JP2009231805A - 半導体装置 - Google Patents

半導体装置 Download PDF

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Publication number
JP2009231805A
JP2009231805A JP2008332756A JP2008332756A JP2009231805A JP 2009231805 A JP2009231805 A JP 2009231805A JP 2008332756 A JP2008332756 A JP 2008332756A JP 2008332756 A JP2008332756 A JP 2008332756A JP 2009231805 A JP2009231805 A JP 2009231805A
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JP
Japan
Prior art keywords
source
lead
semiconductor device
gate
pad
Prior art date
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Pending
Application number
JP2008332756A
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English (en)
Japanese (ja)
Other versions
JP2009231805A5 (https=
Inventor
Kuniharu Muto
邦治 武藤
Tadatoshi Danno
忠敏 団野
Hiroyuki Takahashi
浩幸 高橋
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Renesas Technology Corp
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Renesas Technology Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Renesas Technology Corp filed Critical Renesas Technology Corp
Priority to JP2008332756A priority Critical patent/JP2009231805A/ja
Priority to TW098104704A priority patent/TW200947651A/zh
Priority to US12/393,031 priority patent/US20090218676A1/en
Priority to CN200910126115A priority patent/CN101692444A/zh
Priority to KR1020090016884A priority patent/KR20090093880A/ko
Publication of JP2009231805A publication Critical patent/JP2009231805A/ja
Publication of JP2009231805A5 publication Critical patent/JP2009231805A5/ja
Pending legal-status Critical Current

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    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00Interconnections or connectors in packages
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00Interconnections or connectors in packages
    • H10W72/60Strap connectors, e.g. thick copper clips for grounding of power devices
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W70/00Package substrates; Interposers; Redistribution layers [RDL]
    • H10W70/40Leadframes
    • H10W70/411Chip-supporting parts, e.g. die pads
    • H10W70/417Bonding materials between chips and die pads
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W70/00Package substrates; Interposers; Redistribution layers [RDL]
    • H10W70/40Leadframes
    • H10W70/464Additional interconnections in combination with leadframes
    • H10W70/466Tape carriers or flat leads
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W70/00Package substrates; Interposers; Redistribution layers [RDL]
    • H10W70/40Leadframes
    • H10W70/481Leadframes for devices being provided for in groups H10D8/00 - H10D48/00
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
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    • H10W90/00Package configurations
    • H10W90/811Multiple chips on leadframes
    • HELECTRICITY
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    • H10W99/00Subject matter not provided for in other groups of this subclass
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
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    • H10W72/00Interconnections or connectors in packages
    • H10W72/071Connecting or disconnecting
    • H10W72/073Connecting or disconnecting of die-attach connectors
    • HELECTRICITY
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    • H10W72/071Connecting or disconnecting
    • H10W72/073Connecting or disconnecting of die-attach connectors
    • H10W72/07331Connecting techniques
    • H10W72/07337Connecting techniques using a polymer adhesive, e.g. an adhesive based on silicone or epoxy
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    • H10W72/075Connecting or disconnecting of bond wires
    • H10W72/07531Techniques
    • H10W72/07532Compression bonding, e.g. thermocompression bonding
    • H10W72/07533Ultrasonic bonding, e.g. thermosonic bonding
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    • H10W72/07631Techniques
    • H10W72/07632Compression bonding, e.g. thermocompression bonding
    • H10W72/07633Ultrasonic bonding, e.g. thermosonic bonding
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    • H10W72/076Connecting or disconnecting of strap connectors
    • H10W72/07651Connecting or disconnecting of strap connectors characterised by changes in properties of the strap connectors during connecting
    • H10W72/07653Connecting or disconnecting of strap connectors characterised by changes in properties of the strap connectors during connecting changes in shapes
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    • H10W72/00Interconnections or connectors in packages
    • H10W72/30Die-attach connectors
    • H10W72/321Structures or relative sizes of die-attach connectors
    • H10W72/325Die-attach connectors having a filler embedded in a matrix
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    • H10W72/00Interconnections or connectors in packages
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    • H10W72/353Materials of die-attach connectors not comprising solid metals or solid metalloids, e.g. ceramics
    • H10W72/354Materials of die-attach connectors not comprising solid metals or solid metalloids, e.g. ceramics comprising polymers
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    • H10W72/50Bond wires
    • H10W72/531Shapes of wire connectors
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    • H10W72/534Cross-sectional shape being rectangular
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    • H10W72/531Shapes of wire connectors
    • H10W72/536Shapes of wire connectors the connected ends being ball-shaped
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    • H10W72/531Shapes of wire connectors
    • H10W72/5363Shapes of wire connectors the connected ends being wedge-shaped
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    • H10W72/541Dispositions of bond wires
    • H10W72/5449Dispositions of bond wires not being orthogonal to a side surface of the chip, e.g. fan-out arrangements
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    • H10W72/00Interconnections or connectors in packages
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    • H10W72/541Dispositions of bond wires
    • H10W72/547Dispositions of multiple bond wires
    • H10W72/5473Dispositions of multiple bond wires multiple bond wires connected to a common bond pad
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    • H10W72/00Interconnections or connectors in packages
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    • H10W72/541Dispositions of bond wires
    • H10W72/547Dispositions of multiple bond wires
    • H10W72/5475Dispositions of multiple bond wires multiple bond wires connected to common bond pads at both ends of the wires
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    • H10W72/00Interconnections or connectors in packages
    • H10W72/50Bond wires
    • H10W72/551Materials of bond wires
    • H10W72/552Materials of bond wires comprising metals or metalloids, e.g. silver
    • H10W72/5522Materials of bond wires comprising metals or metalloids, e.g. silver comprising gold [Au]
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    • H10W72/00Interconnections or connectors in packages
    • H10W72/50Bond wires
    • H10W72/551Materials of bond wires
    • H10W72/552Materials of bond wires comprising metals or metalloids, e.g. silver
    • H10W72/5524Materials of bond wires comprising metals or metalloids, e.g. silver comprising aluminium [Al]
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    • H10W72/651Materials of strap connectors
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    • H10W90/736Package configurations characterised by the relative positions of pads or connectors relative to package parts of die-attach connectors between a chip and a stacked lead frame, conducting package substrate or heat sink
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    • H10W90/751Package configurations characterised by the relative positions of pads or connectors relative to package parts of bond wires
    • H10W90/753Package configurations characterised by the relative positions of pads or connectors relative to package parts of bond wires between laterally-adjacent chips
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    • H10W90/751Package configurations characterised by the relative positions of pads or connectors relative to package parts of bond wires
    • H10W90/756Package configurations characterised by the relative positions of pads or connectors relative to package parts of bond wires between a chip and a stacked lead frame, conducting package substrate or heat sink
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    • H10W90/701Package configurations characterised by the relative positions of pads or connectors relative to package parts
    • H10W90/761Package configurations characterised by the relative positions of pads or connectors relative to package parts of strap connectors
    • H10W90/763Package configurations characterised by the relative positions of pads or connectors relative to package parts of strap connectors between laterally-adjacent chips
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    • H10W90/00Package configurations
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    • H10W90/761Package configurations characterised by the relative positions of pads or connectors relative to package parts of strap connectors
    • H10W90/766Package configurations characterised by the relative positions of pads or connectors relative to package parts of strap connectors between a chip and a stacked lead frame, conducting package substrate or heat sink

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Die Bonding (AREA)
  • Insulated Gate Type Field-Effect Transistor (AREA)
  • Wire Bonding (AREA)
JP2008332756A 2008-02-29 2008-12-26 半導体装置 Pending JP2009231805A (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2008332756A JP2009231805A (ja) 2008-02-29 2008-12-26 半導体装置
TW098104704A TW200947651A (en) 2008-02-29 2009-02-13 Semiconductor device
US12/393,031 US20090218676A1 (en) 2008-02-29 2009-02-25 Semiconductor device
CN200910126115A CN101692444A (zh) 2008-02-29 2009-02-27 半导体器件
KR1020090016884A KR20090093880A (ko) 2008-02-29 2009-02-27 반도체 장치

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2008049628 2008-02-29
JP2008332756A JP2009231805A (ja) 2008-02-29 2008-12-26 半導体装置

Publications (2)

Publication Number Publication Date
JP2009231805A true JP2009231805A (ja) 2009-10-08
JP2009231805A5 JP2009231805A5 (https=) 2012-04-19

Family

ID=41012538

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2008332756A Pending JP2009231805A (ja) 2008-02-29 2008-12-26 半導体装置

Country Status (5)

Country Link
US (1) US20090218676A1 (https=)
JP (1) JP2009231805A (https=)
KR (1) KR20090093880A (https=)
CN (1) CN101692444A (https=)
TW (1) TW200947651A (https=)

Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2013046439A1 (ja) * 2011-09-30 2013-04-04 ルネサスエレクトロニクス株式会社 半導体装置
JP2014187080A (ja) * 2013-03-22 2014-10-02 Panasonic Corp 半導体素子、半導体装置及び複合モジュール
JP2015216407A (ja) * 2015-08-31 2015-12-03 三菱電機株式会社 半導体装置
JPWO2016104088A1 (ja) * 2014-12-24 2017-04-27 日本精工株式会社 パワー半導体モジュール及びこれを用いた電動パワーステアリング装置
JP2017191895A (ja) * 2016-04-14 2017-10-19 ローム株式会社 半導体装置および半導体装置の製造方法
JP2018073970A (ja) * 2016-10-28 2018-05-10 ルネサスエレクトロニクス株式会社 半導体装置
KR20180120598A (ko) * 2017-04-27 2018-11-06 르네사스 일렉트로닉스 가부시키가이샤 반도체 장치 및 그 제조 방법
JP2020155660A (ja) * 2019-03-22 2020-09-24 富士電機株式会社 半導体装置および半導体装置の検査方法
JP2022074290A (ja) * 2020-11-04 2022-05-18 ローム株式会社 半導体装置
EP4099382A2 (en) 2021-06-02 2022-12-07 Renesas Electronics Corporation Semiconductor device
JP2023123879A (ja) * 2019-05-13 2023-09-05 ローム株式会社 半導体装置
JP2024015568A (ja) * 2022-07-25 2024-02-06 株式会社東芝 半導体装置

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8580612B2 (en) * 2009-02-12 2013-11-12 Infineon Technologies Ag Chip assembly
US8400778B2 (en) * 2010-02-02 2013-03-19 Monolithic Power Systems, Inc. Layout schemes and apparatus for multi-phase power switch-mode voltage regulator
JP5601863B2 (ja) * 2010-03-29 2014-10-08 三菱電機株式会社 電力半導体装置
JP5775321B2 (ja) 2011-02-17 2015-09-09 トランスフォーム・ジャパン株式会社 半導体装置及びその製造方法、電源装置
CN102163587A (zh) * 2011-03-23 2011-08-24 常州市兴源电子有限公司 集成电路封装用互连铝带
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