JP2008538129A5 - - Google Patents

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Publication number
JP2008538129A5
JP2008538129A5 JP2008504180A JP2008504180A JP2008538129A5 JP 2008538129 A5 JP2008538129 A5 JP 2008538129A5 JP 2008504180 A JP2008504180 A JP 2008504180A JP 2008504180 A JP2008504180 A JP 2008504180A JP 2008538129 A5 JP2008538129 A5 JP 2008538129A5
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JP
Japan
Prior art keywords
substrate
precursor
metal layer
ruthenium metal
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2008504180A
Other languages
English (en)
Japanese (ja)
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JP2008538129A (ja
JP4512159B2 (ja
Filing date
Publication date
Priority claimed from US11/095,356 external-priority patent/US7396766B2/en
Application filed filed Critical
Publication of JP2008538129A publication Critical patent/JP2008538129A/ja
Publication of JP2008538129A5 publication Critical patent/JP2008538129A5/ja
Application granted granted Critical
Publication of JP4512159B2 publication Critical patent/JP4512159B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2008504180A 2005-03-31 2006-03-23 低抵抗ルテニウム層の低温化学気相成長 Active JP4512159B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US11/095,356 US7396766B2 (en) 2005-03-31 2005-03-31 Low-temperature chemical vapor deposition of low-resistivity ruthenium layers
PCT/US2006/010606 WO2006104853A1 (en) 2005-03-31 2006-03-23 Low-temperature chemical vapor deposition of low-resistivity ruthenium layers

Publications (3)

Publication Number Publication Date
JP2008538129A JP2008538129A (ja) 2008-10-09
JP2008538129A5 true JP2008538129A5 (enExample) 2009-05-07
JP4512159B2 JP4512159B2 (ja) 2010-07-28

Family

ID=36698690

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2008504180A Active JP4512159B2 (ja) 2005-03-31 2006-03-23 低抵抗ルテニウム層の低温化学気相成長

Country Status (6)

Country Link
US (1) US7396766B2 (enExample)
JP (1) JP4512159B2 (enExample)
KR (2) KR20130129482A (enExample)
CN (1) CN100593236C (enExample)
TW (1) TWI321162B (enExample)
WO (1) WO2006104853A1 (enExample)

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US7345184B2 (en) * 2005-03-31 2008-03-18 Tokyo Electron Limited Method and system for refurbishing a metal carbonyl precursor
US7651570B2 (en) * 2005-03-31 2010-01-26 Tokyo Electron Limited Solid precursor vaporization system for use in chemical vapor deposition
US20070207611A1 (en) * 2006-03-03 2007-09-06 Lavoie Adrien R Noble metal precursors for copper barrier and seed layer
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US7557047B2 (en) * 2006-06-09 2009-07-07 Micron Technology, Inc. Method of forming a layer of material using an atomic layer deposition process
US7846256B2 (en) * 2007-02-23 2010-12-07 Tokyo Electron Limited Ampule tray for and method of precursor surface area
US20080242088A1 (en) * 2007-03-29 2008-10-02 Tokyo Electron Limited Method of forming low resistivity copper film structures
US7829454B2 (en) * 2007-09-11 2010-11-09 Tokyo Electron Limited Method for integrating selective ruthenium deposition into manufacturing of a semiconductior device
US7704879B2 (en) * 2007-09-27 2010-04-27 Tokyo Electron Limited Method of forming low-resistivity recessed features in copper metallization
US7884012B2 (en) * 2007-09-28 2011-02-08 Tokyo Electron Limited Void-free copper filling of recessed features for semiconductor devices
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US7799681B2 (en) 2008-07-15 2010-09-21 Tokyo Electron Limited Method for forming a ruthenium metal cap layer
US20110263123A1 (en) * 2008-08-05 2011-10-27 Tokyo Electron Limited Placing table structure
US7977235B2 (en) 2009-02-02 2011-07-12 Tokyo Electron Limited Method for manufacturing a semiconductor device with metal-containing cap layers
US8716132B2 (en) 2009-02-13 2014-05-06 Tokyo Electron Limited Radiation-assisted selective deposition of metal-containing cap layers
JP2010189693A (ja) * 2009-02-17 2010-09-02 Tokyo Electron Ltd Ｃｕ膜の成膜方法および記憶媒体
KR20110081694A (ko) 2010-01-08 2011-07-14 삼성모바일디스플레이주식회사 박막 트랜지스터의 제조 방법 및 표시 장치의 제조 방법
US8399353B2 (en) * 2011-01-27 2013-03-19 Tokyo Electron Limited Methods of forming copper wiring and copper film, and film forming system
JP5862353B2 (ja) * 2011-08-05 2016-02-16 東京エレクトロン株式会社 半導体装置の製造方法
US20140134351A1 (en) 2012-11-09 2014-05-15 Applied Materials, Inc. Method to deposit cvd ruthenium
US9506147B2 (en) * 2015-02-13 2016-11-29 Eastman Kodak Company Atomic-layer deposition apparatus using compound gas jet
US9528184B2 (en) * 2015-02-13 2016-12-27 Eastman Kodak Company Atomic-layer deposition method using compound gas jet
WO2018035120A1 (en) * 2016-08-16 2018-02-22 Tokyo Electron Limited Method of metal filling recessed features in a substrate
CN109148455A (zh) * 2017-06-16 2019-01-04 旺宏电子股份有限公司 存储器元件及其制造方法

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US7270848B2 (en) * 2004-11-23 2007-09-18 Tokyo Electron Limited Method for increasing deposition rates of metal layers from metal-carbonyl precursors

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