JP2009513028A5 - - Google Patents
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- JP2009513028A5 JP2009513028A5 JP2008537785A JP2008537785A JP2009513028A5 JP 2009513028 A5 JP2009513028 A5 JP 2009513028A5 JP 2008537785 A JP2008537785 A JP 2008537785A JP 2008537785 A JP2008537785 A JP 2008537785A JP 2009513028 A5 JP2009513028 A5 JP 2009513028A5
- Authority
- JP
- Japan
- Prior art keywords
- abrasive
- wafer
- optionally
- exposed
- agent
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 238000005498 polishing Methods 0.000 claims description 15
- MHAJPDPJQMAIIY-UHFFFAOYSA-N Hydrogen peroxide Chemical compound OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 claims description 6
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims description 3
- 229910052721 tungsten Inorganic materials 0.000 claims description 3
- 239000010937 tungsten Substances 0.000 claims description 3
- 239000000203 mixture Substances 0.000 claims 14
- 239000002131 composite material Substances 0.000 claims 9
- 239000002245 particle Substances 0.000 claims 9
- 239000008139 complexing agent Substances 0.000 claims 7
- 239000000463 material Substances 0.000 claims 7
- 238000000034 method Methods 0.000 claims 7
- 239000002253 acid Substances 0.000 claims 6
- 150000007513 acids Chemical class 0.000 claims 6
- 239000003795 chemical substances by application Substances 0.000 claims 6
- 239000004020 conductor Substances 0.000 claims 5
- 229910021645 metal ion Inorganic materials 0.000 claims 5
- 239000003989 dielectric material Substances 0.000 claims 4
- 239000007800 oxidant agent Substances 0.000 claims 4
- MUBZPKHOEPUJKR-UHFFFAOYSA-N Oxalic acid Chemical compound OC(=O)C(O)=O MUBZPKHOEPUJKR-UHFFFAOYSA-N 0.000 claims 3
- 230000004888 barrier function Effects 0.000 claims 3
- 239000011230 binding agent Substances 0.000 claims 3
- KRKNYBCHXYNGOX-UHFFFAOYSA-N citric acid group Chemical group C(CC(O)(C(=O)O)CC(=O)O)(=O)O KRKNYBCHXYNGOX-UHFFFAOYSA-N 0.000 claims 3
- 150000003839 salts Chemical class 0.000 claims 3
- 239000004065 semiconductor Substances 0.000 claims 3
- BWLBGMIXKSTLSX-UHFFFAOYSA-N 2-hydroxyisobutyric acid Chemical compound CC(C)(O)C(O)=O BWLBGMIXKSTLSX-UHFFFAOYSA-N 0.000 claims 2
- OFOBLEOULBTSOW-UHFFFAOYSA-N Malonic acid Chemical compound OC(=O)CC(O)=O OFOBLEOULBTSOW-UHFFFAOYSA-N 0.000 claims 2
- 239000000654 additive Substances 0.000 claims 2
- 230000000996 additive effect Effects 0.000 claims 2
- WNLRTRBMVRJNCN-UHFFFAOYSA-N adipic acid Chemical compound OC(=O)CCCCC(O)=O WNLRTRBMVRJNCN-UHFFFAOYSA-N 0.000 claims 2
- JVTAAEKCZFNVCJ-UHFFFAOYSA-N lactic acid Chemical compound CC(O)C(O)=O JVTAAEKCZFNVCJ-UHFFFAOYSA-N 0.000 claims 2
- -1 peroxide compound Chemical class 0.000 claims 2
- 239000000126 substance Substances 0.000 claims 2
- RTBFRGCFXZNCOE-UHFFFAOYSA-N 1-methylsulfonylpiperidin-4-one Chemical compound CS(=O)(=O)N1CCC(=O)CC1 RTBFRGCFXZNCOE-UHFFFAOYSA-N 0.000 claims 1
- 229910052684 Cerium Inorganic materials 0.000 claims 1
- 229920005830 Polyurethane Foam Polymers 0.000 claims 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 1
- KDYFGRWQOYBRFD-UHFFFAOYSA-N Succinic acid Natural products OC(=O)CCC(O)=O KDYFGRWQOYBRFD-UHFFFAOYSA-N 0.000 claims 1
- 239000012963 UV stabilizer Substances 0.000 claims 1
- 239000012190 activator Substances 0.000 claims 1
- 239000001361 adipic acid Substances 0.000 claims 1
- 235000011037 adipic acid Nutrition 0.000 claims 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims 1
- JFCQEDHGNNZCLN-UHFFFAOYSA-N anhydrous glutaric acid Natural products OC(=O)CCCC(O)=O JFCQEDHGNNZCLN-UHFFFAOYSA-N 0.000 claims 1
- KDYFGRWQOYBRFD-NUQCWPJISA-N butanedioic acid Chemical compound O[14C](=O)CC[14C](O)=O KDYFGRWQOYBRFD-NUQCWPJISA-N 0.000 claims 1
- 239000003054 catalyst Substances 0.000 claims 1
- CETPSERCERDGAM-UHFFFAOYSA-N ceric oxide Chemical compound O=[Ce]=O CETPSERCERDGAM-UHFFFAOYSA-N 0.000 claims 1
- 229910000422 cerium(IV) oxide Inorganic materials 0.000 claims 1
- 229910052802 copper Inorganic materials 0.000 claims 1
- 239000007822 coupling agent Substances 0.000 claims 1
- 239000000975 dye Substances 0.000 claims 1
- 239000000835 fiber Substances 0.000 claims 1
- 239000000945 filler Substances 0.000 claims 1
- 229910052737 gold Inorganic materials 0.000 claims 1
- 239000003999 initiator Substances 0.000 claims 1
- 150000002500 ions Chemical class 0.000 claims 1
- 229910052742 iron Inorganic materials 0.000 claims 1
- 239000004310 lactic acid Substances 0.000 claims 1
- 235000014655 lactic acid Nutrition 0.000 claims 1
- 239000007788 liquid Substances 0.000 claims 1
- 239000000314 lubricant Substances 0.000 claims 1
- 229910052749 magnesium Inorganic materials 0.000 claims 1
- 229910052748 manganese Inorganic materials 0.000 claims 1
- 229910052751 metal Inorganic materials 0.000 claims 1
- 239000002184 metal Substances 0.000 claims 1
- 229910044991 metal oxide Inorganic materials 0.000 claims 1
- 150000004706 metal oxides Chemical class 0.000 claims 1
- ZIYVHBGGAOATLY-UHFFFAOYSA-N methylmalonic acid Chemical compound OC(=O)C(C)C(O)=O ZIYVHBGGAOATLY-UHFFFAOYSA-N 0.000 claims 1
- 239000003607 modifier Substances 0.000 claims 1
- 235000006408 oxalic acid Nutrition 0.000 claims 1
- 239000000049 pigment Substances 0.000 claims 1
- 229920000515 polycarbonate Polymers 0.000 claims 1
- 239000004417 polycarbonate Substances 0.000 claims 1
- 239000011496 polyurethane foam Substances 0.000 claims 1
- 229910052709 silver Inorganic materials 0.000 claims 1
- 239000004094 surface-active agent Substances 0.000 claims 1
- 239000000375 suspending agent Substances 0.000 claims 1
- 230000008961 swelling Effects 0.000 claims 1
- 230000002195 synergetic effect Effects 0.000 claims 1
- 229910052715 tantalum Inorganic materials 0.000 claims 1
- 229910052718 tin Inorganic materials 0.000 claims 1
- 229910052719 titanium Inorganic materials 0.000 claims 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims 1
- 239000000080 wetting agent Substances 0.000 claims 1
- 238000003491 array Methods 0.000 description 2
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 230000003628 erosive effect Effects 0.000 description 1
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US11/256,736 US7435162B2 (en) | 2005-10-24 | 2005-10-24 | Polishing fluids and methods for CMP |
| PCT/US2006/040803 WO2007050409A1 (en) | 2005-10-24 | 2006-10-20 | Polishing fluids and methods for cmp |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2009513028A JP2009513028A (ja) | 2009-03-26 |
| JP2009513028A5 true JP2009513028A5 (enExample) | 2009-12-03 |
Family
ID=37968128
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2008537785A Withdrawn JP2009513028A (ja) | 2005-10-24 | 2006-10-20 | Ｃｍｐのための研磨流体及び方法 |
Country Status (7)
| Country | Link |
|---|---|
| US (3) | US7435162B2 (enExample) |
| EP (1) | EP1951837A4 (enExample) |
| JP (1) | JP2009513028A (enExample) |
| KR (1) | KR20080059397A (enExample) |
| CN (1) | CN101297015B (enExample) |
| TW (2) | TWI421317B (enExample) |
| WO (1) | WO2007050409A1 (enExample) |
Families Citing this family (41)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7435162B2 (en) * | 2005-10-24 | 2008-10-14 | 3M Innovative Properties Company | Polishing fluids and methods for CMP |
| US20070218692A1 (en) * | 2006-01-31 | 2007-09-20 | Nissan Chemical Industries, Ltd. | Copper-based metal polishing compositions and polishing processes |
| US7629258B2 (en) * | 2006-11-22 | 2009-12-08 | Clarkson University | Method for one-to-one polishing of silicon nitride and silicon oxide |
| WO2009026324A2 (en) * | 2007-08-20 | 2009-02-26 | Advanced Technology Materials, Inc. | Composition and method for removing ion-implanted photoresist |
| US20090130849A1 (en) * | 2007-10-29 | 2009-05-21 | Wai Mun Lee | Chemical mechanical polishing and wafer cleaning composition comprising amidoxime compounds and associated method for use |
| WO2009058278A1 (en) | 2007-10-29 | 2009-05-07 | Ekc Technology, Inc | Methods of cleaning semiconductor devices at the back end of line using amidoxime compositions |
| US8802609B2 (en) | 2007-10-29 | 2014-08-12 | Ekc Technology Inc | Nitrile and amidoxime compounds and methods of preparation for semiconductor processing |
| JP5309692B2 (ja) * | 2008-05-28 | 2013-10-09 | 株式会社Ｓｕｍｃｏ | シリコンウェーハの研磨方法 |
| US7838483B2 (en) | 2008-10-29 | 2010-11-23 | Ekc Technology, Inc. | Process of purification of amidoxime containing cleaning solutions and their use |
| TWI482881B (zh) * | 2008-12-17 | 2015-05-01 | Zen Material Technologies Inc | The surface treatment method of the magnesium-containing substrate and the products thereof, and the polishing liquid and the coating liquid used |
| US8940178B2 (en) * | 2009-03-18 | 2015-01-27 | E I Du Pont De Nemours And Company | Textured silicon substrate and method |
| KR101619380B1 (ko) * | 2009-05-14 | 2016-05-11 | 삼성디스플레이 주식회사 | 식각액 조성물 및 이를 이용한 어레이 기판의 제조방법 |
| FR2947279B1 (fr) * | 2009-06-24 | 2012-10-26 | Franck Vaccaro | Nouveau produit de lustrage, permettant une efficacite multiple sur tout metaux, courants et specifiques ou toute peinture neuve, vieillie, glycero et eau en plus de son pouvoir de raviveur de peinture |
| JP5646862B2 (ja) * | 2009-09-18 | 2014-12-24 | 長興開発科技股▲ふん▼有限公司 | シリコン貫通ビア構造を有する半導体ウェハーの研磨方法、及びそれに使用する研磨組成物 |
| CN102403212B (zh) * | 2010-09-17 | 2014-12-10 | 长兴开发科技股份有限公司 | 硅通孔晶片的抛光方法和用于该方法的抛光组合物 |
| TWI521028B (zh) * | 2010-10-05 | 2016-02-11 | 巴斯夫歐洲公司 | 包含特定異聚酸之化學機械研磨組成物 |
| KR101891363B1 (ko) * | 2010-10-13 | 2018-08-24 | 엔테그리스, 아이엔씨. | 티타늄 니트라이드 부식을 억제하기 위한 조성물 및 방법 |
| SG192220A1 (en) | 2011-02-03 | 2013-09-30 | Nitta Haas Inc | Polishing composition and polishing method using the same |
| TWI575040B (zh) * | 2011-03-18 | 2017-03-21 | 長興開發科技股份有限公司 | 可用於拋光矽通孔晶圓之拋光組成物及其用途 |
| US20130186765A1 (en) * | 2012-01-23 | 2013-07-25 | Seagate Technology Llc | Electrodeposition methods |
| CN104822495A (zh) * | 2012-09-21 | 2015-08-05 | 3M创新有限公司 | 向固定磨料幅材中引入添加剂以改善cmp性能 |
| CN103203681B (zh) * | 2013-04-07 | 2015-04-29 | 大连理工大学 | 一种ii-vi族软脆晶体研磨抛光方法 |
| US9416297B2 (en) * | 2013-11-13 | 2016-08-16 | Taiwan Semiconductor Manufacturing Co., Ltd. | Chemical mechanical polishing method using slurry composition containing N-oxide compound |
| US9238754B2 (en) * | 2014-03-11 | 2016-01-19 | Cabot Microelectronics Corporation | Composition for tungsten CMP |
| US9303189B2 (en) * | 2014-03-11 | 2016-04-05 | Cabot Microelectronics Corporation | Composition for tungsten CMP |
| CN106104764B (zh) * | 2014-03-12 | 2019-12-10 | 嘉柏微电子材料股份公司 | 用于钨材料的化学机械抛光的组合物及方法 |
| CN104979277B (zh) * | 2014-04-11 | 2019-06-14 | 中国科学院微电子研究所 | 一种40nm以下尺寸的器件的化学机械平坦化的工艺方法 |
| US9530655B2 (en) * | 2014-09-08 | 2016-12-27 | Taiwan Semiconductor Manufacting Company, Ltd. | Slurry composition for chemical mechanical polishing of Ge-based materials and devices |
| US11655405B2 (en) | 2014-09-12 | 2023-05-23 | Taiwan Semiconductor Manufacturing Company Limited | Method of manufacturing cerium dioxide powder and cerium dioxide powder |
| MY176603A (en) * | 2014-10-14 | 2020-08-18 | Cmc Mat Inc | Nickel phosphorous cmp compositions and methods |
| KR101922289B1 (ko) * | 2015-11-26 | 2018-11-27 | 삼성에스디아이 주식회사 | Ｃｍｐ 슬러리 조성물 및 이를 이용한 유기막 연마방법 |
| US9944829B2 (en) * | 2015-12-03 | 2018-04-17 | Treliant Fang | Halite salts as silicon carbide etchants for enhancing CMP material removal rate for SiC wafer |
| US20190085207A1 (en) * | 2016-03-25 | 2019-03-21 | Fujimi Incorporated | Polishing composition for object to be polished having metal-containing layer |
| KR101943704B1 (ko) * | 2016-06-27 | 2019-01-29 | 삼성에스디아이 주식회사 | 금속막용 cmp 슬러리 조성물 및 연마 방법 |
| JP6901297B2 (ja) * | 2017-03-22 | 2021-07-14 | 株式会社フジミインコーポレーテッド | 研磨用組成物 |
| CN110892093B (zh) * | 2017-05-25 | 2021-12-28 | 圣戈本陶瓷及塑料股份有限公司 | 用于陶瓷材料的化学机械抛光的氧化流体 |
| US10600655B2 (en) * | 2017-08-10 | 2020-03-24 | Rohm And Haas Electronic Materials Cmp Holdings, Inc. | Chemical mechanical polishing method for tungsten |
| CN110948377B (zh) * | 2018-09-25 | 2024-06-21 | 长鑫存储技术有限公司 | 化学机械研磨混合液及研磨方法 |
| CN111748286A (zh) * | 2020-06-30 | 2020-10-09 | 中国科学院上海微系统与信息技术研究所 | 一种金属钴抛光液及其应用 |
| TWI878613B (zh) * | 2020-09-18 | 2025-04-01 | 美商Ｃｍｃ材料有限責任公司 | 用於碳基薄膜之選擇性拋光之以二氧化矽為主的漿料 |
| CN118255816A (zh) * | 2022-12-28 | 2024-06-28 | 华为技术有限公司 | 铁络合物及其制备方法、组合物、浆料及应用 |
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| US7300601B2 (en) * | 2002-12-10 | 2007-11-27 | Advanced Technology Materials, Inc. | Passivative chemical mechanical polishing composition for copper film planarization |
| US7736405B2 (en) * | 2003-05-12 | 2010-06-15 | Advanced Technology Materials, Inc. | Chemical mechanical polishing compositions for copper and associated materials and method of using same |
| US20050090106A1 (en) * | 2003-10-22 | 2005-04-28 | Jinru Bian | Method of second step polishing in copper CMP with a polishing fluid containing no oxidizing agent |
| US20050090104A1 (en) * | 2003-10-27 | 2005-04-28 | Kai Yang | Slurry compositions for chemical mechanical polishing of copper and barrier films |
| US7253111B2 (en) * | 2004-04-21 | 2007-08-07 | Rohm And Haas Electronic Materials Cmp Holding, Inc. | Barrier polishing solution |
| US7435162B2 (en) * | 2005-10-24 | 2008-10-14 | 3M Innovative Properties Company | Polishing fluids and methods for CMP |
-
2005
- 2005-10-24 US US11/256,736 patent/US7435162B2/en not_active Expired - Lifetime
-
2006
- 2006-10-20 WO PCT/US2006/040803 patent/WO2007050409A1/en not_active Ceased
- 2006-10-20 EP EP06826237A patent/EP1951837A4/en not_active Withdrawn
- 2006-10-20 KR KR1020087009666A patent/KR20080059397A/ko not_active Ceased
- 2006-10-20 CN CN2006800398008A patent/CN101297015B/zh not_active Expired - Fee Related
- 2006-10-20 JP JP2008537785A patent/JP2009513028A/ja not_active Withdrawn
- 2006-10-23 TW TW095139028A patent/TWI421317B/zh not_active IP Right Cessation
- 2006-10-23 TW TW102138553A patent/TWI542650B/zh not_active IP Right Cessation
-
2008
- 2008-09-03 US US12/203,666 patent/US8070843B2/en active Active
- 2008-09-03 US US12/203,653 patent/US8038901B2/en active Active
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