JP2009532877A5 - - Google Patents

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Publication number
JP2009532877A5
JP2009532877A5 JP2009503120A JP2009503120A JP2009532877A5 JP 2009532877 A5 JP2009532877 A5 JP 2009532877A5 JP 2009503120 A JP2009503120 A JP 2009503120A JP 2009503120 A JP2009503120 A JP 2009503120A JP 2009532877 A5 JP2009532877 A5 JP 2009532877A5
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JP
Japan
Prior art keywords
zone
temperature
substrate
power
time interval
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Pending
Application number
JP2009503120A
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English (en)
Japanese (ja)
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JP2009532877A (ja
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Publication date
Priority claimed from US11/393,423 external-priority patent/US7398693B2/en
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Publication of JP2009532877A publication Critical patent/JP2009532877A/ja
Publication of JP2009532877A5 publication Critical patent/JP2009532877A5/ja
Pending legal-status Critical Current

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JP2009503120A 2006-03-30 2007-03-07 基板の急速熱処理のための適応制御方法 Pending JP2009532877A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US11/393,423 US7398693B2 (en) 2006-03-30 2006-03-30 Adaptive control method for rapid thermal processing of a substrate
PCT/US2007/063482 WO2007114987A2 (en) 2006-03-30 2007-03-07 Adaptive control method for rapid thermal processing of a substrate

Publications (2)

Publication Number Publication Date
JP2009532877A JP2009532877A (ja) 2009-09-10
JP2009532877A5 true JP2009532877A5 (enExample) 2011-08-18

Family

ID=38564171

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2009503120A Pending JP2009532877A (ja) 2006-03-30 2007-03-07 基板の急速熱処理のための適応制御方法

Country Status (7)

Country Link
US (1) US7398693B2 (enExample)
EP (1) EP2005134A2 (enExample)
JP (1) JP2009532877A (enExample)
KR (1) KR101019932B1 (enExample)
CN (1) CN101495847A (enExample)
TW (1) TWI387007B (enExample)
WO (1) WO2007114987A2 (enExample)

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