CN101692444A - 半导体器件 - Google Patents

半导体器件 Download PDF

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Publication number
CN101692444A
CN101692444A CN200910126115A CN200910126115A CN101692444A CN 101692444 A CN101692444 A CN 101692444A CN 200910126115 A CN200910126115 A CN 200910126115A CN 200910126115 A CN200910126115 A CN 200910126115A CN 101692444 A CN101692444 A CN 101692444A
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China
Prior art keywords
lead
source
semiconductor device
semiconductor chip
semiconductor
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CN200910126115A
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English (en)
Chinese (zh)
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武藤邦治
团野忠敏
高桥浩幸
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Renesas Electronics Corp
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Renesas Technology Corp
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Publication of CN101692444A publication Critical patent/CN101692444A/zh
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    • H10W70/411—Chip-supporting parts, e.g. die pads
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  • Electrodes Of Semiconductors (AREA)
  • Die Bonding (AREA)
  • Insulated Gate Type Field-Effect Transistor (AREA)
  • Wire Bonding (AREA)
CN200910126115A 2008-02-29 2009-02-27 半导体器件 Pending CN101692444A (zh)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2008049628 2008-02-29
JP2008-049628 2008-02-29
JP2008332756A JP2009231805A (ja) 2008-02-29 2008-12-26 半導体装置
JP2008-332756 2008-12-26

Publications (1)

Publication Number Publication Date
CN101692444A true CN101692444A (zh) 2010-04-07

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CN200910126115A Pending CN101692444A (zh) 2008-02-29 2009-02-27 半导体器件

Country Status (5)

Country Link
US (1) US20090218676A1 (https=)
JP (1) JP2009231805A (https=)
KR (1) KR20090093880A (https=)
CN (1) CN101692444A (https=)
TW (1) TW200947651A (https=)

Cited By (7)

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CN102163587A (zh) * 2011-03-23 2011-08-24 常州市兴源电子有限公司 集成电路封装用互连铝带
CN102709319A (zh) * 2011-02-17 2012-10-03 富士通株式会社 半导体器件及其制造方法以及电源装置
CN102956509A (zh) * 2011-08-31 2013-03-06 飞思卡尔半导体公司 功率器件和封装该功率器件的方法
CN108022900A (zh) * 2016-10-28 2018-05-11 瑞萨电子株式会社 半导体装置
CN108807323A (zh) * 2017-04-27 2018-11-13 瑞萨电子株式会社 半导体器件及其制造方法
CN113410217A (zh) * 2021-07-23 2021-09-17 苏州华太电子技术有限公司 一种双管芯合封的共源共栅SiC功率器件
CN115692225A (zh) * 2021-07-30 2023-02-03 意法半导体股份有限公司 组装半导体器件的方法和对应的半导体器件

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8580612B2 (en) * 2009-02-12 2013-11-12 Infineon Technologies Ag Chip assembly
US8400778B2 (en) * 2010-02-02 2013-03-19 Monolithic Power Systems, Inc. Layout schemes and apparatus for multi-phase power switch-mode voltage regulator
JP5601863B2 (ja) * 2010-03-29 2014-10-08 三菱電機株式会社 電力半導体装置
EP3460832A1 (en) 2011-09-30 2019-03-27 Renesas Electronics Corporation Semiconductor device
EP2858100B1 (en) * 2012-05-29 2020-06-10 NSK Ltd. Semiconductor module and production method for same
JP2014187080A (ja) * 2013-03-22 2014-10-02 Panasonic Corp 半導体素子、半導体装置及び複合モジュール
JP2015005623A (ja) * 2013-06-20 2015-01-08 株式会社東芝 半導体装置
US9263563B2 (en) * 2013-10-31 2016-02-16 Infineon Technologies Austria Ag Semiconductor device package
US9536800B2 (en) 2013-12-07 2017-01-03 Fairchild Semiconductor Corporation Packaged semiconductor devices and methods of manufacturing
CN107112317B (zh) * 2014-12-24 2019-07-05 日本精工株式会社 功率半导体模块以及使用其的电动助力转向装置
JP2015216407A (ja) * 2015-08-31 2015-12-03 三菱電機株式会社 半導体装置
JP6636846B2 (ja) * 2016-04-14 2020-01-29 ローム株式会社 半導体装置および半導体装置の製造方法
US9978672B1 (en) 2017-05-24 2018-05-22 Infineon Technologies Ag Transistor package with terminals coupled via chip carrier
WO2019082345A1 (ja) * 2017-10-26 2019-05-02 新電元工業株式会社 半導体装置、及び、半導体装置の製造方法
CN111341762A (zh) * 2018-12-19 2020-06-26 江苏宏微科技股份有限公司 一种用于大功率多管芯封装结构
JP7334435B2 (ja) * 2019-03-22 2023-08-29 富士電機株式会社 半導体装置および半導体装置の検査方法
JP7312604B2 (ja) * 2019-05-13 2023-07-21 ローム株式会社 半導体装置
JP7649127B2 (ja) * 2020-11-04 2025-03-19 ローム株式会社 半導体装置
JP7653305B2 (ja) 2021-06-02 2025-03-28 ルネサスエレクトロニクス株式会社 半導体装置
JP7847500B2 (ja) * 2022-07-25 2026-04-17 株式会社東芝 半導体装置
EP4340021A1 (en) * 2022-09-16 2024-03-20 Nexperia B.V. Reduced stress clip for semiconductor die
DE102024204844A1 (de) * 2024-05-27 2025-11-27 Robert Bosch Gesellschaft mit beschränkter Haftung Halbleiterbauelement und Schaltungsanordnung

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3070145B2 (ja) * 1991-06-19 2000-07-24 ソニー株式会社 半導体装置
US6084264A (en) * 1998-11-25 2000-07-04 Siliconix Incorporated Trench MOSFET having improved breakdown and on-resistance characteristics
KR20000057810A (ko) * 1999-01-28 2000-09-25 가나이 쓰토무 반도체 장치
US20010001494A1 (en) * 1999-04-01 2001-05-24 Christopher B. Kocon Power trench mos-gated device and process for forming same
JP4112816B2 (ja) * 2001-04-18 2008-07-02 株式会社東芝 半導体装置および半導体装置の製造方法
US6630726B1 (en) * 2001-11-07 2003-10-07 Amkor Technology, Inc. Power semiconductor package with strap
JP4115882B2 (ja) * 2003-05-14 2008-07-09 株式会社ルネサステクノロジ 半導体装置
US7250672B2 (en) * 2003-11-13 2007-07-31 International Rectifier Corporation Dual semiconductor die package with reverse lead form
US7633140B2 (en) * 2003-12-09 2009-12-15 Alpha And Omega Semiconductor Incorporated Inverted J-lead for power devices
JP5291864B2 (ja) * 2006-02-21 2013-09-18 ルネサスエレクトロニクス株式会社 Ｄｃ／ｄｃコンバータ用半導体装置の製造方法およびｄｃ／ｄｃコンバータ用半導体装置
JP4916745B2 (ja) * 2006-03-28 2012-04-18 ルネサスエレクトロニクス株式会社 半導体装置の製造方法

Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102709319A (zh) * 2011-02-17 2012-10-03 富士通株式会社 半导体器件及其制造方法以及电源装置
US9006787B2 (en) 2011-02-17 2015-04-14 Transphorm Japan, Inc. Semiconductor device including gate electrode provided over active region in p-type nitride semiconductor layer and method of manufacturing the same, and power supply apparatus
CN102709319B (zh) * 2011-02-17 2015-12-02 创世舫电子日本株式会社 半导体器件及其制造方法以及电源装置
US9231075B2 (en) 2011-02-17 2016-01-05 Transphorm Japan, Inc. Semiconductor device including gate electrode provided over active region in p-type nitride semiconductor layer and method of manufacturing the same, and power supply apparatus
CN102163587A (zh) * 2011-03-23 2011-08-24 常州市兴源电子有限公司 集成电路封装用互连铝带
CN102956509A (zh) * 2011-08-31 2013-03-06 飞思卡尔半导体公司 功率器件和封装该功率器件的方法
CN108022900A (zh) * 2016-10-28 2018-05-11 瑞萨电子株式会社 半导体装置
CN108022900B (zh) * 2016-10-28 2023-05-23 瑞萨电子株式会社 半导体装置
CN108807323A (zh) * 2017-04-27 2018-11-13 瑞萨电子株式会社 半导体器件及其制造方法
CN113410217A (zh) * 2021-07-23 2021-09-17 苏州华太电子技术有限公司 一种双管芯合封的共源共栅SiC功率器件
CN113410217B (zh) * 2021-07-23 2025-10-17 苏州华太电子技术股份有限公司 一种双管芯合封的共源共栅SiC功率器件
CN115692225A (zh) * 2021-07-30 2023-02-03 意法半导体股份有限公司 组装半导体器件的方法和对应的半导体器件
US12506053B2 (en) 2021-07-30 2025-12-23 Stmicroelectronics S.R.L. Method of assembling semiconductor devices and corresponding semiconductor device

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