JP4987815B2 - 圧電/電歪磁器組成物の製造方法 - Google Patents
圧電/電歪磁器組成物の製造方法 Download PDFInfo
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Description
{組成}
本発明の望ましい実施形態に係る圧電/電歪磁器組成物は、Aサイト元素としてLi(リチウム),Na(ナトリウム)及びK(カリウム)を含み、Bサイト元素としてNb(ニオブ),Ta(タンタル)及びSb(アンチモン)のうちの少なくともNb及びSbを含み、Aサイト元素がBサイト元素より過剰なペロブスカイト型酸化物にBi(ビスマス)化合物を添加して得られる(Li,Na,K)(Nb,Ta)O3系の圧電/電歪磁器組成物である。
図1は、本発明の望ましい実施形態に係る圧電/電歪磁器組成物のセラミックス粉末の製造の流れを示す流れ図である。
図2は、本発明の望ましい実施形態に係る圧電/電歪磁器組成物のセラミックス焼結体の製造の流れを示す流れ図である。
{全体構造}
図3及び図4は、先述の圧電/電歪磁器組成物を用いた圧電/電歪アクチュエータ1,2の構造例の模式図であり、図3は、単層型の圧電/電歪アクチュエータ1の断面図、図4は、多層型の圧電/電歪アクチュエータ2の断面図となっている。
圧電/電歪体膜122,222,224は、先述の圧電/電歪磁器組成物の焼結体である。
電極膜121,123,221,223,225の材質は、白金、パラジウム、ロジウム、金若しくは銀等の金属又はこれらの合金である。中でも、焼成時の耐熱性が高い点で白金又は白金を主成分とする合金が好ましい。また、焼成温度によっては、銀−パラジウム等の合金も好適に用いることができる。
基体11,21の材質は、セラミックスであるが、その種類に制限はない。もっとも、耐熱性、化学的安定性及び絶縁性の観点から、安定された酸化ジルコニウム、酸化アルミニウム、酸化マグネシウム、ムライト、窒化アルミニウム、窒化ケイ素、ガラスからなる群から選択される少なくとも1種類を含むセラミックスが好ましい。中でも、機械的強度及び靭性の観点から安定化された酸化ジルコニウムがさらに好ましい。ここで、「安定化された酸化ジルコニウム」とは、安定化剤の添加によって結晶の相転移を抑制した酸化ジルコニウムをいい、安定化酸化ジルコニウムの他、部分安定化酸化ジルコニムを包含する。
単層型の圧電/電歪アクチュエータ1の製造にあたっては、まず、基体11の上に電極膜121を形成する。電極膜121は、イオンビーム、スパッタリング、真空蒸着、PVD(Physical Vapor Deposition)、イオンプレーティング、CVD(Chemical Vapor Deposition)、メッキ、エアロゾルデポジション、スクリーン印刷、スプレー、ディッピング等の方法で形成することができる。中でも、基体11と圧電/電歪体膜122との接合性の観点から、スパッタリング法又はスクリーン印刷法が好ましい。形成された電極膜121は、熱処理により、基体11及び圧電/電歪体膜122と固着することができる。熱処理の温度は、電極膜121の材質や形成方法に応じて異なるが、概ね500〜1400℃である。
図6〜図8は、先述の圧電/電歪磁器組成物を用いた圧電/電歪アクチュエータ4の構造例の模式図であり、図6は、圧電/電歪アクチュエータ4の斜視図、図7は、圧電/電歪アクチュエータ4の縦断面図、図8は、圧電/電歪アクチュエータ4の横断面図となっている。
実験1では、まず、Li2CO3(炭酸リチウム)、C6H5O6Na・H2O(酒石酸水素ナトリウム一水和物)、C6H5O6K(酒石酸水素カリウム)、Nb2O5(酸化ニオブ)、Ta2O5(酸化タンタル)及びSb2O5(酸化アンチモン)の粉末を図10〜図14に示す組成になるように秤量し、秤量した素原料の粉末に分散媒としてアルコールを加えてボールミルで混合・粉砕した。
実験2では、1回目の仮焼の前に、Bi2O3,MnO2の粉末を含む全ての素原料の粉末を混合・粉砕した点を除いては、実験1の場合と同様にして、実験試料A2と同じ組成を有する実験試料J1及び実験試料A5と同じ組成を有する実験試料J2を作製し評価した。その結果を図14に示す。しかし、実験試料J1では、Bi2O3を添加しなかった実験試料A1と同程度の歪率S4000しか得ることができず、実験試料J2では、焼結体にクラックが発生し、歪率S4000を測定することができなかった。
上記の実験1及び実験2より、一般式{Liy(Na1-xKx)1-y}a(Nb1-z-wTazSbw)O3で表されるニオブ酸アルカリであって1<a≦1.1,0.30≦x≦0.70,0.02≦y≦0.10,0.0≦z≦0.5及び0.01≦w≦0.1を満たすものを合成し、その後に、Bi2O3,MnO2とペロブスカイト化合物とを反応させることにより、歪率S4000を向上することができることがわかった。
122,222,224 圧電/電歪体膜
121,123,221,223,225 電極膜
Claims (4)
- 圧電/電歪磁器組成物の製造方法であって、
(a) Aサイト元素としてLi,Na及びKを含み、Bサイト元素としてNb,Ta及びSbのうちの少なくともNb及びSbを含み、Bサイト元素の総原子数に対するAサイト元素の総原子数の比が1より大きいペロブスカイト型酸化物の粉末を合成する工程と、
(b) 前記ペロブスカイト型酸化物の粉末に添加物の粉末を加えて混合し、セラミックス粉末を製造するする工程と、
(c) 前記セラミックス粉末を成形し、成形体を作製する工程と、
(d) 前記成形体を焼成することにより、前記ペロブスカイト型酸化物と前記添加物とを反応させる工程と、
を備え、
前記工程(b)において混合される添加物がBi化合物を含む、
圧電/電歪磁器組成物の製造方法。 - 請求項1に記載の圧電/電歪磁器組成物の製造方法において、
ペロブスカイト型酸化物100モル部に対するBi化合物の添加量がBi原子換算で0.02モル部以上0.1モル部以下である、
圧電/電歪磁器組成物の製造方法。 - 請求項1又は請求項2に記載の圧電/電歪磁器組成物の製造方法において、
前記工程(b)において混合される添加物がMn化合物を含む、
圧電/電歪磁器組成物の製造方法。 - 請求項3に記載の圧電/電歪磁器組成物の製造方法において、
ペロブスカイト型酸化物100モル部に対するMn化合物の添加量がMn原子換算で0.01モル部以上3モル部以下である、
圧電/電歪磁器組成物の製造方法。
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JP2008193383A JP4987815B2 (ja) | 2008-07-28 | 2008-07-28 | 圧電/電歪磁器組成物の製造方法 |
US12/507,199 US8277680B2 (en) | 2008-07-28 | 2009-07-22 | Method of manufacturing piezoelectric/electrostrictive ceramic composition |
EP20090251855 EP2169737B1 (en) | 2008-07-28 | 2009-07-23 | Method of manufacturing piezoelectric/electrostrictive ceramic composition |
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US8022604B2 (en) * | 2007-10-19 | 2011-09-20 | Ngk Insulators, Ltd. | (Li, Na, K)(Nb, Ta)O3 type piezoelectric/electrostrictive ceramic composition containing 30-50 mol% Ta and piezoelectric/electrorestrictive device containing the same |
US9006959B2 (en) * | 2010-01-29 | 2015-04-14 | Ngk Spark Plug Co., Ltd. | Lead-free piezoelectric ceramic composition, piezoelectric element comprising same, knock sensor, and process for production of lead-free piezoelectric ceramic composition |
JP5550402B2 (ja) * | 2010-03-19 | 2014-07-16 | 京セラ株式会社 | 圧電磁器およびそれを用いた圧電素子 |
JP5550401B2 (ja) * | 2010-03-19 | 2014-07-16 | 京セラ株式会社 | 圧電磁器およびそれを用いた圧電素子 |
JP5672443B2 (ja) * | 2010-11-10 | 2015-02-18 | セイコーエプソン株式会社 | 液体噴射ヘッド、液体噴射装置、圧電素子及び圧電素子の製造方法 |
DE102011010346B4 (de) | 2011-02-04 | 2014-11-20 | H.C. Starck Gmbh | Verfahren zur Herstellung eines homogenen Mehrstoffsystems, Keramikwerkstoff auf Basis des homogenen Mehrstoffsystems und dessen Verwendung |
DE102011079658A1 (de) * | 2011-07-22 | 2013-01-24 | Robert Bosch Gmbh | Verfahren zur Herstellung eines keramischen Mehrlagenbauelements und keramisches Mehrlagenbauelement |
JP6105777B2 (ja) * | 2016-03-01 | 2017-03-29 | 京セラ株式会社 | 圧電磁器およびそれを用いた圧電素子 |
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US7101491B2 (en) * | 2002-07-16 | 2006-09-05 | Denso Corporation | Piezoelectric ceramic composition and method of production of same, piezoelectric element, and dielectric element |
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US7576477B2 (en) * | 2005-03-08 | 2009-08-18 | Ngk Insulators, Ltd. | Piezoelectric/electrostrictive porcelain composition and method of manufacturing the same |
KR100905886B1 (ko) | 2005-04-28 | 2009-07-03 | 가부시키가이샤 무라타 세이사쿠쇼 | 압전체 자기 조성물, 및 압전 세라믹 전자부품 |
EP1990326B1 (en) * | 2006-02-28 | 2015-09-30 | Konica Minolta Holdings, Inc. | Piezoelectric ceramic composition |
US7803282B2 (en) | 2006-09-04 | 2010-09-28 | Ngk Insulators, Ltd. | Piezoelectric/electrostrictive body, manufacturing method of the same, and piezoelectric/electrostrictive element |
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US7911117B2 (en) | 2007-11-08 | 2011-03-22 | Ngk Insulators, Ltd. | Piezoelectric/electrostrictive body, and piezoelectric/electrostrictive element |
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JP2010030818A (ja) | 2010-02-12 |
US8277680B2 (en) | 2012-10-02 |
EP2169737A3 (en) | 2012-07-11 |
EP2169737B1 (en) | 2013-10-23 |
EP2169737A2 (en) | 2010-03-31 |
US20100022381A1 (en) | 2010-01-28 |
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