JP2009503813A - シリコンゲルマニウムバッファ層における転位位置を制御するための方法 - Google Patents
シリコンゲルマニウムバッファ層における転位位置を制御するための方法 Download PDFInfo
- Publication number
- JP2009503813A JP2009503813A JP2008522756A JP2008522756A JP2009503813A JP 2009503813 A JP2009503813 A JP 2009503813A JP 2008522756 A JP2008522756 A JP 2008522756A JP 2008522756 A JP2008522756 A JP 2008522756A JP 2009503813 A JP2009503813 A JP 2009503813A
- Authority
- JP
- Japan
- Prior art keywords
- silicon germanium
- layer
- substrate
- dislocation
- silicon
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 229910000577 Silicon-germanium Inorganic materials 0.000 title claims abstract description 185
- LEVVHYCKPQWKOP-UHFFFAOYSA-N [Si].[Ge] Chemical compound [Si].[Ge] LEVVHYCKPQWKOP-UHFFFAOYSA-N 0.000 title claims abstract description 156
- 238000000034 method Methods 0.000 title claims abstract description 115
- 239000000758 substrate Substances 0.000 claims abstract description 122
- 230000008569 process Effects 0.000 claims abstract description 68
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 54
- 239000010703 silicon Substances 0.000 claims abstract description 54
- 238000000137 annealing Methods 0.000 claims abstract description 38
- 239000000411 inducer Substances 0.000 claims abstract description 16
- 238000000151 deposition Methods 0.000 claims abstract description 12
- 230000001939 inductive effect Effects 0.000 claims abstract description 12
- 150000002500 ions Chemical class 0.000 claims abstract description 10
- 239000000126 substance Substances 0.000 claims abstract description 10
- 230000001678 irradiating effect Effects 0.000 claims abstract description 7
- 230000008859 change Effects 0.000 claims abstract description 6
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 38
- 235000012239 silicon dioxide Nutrition 0.000 claims description 19
- 239000000377 silicon dioxide Substances 0.000 claims description 19
- 239000000463 material Substances 0.000 claims description 10
- 239000002096 quantum dot Substances 0.000 claims description 8
- 238000005468 ion implantation Methods 0.000 claims description 6
- 239000001301 oxygen Substances 0.000 claims description 4
- 229910052760 oxygen Inorganic materials 0.000 claims description 4
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 3
- 230000002040 relaxant effect Effects 0.000 claims description 2
- 230000005945 translocation Effects 0.000 claims 2
- 239000003795 chemical substances by application Substances 0.000 claims 1
- 230000008707 rearrangement Effects 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 abstract description 9
- 229910004298 SiO 2 Inorganic materials 0.000 abstract description 3
- 230000005855 radiation Effects 0.000 abstract description 3
- 239000010410 layer Substances 0.000 description 182
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 47
- 230000006911 nucleation Effects 0.000 description 8
- 238000010899 nucleation Methods 0.000 description 8
- -1 silicon ions Chemical class 0.000 description 8
- 230000003993 interaction Effects 0.000 description 6
- 238000010884 ion-beam technique Methods 0.000 description 6
- 238000005229 chemical vapour deposition Methods 0.000 description 5
- 238000005530 etching Methods 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 5
- 238000010894 electron beam technology Methods 0.000 description 4
- 229910052732 germanium Inorganic materials 0.000 description 4
- 230000000149 penetrating effect Effects 0.000 description 4
- 229920002120 photoresistant polymer Polymers 0.000 description 4
- XKRFYHLGVUSROY-UHFFFAOYSA-N argon Substances [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 3
- 238000002955 isolation Methods 0.000 description 3
- 238000001459 lithography Methods 0.000 description 3
- 238000001451 molecular beam epitaxy Methods 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N nitrogen Substances N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 3
- 229910052786 argon Inorganic materials 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 2
- 238000002513 implantation Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000007935 neutral effect Effects 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 230000035515 penetration Effects 0.000 description 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- 238000009825 accumulation Methods 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 229910052787 antimony Inorganic materials 0.000 description 1
- WATWJIUSRGPENY-UHFFFAOYSA-N antimony atom Chemical compound [Sb] WATWJIUSRGPENY-UHFFFAOYSA-N 0.000 description 1
- 229910052785 arsenic Inorganic materials 0.000 description 1
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 239000011247 coating layer Substances 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 239000003989 dielectric material Substances 0.000 description 1
- 239000002019 doping agent Substances 0.000 description 1
- 238000000609 electron-beam lithography Methods 0.000 description 1
- 239000012776 electronic material Substances 0.000 description 1
- 230000008030 elimination Effects 0.000 description 1
- 238000003379 elimination reaction Methods 0.000 description 1
- 238000000407 epitaxy Methods 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- 238000001534 heteroepitaxy Methods 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 230000002401 inhibitory effect Effects 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 238000002164 ion-beam lithography Methods 0.000 description 1
- 238000001127 nanoimprint lithography Methods 0.000 description 1
- 229910052754 neon Inorganic materials 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 238000000103 photoluminescence spectrum Methods 0.000 description 1
- 238000001020 plasma etching Methods 0.000 description 1
- 230000001902 propagating effect Effects 0.000 description 1
- 238000004151 rapid thermal annealing Methods 0.000 description 1
- 238000001289 rapid thermal chemical vapour deposition Methods 0.000 description 1
- 238000006748 scratching Methods 0.000 description 1
- 230000002393 scratching effect Effects 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 238000002174 soft lithography Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/26—Bombardment with radiation
- H01L21/263—Bombardment with radiation with high-energy radiation
- H01L21/265—Bombardment with radiation with high-energy radiation producing ion implantation
- H01L21/26506—Bombardment with radiation with high-energy radiation producing ion implantation in group IV semiconductors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/322—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to modify their internal properties, e.g. to produce internal imperfections
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/26—Bombardment with radiation
- H01L21/263—Bombardment with radiation with high-energy radiation
- H01L21/265—Bombardment with radiation with high-energy radiation producing ion implantation
- H01L21/26506—Bombardment with radiation with high-energy radiation producing ion implantation in group IV semiconductors
- H01L21/26533—Bombardment with radiation with high-energy radiation producing ion implantation in group IV semiconductors of electrically inactive species in silicon to make buried insulating layers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/26—Bombardment with radiation
- H01L21/263—Bombardment with radiation with high-energy radiation
- H01L21/265—Bombardment with radiation with high-energy radiation producing ion implantation
- H01L21/266—Bombardment with radiation with high-energy radiation producing ion implantation using masks
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/10—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions with semiconductor regions connected to an electrode not carrying current to be rectified, amplified or switched and such electrode being part of a semiconductor device which comprises three or more electrodes
- H01L29/1025—Channel region of field-effect devices
- H01L29/1029—Channel region of field-effect devices of field-effect transistors
- H01L29/1033—Channel region of field-effect devices of field-effect transistors with insulated gate, e.g. characterised by the length, the width, the geometric contour or the doping structure
- H01L29/1054—Channel region of field-effect devices of field-effect transistors with insulated gate, e.g. characterised by the length, the width, the geometric contour or the doping structure with a variation of the composition, e.g. channel with strained layer for increasing the mobility
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- High Energy & Nuclear Physics (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Computer Hardware Design (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Manufacturing & Machinery (AREA)
- Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Chemical & Material Sciences (AREA)
- Nanotechnology (AREA)
- Ceramic Engineering (AREA)
- Theoretical Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Mathematical Physics (AREA)
- Recrystallisation Techniques (AREA)
- Element Separation (AREA)
Abstract
【選択図】図11
Description
Claims (21)
- シリコンゲルマニウムバッファ層における転位位置の制御方法であって、
基板上にシリコンゲルマニウムを含む歪み層を蒸着するステップと、
転位誘発物質(dislocation inducing agent)を前記シリコンゲルマニウムを含む層の1又はそれ以上の領域に照射するステップと、
前記基板及び前記シリコンゲルマニウムを含む歪み層にアニーリングプロセスを施すことによって、前記シリコンゲルマニウムを含む歪み層を緩和状態に変えるステップとを具えており、
前記シリコンゲルマニウムを含む層の転位が前記1又はそれ以上の領域に位置することを特徴とする方法。 - さらに、前記緩和したシリコンゲルマニウムを含む層上に、歪んだシリコン及び歪んだシリコンゲルマニウムから成る群から選択される歪んだ材料の層を蒸着するステップを具えることを特徴とする請求項1に記載の方法。
- さらに、前記歪んだ材料の層上に配置されたマスクにより前記転位を含む1又はそれ以上の領域を露光するステップと、
前記転位を含む1又はそれ以上の領域に二酸化シリコンの絶縁領域を形成するステップと、
を具えることを特徴とする請求項2に記載の方法。 - 前記二酸化シリコンの絶縁領域を、酸素イオン注入に続くアニーリングプロセスによって形成することを特徴とする請求項3に記載の方法。
- 前記1又はそれ以上の領域が、複数のレーンを具えることを特徴とする請求項1に記載の方法。
- 前記1又はそれ以上の領域が、複数の交差レーンを具えることを特徴とする請求項5に記載の方法。
- 前記転位誘発物質がイオンを具えることを特徴とする請求項1に記載の方法。
- 前記転位誘発物質が電子を具えることを特徴とする請求項1に記載の方法。
- さらに、前記基板及び前記シリコンゲルマニウムを含む歪み層にアニーリングプロセスを施す前に、前記シリコンゲルマニウムを含む歪み層上にシリコンを含む層を蒸着するステップを具えることを特徴とする請求項1に記載の方法。
- シリコンゲルマニウムバッファ層における転位位置の制御方法であって、
転位誘発物質を基板の1又はそれ以上の領域に照射するステップと、
前記基板上にシリコンゲルマニウムを含む歪み層を蒸着するステップと、
前記基板及び前記シリコンゲルマニウムを含む歪み層にアニーリングプロセスを施して、前記シリコンゲルマニウムを含む歪み層を緩和状態に変えるステップとを具えており、
前記シリコンゲルマニウムを含む層の転位が前記1又はそれ以上の領域に位置することを特徴とする方法。 - さらに、前記緩和したシリコンゲルマニウム層上に、歪んだシリコン及び歪んだシリコンゲルマニウムから成る群から選択される歪んだ材料の層を蒸着するステップを具えることを特徴とする請求項10に記載の方法。
- さらに、前記歪んだ材料の層上に配置されたマスクにより前記転位を含む1又はそれ以上の領域を露光するステップと、
前記転位を含む1又はそれ以上の領域に二酸化シリコンの絶縁領域を形成するステップと、
を具えることを特徴とする請求項11に記載の方法。 - 前記二酸化シリコンの絶縁領域を、酸素イオン注入に続くアニーリングプロセスによって形成することを特徴とする請求項12に記載の方法。
- 前記1又はそれ以上の領域が、複数のレーンを具えることを特徴とする請求項10に記載の方法。
- 前記1又はそれ以上の領域が、複数の交差レーンを具えることを特徴とする請求項14に記載の方法。
- 前記転位誘発物質がイオンを具えることを特徴とする請求項10に記載の方法。
- 前記転位誘発物質が電子を具えることを特徴とする請求項10に記載の方法。
- さらに、前記基板及び前記シリコンゲルマニウムを含む歪み層にアニーリングプロセスを施す前に、前記シリコンゲルマニウムを含む歪み層上にシリコンを含む層を蒸着するステップを具えることを特徴とする請求項10に記載の方法。
- シリコンゲルマニウムバッファ層における転位位置の制御方法であって、
基板にシリコンゲルマニウムを含む歪み層を蒸着するステップと、
転位誘発物質を前記シリコンゲルマニウムを含む層の1又はそれ以上の領域に照射するステップと、
前記シリコンゲルマニウムの歪み層を緩和状態に緩和させるステップであって、前記緩和シリコンゲルマニウム層に転位ネットワークを形成するステップと、
前記転位ネットワーク上に量子ドットを配置するステップと、
を具えることを特徴とする方法。 - 前記転位ネットワークが、実質的に直交するネットワークであることを特徴とする請求項19に記載の方法。
- 基板と、
前記基板上に蒸着された緩和バッファ層と、
前記緩和バッファ層に形成された複数の絶縁領域とを具えており、
前記絶縁領域が貫通転位を有しており、
前記緩和バッファ層の残りの部分に実質的に貫通転位が無いことを特徴とする製品。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US11/187,444 | 2005-07-22 | ||
US11/187,444 US7186626B2 (en) | 2005-07-22 | 2005-07-22 | Method for controlling dislocation positions in silicon germanium buffer layers |
PCT/US2005/026364 WO2007018495A2 (en) | 2005-07-22 | 2005-07-25 | Method for controlling dislocation positions in silicon germanium buffer layers |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2009503813A true JP2009503813A (ja) | 2009-01-29 |
JP5175189B2 JP5175189B2 (ja) | 2013-04-03 |
Family
ID=37678306
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2008522756A Active JP5175189B2 (ja) | 2005-07-22 | 2005-07-25 | シリコンゲルマニウムバッファ層における転位位置を制御するための方法 |
Country Status (6)
Country | Link |
---|---|
US (3) | US7186626B2 (ja) |
EP (1) | EP1908097B1 (ja) |
JP (1) | JP5175189B2 (ja) |
KR (1) | KR101018532B1 (ja) |
CN (1) | CN101228616B (ja) |
WO (1) | WO2007018495A2 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2016025178A (ja) * | 2014-07-18 | 2016-02-08 | 勇 城之下 | 量子ドットを有する材料の製造方法 |
Families Citing this family (25)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6530929B1 (en) * | 1999-10-20 | 2003-03-11 | Sdgi Holdings, Inc. | Instruments for stabilization of bony structures |
US6872641B1 (en) * | 2003-09-23 | 2005-03-29 | International Business Machines Corporation | Strained silicon on relaxed sige film with uniform misfit dislocation density |
GB2418531A (en) * | 2004-09-22 | 2006-03-29 | Univ Warwick | Formation of lattice-tuning semiconductor substrates |
DE602006019940D1 (de) * | 2006-03-06 | 2011-03-17 | St Microelectronics Crolles 2 | Herstellung eines flachen leitenden Kanals aus SiGe |
FR2914783A1 (fr) * | 2007-04-03 | 2008-10-10 | St Microelectronics Sa | Procede de fabrication d'un dispositif a gradient de concentration et dispositif correspondant. |
US8110890B2 (en) | 2007-06-05 | 2012-02-07 | Taiwan Semiconductor Manufacturing Company, Ltd. | Method of fabricating semiconductor device isolation structure |
US7767560B2 (en) * | 2007-09-29 | 2010-08-03 | Intel Corporation | Three dimensional strained quantum wells and three dimensional strained surface channels by Ge confinement method |
KR100955183B1 (ko) | 2008-02-29 | 2010-04-29 | 주식회사 하이닉스반도체 | 반도체 소자 및 그 제조 방법 |
US8138066B2 (en) * | 2008-10-01 | 2012-03-20 | International Business Machines Corporation | Dislocation engineering using a scanned laser |
US20100193879A1 (en) * | 2009-02-05 | 2010-08-05 | Ming-Han Liao | Isolation Region Implant and Structure |
US8076217B2 (en) * | 2009-05-04 | 2011-12-13 | Empire Technology Development Llc | Controlled quantum dot growth |
US8039371B2 (en) * | 2009-07-01 | 2011-10-18 | International Business Machines Corporation | Reduced defect semiconductor-on-insulator hetero-structures |
DE102010002410B4 (de) * | 2010-02-26 | 2017-03-02 | Globalfoundries Dresden Module One Limited Liability Company & Co. Kg | Verformungsgedächtnistechnologie in verformten SOI-Substraten von Halbleiterbauelementen |
EP2548138B1 (en) * | 2010-03-15 | 2018-09-12 | VMware, Inc. | Computer relational database method and system having role based access control |
US8242003B1 (en) * | 2010-04-14 | 2012-08-14 | Stc.Unm | Defect removal in Ge grown on Si |
CN102315246B (zh) * | 2010-06-30 | 2013-03-13 | 中国科学院上海硅酸盐研究所 | 一种弛豫SiGe虚拟衬底及其制备方法 |
CN102254800A (zh) * | 2011-06-21 | 2011-11-23 | 清华大学 | 一种GaN基量子点的外延生长方法 |
EP2771502A1 (en) * | 2011-10-24 | 2014-09-03 | The Regents of The University of California | SUPPRESSION OF RELAXATION BY LIMITED AREA EPITAXY ON NON-C-PLANE (In,Al,B,Ga)N |
US9129827B2 (en) * | 2012-04-13 | 2015-09-08 | Intel Corporation | Conversion of strain-inducing buffer to electrical insulator |
TWI473295B (zh) * | 2012-11-29 | 2015-02-11 | Kingwave Corp | 應力與缺陷間均衡化之半導體模板之製造方法 |
KR102099756B1 (ko) | 2013-08-23 | 2020-04-10 | 인텔 코포레이션 | Mos 트랜지스터를 위한 iv족 기판 상에 퇴적된 iii-v 채널에 대한 고저항층 |
US9343303B2 (en) * | 2014-03-20 | 2016-05-17 | Samsung Electronics Co., Ltd. | Methods of forming low-defect strain-relaxed layers on lattice-mismatched substrates and related semiconductor structures and devices |
US9305781B1 (en) * | 2015-04-30 | 2016-04-05 | International Business Machines Corporation | Structure and method to form localized strain relaxed SiGe buffer layer |
US9722057B2 (en) * | 2015-06-23 | 2017-08-01 | Global Foundries Inc. | Bipolar junction transistors with a buried dielectric region in the active device region |
CN112908849A (zh) * | 2021-01-28 | 2021-06-04 | 上海华力集成电路制造有限公司 | 一种形成SiGe沟道的热处理方法 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH07273028A (ja) * | 1994-03-30 | 1995-10-20 | Matsushita Electric Works Ltd | 半導体基板及びその製造方法 |
JP2003007615A (ja) * | 2001-06-20 | 2003-01-10 | Mitsubishi Materials Silicon Corp | 半導体基板及び電界効果型トランジスタ並びにこれらの製造方法 |
JP2004111638A (ja) * | 2002-09-18 | 2004-04-08 | Sharp Corp | 半導体基板の製造方法およびこの方法を用いた半導体装置の製造方法および半導体装置 |
JP2005109474A (ja) * | 2003-09-23 | 2005-04-21 | Internatl Business Mach Corp <Ibm> | 均一なミスフィット転位密度を含む緩和SiGe被膜上の引っ張り歪みシリコンおよびその形成方法 |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0279445A (ja) | 1988-09-14 | 1990-03-20 | Oki Electric Ind Co Ltd | 素子分離領域の形成方法 |
WO1999019546A1 (en) * | 1997-10-10 | 1999-04-22 | Cornell Research Foundation, Inc. | Methods for growing defect-free heteroepitaxial layers |
US6121651A (en) * | 1998-07-30 | 2000-09-19 | International Business Machines Corporation | Dram cell with three-sided-gate transfer device |
KR100319300B1 (ko) * | 2000-03-23 | 2002-01-04 | 윤종용 | 이종접합구조의 양자점 버퍼층을 가지는 반도체 소자 |
JP2004103805A (ja) * | 2002-09-09 | 2004-04-02 | Sharp Corp | 半導体基板の製造方法、半導体基板及び半導体装置 |
US6576558B1 (en) * | 2002-10-02 | 2003-06-10 | Taiwan Semiconductor Manufacturing Company | High aspect ratio shallow trench using silicon implanted oxide |
US6946358B2 (en) * | 2003-05-30 | 2005-09-20 | International Business Machines Corporation | Method of fabricating shallow trench isolation by ultra-thin SIMOX processing |
US6902965B2 (en) * | 2003-10-31 | 2005-06-07 | Taiwan Semiconductor Manufacturing Company, Ltd. | Strained silicon structure |
US20050196925A1 (en) * | 2003-12-22 | 2005-09-08 | Kim Sang H. | Method of forming stress-relaxed SiGe buffer layer |
GB2418531A (en) * | 2004-09-22 | 2006-03-29 | Univ Warwick | Formation of lattice-tuning semiconductor substrates |
-
2005
- 2005-07-22 US US11/187,444 patent/US7186626B2/en active Active
- 2005-07-25 EP EP05776422.7A patent/EP1908097B1/en active Active
- 2005-07-25 CN CN2005800511330A patent/CN101228616B/zh active Active
- 2005-07-25 KR KR1020087001644A patent/KR101018532B1/ko active IP Right Grant
- 2005-07-25 WO PCT/US2005/026364 patent/WO2007018495A2/en active Application Filing
- 2005-07-25 JP JP2008522756A patent/JP5175189B2/ja active Active
-
2006
- 2006-08-30 US US11/468,716 patent/US7459731B2/en active Active
-
2007
- 2007-01-29 US US11/668,434 patent/US7517776B2/en active Active
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH07273028A (ja) * | 1994-03-30 | 1995-10-20 | Matsushita Electric Works Ltd | 半導体基板及びその製造方法 |
JP2003007615A (ja) * | 2001-06-20 | 2003-01-10 | Mitsubishi Materials Silicon Corp | 半導体基板及び電界効果型トランジスタ並びにこれらの製造方法 |
JP2004111638A (ja) * | 2002-09-18 | 2004-04-08 | Sharp Corp | 半導体基板の製造方法およびこの方法を用いた半導体装置の製造方法および半導体装置 |
JP2005109474A (ja) * | 2003-09-23 | 2005-04-21 | Internatl Business Mach Corp <Ibm> | 均一なミスフィット転位密度を含む緩和SiGe被膜上の引っ張り歪みシリコンおよびその形成方法 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2016025178A (ja) * | 2014-07-18 | 2016-02-08 | 勇 城之下 | 量子ドットを有する材料の製造方法 |
Also Published As
Publication number | Publication date |
---|---|
EP1908097A4 (en) | 2009-06-03 |
WO2007018495A2 (en) | 2007-02-15 |
CN101228616B (zh) | 2010-10-20 |
CN101228616A (zh) | 2008-07-23 |
US20070018285A1 (en) | 2007-01-25 |
EP1908097B1 (en) | 2013-05-22 |
US20070123008A1 (en) | 2007-05-31 |
US7186626B2 (en) | 2007-03-06 |
KR101018532B1 (ko) | 2011-03-03 |
US7459731B2 (en) | 2008-12-02 |
KR20080028440A (ko) | 2008-03-31 |
WO2007018495A3 (en) | 2007-12-13 |
US20070020874A1 (en) | 2007-01-25 |
US7517776B2 (en) | 2009-04-14 |
EP1908097A2 (en) | 2008-04-09 |
JP5175189B2 (ja) | 2013-04-03 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP5175189B2 (ja) | シリコンゲルマニウムバッファ層における転位位置を制御するための方法 | |
JP5039912B2 (ja) | ヘテロ集積型歪みシリコンn型MOSFET及びp型MOSFET及びその製造方法 | |
JP4446424B2 (ja) | 緩和SiGe基板の製造方法 | |
JP3027473B2 (ja) | 半導体からなる部品 | |
JPS5925382B2 (ja) | サフアイア基板上にシリコン層を成長させた半導体装置の製造方法 | |
JP4701181B2 (ja) | 半導体基板材料を製造する方法 | |
KR101209151B1 (ko) | 양자점 제조방법 및 양자점을 포함하는 반도체 구조물 | |
JP2003229361A (ja) | 半導体基板の製造方法 | |
JP2005516395A (ja) | ひずみ緩和されたSiGeオン・インシュレータ及びその製造方法 | |
TWI596649B (zh) | 在應變鬆弛緩衝層上方形成具應變之磊晶半導體材料的方法 | |
US20050196925A1 (en) | Method of forming stress-relaxed SiGe buffer layer | |
TWI720587B (zh) | 用於製作具較低缺陷密度超晶格結構之方法及元件 | |
KR100833897B1 (ko) | 에피택셜 성장 방법 | |
KR101323218B1 (ko) | 희생적 식각 마스크를 이용한 나노 구조물 제조방법 | |
JP2004014878A (ja) | 半導体基板の製造方法及び半導体装置 | |
JPH08264780A (ja) | 半導体素子 | |
Baidakova et al. | Growth of light-emitting SiGe heterostructures on strained silicon-on-insulator substrates with a thin oxide layer | |
KR100738459B1 (ko) | Soi 기판을 이용한 게르마늄-온-절연체 기판의 제조방법 | |
JPH08288214A (ja) | 半導体基板の製造方法 | |
JPH06318548A (ja) | Si基板上へのGaAs層形成方法 | |
KR20050063642A (ko) | 응력 완화된 실리콘-게르마늄 완충층 형성 방법 | |
JPH08274024A (ja) | 半導体装置及びその製造方法 | |
JPH088184A (ja) | 半導体素子の製造方法 | |
JPH09237761A (ja) | 半導体エピタキシャル成長方法 | |
JPH04364023A (ja) | 化合物半導体の薄膜成長方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20111128 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20111206 |
|
A601 | Written request for extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A601 Effective date: 20120306 |
|
A602 | Written permission of extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A602 Effective date: 20120313 |
|
A601 | Written request for extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A601 Effective date: 20120405 |
|
A602 | Written permission of extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A602 Effective date: 20120412 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20120423 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20120529 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20120829 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20120918 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20121113 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20121211 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20130104 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 5175189 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |