JP2008519959A - 削減処理中の粒子堆積を軽減するための反応装置構造 - Google Patents

削減処理中の粒子堆積を軽減するための反応装置構造 Download PDF

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Publication number
JP2008519959A
JP2008519959A JP2007541359A JP2007541359A JP2008519959A JP 2008519959 A JP2008519959 A JP 2008519959A JP 2007541359 A JP2007541359 A JP 2007541359A JP 2007541359 A JP2007541359 A JP 2007541359A JP 2008519959 A JP2008519959 A JP 2008519959A
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Prior art keywords
wall
porous
chamber
thermal
thermal reaction
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Ceased
Application number
JP2007541359A
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English (en)
Japanese (ja)
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JP2008519959A5 (enExample
Inventor
ホーマン ロドニー チウ
ダニエル オー クラーク
ショーン ダブリュウ クロフォード
ジェ ジェイ ジョン
レオナルド ビー タッド
ロバート ベルムイレン
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Applied Materials Inc
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Applied Materials Inc
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Application filed by Applied Materials Inc filed Critical Applied Materials Inc
Publication of JP2008519959A publication Critical patent/JP2008519959A/ja
Publication of JP2008519959A5 publication Critical patent/JP2008519959A5/ja
Ceased legal-status Critical Current

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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
    • F23G7/00—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals
    • F23G7/06—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23M—CASINGS, LININGS, WALLS OR DOORS SPECIALLY ADAPTED FOR COMBUSTION CHAMBERS, e.g. FIREBRIDGES; DEVICES FOR DEFLECTING AIR, FLAMES OR COMBUSTION PRODUCTS IN COMBUSTION CHAMBERS; SAFETY ARRANGEMENTS SPECIALLY ADAPTED FOR COMBUSTION APPARATUS; DETAILS OF COMBUSTION CHAMBERS, NOT OTHERWISE PROVIDED FOR
    • F23M5/00—Casings; Linings; Walls
    • F23M5/08—Cooling thereof; Tube walls
    • F23M5/085—Cooling thereof; Tube walls using air or other gas as the cooling medium
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
    • F23G7/00—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals
    • F23G7/06—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases
    • F23G7/061—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases with supplementary heating
    • F23G7/065—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases with supplementary heating using gaseous or liquid fuel
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23J—REMOVAL OR TREATMENT OF COMBUSTION PRODUCTS OR COMBUSTION RESIDUES; FLUES 
    • F23J9/00—Preventing premature solidification of molten combustion residues
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23M—CASINGS, LININGS, WALLS OR DOORS SPECIALLY ADAPTED FOR COMBUSTION CHAMBERS, e.g. FIREBRIDGES; DEVICES FOR DEFLECTING AIR, FLAMES OR COMBUSTION PRODUCTS IN COMBUSTION CHAMBERS; SAFETY ARRANGEMENTS SPECIALLY ADAPTED FOR COMBUSTION APPARATUS; DETAILS OF COMBUSTION CHAMBERS, NOT OTHERWISE PROVIDED FOR
    • F23M5/00—Casings; Linings; Walls
    • F23M5/08—Cooling thereof; Tube walls
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23D—BURNERS
    • F23D2900/00—Special features of, or arrangements for burners using fluid fuels or solid fuels suspended in a carrier gas
    • F23D2900/00016—Preventing or reducing deposit build-up on burner parts, e.g. from carbon
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23M—CASINGS, LININGS, WALLS OR DOORS SPECIALLY ADAPTED FOR COMBUSTION CHAMBERS, e.g. FIREBRIDGES; DEVICES FOR DEFLECTING AIR, FLAMES OR COMBUSTION PRODUCTS IN COMBUSTION CHAMBERS; SAFETY ARRANGEMENTS SPECIALLY ADAPTED FOR COMBUSTION APPARATUS; DETAILS OF COMBUSTION CHAMBERS, NOT OTHERWISE PROVIDED FOR
    • F23M2900/00—Special features of, or arrangements for combustion chambers
    • F23M2900/05002—Means for accommodate thermal expansion of the wall liner
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23M—CASINGS, LININGS, WALLS OR DOORS SPECIALLY ADAPTED FOR COMBUSTION CHAMBERS, e.g. FIREBRIDGES; DEVICES FOR DEFLECTING AIR, FLAMES OR COMBUSTION PRODUCTS IN COMBUSTION CHAMBERS; SAFETY ARRANGEMENTS SPECIALLY ADAPTED FOR COMBUSTION APPARATUS; DETAILS OF COMBUSTION CHAMBERS, NOT OTHERWISE PROVIDED FOR
    • F23M2900/00—Special features of, or arrangements for combustion chambers
    • F23M2900/05004—Special materials for walls or lining

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Environmental & Geological Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Incineration Of Waste (AREA)
  • Devices And Processes Conducted In The Presence Of Fluids And Solid Particles (AREA)
  • Treating Waste Gases (AREA)
JP2007541359A 2004-11-12 2005-11-12 削減処理中の粒子堆積を軽減するための反応装置構造 Ceased JP2008519959A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/987,921 US7736599B2 (en) 2004-11-12 2004-11-12 Reactor design to reduce particle deposition during process abatement
PCT/US2005/040960 WO2006053231A2 (en) 2004-11-12 2005-11-12 Reactor design to reduce particle deposition during process abatement

Publications (2)

Publication Number Publication Date
JP2008519959A true JP2008519959A (ja) 2008-06-12
JP2008519959A5 JP2008519959A5 (enExample) 2008-12-25

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007541359A Ceased JP2008519959A (ja) 2004-11-12 2005-11-12 削減処理中の粒子堆積を軽減するための反応装置構造

Country Status (8)

Country Link
US (2) US7736599B2 (enExample)
EP (1) EP1828680B1 (enExample)
JP (1) JP2008519959A (enExample)
KR (1) KR20070086017A (enExample)
CN (1) CN101069041B (enExample)
IL (1) IL183122A0 (enExample)
TW (2) TWI323003B (enExample)
WO (1) WO2006053231A2 (enExample)

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KR20130099078A (ko) * 2010-08-31 2013-09-05 팔머 랩스, 엘엘씨 고온 및 고압에서 연료를 연소하는 장치 및 이에 관련된 시스템
JP2016011759A (ja) * 2014-06-27 2016-01-21 日本パイオニクス株式会社 排ガスの燃焼式浄化装置
JP2016527467A (ja) * 2013-07-17 2016-09-08 エドワーズ リミテッド 放射バーナ用ヘッドアセンブリ
JP2017524120A (ja) * 2014-07-21 2017-08-24 エドワーズ リミテッド 遠心除去装置
JP2018526608A (ja) * 2015-09-01 2018-09-13 エドワーズ リミテッド 除害装置
JP2022507799A (ja) * 2018-11-22 2022-01-18 エドワーズ リミテッド ペルフルオロ化合物の除害方法
JP2022536637A (ja) * 2019-06-10 2022-08-18 エドワーズ リミテッド 除害装置のための入口組立体
JP2024529794A (ja) * 2021-07-13 2024-08-09 エドワーズ リミテッド 入口ノズル組立体
JP2024530401A (ja) * 2021-07-13 2024-08-21 エドワーズ リミテッド 入口組立体

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US20070274876A1 (en) 2007-11-29
WO2006053231A2 (en) 2006-05-18
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EP1828680A2 (en) 2007-09-05
TW201023244A (en) 2010-06-16
IL183122A0 (en) 2007-09-20
EP1828680B1 (en) 2012-02-01
US20060104879A1 (en) 2006-05-18
CN101069041B (zh) 2012-07-18
KR20070086017A (ko) 2007-08-27
WO2006053231A3 (en) 2006-11-23
TWI323003B (en) 2010-04-01
TW200623226A (en) 2006-07-01
US7736599B2 (en) 2010-06-15

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