JP2009172459A5 - - Google Patents
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- JP2009172459A5 JP2009172459A5 JP2008010950A JP2008010950A JP2009172459A5 JP 2009172459 A5 JP2009172459 A5 JP 2009172459A5 JP 2008010950 A JP2008010950 A JP 2008010950A JP 2008010950 A JP2008010950 A JP 2008010950A JP 2009172459 A5 JP2009172459 A5 JP 2009172459A5
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- JP
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- Prior art keywords
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- raw material
- flow path
- mixing tank
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- 239000007788 liquid Substances 0.000 claims description 271
- 239000002994 raw material Substances 0.000 claims description 132
- 238000012545 processing Methods 0.000 claims description 104
- 238000000034 method Methods 0.000 claims description 28
- 239000000758 substrate Substances 0.000 claims description 20
- 238000001514 detection method Methods 0.000 claims description 16
- 238000003860 storage Methods 0.000 claims description 6
- 238000012993 chemical processing Methods 0.000 description 16
- 239000000126 substance Substances 0.000 description 8
- 238000004519 manufacturing process Methods 0.000 description 4
- 239000008155 medical solution Substances 0.000 description 4
- 238000007599 discharging Methods 0.000 description 3
- 239000011550 stock solution Substances 0.000 description 3
- 230000005540 biological transmission Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000006870 function Effects 0.000 description 2
- 238000010129 solution processing Methods 0.000 description 2
- 238000003756 stirring Methods 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 230000002123 temporal effect Effects 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
Priority Applications (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2008010950A JP5043696B2 (ja) | 2008-01-21 | 2008-01-21 | 処理液混合装置、基板処理装置および処理液混合方法並びに記憶媒体 |
| TW98100371A TWI385026B (zh) | 2008-01-21 | 2009-01-07 | 處理液混合裝置、基板處理裝置及處理液混合方法與記憶媒體 |
| KR1020090002201A KR101213375B1 (ko) | 2008-01-21 | 2009-01-12 | 처리액 혼합 장치, 기판 처리 장치, 처리액 혼합 방법 및 컴퓨터 판독 가능한 기억 매체 |
| DE200910000293 DE102009000293A1 (de) | 2008-01-21 | 2009-01-19 | Bearbeitungsflüssigkeitsmischvorrichtung und Verfahren, Substratbearbeitungsvorrichtung und Speichermedium |
| US12/357,083 US8104948B2 (en) | 2008-01-21 | 2009-01-21 | Processing liquid mixing apparatus and method, substrate processing apparatus, and storage medium |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2008010950A JP5043696B2 (ja) | 2008-01-21 | 2008-01-21 | 処理液混合装置、基板処理装置および処理液混合方法並びに記憶媒体 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2009172459A JP2009172459A (ja) | 2009-08-06 |
| JP2009172459A5 true JP2009172459A5 (enExample) | 2009-11-05 |
| JP5043696B2 JP5043696B2 (ja) | 2012-10-10 |
Family
ID=40794635
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2008010950A Active JP5043696B2 (ja) | 2008-01-21 | 2008-01-21 | 処理液混合装置、基板処理装置および処理液混合方法並びに記憶媒体 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US8104948B2 (enExample) |
| JP (1) | JP5043696B2 (enExample) |
| KR (1) | KR101213375B1 (enExample) |
| DE (1) | DE102009000293A1 (enExample) |
| TW (1) | TWI385026B (enExample) |
Families Citing this family (33)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102151678A (zh) * | 2010-12-06 | 2011-08-17 | 深圳市华星光电技术有限公司 | 供液系统及供液方法 |
| US9896980B2 (en) * | 2011-07-26 | 2018-02-20 | Paccar Inc | Exhaust aftertreatment supplying a reducing agent |
| JP6352143B2 (ja) * | 2013-11-13 | 2018-07-04 | 東京エレクトロン株式会社 | 基板液処理装置及び基板液処理方法 |
| JP6367069B2 (ja) | 2013-11-25 | 2018-08-01 | 東京エレクトロン株式会社 | 混合装置、基板処理装置および混合方法 |
| JP6371716B2 (ja) | 2014-04-01 | 2018-08-08 | 東京エレクトロン株式会社 | 基板液処理装置及び基板液処理方法並びに基板液処理プログラムを記録したコンピュータ読み取り可能な記録媒体 |
| JP6339954B2 (ja) * | 2014-06-09 | 2018-06-06 | 株式会社荏原製作所 | 洗浄薬液供給装置、洗浄薬液供給方法、及び洗浄ユニット |
| KR102357784B1 (ko) * | 2014-06-09 | 2022-02-04 | 가부시키가이샤 에바라 세이사꾸쇼 | 세정 약액 공급장치 및 세정 약액 공급 방법 |
| US10340159B2 (en) | 2014-06-09 | 2019-07-02 | Ebara Corporation | Cleaning chemical supplying device, cleaning chemical supplying method, and cleaning unit |
| JP6505416B2 (ja) * | 2014-11-04 | 2019-04-24 | 芝浦メカトロニクス株式会社 | 計量装置、計量システム、処理装置、および計量方法 |
| JP6486986B2 (ja) | 2017-04-03 | 2019-03-20 | 株式会社荏原製作所 | 液体供給装置及び液体供給方法 |
| JP6776208B2 (ja) * | 2017-09-28 | 2020-10-28 | 東京エレクトロン株式会社 | 基板処理装置および基板処理方法 |
| JP6726330B2 (ja) * | 2019-03-27 | 2020-07-22 | 芝浦メカトロニクス株式会社 | 計量装置、計量システム、処理装置、および計量方法 |
| US11559774B2 (en) | 2019-12-30 | 2023-01-24 | Marathon Petroleum Company Lp | Methods and systems for operating a pump at an efficiency point |
| US11607654B2 (en) | 2019-12-30 | 2023-03-21 | Marathon Petroleum Company Lp | Methods and systems for in-line mixing of hydrocarbon liquids |
| CA3103413C (en) | 2019-12-30 | 2023-04-25 | Marathon Petroleum Company Lp | Methods and systems for inline mixing of hydrocarbon liquids based on density or gravity |
| US11247184B2 (en) * | 2019-12-30 | 2022-02-15 | Marathon Petroleum Company Lp | Methods and systems for spillback control of in-line mixing of hydrocarbon liquids |
| JP6802405B2 (ja) * | 2020-04-14 | 2020-12-16 | 芝浦メカトロニクス株式会社 | 計量装置、計量システム、処理装置、および計量方法 |
| US20220243573A1 (en) * | 2021-01-29 | 2022-08-04 | Downhole Chemical Solutions, Llc | Systems and methods for subdividing chemical flow for well completion operations |
| US11578638B2 (en) | 2021-03-16 | 2023-02-14 | Marathon Petroleum Company Lp | Scalable greenhouse gas capture systems and methods |
| US11578836B2 (en) | 2021-03-16 | 2023-02-14 | Marathon Petroleum Company Lp | Scalable greenhouse gas capture systems and methods |
| US12012883B2 (en) | 2021-03-16 | 2024-06-18 | Marathon Petroleum Company Lp | Systems and methods for backhaul transportation of liquefied gas and CO2 using liquefied gas carriers |
| US11655940B2 (en) | 2021-03-16 | 2023-05-23 | Marathon Petroleum Company Lp | Systems and methods for transporting fuel and carbon dioxide in a dual fluid vessel |
| US12129559B2 (en) | 2021-08-26 | 2024-10-29 | Marathon Petroleum Company Lp | Test station assemblies for monitoring cathodic protection of structures and related methods |
| US11447877B1 (en) | 2021-08-26 | 2022-09-20 | Marathon Petroleum Company Lp | Assemblies and methods for monitoring cathodic protection of structures |
| US12043905B2 (en) | 2021-08-26 | 2024-07-23 | Marathon Petroleum Company Lp | Electrode watering assemblies and methods for maintaining cathodic monitoring of structures |
| US12180597B2 (en) | 2021-08-26 | 2024-12-31 | Marathon Petroleum Company Lp | Test station assemblies for monitoring cathodic protection of structures and related methods |
| US11686070B1 (en) | 2022-05-04 | 2023-06-27 | Marathon Petroleum Company Lp | Systems, methods, and controllers to enhance heavy equipment warning |
| US12012082B1 (en) | 2022-12-30 | 2024-06-18 | Marathon Petroleum Company Lp | Systems and methods for a hydraulic vent interlock |
| US12006014B1 (en) | 2023-02-18 | 2024-06-11 | Marathon Petroleum Company Lp | Exhaust vent hoods for marine vessels and related methods |
| US12043361B1 (en) | 2023-02-18 | 2024-07-23 | Marathon Petroleum Company Lp | Exhaust handling systems for marine vessels and related methods |
| US12297965B2 (en) | 2023-08-09 | 2025-05-13 | Marathon Petroleum Company Lp | Systems and methods for mixing hydrogen with natural gas |
| US12087002B1 (en) | 2023-09-18 | 2024-09-10 | Marathon Petroleum Company Lp | Systems and methods to determine depth of soil coverage along a right-of-way |
| KR102844262B1 (ko) | 2024-01-29 | 2025-08-11 | 엘에스이 주식회사 | 기판 세정 장치 |
Family Cites Families (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2979066A (en) * | 1956-09-17 | 1961-04-11 | Proctor Silex Corp | Color control of liquids |
| US4403866A (en) * | 1982-05-07 | 1983-09-13 | E. I. Du Pont De Nemours And Company | Process for making paints |
| US4823987A (en) * | 1986-04-28 | 1989-04-25 | Ryco Graphic Manufacturing, Inc. | Liquid mixing system and method |
| CH674319A5 (enExample) * | 1988-03-22 | 1990-05-31 | Miteco Ag | |
| US5409310A (en) * | 1993-09-30 | 1995-04-25 | Semitool, Inc. | Semiconductor processor liquid spray system with additive blending |
| BR9800361A (pt) * | 1998-02-13 | 2000-09-26 | Renner Du Pont Tintas Automoti | Processo continuo e automatico para a produção de tintas automotivas e outros |
| US6554162B2 (en) * | 2001-05-24 | 2003-04-29 | Chemand Corporation | System and method for accurately blending fluids |
| JP2003275569A (ja) * | 2002-03-19 | 2003-09-30 | Shibaura Mechatronics Corp | 処理液の混合装置、混合方法及び基板処理装置 |
| JP4417642B2 (ja) * | 2003-03-17 | 2010-02-17 | 芝浦メカトロニクス株式会社 | 処理液の製造装置、製造方法及び基板の処理装置 |
| KR100500475B1 (ko) * | 2003-11-10 | 2005-07-12 | 삼성전자주식회사 | 케미컬 혼합장치 |
| JP2005183791A (ja) * | 2003-12-22 | 2005-07-07 | Dainippon Screen Mfg Co Ltd | 基板処理方法及びその装置 |
| KR100598913B1 (ko) * | 2004-09-02 | 2006-07-10 | 세메스 주식회사 | 약액 혼합 공급 장치 및 그 방법 |
| JP2007168862A (ja) * | 2005-12-22 | 2007-07-05 | Cosmo Oil Co Ltd | 燃料給油装置及び燃料給油プログラム |
-
2008
- 2008-01-21 JP JP2008010950A patent/JP5043696B2/ja active Active
-
2009
- 2009-01-07 TW TW98100371A patent/TWI385026B/zh active
- 2009-01-12 KR KR1020090002201A patent/KR101213375B1/ko active Active
- 2009-01-19 DE DE200910000293 patent/DE102009000293A1/de not_active Ceased
- 2009-01-21 US US12/357,083 patent/US8104948B2/en active Active
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