27 セイコーエプソン株式会社 アクチュエータ装置の製造方法及び液体噴射ヘッドの製造方法並びに液体噴射装置の製造方法
US20060018796A1 (en) * 2004-07-21 2006-01-26 Hans Sitte Methods and apparatus for preparing multiwell sheets
US7420317B2 (en) * 2004-10-15 2008-09-02 Fujifilm Dimatix, Inc. Forming piezoelectric actuators
WO2006046494A1 (ja) * 2004-10-25 2006-05-04 Ngk Insulators, Ltd. 圧電／電歪デバイス
US7368860B2 (en) * 2005-02-11 2008-05-06 The Regents Of The University Od California High performance piezoelectric actuator

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