JP2009302287A - ウエハ収納キャリア - Google Patents
ウエハ収納キャリア Download PDFInfo
- Publication number
- JP2009302287A JP2009302287A JP2008155128A JP2008155128A JP2009302287A JP 2009302287 A JP2009302287 A JP 2009302287A JP 2008155128 A JP2008155128 A JP 2008155128A JP 2008155128 A JP2008155128 A JP 2008155128A JP 2009302287 A JP2009302287 A JP 2009302287A
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- support
- storage carrier
- wall plate
- plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000002184 metal Substances 0.000 claims description 8
- 239000004809 Teflon Substances 0.000 claims description 3
- 229920006362 Teflon® Polymers 0.000 claims description 3
- 235000012431 wafers Nutrition 0.000 description 148
- 238000000034 method Methods 0.000 description 6
- 239000004065 semiconductor Substances 0.000 description 6
- 238000010438 heat treatment Methods 0.000 description 4
- 239000000463 material Substances 0.000 description 3
- 239000000969 carrier Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 238000006748 scratching Methods 0.000 description 1
- 230000002393 scratching effect Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6732—Vertical carrier comprising wall type elements whereby the substrates are horizontally supported, e.g. comprising sidewalls
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Packaging Frangible Articles (AREA)
Abstract
【解決手段】天井板と天井板の左右両端に固定された2枚の側壁板とが形成する2つの矩形開口端面の一方を閉塞する後壁板の左右中央部に、矩形開口面の他方に向かって伸長して、ウエハ支持棚を構成する少なくとも2本の支持杆が植設されている。
【選択図】図2
Description
Z軸方向に容易に変移すること(例えば、支持杆25がY軸マイナス方向に向かって下り傾斜となること)がない程度に小さいことをいう。
11 天井板
12 左側壁板
13 右側壁板
16 後壁板
17 左底板
18 右底板
20 連結棒
21 支持領域
22 持ち手部
23 ストッパ
24 開口
25 支持杆
26 貫通孔
W1〜W5 ウエハ
Claims (6)
- 平板状の天井板と、
前記天井板の左右両端に固定されて互いに向かい合う側壁板と、
前記天井板と前記側壁板とが形成する2つの矩形開口端面の一方を閉塞する後壁板と、
前記後壁板の左右方向における中央部に植設されて前記矩形開口面の他方に向かって伸長する少なくとも2本の支持杆からなるウエハ支持棚と、を有することを特徴とするウエハ収納キャリア。 - 前記ウエハ支持棚のウエハ支持平面は、前記天井板に平行であることを特徴とする請求項1記載のウエハ収納キャリア。
- 前記ウエハ支持棚は複数であることを特徴とする請求項1又は2記載のウエハ収納キャリア。
- 前記支持杆は、テフロン(登録商標)製チューブによって被覆された金属棒であることを特徴とする請求項1乃至3のいずれか1記載のウエハ収納キャリア。
- 前記支持杆の断面形状は、円形であることを特徴とする請求項3記載のウエハ収納キャリア。
- 前記側壁板及び前記後壁板が前記天井板に対して着脱自在であることを特徴とする請求項1乃至5記載のいずれか1記載のウエハ収納キャリア。
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2008155128A JP5118560B2 (ja) | 2008-06-13 | 2008-06-13 | ウエハ収納キャリア |
US12/478,046 US20090308784A1 (en) | 2008-06-13 | 2009-06-04 | Wafer storage carrier |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2008155128A JP5118560B2 (ja) | 2008-06-13 | 2008-06-13 | ウエハ収納キャリア |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2009302287A true JP2009302287A (ja) | 2009-12-24 |
JP5118560B2 JP5118560B2 (ja) | 2013-01-16 |
Family
ID=41413787
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2008155128A Expired - Fee Related JP5118560B2 (ja) | 2008-06-13 | 2008-06-13 | ウエハ収納キャリア |
Country Status (2)
Country | Link |
---|---|
US (1) | US20090308784A1 (ja) |
JP (1) | JP5118560B2 (ja) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2010054130A1 (en) * | 2008-11-05 | 2010-05-14 | Tosoh Quartz, Inc. | High strength camfer on quartzware |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH09293700A (ja) * | 1996-04-26 | 1997-11-11 | Mitsubishi Materials Shilicon Corp | ウェ−ハ支持具 |
JP2003077999A (ja) * | 2001-09-05 | 2003-03-14 | Nitto Denko Corp | 半導体ウエハ用カセット |
JP2004273686A (ja) * | 2003-03-07 | 2004-09-30 | Yodogawa Hu-Tech Kk | 大型基板用カセット |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4930634A (en) * | 1987-09-29 | 1990-06-05 | Fluoroware, Inc. | Carrier for flat panel displays |
FR2658156B1 (fr) * | 1990-02-12 | 1992-06-12 | Kodak Pathe | Procede d'emballage, emballage et dispositif de manutention des produits en bandes. |
GB9021873D0 (en) * | 1990-10-09 | 1990-11-21 | Groom Bryan Ltd | Ware support apparatus |
US5094346A (en) * | 1991-05-07 | 1992-03-10 | Minnesota Mining And Manufacturing Company | Reusable container for tape pancakes |
DE9313349U1 (de) * | 1993-09-04 | 1993-11-11 | Basf Magnetics Gmbh | Aufnahmevorrichtung für Gegenstände, insbesondere als Wickelrollen aufgewickelte Streifenmaterialien |
TW323633U (en) * | 1995-09-07 | 1997-12-21 | Samsung Electronics Co Ltd | Cassette for loading glasses for liquid crystal display device |
US5638958A (en) * | 1995-09-08 | 1997-06-17 | Micron Technology, Inc. | Semiconductor film wafer cassette |
US5788082A (en) * | 1996-07-12 | 1998-08-04 | Fluoroware, Inc. | Wafer carrier |
JP3916342B2 (ja) * | 1999-04-20 | 2007-05-16 | 信越ポリマー株式会社 | 基板収納容器 |
KR101010481B1 (ko) * | 2003-12-13 | 2011-01-21 | 엘지디스플레이 주식회사 | 기판 거치대 |
TWI282771B (en) * | 2004-07-26 | 2007-06-21 | Au Optronics Corp | A support device of a cassette |
-
2008
- 2008-06-13 JP JP2008155128A patent/JP5118560B2/ja not_active Expired - Fee Related
-
2009
- 2009-06-04 US US12/478,046 patent/US20090308784A1/en not_active Abandoned
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH09293700A (ja) * | 1996-04-26 | 1997-11-11 | Mitsubishi Materials Shilicon Corp | ウェ−ハ支持具 |
JP2003077999A (ja) * | 2001-09-05 | 2003-03-14 | Nitto Denko Corp | 半導体ウエハ用カセット |
JP2004273686A (ja) * | 2003-03-07 | 2004-09-30 | Yodogawa Hu-Tech Kk | 大型基板用カセット |
Also Published As
Publication number | Publication date |
---|---|
US20090308784A1 (en) | 2009-12-17 |
JP5118560B2 (ja) | 2013-01-16 |
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