JP2008524450A5 - - Google Patents

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Publication number
JP2008524450A5
JP2008524450A5 JP2007548264A JP2007548264A JP2008524450A5 JP 2008524450 A5 JP2008524450 A5 JP 2008524450A5 JP 2007548264 A JP2007548264 A JP 2007548264A JP 2007548264 A JP2007548264 A JP 2007548264A JP 2008524450 A5 JP2008524450 A5 JP 2008524450A5
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JP
Japan
Prior art keywords
substrate
coating
product stream
stream
reactant
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Pending
Application number
JP2007548264A
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English (en)
Japanese (ja)
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JP2008524450A (ja
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Priority claimed from US11/017,214 external-priority patent/US7491431B2/en
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Publication of JP2008524450A publication Critical patent/JP2008524450A/ja
Publication of JP2008524450A5 publication Critical patent/JP2008524450A5/ja
Pending legal-status Critical Current

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JP2007548264A 2004-12-20 2005-12-07 反応性堆積による緻密コーティング形成 Pending JP2008524450A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US11/017,214 US7491431B2 (en) 2004-12-20 2004-12-20 Dense coating formation by reactive deposition
PCT/US2005/044403 WO2006068846A2 (en) 2004-12-20 2005-12-07 Dense coating formation by reactive deposition

Publications (2)

Publication Number Publication Date
JP2008524450A JP2008524450A (ja) 2008-07-10
JP2008524450A5 true JP2008524450A5 (enExample) 2009-01-29

Family

ID=36596196

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007548264A Pending JP2008524450A (ja) 2004-12-20 2005-12-07 反応性堆積による緻密コーティング形成

Country Status (7)

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US (1) US7491431B2 (enExample)
EP (1) EP1841541A2 (enExample)
JP (1) JP2008524450A (enExample)
KR (1) KR20070091666A (enExample)
CN (1) CN101119807A (enExample)
TW (1) TWI308600B (enExample)
WO (1) WO2006068846A2 (enExample)

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