JP4945801B2 - 圧電素子、及び圧電素子の製造方法 - Google Patents
圧電素子、及び圧電素子の製造方法 Download PDFInfo
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- JP4945801B2 JP4945801B2 JP2007509144A JP2007509144A JP4945801B2 JP 4945801 B2 JP4945801 B2 JP 4945801B2 JP 2007509144 A JP2007509144 A JP 2007509144A JP 2007509144 A JP2007509144 A JP 2007509144A JP 4945801 B2 JP4945801 B2 JP 4945801B2
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- 238000004519 manufacturing process Methods 0.000 title claims description 10
- 239000000919 ceramic Substances 0.000 claims description 153
- 150000001875 compounds Chemical class 0.000 claims description 45
- 239000012298 atmosphere Substances 0.000 claims description 38
- 239000010953 base metal Substances 0.000 claims description 35
- 229910052783 alkali metal Inorganic materials 0.000 claims description 33
- 150000001340 alkali metals Chemical class 0.000 claims description 33
- 239000000463 material Substances 0.000 claims description 32
- 229910010293 ceramic material Inorganic materials 0.000 claims description 7
- 229910052700 potassium Inorganic materials 0.000 claims description 6
- 229910052744 lithium Inorganic materials 0.000 claims description 5
- 238000005245 sintering Methods 0.000 claims description 4
- 229910052708 sodium Inorganic materials 0.000 claims description 3
- 239000002131 composite material Substances 0.000 claims description 2
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- 239000000203 mixture Substances 0.000 description 54
- 230000000052 comparative effect Effects 0.000 description 23
- 238000010304 firing Methods 0.000 description 20
- 229910052451 lead zirconate titanate Inorganic materials 0.000 description 19
- 239000007772 electrode material Substances 0.000 description 16
- 239000002994 raw material Substances 0.000 description 11
- 238000012360 testing method Methods 0.000 description 10
- 230000008878 coupling Effects 0.000 description 9
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- 238000002156 mixing Methods 0.000 description 6
- 229910002077 partially stabilized zirconia Inorganic materials 0.000 description 6
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- 239000010955 niobium Substances 0.000 description 5
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- 229910052802 copper Inorganic materials 0.000 description 4
- 229910052759 nickel Inorganic materials 0.000 description 4
- 239000000843 powder Substances 0.000 description 4
- -1 KNbO 3 Chemical class 0.000 description 3
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- CXWXQJXEFPUFDZ-UHFFFAOYSA-N tetralin Chemical compound C1=CC=C2CCCCC2=C1 CXWXQJXEFPUFDZ-UHFFFAOYSA-N 0.000 description 3
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- ZZSNKZQZMQGXPY-UHFFFAOYSA-N Ethyl cellulose Chemical compound CCOCC1OC(OC)C(OCC)C(OCC)C1OC1C(O)C(O)C(OC)C(CO)O1 ZZSNKZQZMQGXPY-UHFFFAOYSA-N 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 229910000272 alkali metal oxide Inorganic materials 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 238000007606 doctor blade method Methods 0.000 description 2
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- 238000000227 grinding Methods 0.000 description 2
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 239000007769 metal material Substances 0.000 description 2
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- 229910000510 noble metal Inorganic materials 0.000 description 2
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- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- WUOACPNHFRMFPN-SECBINFHSA-N (S)-(-)-alpha-terpineol Chemical compound CC1=CC[C@@H](C(C)(C)O)CC1 WUOACPNHFRMFPN-SECBINFHSA-N 0.000 description 1
- OAYXUHPQHDHDDZ-UHFFFAOYSA-N 2-(2-butoxyethoxy)ethanol Chemical compound CCCCOCCOCCO OAYXUHPQHDHDDZ-UHFFFAOYSA-N 0.000 description 1
- 239000004925 Acrylic resin Substances 0.000 description 1
- 229920000178 Acrylic resin Polymers 0.000 description 1
- 229910018068 Li 2 O Inorganic materials 0.000 description 1
- 229910052779 Neodymium Inorganic materials 0.000 description 1
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 1
- 239000003513 alkali Substances 0.000 description 1
- 150000001339 alkali metal compounds Chemical class 0.000 description 1
- OVKDFILSBMEKLT-UHFFFAOYSA-N alpha-Terpineol Natural products CC(=C)C1(O)CCC(C)=CC1 OVKDFILSBMEKLT-UHFFFAOYSA-N 0.000 description 1
- 229940088601 alpha-terpineol Drugs 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 229910052787 antimony Inorganic materials 0.000 description 1
- 239000002585 base Substances 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000002788 crimping Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 229910052746 lanthanum Inorganic materials 0.000 description 1
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 1
- 229910052749 magnesium Inorganic materials 0.000 description 1
- 229910052748 manganese Inorganic materials 0.000 description 1
- 229910052758 niobium Inorganic materials 0.000 description 1
- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 description 1
- 229910000484 niobium oxide Inorganic materials 0.000 description 1
- URLJKFSTXLNXLG-UHFFFAOYSA-N niobium(5+);oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Nb+5].[Nb+5] URLJKFSTXLNXLG-UHFFFAOYSA-N 0.000 description 1
- 229910017604 nitric acid Inorganic materials 0.000 description 1
- 229910052763 palladium Inorganic materials 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 229920002037 poly(vinyl butyral) polymer Polymers 0.000 description 1
- 229910052573 porcelain Inorganic materials 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000007639 printing Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 238000010532 solid phase synthesis reaction Methods 0.000 description 1
- 239000007858 starting material Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- 229910052718 tin Inorganic materials 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 229910052727 yttrium Inorganic materials 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
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Description
2 内部電極
(実施例1)
まず、セラミック素原料として、K2CO3、Na2CO3、及びNb2O5を用意し、主成分が組成式(K0.5Na0.5)NbO3で表される圧電磁器組成物が得られるように前記セラミック素原料を秤量した。
セラミック素原料としてK2CO3、Na2CO3、Li2CO3及びNb2O5を用意し、主成分が組成式(K0.475Na0.475Li0.05)NbO3で表される圧電磁器組成物が得られるように前記セラミック素原料を秤量し、それ以外は実施例1と同様の方法・手順で実施例2の試験片を作製した。尚、焼成温度は1050℃、焼成時間は2時間であった。
セラミック素原料としてK2CO3、Na2CO3、Li2CO3、Nb2O5及びTa2O5を用意し、主成分が組成式(K0.5Na0.5)(Nb0.9Ta0.1)O3で表される圧電磁器組成物が得られるように前記セラミック素原料を秤量し、それ以外は実施例1と同様の方法・手順で実施例3の試験片を作製した。尚、焼成温度は1050℃、焼成時間は2時間であった。
三本ロールミルを使用し、平均粒径1.5μmのPt粉末を実施例1と同様の有機ビヒクル中に分散させて導電性ペーストを作製した。
Pb3O4、TiO2、及びZrO2を用意し、主成分が組成式Pb(Ti0.48Zr0.52)O3で表される圧電磁器組成物が得られるように前記セラミック素原料を秤量した。
比較例1〜3で作製したPtを主成分とする導電性ペーストを使用し、比較例4で得られたセラミックグリーンシートにスクリーン印刷を施し、その後導電パターンの形成されたセラミックグリーンシートを導電パターンの形成されていない複数枚のセラミックグリーンシートで挟持し、圧着してセラミック積層体を形成した。
Pb3O4、CaCO3、TiO2、及びZrO2を用意し、主成分が組成式(Pb0.8Ca0.2)(Ti0.48Zr0.52)O3で表される圧電磁器組成物が得られるように前記セラミック素原料を秤量した。
Pb3O4、CaCO3、TiO2、及びZrO2を用意し、主成分が組成式(Pb0.92Ca0.1)(Ti0.48Zr0.52)O3で表される圧電磁器組成物が得られるように前記セラミック素原料を秤量した。
上記各試験片の表裏両面の外部電極と内部電極との間にインピーダンス・アナライザ(ヒューレット・パッカード社製:HP4291A)を接続し、圧電振動させて電気機械結合係数kを測定し、圧電特性を評価した。
Claims (3)
- 圧電セラミック素体に内部電極が埋設された圧電素子において、
前記圧電セラミック素体が、ニオブ酸アルカリ金属系化合物からなるペロブスカイト型複合酸化物を主成分とすると共に、
前記内部電極がNiを主成分とする卑金属材料からなり、
前記内部電極と前記圧電セラミック素体とが共焼結されてなることを特徴とする圧電素子。 - 前記ニオブ酸アルカリ金属系化合物は、少なくともK、Li、及びNaの中から選択された1種の元素が含有されていることを特徴とする請求項1記載の圧電素子。
- 圧電セラミック素体に内部電極が埋設された圧電素子の製造方法であって、
ニオブ酸アルカリ金属系化合物からなるペロブスカイト型複合酸化物を主成分とする圧電セラミック材料を用意し、所定の形状に成形して成形体を得る工程と、
前記内部電極を形成するための導電性ペーストを前記成形体に付与する工程と、
前記導電ペーストが付与された前記成形体を積層して積層体を得る工程と、
前記積層体を還元雰囲気中で共焼結する工程とを含み、
前記導電性ペーストがNiを主成分とした卑金属材料を含有していることを特徴とする圧電素子の製造方法。
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JP2007258280A (ja) * | 2006-03-20 | 2007-10-04 | Tdk Corp | 積層型圧電素子 |
CN101679122A (zh) * | 2007-06-15 | 2010-03-24 | 株式会社村田制作所 | 压电瓷器组成物及压电陶瓷电子部件 |
US20090199392A1 (en) * | 2008-02-11 | 2009-08-13 | General Electric Company | Ultrasound transducer probes and system and method of manufacture |
JP5219921B2 (ja) * | 2008-05-28 | 2013-06-26 | キヤノン株式会社 | 金属酸化物、圧電材料および圧電素子 |
JP5561483B2 (ja) * | 2008-10-28 | 2014-07-30 | 株式会社村田製作所 | 圧電セラミック電子部品 |
JP5515675B2 (ja) * | 2009-11-20 | 2014-06-11 | 日立金属株式会社 | 圧電薄膜素子及び圧電薄膜デバイス |
JP5531635B2 (ja) * | 2010-01-18 | 2014-06-25 | 日立金属株式会社 | 圧電薄膜素子及び圧電薄膜デバイス |
DE102011010346B4 (de) * | 2011-02-04 | 2014-11-20 | H.C. Starck Gmbh | Verfahren zur Herstellung eines homogenen Mehrstoffsystems, Keramikwerkstoff auf Basis des homogenen Mehrstoffsystems und dessen Verwendung |
JP5662888B2 (ja) * | 2011-07-04 | 2015-02-04 | 太陽誘電株式会社 | 多積層圧電セラミックス部品 |
US8853918B2 (en) * | 2011-09-22 | 2014-10-07 | General Electric Company | Transducer structure for a transducer probe and methods of fabricating same |
US9379310B2 (en) | 2013-01-29 | 2016-06-28 | Canon Kabushiki Kaisha | Piezoelectric material, piezoelectric device, and electronic apparatus |
US9260348B2 (en) | 2013-01-29 | 2016-02-16 | Canon Kabushiki Kaisha | Piezoelectric material, piezoelectric element, and electronic equipment |
TW201434789A (zh) * | 2013-01-29 | 2014-09-16 | Canon Kk | 壓電材料、壓電元件及電子裝備 |
WO2014162752A1 (ja) * | 2013-04-04 | 2014-10-09 | 株式会社村田製作所 | 誘電体磁器組成物およびそれを用いた積層セラミックコンデンサ |
WO2015046434A1 (ja) * | 2013-09-30 | 2015-04-02 | 株式会社村田製作所 | 積層型圧電セラミック電子部品、及び積層型圧電セラミック電子部品の製造方法 |
JP6132070B2 (ja) * | 2014-04-28 | 2017-05-24 | 株式会社村田製作所 | 圧電素子の製造方法 |
JP6489333B2 (ja) * | 2015-07-09 | 2019-03-27 | 株式会社村田製作所 | 圧電セラミック電子部品の製造方法 |
JP6725049B1 (ja) * | 2019-12-16 | 2020-07-15 | Tdk株式会社 | 積層圧電素子 |
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