JP2009026750A - チャンバ内電子検出器 - Google Patents

チャンバ内電子検出器 Download PDF

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Publication number
JP2009026750A
JP2009026750A JP2008158789A JP2008158789A JP2009026750A JP 2009026750 A JP2009026750 A JP 2009026750A JP 2008158789 A JP2008158789 A JP 2008158789A JP 2008158789 A JP2008158789 A JP 2008158789A JP 2009026750 A JP2009026750 A JP 2009026750A
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JP
Japan
Prior art keywords
charged particle
particle beam
detector
vacuum chamber
beam system
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
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JP2008158789A
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English (en)
Japanese (ja)
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JP2009026750A5 (https=
Inventor
Mostafa Maazouz
モスタファ・マーゾウズ
Trevor Dingle
トレバー・ディングル
Robert Gerlach
ロバート・ジャーラッチ
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FEI Co
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FEI Co
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Publication date
Application filed by FEI Co filed Critical FEI Co
Publication of JP2009026750A publication Critical patent/JP2009026750A/ja
Publication of JP2009026750A5 publication Critical patent/JP2009026750A5/ja
Pending legal-status Critical Current

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/244—Detectors; Associated components or circuits therefor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/2443—Scintillation detectors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/24435—Microchannel plates
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/2445—Photon detectors for X-rays, light, e.g. photomultipliers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/2448—Secondary particle detectors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/26—Electron or ion microscopes

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  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Measurement Of Radiation (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
JP2008158789A 2007-06-18 2008-06-18 チャンバ内電子検出器 Pending JP2009026750A (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US94479207P 2007-06-18 2007-06-18

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2014086925A Division JP2014132598A (ja) 2007-06-18 2014-04-18 チャンバ内電子検出器

Publications (2)

Publication Number Publication Date
JP2009026750A true JP2009026750A (ja) 2009-02-05
JP2009026750A5 JP2009026750A5 (https=) 2011-08-04

Family

ID=39671425

Family Applications (2)

Application Number Title Priority Date Filing Date
JP2008158789A Pending JP2009026750A (ja) 2007-06-18 2008-06-18 チャンバ内電子検出器
JP2014086925A Pending JP2014132598A (ja) 2007-06-18 2014-04-18 チャンバ内電子検出器

Family Applications After (1)

Application Number Title Priority Date Filing Date
JP2014086925A Pending JP2014132598A (ja) 2007-06-18 2014-04-18 チャンバ内電子検出器

Country Status (3)

Country Link
US (2) US8164059B2 (https=)
EP (1) EP2006881A3 (https=)
JP (2) JP2009026750A (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20150026970A (ko) * 2013-09-02 2015-03-11 가부시키가이샤 히다치 하이테크 사이언스 하전 입자 빔 장치

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EP2109873B1 (en) * 2007-02-06 2017-04-05 FEI Company High pressure charged particle beam system
EP2006881A3 (en) * 2007-06-18 2010-01-06 FEI Company In-chamber electron detector
US7847268B2 (en) * 2008-05-30 2010-12-07 El-Mul Technologies, Ltd. Three modes particle detector
EP2430432A4 (en) * 2009-05-15 2014-07-23 Fei Co ELECTRON MICROSCOPE WITH ONE OR MORE INTEGRATED DETECTORS
DE102010001346B4 (de) * 2010-01-28 2014-05-08 Carl Zeiss Microscopy Gmbh Teilchenstrahlgerät und Verfahren zum Betreiben eines Teilchenstrahlgeräts
US8729471B2 (en) 2010-07-30 2014-05-20 Pulsetor, Llc Electron detector including an intimately-coupled scintillator-photomultiplier combination, and electron microscope and X-ray detector employing same
US9679741B2 (en) 2010-11-09 2017-06-13 Fei Company Environmental cell for charged particle beam system
JP2012138324A (ja) * 2010-12-28 2012-07-19 Topcon Corp 二次電子検出器、及び荷電粒子ビーム装置
JP6215202B2 (ja) 2011-08-05 2017-10-18 パルセータ, エルエルシーPulsetor, Llc 密接に結合したシンチレータ−光電子増倍管の１又は複数の組合体を含む電子検出器及びそれを使用した電子顕微鏡
US8770037B2 (en) * 2011-10-14 2014-07-08 Chrysler Group Llc System and method for structure stiffness determination
JP6014688B2 (ja) * 2013-01-31 2016-10-25 株式会社日立ハイテクノロジーズ 複合荷電粒子線装置
CN107342205B (zh) * 2016-05-03 2019-07-23 睿励科学仪器（上海）有限公司 一种带电粒子探测装置
US9972474B2 (en) 2016-07-31 2018-05-15 Fei Company Electron microscope with multiple types of integrated x-ray detectors arranged in an array
WO2021176513A1 (ja) * 2020-03-02 2021-09-10 株式会社日立ハイテク 荷電粒子検出器、荷電粒子線装置、放射線検出器および放射線検出装置
WO2022174187A2 (en) * 2021-02-15 2022-08-18 E.A. Fischione Instruments, Inc. System and method for uniform ion milling
DE102021125639A1 (de) * 2021-10-04 2023-04-06 Carl Zeiss Microscopy Gmbh Teilchenstrahlsystem
US12542252B1 (en) * 2023-01-26 2026-02-03 Carl Zeiss Microscopy Gmbh Method of operating a particle beam system, particle beam system, non-transitory storage medium and program

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JPH0369853U (https=) * 1989-11-10 1991-07-11
JPH07142022A (ja) * 1993-11-19 1995-06-02 Hitachi Ltd 集束イオンビーム装置及び荷電粒子検出器
JPH1116531A (ja) * 1997-06-23 1999-01-22 Apuko:Kk 二次電子検出器
JP2002075264A (ja) * 2000-08-29 2002-03-15 Jeol Ltd 低真空走査電子顕微鏡
US7009187B2 (en) * 2002-08-08 2006-03-07 Fei Company Particle detector suitable for detecting ions and electrons

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JPH11154479A (ja) * 1997-11-20 1999-06-08 Hitachi Ltd ２次電子画像検出方法及びその装置並びに集束荷電粒子ビームによる処理方法及びその装置
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JP4178741B2 (ja) * 2000-11-02 2008-11-12 株式会社日立製作所 荷電粒子線装置および試料作製装置
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JP6215202B2 (ja) * 2011-08-05 2017-10-18 パルセータ, エルエルシーPulsetor, Llc 密接に結合したシンチレータ−光電子増倍管の１又は複数の組合体を含む電子検出器及びそれを使用した電子顕微鏡

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0369853U (https=) * 1989-11-10 1991-07-11
JPH07142022A (ja) * 1993-11-19 1995-06-02 Hitachi Ltd 集束イオンビーム装置及び荷電粒子検出器
JPH1116531A (ja) * 1997-06-23 1999-01-22 Apuko:Kk 二次電子検出器
JP2002075264A (ja) * 2000-08-29 2002-03-15 Jeol Ltd 低真空走査電子顕微鏡
US7009187B2 (en) * 2002-08-08 2006-03-07 Fei Company Particle detector suitable for detecting ions and electrons

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20150026970A (ko) * 2013-09-02 2015-03-11 가부시키가이샤 히다치 하이테크 사이언스 하전 입자 빔 장치
KR102169574B1 (ko) 2013-09-02 2020-10-23 가부시키가이샤 히다치 하이테크 사이언스 하전 입자 빔 장치

Also Published As

Publication number Publication date
EP2006881A2 (en) 2008-12-24
JP2014132598A (ja) 2014-07-17
EP2006881A3 (en) 2010-01-06
US8164059B2 (en) 2012-04-24
US20080308742A1 (en) 2008-12-18
US20120199738A1 (en) 2012-08-09

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