JP2009026750A5 - - Google Patents

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Publication number
JP2009026750A5
JP2009026750A5 JP2008158789A JP2008158789A JP2009026750A5 JP 2009026750 A5 JP2009026750 A5 JP 2009026750A5 JP 2008158789 A JP2008158789 A JP 2008158789A JP 2008158789 A JP2008158789 A JP 2008158789A JP 2009026750 A5 JP2009026750 A5 JP 2009026750A5
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JP
Japan
Prior art keywords
charged particle
particle beam
scintillator
sample
vacuum chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2008158789A
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English (en)
Japanese (ja)
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JP2009026750A (ja
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Publication date
Application filed filed Critical
Publication of JP2009026750A publication Critical patent/JP2009026750A/ja
Publication of JP2009026750A5 publication Critical patent/JP2009026750A5/ja
Pending legal-status Critical Current

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JP2008158789A 2007-06-18 2008-06-18 チャンバ内電子検出器 Pending JP2009026750A (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US94479207P 2007-06-18 2007-06-18

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2014086925A Division JP2014132598A (ja) 2007-06-18 2014-04-18 チャンバ内電子検出器

Publications (2)

Publication Number Publication Date
JP2009026750A JP2009026750A (ja) 2009-02-05
JP2009026750A5 true JP2009026750A5 (https=) 2011-08-04

Family

ID=39671425

Family Applications (2)

Application Number Title Priority Date Filing Date
JP2008158789A Pending JP2009026750A (ja) 2007-06-18 2008-06-18 チャンバ内電子検出器
JP2014086925A Pending JP2014132598A (ja) 2007-06-18 2014-04-18 チャンバ内電子検出器

Family Applications After (1)

Application Number Title Priority Date Filing Date
JP2014086925A Pending JP2014132598A (ja) 2007-06-18 2014-04-18 チャンバ内電子検出器

Country Status (3)

Country Link
US (2) US8164059B2 (https=)
EP (1) EP2006881A3 (https=)
JP (2) JP2009026750A (https=)

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JP6215202B2 (ja) 2011-08-05 2017-10-18 パルセータ, エルエルシーPulsetor, Llc 密接に結合したシンチレータ−光電子増倍管の１又は複数の組合体を含む電子検出器及びそれを使用した電子顕微鏡
US8770037B2 (en) * 2011-10-14 2014-07-08 Chrysler Group Llc System and method for structure stiffness determination
DE112014000306B4 (de) * 2013-01-31 2020-03-26 Hitachi High-Technologies Corporation Kombinierte Ladungsteilchenstrahlvorrichtung
JP6271189B2 (ja) * 2013-09-02 2018-01-31 株式会社日立ハイテクサイエンス 荷電粒子ビーム装置
CN107342205B (zh) * 2016-05-03 2019-07-23 睿励科学仪器（上海）有限公司 一种带电粒子探测装置
US9972474B2 (en) 2016-07-31 2018-05-15 Fei Company Electron microscope with multiple types of integrated x-ray detectors arranged in an array
IL295646A (en) * 2020-03-02 2022-10-01 Hitachi High Tech Corp Charged particle detector, charged particle ray device, radiation detector, and radiation detection device
JP7818615B2 (ja) * 2021-02-15 2026-02-20 イー エイ フィシオネ インストルメンツ インコーポレーテッド 均一なイオン切削に適するシステム及び方法
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US12542252B1 (en) * 2023-01-26 2026-02-03 Carl Zeiss Microscopy Gmbh Method of operating a particle beam system, particle beam system, non-transitory storage medium and program

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