JP2009036532A - 検査冶具および検査装置 - Google Patents

検査冶具および検査装置 Download PDF

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Publication number
JP2009036532A
JP2009036532A JP2007198751A JP2007198751A JP2009036532A JP 2009036532 A JP2009036532 A JP 2009036532A JP 2007198751 A JP2007198751 A JP 2007198751A JP 2007198751 A JP2007198751 A JP 2007198751A JP 2009036532 A JP2009036532 A JP 2009036532A
Authority
JP
Japan
Prior art keywords
end side
probe
rear end
insertion hole
inspection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2007198751A
Other languages
English (en)
Japanese (ja)
Inventor
Kenji Dobashi
賢治 土橋
Mitsuhiko Ito
光彦 伊藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
KOYO TECHNOS KK
Original Assignee
KOYO TECHNOS KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by KOYO TECHNOS KK filed Critical KOYO TECHNOS KK
Priority to JP2007198751A priority Critical patent/JP2009036532A/ja
Priority to TW097128552A priority patent/TW200905221A/zh
Priority to CNA2008101441557A priority patent/CN101358997A/zh
Priority to KR1020080075069A priority patent/KR101011360B1/ko
Publication of JP2009036532A publication Critical patent/JP2009036532A/ja
Pending legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/04—Housings; Supporting members; Arrangements of terminals
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06716—Elastic
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26—Testing of individual semiconductor devices
    • G01R31/2601—Apparatus or methods therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/50—Testing of electric apparatus, lines, cables or components for short-circuits, continuity, leakage current or incorrect line connections

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Leads Or Probes (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
JP2007198751A 2007-07-31 2007-07-31 検査冶具および検査装置 Pending JP2009036532A (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2007198751A JP2009036532A (ja) 2007-07-31 2007-07-31 検査冶具および検査装置
TW097128552A TW200905221A (en) 2007-07-31 2008-07-29 Inspection jig and inspection apparatus
CNA2008101441557A CN101358997A (zh) 2007-07-31 2008-07-29 检查夹具及检查装置
KR1020080075069A KR101011360B1 (ko) 2007-07-31 2008-07-31 검사 지그 및 그 검사 장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007198751A JP2009036532A (ja) 2007-07-31 2007-07-31 検査冶具および検査装置

Publications (1)

Publication Number Publication Date
JP2009036532A true JP2009036532A (ja) 2009-02-19

Family

ID=40331497

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007198751A Pending JP2009036532A (ja) 2007-07-31 2007-07-31 検査冶具および検査装置

Country Status (4)

Country Link
JP (1) JP2009036532A (enExample)
KR (1) KR101011360B1 (enExample)
CN (1) CN101358997A (enExample)
TW (1) TW200905221A (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106324481A (zh) * 2016-08-23 2017-01-11 王文庆 一种用于集成电路的定位检测装置
KR20190117017A (ko) * 2017-02-24 2019-10-15 테크노프로브 에스.피.에이. 향상된 주파수 특성을 갖는 수직 프로브 테스트 헤드

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6255914B2 (ja) * 2013-11-07 2018-01-10 日本電産リード株式会社 検査治具
KR101565344B1 (ko) 2013-12-13 2015-11-03 현대자동차주식회사 차량 연동 단말기 조명 제어 시스템 및 제어 방법
JP6237441B2 (ja) * 2014-04-24 2017-11-29 日本電産リード株式会社 電極構造体、検査治具、及び電極構造体の製造方法
CN106932615B (zh) * 2017-04-28 2024-02-13 尼得科精密检测设备(浙江)有限公司 检查夹具及具备该检查夹具的检查装置
CN112424615B (zh) * 2018-07-13 2025-02-07 日本电产理德股份有限公司 检查治具以及检查装置
US11454650B2 (en) * 2018-07-18 2022-09-27 Nidec-Read Corporation Probe, inspection jig, inspection device, and method for manufacturing probe
CN113433360B (zh) * 2020-03-23 2023-12-01 奥特斯(中国)有限公司 测试适配器、测试设备和测试部件承载件的方法
KR102324248B1 (ko) * 2020-06-19 2021-11-12 리노정밀(주) 검사 장치용 블록 조립체
CN113639979B (zh) * 2021-07-26 2022-04-26 苏州佳祺仕信息科技有限公司 一种检测治具及用于检测带孔工件性能的检测装置
KR102649845B1 (ko) * 2023-11-29 2024-03-21 주식회사 나노시스 반도체 소자 테스터 지그

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08315882A (ja) * 1995-05-15 1996-11-29 Nippon Maikuronikusu:Kk 多極端子板およびプローブ装置
JP2005338065A (ja) * 2004-04-26 2005-12-08 Koyo Technos:Kk 検査冶具および検査装置
WO2007058037A1 (ja) * 2005-11-16 2007-05-24 Nidec-Read Corporation 基板検査用治具及び検査用プローブ

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0729838U (ja) * 1993-11-08 1995-06-02 日本電子材料株式会社 座屈応力減少機構付垂直動作式プローブカード
JPH09274054A (ja) * 1996-04-08 1997-10-21 Furukawa Electric Co Ltd:The プローバー
JP3505495B2 (ja) 2000-09-13 2004-03-08 日本電産リード株式会社 基板検査用検査治具、該検査治具を備えた基板検査装置および基板検査用検査治具の組立方法
US7248482B2 (en) * 2003-05-16 2007-07-24 Matsushita Electric Industrial Co., Ltd. Module with built-in circuit component and method for producing the same
TWI286606B (en) * 2004-03-16 2007-09-11 Gunsei Kimoto Electric signal connecting device, and probe assembly and prober device using it
CN100535676C (zh) * 2005-04-21 2009-09-02 株式会社光阳科技 检查夹具及检查装置
JP4448086B2 (ja) * 2005-12-12 2010-04-07 大西電子株式会社 プリント配線板の検査治具

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08315882A (ja) * 1995-05-15 1996-11-29 Nippon Maikuronikusu:Kk 多極端子板およびプローブ装置
JP2005338065A (ja) * 2004-04-26 2005-12-08 Koyo Technos:Kk 検査冶具および検査装置
WO2007058037A1 (ja) * 2005-11-16 2007-05-24 Nidec-Read Corporation 基板検査用治具及び検査用プローブ

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106324481A (zh) * 2016-08-23 2017-01-11 王文庆 一种用于集成电路的定位检测装置
KR20190117017A (ko) * 2017-02-24 2019-10-15 테크노프로브 에스.피.에이. 향상된 주파수 특성을 갖는 수직 프로브 테스트 헤드
JP2020509371A (ja) * 2017-02-24 2020-03-26 テクノプローべ ソシエタ ペル アチオニ 改善された周波数特性を有する垂直プローブ試験ヘッド
KR102522522B1 (ko) * 2017-02-24 2023-04-14 테크노프로브 에스.피.에이. 향상된 주파수 특성을 갖는 수직 프로브 테스트 헤드
JP7315462B2 (ja) 2017-02-24 2023-07-26 テクノプローべ ソシエタ ペル アチオニ 改善された周波数特性を有する垂直プローブ試験ヘッド

Also Published As

Publication number Publication date
TWI383163B (enExample) 2013-01-21
TW200905221A (en) 2009-02-01
KR101011360B1 (ko) 2011-01-28
CN101358997A (zh) 2009-02-04
KR20090013139A (ko) 2009-02-04

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