JP2009033111A5 - - Google Patents

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Publication number
JP2009033111A5
JP2009033111A5 JP2008137409A JP2008137409A JP2009033111A5 JP 2009033111 A5 JP2009033111 A5 JP 2009033111A5 JP 2008137409 A JP2008137409 A JP 2008137409A JP 2008137409 A JP2008137409 A JP 2008137409A JP 2009033111 A5 JP2009033111 A5 JP 2009033111A5
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JP
Japan
Prior art keywords
exposure
liquid
predetermined member
movable
optical element
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Pending
Application number
JP2008137409A
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English (en)
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JP2009033111A (ja
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Priority to JP2008137409A priority Critical patent/JP2009033111A/ja
Priority claimed from JP2008137409A external-priority patent/JP2009033111A/ja
Publication of JP2009033111A publication Critical patent/JP2009033111A/ja
Publication of JP2009033111A5 publication Critical patent/JP2009033111A5/ja
Pending legal-status Critical Current

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Claims (1)

  1. 露光用液体を介して露光光で基板を露光する露光装置であって、
    前記露光光を射出する光学素子と、
    前記光学素子の射出側で移動可能な可動部材と、
    前記可動部材に搭載された所定部材と、
    前記所定部材を振動させることによって前記所定部材上のクリーニング用液体に振動を与える振動発生装置と、を備え、
    前記所定部材の表面の少なくとも一部は、前記露光用液体と前記クリーニング用液体の少なくとも一方に対して撥液性である露光装置。
JP2008137409A 2007-05-28 2008-05-27 露光装置、デバイス製造方法、洗浄装置、及びクリーニング方法並びに露光方法 Pending JP2009033111A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2008137409A JP2009033111A (ja) 2007-05-28 2008-05-27 露光装置、デバイス製造方法、洗浄装置、及びクリーニング方法並びに露光方法

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2007140474 2007-05-28
JP2007177217 2007-07-05
JP2008137409A JP2009033111A (ja) 2007-05-28 2008-05-27 露光装置、デバイス製造方法、洗浄装置、及びクリーニング方法並びに露光方法

Publications (2)

Publication Number Publication Date
JP2009033111A JP2009033111A (ja) 2009-02-12
JP2009033111A5 true JP2009033111A5 (ja) 2011-05-12

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JP2008137409A Pending JP2009033111A (ja) 2007-05-28 2008-05-27 露光装置、デバイス製造方法、洗浄装置、及びクリーニング方法並びに露光方法

Country Status (5)

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US (2) US8189168B2 (ja)
JP (1) JP2009033111A (ja)
KR (1) KR20100031694A (ja)
TW (1) TW200903589A (ja)
WO (1) WO2008146819A1 (ja)

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