JP2009227482A - 圧電磁器及びそれを用いた圧電素子 - Google Patents
圧電磁器及びそれを用いた圧電素子 Download PDFInfo
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Abstract
【解決手段】本発明の圧電素子20は、一対の電極2,3と圧電磁器1とを備える。圧電磁器1は、KNbO3とBaTiO3との2成分が固溶した固溶体を主成分として含有している。そして、当該固溶体において、2成分の合計に対するKNbO3のモル比率は0.5〜0.9である。
【選択図】図1
Description
xKNbO3−(1−x)BaTiO3 (1)
上記一般式(1)は、KNbO3とBaTiO3とがx:(1−x)の比率で固溶している固溶体を示している。本実施形態では、上記xは0.5〜0.9である。
<圧電素子の作製>
以下の手順で図1に示すような圧電素子20を作製した。まず、KNbO3を構成する元素の原料として、K2CO3粉末およびNb2O5粉末を用意し、これら原料を十分に乾燥させた。そして、乾燥させたK2CO3粉末およびNb2O5粉末を、KNbO3の組成と一致するように秤量した(K:Nb=1:1(モル比))。
[圧電定数の測定]
得られた圧電素子20に、変位計(Mahr製、商品名:1202IC)で2kV/mmの電圧を印加したときの変位量を測定した。得られた変位量から圧電定数d33を算出した。その結果を表1に示す。
圧電素子20を電気炉中に設置した後、LCRメータを用いて、昇温過程及び降温過程で圧電素子の静電容量が最大値となるときの温度をそれぞれ測定し、これらの平均値からキュリー温度Tcを求めた。その結果を表1に示す。なお、一般的に、キュリー温度Tcが高い圧電素子ほど、より高い温度まで圧電特性を示す。
得られた圧電素子20の相対密度をアルキメデス法によって求めた。その結果を表1に示す。
KNbO3粉末およびBaTiO3粉末を混合する混合粉末の調製において、KNbO3粉末及びBaTiO3粉末の混合モル比率を、表1に示すとおりに変更したこと以外は、実施例1と同様にして混合粉末を調製した。当該混合粉末を900℃で10時間仮焼した。仮焼して得られた粉体に、ポリビニルアルコール(PVA)を加え、一軸成形してペレット化した後、バインダを除去し、温度1150℃、2時間の焼成条件にて、密閉系で焼成して焼結体を得た。
KNbO3粉末およびBaTiO3粉末を混合する混合粉末の調製において、KNbO3粉末及びBaTiO3粉末の混合モル比率を、表1に示すとおりに変更したこと以外は、実施例1と同様にして混合粉末を調製した。当該混合粉末を900℃で10時間仮焼した。仮焼して得られた粉体に、ポリビニルアルコール(PVA)を加え、一軸成形してペレット化した後、バインダを除去し、温度1140℃、2時間の焼成条件にて、密閉系で焼成して焼結体を得た。
KNbO3粉末およびBaTiO3粉末を混合する混合粉末の調製において、KNbO3粉末及びBaTiO3粉末の混合モル比率を、表1に示すとおりに変更したこと以外は、実施例1と同様にして混合粉末を調製した。当該混合粉末を900℃で10時間仮焼した。仮焼して得られた粉体に、ポリビニルアルコール(PVA)を加え、一軸成形してペレット化した後、バインダを除去し、温度1130℃、2時間の焼成条件にて、密閉系で焼成して焼結体を得た。
KNbO3粉末およびBaTiO3粉末を混合する混合粉末の調製において、KNbO3粉末及びBaTiO3粉末の混合モル比率を、表1に示すとおりに変更したこと以外は、実施例1と同様にして混合粉末を調製した。当該混合粉末を900℃で10時間仮焼した。仮焼して得られた粉体に、ポリビニルアルコール(PVA)を加え、一軸成形してペレット化した後、バインダを除去し、温度1120℃、2時間の焼成条件にて、密閉系で焼成して焼結体を得た。
KNbO3粉末およびBaTiO3粉末を混合する混合粉末の調製において、KNbO3粉末及びBaTiO3粉末の混合モル比率を、表1に示すとおりに変更したこと以外は、実施例1と同様にして混合粉末を調製した。なお、比較例1では、BaTiO3粉末のみを用いた。当該混合粉末またはBaTiO3粉末を900℃で10時間仮焼した。仮焼して得られた粉体に、ポリビニルアルコール(PVA)を加え、一軸成形してペレット化した後、バインダを除去し、温度1350℃、2時間の焼成条件にて、密閉系で焼成して焼結体を得た。
KNbO3粉末およびBaTiO3粉末を混合する混合粉末の調製において、KNbO3粉末及びBaTiO3粉末の混合モル比率を、表1に示すとおりに変更したこと以外は、実施例1と同様にして混合粉末を調製した。当該混合粉末を900℃で10時間仮焼した。仮焼して得られた粉体に、ポリビニルアルコール(PVA)を加え、一軸成形してペレット化した後、バインダを除去し、温度1266℃、2時間の焼成条件にて、密閉系で焼成して焼結体を得た。
KNbO3粉末およびBaTiO3粉末を混合する混合粉末の調製において、KNbO3粉末及びBaTiO3粉末の混合モル比率を、表1に示すとおりに変更したこと以外は、実施例1と同様にして混合粉末を調製した。当該混合粉末を900℃で10時間仮焼した。仮焼して得られた粉体に、ポリビニルアルコール(PVA)を加え、一軸成形してペレット化した後、バインダを除去し、温度1213℃、2時間の焼成条件にて、密閉系で焼成して焼結体を得た。
KNbO3粉末およびBaTiO3粉末の混合粉末の代わりに、KNbO3粉末を用いたこと以外は、実施例1と同様にして混合粉末を調製した。当該混合粉末を900℃で10時間仮焼した。仮焼して得られた粉体に、ポリビニルアルコール(PVA)を加え、一軸成形してペレット化した後、バインダを除去し、温度1045℃、2時間の焼成条件にて、密閉系で焼成して焼結体を得た。
Claims (4)
- KNbO3とBaTiO3との2成分が固溶した固溶体を主成分として含有し、
前記2成分の合計に対する前記KNbO3のモル比率が0.5〜0.9である圧電磁器。 - 相対密度が95%以上である請求項1記載の圧電磁器。
- 一対の電極と、該一対の電極の間に請求項1又は2記載の圧電磁器と、を備える圧電素子。
- 内部電極と請求項1又は2記載の圧電磁器とが交互に積層された素体と、
該素体を挟むように該素体の両端面にそれぞれ設けられ、前記内部電極と電気的に接続されている一対の端子電極と、を備える圧電素子。
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Application Number | Priority Date | Filing Date | Title |
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JP2008071898A JP5256804B2 (ja) | 2008-03-19 | 2008-03-19 | 圧電磁器及びそれを用いた圧電素子 |
EP09003780.5A EP2104152B1 (en) | 2008-03-19 | 2009-03-16 | Piezoelectric ceramic and piezoelectric element employing it |
US12/405,768 US7973456B2 (en) | 2008-03-19 | 2009-03-17 | Piezoelectric ceramic and piezoelectric element employing it |
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JP2008071898A JP5256804B2 (ja) | 2008-03-19 | 2008-03-19 | 圧電磁器及びそれを用いた圧電素子 |
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JP2009227482A true JP2009227482A (ja) | 2009-10-08 |
JP5256804B2 JP5256804B2 (ja) | 2013-08-07 |
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JP2012254913A (ja) * | 2011-05-18 | 2012-12-27 | Tdk Corp | 複合圧電セラミックスおよび圧電素子 |
JP2013028478A (ja) * | 2011-07-27 | 2013-02-07 | Tdk Corp | 誘電体磁器組成物、および電子部品 |
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JP2016138036A (ja) * | 2015-01-27 | 2016-08-04 | サムソン エレクトロ−メカニックス カンパニーリミテッド. | 誘電体磁器組成物、誘電体材料、及びこれを含む積層セラミックキャパシタ |
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JP2012162408A (ja) * | 2011-02-03 | 2012-08-30 | Fdk Corp | 圧電材料 |
JP2012195577A (ja) * | 2011-02-28 | 2012-10-11 | Canon Inc | 圧電材料、圧電素子、液体吐出ヘッド、超音波モータおよび塵埃除去装置 |
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JP2013063874A (ja) * | 2011-09-16 | 2013-04-11 | Tdk Corp | 誘電体磁器組成物および電子部品 |
JP2013063876A (ja) * | 2011-09-16 | 2013-04-11 | Tdk Corp | 誘電体磁器組成物および電子部品 |
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KR102149788B1 (ko) | 2015-01-27 | 2020-08-31 | 삼성전기주식회사 | 유전체 자기 조성물, 유전체 재료 및 이를 포함하는 적층 세라믹 커패시터 |
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EP2104152A2 (en) | 2009-09-23 |
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