JP2008522026A - 被膜付製品およびその製造方法 - Google Patents

被膜付製品およびその製造方法 Download PDF

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Publication number
JP2008522026A
JP2008522026A JP2007542987A JP2007542987A JP2008522026A JP 2008522026 A JP2008522026 A JP 2008522026A JP 2007542987 A JP2007542987 A JP 2007542987A JP 2007542987 A JP2007542987 A JP 2007542987A JP 2008522026 A JP2008522026 A JP 2008522026A
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JP
Japan
Prior art keywords
coating
composite coating
substrate
coated product
components
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2007542987A
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English (en)
Japanese (ja)
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JP2008522026A5 (enExample
Inventor
シュイスキー，ミカエル
パルムキスト，イェンス−ペッター
Original Assignee
サンドビック インテレクチュアル プロパティー アクティエボラーグ
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Publication of JP2008522026A publication Critical patent/JP2008522026A/ja
Publication of JP2008522026A5 publication Critical patent/JP2008522026A5/ja
Pending legal-status Critical Current

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B15/00—Layered products comprising a layer of metal
    • B32B15/04—Layered products comprising a layer of metal comprising metal as the main or only constituent of a layer, which is next to another layer of the same or of a different material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0641—Nitrides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0676—Oxynitrides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0688—Cermets, e.g. mixtures of metal and one or more of carbides, nitrides, oxides or borides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/221—Ion beam deposition
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C30/00—Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/26—Web or sheet containing structurally defined element or component, the element or component having a specified physical dimension
    • Y10T428/266—Web or sheet containing structurally defined element or component, the element or component having a specified physical dimension of base or substrate
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/31504—Composite [nonstructural laminate]
    • Y10T428/31678—Of metal

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Reduction Rolling/Reduction Stand/Operation Of Reduction Machine (AREA)
  • Laminated Bodies (AREA)
JP2007542987A 2004-11-26 2005-11-28 被膜付製品およびその製造方法 Pending JP2008522026A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
SE0402904A SE0402904L (sv) 2004-11-26 2004-11-26 Belagd produkt och produktionsmetod för denna
PCT/SE2005/001792 WO2006057618A2 (en) 2004-11-26 2005-11-28 Product coated with a composite max-material and method of its production

Publications (2)

Publication Number Publication Date
JP2008522026A true JP2008522026A (ja) 2008-06-26
JP2008522026A5 JP2008522026A5 (enExample) 2009-01-22

Family

ID=33538404

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007542987A Pending JP2008522026A (ja) 2004-11-26 2005-11-28 被膜付製品およびその製造方法

Country Status (7)

Country Link
US (1) US20090047510A1 (enExample)
EP (1) EP1851353A2 (enExample)
JP (1) JP2008522026A (enExample)
KR (1) KR20070083961A (enExample)
CN (1) CN101048530A (enExample)
SE (1) SE0402904L (enExample)
WO (1) WO2006057618A2 (enExample)

Families Citing this family (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SE0402865L (sv) * 2004-11-04 2006-05-05 Sandvik Intellectual Property Belagd produkt och framställningsmetod för denna
SE530443C2 (sv) * 2006-10-19 2008-06-10 Totalfoersvarets Forskningsins Mikrovågsabsorbent, speciellt för högtemperaturtillämpning
US20080131686A1 (en) * 2006-12-05 2008-06-05 United Technologies Corporation Environmentally friendly wear resistant carbide coating
SE531749C2 (sv) * 2007-09-17 2009-07-28 Seco Tools Ab Metod att utfälla slitstarka skikt på hårdmetall med bågförångning och katod med Ti3SiC2 som huvudbeståndsdel
CN102054497B (zh) * 2009-11-06 2013-01-02 中国科学院上海硅酸盐研究所 磁头衬底材料及其制备方法
US9023493B2 (en) * 2010-07-13 2015-05-05 L. Pierre de Rochemont Chemically complex ablative max-phase material and method of manufacture
US9169800B2 (en) * 2011-11-28 2015-10-27 Federal-Mogul Corporation Piston with anti-carbon deposit coating and method of construction thereof
CN103770397B (zh) * 2012-10-26 2016-04-27 南昌航空大学 一种(Ti,Al,Si)N-Mo(S,N)2-Ag/TiAlN纳米多层涂层
KR20140090754A (ko) * 2013-01-10 2014-07-18 부산대학교 산학협력단 Ｍａｘ 상 박막의 제조방법
EP2971560B1 (en) * 2013-03-15 2020-05-06 United Technologies Corporation Maxmet composites for turbine engine component tips
US10273583B2 (en) * 2013-11-26 2019-04-30 United Technologies Corporation Gas turbine engine component coating with self-healing barrier layer
EP2945207A1 (en) 2014-05-14 2015-11-18 Haldor Topsøe A/S MAX phase materials for use in solid oxide fuel cells and solid oxide electrolysis cells
EP2944624A1 (en) 2014-05-14 2015-11-18 Haldor Topsøe A/S MAX phase materials free of the elements Al and Si
FR3032449B1 (fr) 2015-02-09 2017-01-27 Office Nat D'etudes Et De Rech Aerospatiales (Onera) Materiaux en cermet et procede de fabrication de tels materiaux
CN104805327B (zh) * 2015-04-17 2017-01-25 安徽工程大学 一种铜‑碳化锡钛自润滑导电涂层及其制备方法
US10199788B1 (en) * 2015-05-28 2019-02-05 National Technology & Engineering Solutions Of Sandia, Llc Monolithic MAX phase ternary alloys for sliding electrical contacts
CA2939288A1 (en) 2015-08-28 2017-02-28 Rolls-Royce High Temperature Composites, Inc. Ceramic matrix composite including silicon carbide fibers in a ceramic matrix comprising a max phase compound
CN106083117A (zh) * 2016-06-21 2016-11-09 中国科学院宁波材料技术与工程研究所 具有三元层状max相界面层的纤维增韧陶瓷基复合材料及其制备方法
DE102016216428A1 (de) 2016-08-31 2018-03-01 Federal-Mogul Burscheid Gmbh Gleitelement mit MAX-Phasen-Beschichtung
CN107217231A (zh) * 2017-05-16 2017-09-29 福建新越金属材料科技有限公司 基于磁控共同溅射技术在铝基材上制备的装饰性涂层
CN111286701B (zh) * 2018-12-07 2022-03-15 中国科学院宁波材料技术与工程研究所 一种宽温域耐磨润滑涂层及其制备方法与应用
CN109722637B (zh) * 2018-12-24 2021-09-07 中国科学院宁波材料技术与工程研究所 润滑涂层及其制备方法
CN114450380A (zh) * 2019-07-30 2022-05-06 德雷塞尔大学 Max相-金复合材料及其制造方法
CN112695282B (zh) * 2020-12-15 2022-10-28 中国科学院宁波材料技术与工程研究所 一种抗中高温水蒸气腐蚀的防护涂层及其制备方法与应用
CN115961259B (zh) * 2022-12-09 2024-05-03 中国科学院宁波材料技术与工程研究所 一种强韧耐蚀max相多层复合涂层及其制备方法与应用
CN115896726A (zh) * 2023-02-22 2023-04-04 中国科学院宁波材料技术与工程研究所 一种MAX-Ag相复合涂层及其制备方法和应用

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1990013685A1 (en) * 1989-05-10 1990-11-15 Furukawa Electric Co., Ltd. Electric contact material, method of producing said material, and electric contact produced therefrom
JPH04365854A (ja) * 1991-06-11 1992-12-17 Ulvac Japan Ltd イオンプレーティング装置
JPH05239630A (ja) * 1992-02-28 1993-09-17 Nkk Corp イオンプレーティング方法及び装置
WO2003046247A1 (en) * 2001-11-30 2003-06-05 Abb Ab METHOD OF SYNTHESIZING A COMPOUND OF THE FORMULA Mn+1AXn, FILM OF THE COMPOUND AND ITS USE

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5942455A (en) * 1995-11-14 1999-08-24 Drexel University Synthesis of 312 phases and composites thereof
AU5818198A (en) * 1997-01-10 1998-08-03 Drexel University Surface treatment of 312 ternary ceramic materials and products thereof
US6231969B1 (en) * 1997-08-11 2001-05-15 Drexel University Corrosion, oxidation and/or wear-resistant coatings
SE9902411L (sv) * 1999-06-24 2000-07-31 Henrik Ljungcrantz Slityta och förfarande för framställande av densamma
US6461989B1 (en) * 1999-12-22 2002-10-08 Drexel University Process for forming 312 phase materials and process for sintering the same
US6544674B2 (en) * 2000-08-28 2003-04-08 Boston Microsystems, Inc. Stable electrical contact for silicon carbide devices
JP2002356751A (ja) * 2001-05-29 2002-12-13 Kawasaki Steel Corp 超低鉄損一方向性珪素鋼板およびその製造方法
SE521882C2 (sv) * 2001-06-21 2003-12-16 Sandvik Ab Förfarande för framställning av en enfassammansättning innefattande metall
SE526336C2 (sv) * 2002-07-01 2005-08-23 Seco Tools Ab Skär med slitstark refraktär beläggning av MAX-fas
WO2005038985A2 (en) * 2003-10-16 2005-04-28 Abb Research Ltd. COATINGS OF Mn+1AXn MATERIAL FOR ELECTRICAL CONTACT ELEMENTS
US7572313B2 (en) * 2004-05-26 2009-08-11 Drexel University Ternary carbide and nitride composites having tribological applications and methods of making same

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1990013685A1 (en) * 1989-05-10 1990-11-15 Furukawa Electric Co., Ltd. Electric contact material, method of producing said material, and electric contact produced therefrom
JPH04365854A (ja) * 1991-06-11 1992-12-17 Ulvac Japan Ltd イオンプレーティング装置
JPH05239630A (ja) * 1992-02-28 1993-09-17 Nkk Corp イオンプレーティング方法及び装置
WO2003046247A1 (en) * 2001-11-30 2003-06-05 Abb Ab METHOD OF SYNTHESIZING A COMPOUND OF THE FORMULA Mn+1AXn, FILM OF THE COMPOUND AND ITS USE

Also Published As

Publication number Publication date
CN101048530A (zh) 2007-10-03
SE0402904D0 (sv) 2004-11-26
WO2006057618A2 (en) 2006-06-01
EP1851353A2 (en) 2007-11-07
US20090047510A1 (en) 2009-02-19
SE0402904L (sv) 2006-05-27
WO2006057618A3 (en) 2006-10-26
KR20070083961A (ko) 2007-08-24

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